Uniform molding and demolding of structures on highly curved surfaces through conformal contact is a crucial yet often-overlooked aspect of nanoimprint lithography(NIL).This study describes the development of a NIL to...Uniform molding and demolding of structures on highly curved surfaces through conformal contact is a crucial yet often-overlooked aspect of nanoimprint lithography(NIL).This study describes the development of a NIL tool and its integration into a nanopositioning and nanomeasuring machine to achieve high-precision orthogonal molding and demolding for soft ultraviolet-assisted NIL(soft UV-NIL).The process was implemented primarily on the edges of highly curved plano-convex substrates to demonstrate structure uniformity on the edges.High-resolution nanostructures of sub-200-nm lateral dimension and microstructures in the range of tens of microns were imprinted.However,the nanostructures on the edges of the large,curved substrates were difficult to characterize precisely.Therefore,microstructures were used to measure the structure fidelity and were characterized using profilometry,white light interferometry,and confocal laser scanning microscopy.Regardless of the restricted imaging capabilities at high inclinations for high-resolution nanostructures,the scanning electron microscope(SEM)imaging of the structures on top of the lens substrate and at an inclination of 45°was performed.The micro and nanostructures were successfully imprinted on the edges of the plano-convex lens at angles of 45°,60°,and 90°from the center of rotation of the rotating NIL tool.The method enables precise imprinting at high inclinations,thereby presenting a different approach to soft UV-NIL on curved surfaces.展开更多
Nanomeasuring machines developed at the Technische Universitat Ilmenau enable three-dimensional measurements and manufacturing processes with the lowest uncertainties.Due to the requirements for these processes,a high...Nanomeasuring machines developed at the Technische Universitat Ilmenau enable three-dimensional measurements and manufacturing processes with the lowest uncertainties.Due to the requirements for these processes,a highly reproducible and long-term stable tool changing system is needed.For this purpose,kinematically determined couplings are widely used.The state-of-the-art investigations on those are not sufficient for the highest demands on the reproducibility required for this application.A theoretical determination of the reproducibility based on analytical or numerical methods is possible,however not in the desired nanometer range.Due to this,a measurement setup for the determination of the reproducibility in five degrees of freedom with nanometer uncertainty was developed.First,potential measuring devices are systematically examined and measurement principles were developed out of this.A three-dimensional vector-based uncertainty analysis is performed to prove the feasibility of the measurement principle and provides a basis for further design.As a result,a transla-tory measurement uncertainty of 10 nm and a rotatory uncertainty of 11 nrad can be reached.Afterwards,the measurement setup is designed,focusing on the metrological frame and the lift-off device.The developed setup exceeds the uncertainties of the measurement setups presented in the state-of-the-art by an order of magnitude,allowing new in-depth investigations of the reproducibility of kinematic couplings.展开更多
基金the support by the Deutsche Forschungsgemeinschaft(DFG)in the framework of the Research Training Group Tip and Laser-based 3D-Nanofabrication in extended macroscopic working areas(GRK 2182)at the Technische Universitat Ilmenau,Germany.
文摘Uniform molding and demolding of structures on highly curved surfaces through conformal contact is a crucial yet often-overlooked aspect of nanoimprint lithography(NIL).This study describes the development of a NIL tool and its integration into a nanopositioning and nanomeasuring machine to achieve high-precision orthogonal molding and demolding for soft ultraviolet-assisted NIL(soft UV-NIL).The process was implemented primarily on the edges of highly curved plano-convex substrates to demonstrate structure uniformity on the edges.High-resolution nanostructures of sub-200-nm lateral dimension and microstructures in the range of tens of microns were imprinted.However,the nanostructures on the edges of the large,curved substrates were difficult to characterize precisely.Therefore,microstructures were used to measure the structure fidelity and were characterized using profilometry,white light interferometry,and confocal laser scanning microscopy.Regardless of the restricted imaging capabilities at high inclinations for high-resolution nanostructures,the scanning electron microscope(SEM)imaging of the structures on top of the lens substrate and at an inclination of 45°was performed.The micro and nanostructures were successfully imprinted on the edges of the plano-convex lens at angles of 45°,60°,and 90°from the center of rotation of the rotating NIL tool.The method enables precise imprinting at high inclinations,thereby presenting a different approach to soft UV-NIL on curved surfaces.
基金the support by the Deutsche Forschungsgemeinschaft(DFG)in the framework of Research Training Group"Tip-and laser-based 3D-Nanofabrication inextended macroscopic working areas"(GRK 2182)at the Technische Universiat Ilmenau,Germany.
文摘Nanomeasuring machines developed at the Technische Universitat Ilmenau enable three-dimensional measurements and manufacturing processes with the lowest uncertainties.Due to the requirements for these processes,a highly reproducible and long-term stable tool changing system is needed.For this purpose,kinematically determined couplings are widely used.The state-of-the-art investigations on those are not sufficient for the highest demands on the reproducibility required for this application.A theoretical determination of the reproducibility based on analytical or numerical methods is possible,however not in the desired nanometer range.Due to this,a measurement setup for the determination of the reproducibility in five degrees of freedom with nanometer uncertainty was developed.First,potential measuring devices are systematically examined and measurement principles were developed out of this.A three-dimensional vector-based uncertainty analysis is performed to prove the feasibility of the measurement principle and provides a basis for further design.As a result,a transla-tory measurement uncertainty of 10 nm and a rotatory uncertainty of 11 nrad can be reached.Afterwards,the measurement setup is designed,focusing on the metrological frame and the lift-off device.The developed setup exceeds the uncertainties of the measurement setups presented in the state-of-the-art by an order of magnitude,allowing new in-depth investigations of the reproducibility of kinematic couplings.
