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Unravelling Temperature Profile through Bifacial PV Modules via Finite Difference Method:Effects of Heat Internal Generation Due to Spectral Absorption
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作者 Khadija Ibaararen Mhammed Zaimi +1 位作者 Khadija El Ainaoui El Mahdi Assaid 《Energy Engineering》 2025年第9期3487-3505,共19页
This study investigates the complex heat transfer dynamics inmultilayer bifacial photovoltaic(bPV)solar modules under spectrally resolved solar irradiation.A novel numericalmodel is developed to incorporate internal h... This study investigates the complex heat transfer dynamics inmultilayer bifacial photovoltaic(bPV)solar modules under spectrally resolved solar irradiation.A novel numericalmodel is developed to incorporate internal heat generation resulting from optical absorption,grounded in the physical equations governing light-matter interactions within the module’smultilayer structure.The model accounts for reflection and transmission at each interface between adjacent layers,as well as absorption within individual layers,using the wavelength-dependent dielectric properties of constituent materials.These properties are used to calculate the spectral reflectance,transmittance,and absorption coefficients,enabling precise quantification of internal heat sources from irradiance incidents on both the front and rear surfaces of the module.The study further examines the influence of irradiance reflection on thermal behavior,evaluates the thermal impact of various supporting materials placed beneath the module,and analyzes the role of albedo in modifying heat distribution.By incorporating spectrally resolved heat generation across each layer often simplified or omitted in conventional models,the proposed approach enhances physical accuracy.The transient heat equation is solved using a one-dimensional finite difference(FD)method to produce detailed temperature profiles under multiple operating scenarios,including Standard Test Conditions(STC),Bifacial Standard Test Conditions(BSTC),Normal Operating Cell Temperature(NOCT),and Bifacial NOCT(BNOCT).The results offer valuable insights into the interplay between optical and thermal phenomena in bifacial systems,informing the design and optimization of more efficient photovoltaic technologies. 展开更多
关键词 Bifacial photovoltaic(bPV) solarmodule heat transfer optical absorption temperature profile ALBEDO finite difference method
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Performance and Degradation Assessment of PV Modules Exposed to Short-Term Outdoor Conditions in Two Distinct US Climatic Zones
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作者 Bouasria Youssef Zaimi Mhammed +1 位作者 ElAinaoui Khadija Assaid El Mahdi 《Energy Engineering》 2025年第10期4195-4223,共29页
Current research focuses on the performance degradation of photovoltaic(PV)modules,examining both crystalline silicon(p-Si and m-Si)and thin-film technologies,including a-Si/μc-Si,HIT,CdTe and CIGS.These modules were... Current research focuses on the performance degradation of photovoltaic(PV)modules,examining both crystalline silicon(p-Si and m-Si)and thin-film technologies,including a-Si/μc-Si,HIT,CdTe and CIGS.These modules were operated outdoors in two distinct climatic zones in the United States(US)over a period of three years.The degradation analysis includes the study of various quantities,such as the decrease in peak power,the reduction in current and voltage,and the variation in the fill factor.The annual degradation rate(DR)of PV modules is obtained by a linear fit of the effective maximum power evolution over time.The results indicate that m-Si and p-Si modules experienced a slight decrease in performance,with DRs of−0.83%and−1.07%,respectively.Subsequently,the HIT module exhibited a DR of−1.75%,while CdTe and CIGS modules demonstrated DRs of−2.03%and−2.45%,respectively.The a-Si/μc-Si module showed the highest DR at−3.26%.Using the Single Diode Model(SDM),we monitored the temporal evolution of physical parameters as well as changes in the shape of the I-V and P-V curves over time.We found that the key points of the I-V curve degrade over time,as do the I-V and P-V characteristics between two days approximately 30 months apart. 展开更多
关键词 PV module crystalline silicon thin-film technologies outdoor test effective maximum power degradation rate single diode model
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A method of line spectrum extraction based on target radiated spectrum feature and its post-processing 被引量:2
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作者 DAI Wenshu ZHENG Enming BAO Kaikai 《Journal of Systems Engineering and Electronics》 SCIE EI CSCD 2021年第6期1381-1393,共13页
