In electronics packaging the time-pressure dispensing system is widely usedto squeeze the adhesive fluid in a syringe onto boards or substrates with the pressurized air.However, complexity of the process, which includ...In electronics packaging the time-pressure dispensing system is widely usedto squeeze the adhesive fluid in a syringe onto boards or substrates with the pressurized air.However, complexity of the process, which includes the air-fluid coupling and the nonlinearuncertainties, makes it difficult to have a consistent process performance. An integrated dispensingprocess model is first introduced and then its input-output regression relationship is used todesign a run to run control methodology for this process. The controller takes EWMA scheme and itsstability region is given. Experimental results verify the effectiveness of the proposed run to runcontrol method for dispensing process.展开更多
Multilayer thin films of TiN/SiNx have been deposited onto heated Si 100 substra tes (200℃) by reactive dc-magnetron sputtering from Ti and Si targets in an Ar- N2 gas mixture. The rotation speed of the substrate hol...Multilayer thin films of TiN/SiNx have been deposited onto heated Si 100 substra tes (200℃) by reactive dc-magnetron sputtering from Ti and Si targets in an Ar- N2 gas mixture. The rotation speed of the substrate holder was varied from 1 to 20rpm, while target currents were held constant, to produce bilayer periods vary ing from approximately 22 to 0.6nm. These multilayer films were characterized by atomic force microscopy (AFM), cross-sectional transmission electron microscopy (TEM), scanning electron microscopy (SEM), and microhardness measurements. TEM and SEM studies showed elimination of columnar structure in TiN, owing to the in corporation of amorphous SiNx layers. The crystallinity of TiN and amorphous nat ure of SiNx were confirmed by high resolution TEM. An optimum rotation speed was observed, at which hardness was a maximum. The resulting bilayer period was fou nd to be approximately 1.6nm, which resulted in a significant improvement in mic rohardness (~57GPa). The rms surface roughness for this film was less than 1.5nm .展开更多
The concepts of metric R0-algebra and Hilbert cube of type RO are introduced. A unified approximate reasoning theory in propositional caculus system ? and predicate calculus system (?) is established semantically as w...The concepts of metric R0-algebra and Hilbert cube of type RO are introduced. A unified approximate reasoning theory in propositional caculus system ? and predicate calculus system (?) is established semantically as well as syntactically, and a unified complete theorem is obtained.展开更多
基金This project is supported by National Natural Science Foundation of China (No.50390063, 50390064), Research Grant Council of HK SAR (CityU1086/01E)and City University of HK Applied R&D Project(No.9620002).
文摘In electronics packaging the time-pressure dispensing system is widely usedto squeeze the adhesive fluid in a syringe onto boards or substrates with the pressurized air.However, complexity of the process, which includes the air-fluid coupling and the nonlinearuncertainties, makes it difficult to have a consistent process performance. An integrated dispensingprocess model is first introduced and then its input-output regression relationship is used todesign a run to run control methodology for this process. The controller takes EWMA scheme and itsstability region is given. Experimental results verify the effectiveness of the proposed run to runcontrol method for dispensing process.
文摘Multilayer thin films of TiN/SiNx have been deposited onto heated Si 100 substra tes (200℃) by reactive dc-magnetron sputtering from Ti and Si targets in an Ar- N2 gas mixture. The rotation speed of the substrate holder was varied from 1 to 20rpm, while target currents were held constant, to produce bilayer periods vary ing from approximately 22 to 0.6nm. These multilayer films were characterized by atomic force microscopy (AFM), cross-sectional transmission electron microscopy (TEM), scanning electron microscopy (SEM), and microhardness measurements. TEM and SEM studies showed elimination of columnar structure in TiN, owing to the in corporation of amorphous SiNx layers. The crystallinity of TiN and amorphous nat ure of SiNx were confirmed by high resolution TEM. An optimum rotation speed was observed, at which hardness was a maximum. The resulting bilayer period was fou nd to be approximately 1.6nm, which resulted in a significant improvement in mic rohardness (~57GPa). The rms surface roughness for this film was less than 1.5nm .
基金supported by the National Natural Science Foundation of China(Grant No.19331010).
文摘The concepts of metric R0-algebra and Hilbert cube of type RO are introduced. A unified approximate reasoning theory in propositional caculus system ? and predicate calculus system (?) is established semantically as well as syntactically, and a unified complete theorem is obtained.
