Quasi-one-dimensional(quasi-1D)van der Waals(vdWs)materials,such as ZrTe_(5),exhibit unique elec-trical properties and quantum phenomena,making them attractive for advanced electronic applications.However,large-scale ...Quasi-one-dimensional(quasi-1D)van der Waals(vdWs)materials,such as ZrTe_(5),exhibit unique elec-trical properties and quantum phenomena,making them attractive for advanced electronic applications.However,large-scale growth of ZrTe_(5) thin films presents challenges.We address this by employing sput-tering,a common semiconductor industry technique.The as-deposited ZrTe_(5) film is amorphous,and post-annealing induces a crystallization process akin to transition-metal dichalcogenides.Our study in-vestigates the electrical and optical properties during this amorphous-to-crystalline transition,reveal-ing insights into the underlying mechanism.This work contributes to the fundamental understanding of quasi-1D materials and introduces a scalable fabrication method for ZrTe_(5) which offers the possibility of fabricating unique future electronic and optical devices.展开更多
In this study,we developed a metal multilayer that can provide hermetic sealing after degassing the assemblies and absorbing the residual gases in the package.A package without a leak path was obtained by the direct b...In this study,we developed a metal multilayer that can provide hermetic sealing after degassing the assemblies and absorbing the residual gases in the package.A package without a leak path was obtained by the direct bonding of the Au/Pt/Ti layers.After packaging,annealing at 450°C caused thermal diffusion of the Ti underlayer atoms to the inner surface,which led to absorption of the residual gas molecules.These results indicated that a wafer coated with a Au/Pt/Ti layer can provide hermetic sealing and absorb residual gases,which can simplify vacuum packaging processes in the electronics industry.展开更多
基金supported by the JSPS KAKENHI(Grant Nos.21H05009,22K20474,and 24K00915)the Murata Science Foundation+1 种基金supported by the Commissioned Research(No.JPJ012368C03701)of the National Institute of Information and Communications Technology(NICT),Japansupport from the Hirose Foundation and Iketani Science and Technology Foundation.
文摘Quasi-one-dimensional(quasi-1D)van der Waals(vdWs)materials,such as ZrTe_(5),exhibit unique elec-trical properties and quantum phenomena,making them attractive for advanced electronic applications.However,large-scale growth of ZrTe_(5) thin films presents challenges.We address this by employing sput-tering,a common semiconductor industry technique.The as-deposited ZrTe_(5) film is amorphous,and post-annealing induces a crystallization process akin to transition-metal dichalcogenides.Our study in-vestigates the electrical and optical properties during this amorphous-to-crystalline transition,reveal-ing insights into the underlying mechanism.This work contributes to the fundamental understanding of quasi-1D materials and introduces a scalable fabrication method for ZrTe_(5) which offers the possibility of fabricating unique future electronic and optical devices.
基金This study was supported by JSPS KAKENHI(Grant Number JP19H02045).
文摘In this study,we developed a metal multilayer that can provide hermetic sealing after degassing the assemblies and absorbing the residual gases in the package.A package without a leak path was obtained by the direct bonding of the Au/Pt/Ti layers.After packaging,annealing at 450°C caused thermal diffusion of the Ti underlayer atoms to the inner surface,which led to absorption of the residual gas molecules.These results indicated that a wafer coated with a Au/Pt/Ti layer can provide hermetic sealing and absorb residual gases,which can simplify vacuum packaging processes in the electronics industry.