To improve the ability of detecting underwater targets under strong wideband interference environment,an efficient method of line spectrum extraction is proposed,which fully utilizes the feature of the target spectrum... To improve the ability of detecting underwater targets under strong wideband interference environment,an efficient method of line spectrum extraction is proposed,which fully utilizes the feature of the target spectrum that the high intense and stable line spectrum is superimposed on the wide continuous spectrum.This method modifies the traditional beam forming algorithm by calculating and fusing the beam forming results at multi-frequency band and multi-azimuth interval,showing an excellent way to extract the line spectrum when the interference and the target are not in the same azimuth interval simultaneously.Statistical efficiency of the estimated azimuth variance and corresponding power of the line spectrum band depends on the line spectra ratio(LSR)of the line spectrum.The change laws of the output signal to noise ratio(SNR)with the LSR,the input SNR,the integration time and the filtering bandwidth of different algorithms bring the selection principle of the critical LSR.As the basis,the detection gain of wideband energy integration and the narrowband line spectrum algorithm are theoretically analyzed.The simulation detection gain demonstrates a good match with the theoretical model.The application conditions of all methods are verified by the receiver operating characteristic(ROC)curve and experimental data from Qiandao Lake.In fact,combining the two methods for target detection reduces the missed detection rate.The proposed post-processing method in2-dimension with the Kalman filter in the time dimension and the background equalization algorithm in the azimuth dimension makes use of the strong correlation between adjacent frames,could further remove background fluctuation and improve the display effect. 展开更多
关键词 towed linear array sonar target radiated noise spectrum line spectra level ratio(LSR) receiver operating characteristic(ROC)curve POST-PROCESSING
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Microstructures and Dielectric Properties of Ba_(1-x)Sr_xTiO_3 Ceramics Doped with B_2O_3-Li_2O Glasses for LTCC Technology Applications 被引量:2
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作者 Xiujian Chou Zhenyu Zhao +2 位作者 Miaoxuan Du Jun Liu Jiwei Zhai 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2012年第3期280-284,共5页
Ba1-xSrxTiO3 ceramics, doped with B2O3-Li2O glasses have been fabricated via a traditional ceramic process at a low sintering temperature of 900 ℃ using liquid-phase sintering aids. The microstructures and di- electr... Ba1-xSrxTiO3 ceramics, doped with B2O3-Li2O glasses have been fabricated via a traditional ceramic process at a low sintering temperature of 900 ℃ using liquid-phase sintering aids. The microstructures and di- electric properties of B2O3-Li2O glasses doped Ba1-xSrxTiO3 ceramics have been investigated systemat- ically. The temperature dependence dielectric constant and loss reveals that B2O3-Li2O glasses doped Ba1-xSrxTiO3 ceramics have di?usion phase transformation characteristics. For 5 wt% B2O3-Li2O glasses doped Ba0.55Sr0.45TiO3 composites, the tunability is 15.4% under a dc-applied electric field of 30 kV/cm at 10 kHz; the dielectric loss can be controlled about 0.0025; and the Q value is 286. These composite ceramics sintered at low temperature with suitable dielectric constant, low dielectric loss, relatively high tunability and high Q value are promising candidates for multilayer low-temperature co-fired ceramics (LTCC) and potential microwave tunable devices applications. 展开更多
关键词 SINTERING FERROELECTRICITY Dielectric properties Microstructure
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Analysis and compensation of low frequency characteristics of sensors for vibration testing 被引量:2
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作者 ZHAI Yu-peng ZHANG Zhi-jie ZHANG Hao 《Journal of Measurement Science and Instrumentation》 CAS CSCD 2019年第2期176-181,共6页
In view of the influence and harm of low frequency vibration environment on the structure of spaceflight products,a low frequency dynamic study method for piezoelectric sensor based on the dynamic system of sinusoidal... In view of the influence and harm of low frequency vibration environment on the structure of spaceflight products,a low frequency dynamic study method for piezoelectric sensor based on the dynamic system of sinusoidal pressure is proposed.This method uses a sinusoidal pressure dynamic system with two-way dual channel import and export synchronization technology to study the low frequency characteristics of a piezoelectric sensor of PCB company,and its lower cut-off frequency is 0.26 Hz.It is also studied that when the frequency of the measured vibration or shock signal is 1-200 kHz,the error range of signal positive pressure action time is 4.87%-0.03%.The dynamic compensation for the low frequency of the vibration sensor is carried out,and the compensation effect is good. 展开更多
关键词 low frequency vibration piezoelectric sensor lower cut-off frequency sinusoidal pressure dynamic system low frequency dynamic compensation
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A Novel Method for Heightening Sensitivity of Prism Coupler-Based SPR Sensor 被引量:2
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作者 ZHU Jia-Hu HUANG Xu-Guang MEI Xian 《Chinese Physics Letters》 SCIE CAS CSCD 2011年第5期143-146,共4页
We present a novel method for heightening the sensitivity of a prism coupler-based surface plasmon resonance(SPR)sensor.The method is based on the total reflection prism made of BK7 glass combined with the Kretschmann... We present a novel method for heightening the sensitivity of a prism coupler-based surface plasmon resonance(SPR)sensor.The method is based on the total reflection prism made of BK7 glass combined with the Kretschmann geometry of theattenuated total reflection(ATR)method.Compared to the conventional methods of prism coupler-based SPR,the novel method provides higher sensitivity to the measurement system.Theoretical simulations show that the detection sensitivity to the refractive index(RI)of the sensor based on the novel approach has a strong dependence on the thickness of the metal layer.The RI resolution of the sensor is predicted to be 8×10^(-7)refractive index units(RIU)under the condition of optimum metal film thickness.This novel method can leave out a precision angle rotation device in the angle modulation and it is unnecessary to adjust the acceptance angle of the light detector.The principal advantage of this method over other methods of light intensity modulation based on prism coupler-based SPR is high sensitivity,expediency to measure and application of long distances. 展开更多
关键词 refractive METHOD ANGLE
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Adsorption of Methyl Orange on Magnetically Separable Mesoporous Titania Nanocomposite 被引量:1
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作者 高立波 张强 +3 位作者 李俊漾 冯瑞婷 徐宏妍 薛晨阳 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2014年第10期1168-1173,共6页
The adsorption of mesoporous Fe3O4–SiO2–TiO2(MFST), which can be separated easily from solution by a magnet, for the removal of methyl orange(MO) was investigated. The nitrogen adsorption–desorption measurement sho... The adsorption of mesoporous Fe3O4–SiO2–TiO2(MFST), which can be separated easily from solution by a magnet, for the removal of methyl orange(MO) was investigated. The nitrogen adsorption–desorption measurement shows successful synthesis of MFST with an average pore size of 3.8 nm and a large specific surface area of55 m2·g-1. About 95% adsorption percentage of MO is achieved with an initial concentration of 10 mg·L-1in the dark and the MFST exhibits superior adsorption ability under acid conditions. The adsorption data fit well with the pseudo-second order model for adsorption. After 4 cycles, the adsorption rate for MO remains 74% in the dark and the MFST can be recovered in a magnetic field with a recovery of about 80 %(by mass). It demonstrates that the samples have significant value on applications of wastewater treatment. 展开更多
关键词 MESOPOROUS Fe3O4–SiO2–TiO2 ADSORPTION METHYL ORANGE Pseudo-second order model
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Wireless contactless pressure measurement of an LC passive pressure sensor with a novel antenna for high-temperature applications 被引量:1
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作者 李晨 谭秋林 +3 位作者 薛晨阳 张文栋 李运芝 熊继军 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第4期540-545,共6页
In this paper, a novel antenna is proposed for high-temperature testing, which can make the high-temperature pressure characteristics of a wireless passive ceramic pressure sensor demonstrated at up to a temperature o... In this paper, a novel antenna is proposed for high-temperature testing, which can make the high-temperature pressure characteristics of a wireless passive ceramic pressure sensor demonstrated at up to a temperature of 600℃. The design parameters of the antenna are similar to those of the sensor, which will increase the coupling strength between the sensor and testing antenna. The antenna is fabricated in thick film integrated technology, and the properties of the alumina ceramic and silver ensure the feasibility of the antenna in high-temperature environments. The sensor, coupled with the ceramic antenna, is investigated using a high-temperature pressure testing platform. The experimental measurement results show that the pressure signal in a harsh environment can be detected by the frequency diversity of the sensor. 展开更多
关键词 ceramic antenna contactless pressure measurement high-temperature application wireless passive pressure sensor
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A multiscale transform denoising method of the bionic polarized light compass for improving the unmanned aerial vehicle navigation accuracy 被引量:1
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作者 Donghua ZHAO Jun TANG +4 位作者 Xindong WU Jing ZHAO Chenguang WANG Chong SHEN Jun LIU 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2022年第4期400-414,共15页
In recent years, the bionic polarized light compass has been widely studied for the unmanned aerial vehicle navigation. However, it is found from the obtained investigation results that a polarized light compass with ... In recent years, the bionic polarized light compass has been widely studied for the unmanned aerial vehicle navigation. However, it is found from the obtained investigation results that a polarized light compass with a sensitive and high dynamic range polarimeter still provides inferior output precision of the heading angle due to the presence of the noise generating from the compass.The noise is existed not only in the angle of the polarization image acquired by polarimeters but also in the output heading data, which leads to a sharp reduction in the accuracy of a polarized light compass. Herein, we present noise analysis and a novel multiscale transform denoising method of a polarized light compass used for the unmanned aerial vehicle navigation. Specifically, a multiscale principle component analysis utilizing one-dimensional image entropy as classification criterion is directly implemented to suppress the noise in the acquired polarization image. Subsequently, a multiscale time–frequency peak filtering method using the sample entropy as classification criterion is applied for the output heading data so as to further increase the heading measurement accuracy from the denoised image above. These two approaches are combined to significantly reduce the heading error affected by different types of noises. Our experimental results indicate the proposed multiscale transform denoising method exhibits high performance in suppressing the noise of a polarized light compass used for the unmanned aerial vehicle navigation compared to existing prior arts. 展开更多
关键词 DENOISING Multi-scale transform ORIENTATION Polarized light compass UAV navigation
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An improved crossbar array of memristor 被引量:1
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作者 YANG Li-bo LIANG Wei-ze ZHANG Xiao-yong 《Journal of Measurement Science and Instrumentation》 CAS CSCD 2017年第3期254-260,共7页
This paper conducts an analysis of HP model of a memristor and memory cells of a differential type memristor,formsa classic array of the memristor using the HP model,and does the stimulation of its storage capacity.Ba... This paper conducts an analysis of HP model of a memristor and memory cells of a differential type memristor,formsa classic array of the memristor using the HP model,and does the stimulation of its storage capacity.Based on differential typememristor cells,this paper proposes an improved crossbar array of the memristor,which can be applied in image storage.Bymeans of theoretical analysis and stimulation,this improved crossbar array of memristor has been proved to have bettergrayscale image storage capacity,and its peak signal-to-noise ratio(PSNR)has been improved by about30%. 展开更多
关键词 MEMRISTOR crossbar array modeling and simulation image storage
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Acoustic multipolar local effects of metamaterial with annular columnar structures 被引量:1
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作者 HAN Jian-ning ZHEN Wen-xiang +2 位作者 QIN Jia-jie WU Yu-peng TANG Shuai 《Journal of Measurement Science and Instrumentation》 CAS CSCD 2017年第4期307-313,共7页
Research of the acoustic local effect of metamaterial is widely used in the fields of environmental science,military industry and biomedicine.In this paper,the metamaterial is designed by annular columnar structures.T... Research of the acoustic local effect of metamaterial is widely used in the fields of environmental science,military industry and biomedicine.In this paper,the metamaterial is designed by annular columnar structures.The acoustic local effect in slender columnar structure with two layers of rings in air is investigated.Results prove that when the plane acoustic wave is incident into the model,complex interference and diffraction occur.And at different frequencies,multipolar acoustic local effect existes and cycle distribution phenomenon is observed.It is noteworthy that this phenomenon has very weak relatedness with the materials and acoustic parameters of the model.The research of this metamaterial design in this paper has definite reference significance in the acoustic communication and amplification of the acoustic signal detection. 展开更多
关键词 acoustic multipolar acoustic local effects acoustic metamaterial slender columnar
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Error modeling and analysis of inclinometer based on digital accelerometer 被引量:1
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作者 白渚铨 张晓明 刘俊 《Journal of Measurement Science and Instrumentation》 CAS 2013年第4期321-324,共4页
Measuring accuracy of inclinometer based on accelerometer is mainly influenced by the adopted accelerometer sensor.To improve the measuring accuracy of the inclinometer,the structure of the measuring system is given a... Measuring accuracy of inclinometer based on accelerometer is mainly influenced by the adopted accelerometer sensor.To improve the measuring accuracy of the inclinometer,the structure of the measuring system is given and measuring principle is analyzed,and the error model is established in this paper.Furthermore,the model is verified by simulation and experiment,which not only gives the smallest errors of the measured pitch and roll,but also lays foundation for sensor selection,error analysis and error compensation.The results show that the error model is of practical value. 展开更多
关键词 INCLINOMETER ACCELEROMETER error modeling error analysis
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Dynamic calibration method of capacitive pressure measuring device 被引量:1
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作者 樊俊霞 李新娥 《Journal of Measurement Science and Instrumentation》 CAS 2013年第1期1-5,共5页
This paper presents working principle,structure and a dynamic calibration method of capacitive pressure measuring device.Using this method,placing calibrated capacitive electronic pressure measuring device and three s... This paper presents working principle,structure and a dynamic calibration method of capacitive pressure measuring device.Using this method,placing calibrated capacitive electronic pressure measuring device and three standard sensors in simulation chamber pressure generator is proper and the data generated by them are analyzed and compared.This calibration method realizes dynamic calibration of capacitive electronic pressure measuring device under actual working pressure;pressure signal and frequency spectrum are analyzed.The experimental results show that simulation chamber pressure calibration method is feasible. 展开更多
关键词 chamber pressure generator dynamic calibration rising edge LINEARITY
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Temperature and strain sensitivities of surface and hybrid acoustic wave Brillouin scattering in optical microfibers 被引量:1
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作者 Yi Liu Yuanqi Gu +5 位作者 Yu Ning Pengfei Chen Yao Yao Yajun You Wenjun He Xiujian Chou 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第9期333-339,共7页
Temperature and strain sensitivities of surface acoustic wave(SAW)and hybrid acoustic wave(HAW)Brillouin scat-tering(BS)in 1μm-1.3μm diameter optical microfibers are simulated.In contrast to stimulated Brillouin sca... Temperature and strain sensitivities of surface acoustic wave(SAW)and hybrid acoustic wave(HAW)Brillouin scat-tering(BS)in 1μm-1.3μm diameter optical microfibers are simulated.In contrast to stimulated Brillouin scattering(SBS)from bulk acoustic wave in standard optical fiber,SAW and HAW BS,due to SAWs and HAWs induced by the coupling of longitudinal and shear waves and propagating along the surface and core of microfiber respectively,facilitate innovative detection in optical microfibers sensing.The highest temperature and strain sensitivities of the hybrid acoustic modes(HAMs)are 1.082 MHz/℃and 0.0289 MHz/με,respectively,which is suitable for microfiber sensing applica-tion of high temperature and strain resolutions.Meanwhile,the temperature and strain sensitivities of the SAMs are less affected by fiber diameter changes,ranging from 0.05 MHz/℃/μm to 0.25 MHz/℃/μm and 1×10^(-4) MHz/με/μm to 5×10^(-4) MHz/με/μm,respectively.It can be found that that SAW BS for temperature and strain sensing would put less stress on manufacturing constraints for optical microfibers.Besides,the simultaneous sensing of temperature and strain can be realized by SAW and HAW BS,with temperature and strain errors as low as 0.30℃-0.34℃and 14.47με-16.25με. 展开更多
关键词 Brllouin scatering surface acoustic waves hybrid acoustic waves optical microfiber sensing
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Analysis of errors induced by λ/4 wave plate in fiber-optic current sensor system
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作者 杨瑞峰 《Journal of Central South University》 SCIE EI CAS 2008年第S2期399-403,共5页
1/4λ wave plate is a key element in the fiber-optic current sensor system. When a retardation error or an orientation error of birefringence axes of 1/4λ wave plate with respect to the hi-bi fiber axes occurs in the... 1/4λ wave plate is a key element in the fiber-optic current sensor system. When a retardation error or an orientation error of birefringence axes of 1/4λ wave plate with respect to the hi-bi fiber axes occurs in the 1/4λ wave plate, the sensor system will output a wrong result of the measured current. The contributions of these two errors to the final result of the whole system were studied and the errors functions were deduced by establishing the measurement function of the current sensor system with Jones matrixes of the optical elements. The results show that that the greater the orientation error or the retardation error, the larger the final error, and that these two errors cannot be compensated each other. 展开更多
关键词 1/4λ wave PLATE RETARDATION POLARIZATION optical fiber JONES MATRIX
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Pressure effect study on the Ⅰ-Ⅴ property of the GaAs-based resonant tunnelling structure by photoluminescence measurement
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作者 李秋柱 王楷群 +2 位作者 菅傲群 刘鑫 张斌珍 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第4期418-422,共5页
This paper discusses the I-V property of the GaAs-based resonant tunnelling structure (RTS) under external uniaxial pressure by photoluminescence studies. Compressive pressure parallel to the [110] direction, whose ... This paper discusses the I-V property of the GaAs-based resonant tunnelling structure (RTS) under external uniaxial pressure by photoluminescence studies. Compressive pressure parallel to the [110] direction, whose value is determined by Hooke's law, is imposed on the sample by a helix micrometer. With the increase of the applied external uniaxial compressive pressure, the blue shift and splitting of the luminescence peaks were observed, which have some influence on the I-V curve of RTS from the point of view of the energy gap, and the splitting became more apparent with applied pressure. Full width at half maximum broadening could also be observed. 展开更多
关键词 resonant tunnelling structure I-V curve photoluminescence measurement peak shift peak split full width at half maximum broadening
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Design and characterization of a multi-ring nested CMUT array for hydrophone
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作者 Licheng Jia Rihui Xue Fansheng Meng 《Journal of Semiconductors》 EI CAS CSCD 2024年第11期58-62,共5页
This paper presents the design,fabrication,packaging,and characterization of a high-performance CMUT array.The array,which features rectangular cells fabricated using a sacrificial release process,achieves a receiving... This paper presents the design,fabrication,packaging,and characterization of a high-performance CMUT array.The array,which features rectangular cells fabricated using a sacrificial release process,achieves a receiving sensitivity of-231.44 d B(re:1 V/μPa)with a 40 d B gain.Notably,the CMUT array exhibits a minimal sensitivity variation of just 0.87 d B across a temperature range of 0 to 60°C.Furthermore,the output voltage non-linearity at 1 k Hz is approximately 0.44%.These test results demonstrate that the reception performance of the 67-element CMUT array is superior to that of commercial transducers.The high performance and compact design of this CMUT array underscore its significant commercial potential for hydrophone applications. 展开更多
关键词 cmut array mirco-electro-mechanical systems(mems) receiving sensitivity non-linearity
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Temperature dependence of biaxial strain and its influence on phonon and band gap of GaN thin film
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作者 徐宏妍 菅傲群 +5 位作者 薛晨阳 陈阳 张斌珍 张文栋 张志国 冯震 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第6期2245-2250,共6页
Hexagonal GaN epilayer grown on sapphire substrate by metal organic chemical vapour deposition (MOCVD) is studied using Raman scattering and photoluminescence in a temperature range from 100K to 873 K. The model of ... Hexagonal GaN epilayer grown on sapphire substrate by metal organic chemical vapour deposition (MOCVD) is studied using Raman scattering and photoluminescence in a temperature range from 100K to 873 K. The model of strain (stress) induced by the different lattice parameters and thermal coefficients of epilayer and substrate as a function of temperature is set up. The frequency and the linewidth of E2^high mode in a GaN layer are modelled by a theory with considering the thermal expansion of the lattice, a symmetric decay of the optical phonons, and the strain (stress) in the layer. The temperature-dependent energy shift of free exeiton A is determined by using Varshni empirical relation, and the effect of strain (stress) is also investigated. We find that the strain in the film leads to a decreasing shift of the phonon frequency and an about 10meV-inereasing shift of the energy in a temperature range from 100 K to 823 K. 展开更多
关键词 biaxial strain PHONON band gap GAN
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A Novel Silicon Etching Method Using Vapor of Tetramethylammonium Hydroxide Solution
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作者 Jian He Yue-fang Zhao +3 位作者 Fang-liang Xu Dong-yang Zhao Xiao-juan Hou Xiu-jian Chou 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2020年第6期769-774,I0003,共7页
Silicon bulk etching is an important part of micro-electro-mechanical system(MEMS) technology. In this work, a novel etching method is proposed based on the vapor from tetramethylammonium hydroxide(TMAH) solution heat... Silicon bulk etching is an important part of micro-electro-mechanical system(MEMS) technology. In this work, a novel etching method is proposed based on the vapor from tetramethylammonium hydroxide(TMAH) solution heated up to boiling point. The monocrystalline silicon wafer is positioned over the solution surface and can be anisotropically etched by the produced vapor. This etching method does not rely on the expensive vacuum equipment used in dry etching. Meanwhile, it presents several advantages like low roughness, high etching rate and high uniformity compared with the conventional wet etching methods. The etching rate and roughness can reach 2.13 μm/min and 1.02 nm, respectively. Furthermore,the diaphragm structure and Al-based pattern on the non-etched side of wafer can maintain intact without any damage during the back-cavity fabrication. Finally, an etching mechanism has been proposed to illustrate the observed experimental phenomenon. It is suggested that there is a water thin film on the etched surface during the solution evaporation. It is in this water layer that the ionization and etching reaction of TMAH proceed, facilitating the desorption of hydrogen bubble and the enhancement of molecular exchange rate. This new etching method is of great significance in the low-cost and high-quality micro-electromechanical system industrial fabrication. 展开更多
关键词 Silicon bulk etching Micro-electro-mechanical system Tetramethylammo-nium hydroxide solution Anisotropic etching
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Mode characteristics of nested eccentric waveguides constructed by two cylindrical nanowires coated with graphene
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作者 Ji Liu Lixia Yu Wenrui Xue 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第3期466-474,共9页
A kind of nested eccentric waveguide constructed with two cylindrical nanowires coated with graphene was designed.The mode characteristics of this waveguide were studied using the multipole method. It was found that t... A kind of nested eccentric waveguide constructed with two cylindrical nanowires coated with graphene was designed.The mode characteristics of this waveguide were studied using the multipole method. It was found that the three lowest modes(mode 0, mode 1 and mode 2) can be combined by the zero-order mode or/and the first-order modes of two single nanowires. Mode 0 has a higher figure of merit and the best performance among these modes within the parameter range of interest. The mode characteristics can be adjusted by changing the parameters of the waveguide. For example, the propagation length will be increased when the operating wavelength, the minimum spacing between the inner and outer cylinders, the inner cylinder radius and the Fermi energy are increased. However, when the outer cylinder radius, the dielectric constants of region Ⅰ, or the dielectric constants of region Ⅲ are increased, the opposite effect can be seen. These results are consistent with the results obtained using the finite element method(FEM). The waveguide structure designed in this paper is easy to fabricate and can be applied to the field of micro/nano sensing. 展开更多
关键词 GRAPHENE NANOWIRE waveguide multipole method
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