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Fabrication and measurement of traceable pitch standard with a big area at trans-scale 被引量:7
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作者 邓晓 李同保 +4 位作者 雷李华 马艳 马蕊 翁浚婧 李源 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第9期143-147,共5页
Atom lithography with chromium can be utilized to fabricate a pitch standard, which is chrectly traceable to me wavelength of the laser standing waves. The result of a calibrated commercial AFM measurement demonstrate... Atom lithography with chromium can be utilized to fabricate a pitch standard, which is chrectly traceable to me wavelength of the laser standing waves. The result of a calibrated commercial AFM measurement demonstrates that the pitch standard is (212.8±0.1) nm with a peak-to-valley-height (PTVH) better than 20 nm. The measurement results show the high period accuracy of traceability with the standing laser wavelength (λ/2 = 212.78 nm). The Cr nano-grating covers a 1000μm×500 μm area, with a PTVH better than 10 nm. The feature width broadening of the Cr nanostructure has been experimentally observed along the direction of the standing waves. The PTVH along the Gaussian laser direction is similar to a Gaussian distribution. Highly uniform periodic nanostructures with a big area at the millimeter scale, and the surface growth uniformity of the Cr nano-grating, show its great potential in the application of a traceable pitch standard at trans-scales. 展开更多
关键词 atom lithography nano-scale metrology standard TRACEABILITY
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Mid-Temperature Synthesis of CeO_2-TiO_2 Complex Compound and Its XRD Structure Study 被引量:1
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作者 陈林深 吕光烈 胡秀荣 《Journal of Rare Earths》 SCIE EI CAS CSCD 2003年第2期108-111,共4页
The CeTi 2O 6, which is formed above 1300 ℃ by ceramic method, was obtained at 700 ℃ using sol gel synthesis method. XRD analysis shows that there is 8% deficient of Ce in the structure. The chemical formula is C... The CeTi 2O 6, which is formed above 1300 ℃ by ceramic method, was obtained at 700 ℃ using sol gel synthesis method. XRD analysis shows that there is 8% deficient of Ce in the structure. The chemical formula is Ce 0.92 Ti 2O 5.84 , which has a monoclinic structure with space group of C 2/ m . Its cell parameters are a =0.9811(8) nm, b =0.3726(3) nm, c =0.6831(6) nm, and β =118.84°. After being treated at 1300 ℃ for 3 h, the system keeps stable but the deficient disappears, while the chemical formula change to the normal CeTi 2O 6, and the cell parameters are a =0.9813(3) nm, b =0.3752(4) nm, c =0.6883(5) nm, β =119.05°. The key to synthesis the precursors of CeTi 2O 6 is that Ti 4+ and Ce 3+ ions must reach the atomistic distributing state and prevent the oxidation of Ce 3+ during sol gel process. 展开更多
关键词 Semiconductor materials sol gel process CeO 2 TiO 2 complex compound XRD Rietveld analysis rare earths
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Crystal and Molecular Structure of an Inclusion Complex of p-tert-Butylcalix[6]arene with Toluene 被引量:1
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作者 LU Tong-bu LI Xiao-yan +3 位作者 JI Liang-nian HAN Bao-hang LIU Yu YU Kai-bei 《Chemical Research in Chinese Universities》 SCIE CAS CSCD 1999年第1期3-6,共4页
An inclusion complex between p-tert-butylcalixarene and toluene was prepared. It crystallized in the monoclinic system with space group P 2 1/ n , a =1.734 7(2) nm, b =1.903 2(2) nm, c =1.972 9(2) ... An inclusion complex between p-tert-butylcalixarene and toluene was prepared. It crystallized in the monoclinic system with space group P 2 1/ n , a =1.734 7(2) nm, b =1.903 2(2) nm, c =1.972 9(2) nm , β =94.74(1)°, V =6.491 2(14) nm 3, Z =4. The toluene molecule was included in the macrocycle cavity. The calixanene is of a pinched cone conformation. 展开更多
关键词 arene TOLUENE Inclusion complex
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Intergranular Tunnelling and Field-Induced Percolation Fluctuation of Granular Composites (La1-zAgzMnO3)/(MnO2/Mn2O3)
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作者 张宁 包建春 +2 位作者 李刚 耿滔 陈继康 《Chinese Physics Letters》 SCIE CAS CSCD 2005年第11期2940-2943,共4页
We investigate the giant magnetoresistance of composites (La1-xAgzMnO3)1-υ(MnO2/Mn2O3)υ. The magnetoresistive property of the composites shows the characteristics of intergranular tunnelling. A conductivity leap... We investigate the giant magnetoresistance of composites (La1-xAgzMnO3)1-υ(MnO2/Mn2O3)υ. The magnetoresistive property of the composites shows the characteristics of intergranular tunnelling. A conductivity leap has been observed around y = 0.7. The composite (La0.926Ag0.074MnO3)0.698(MnO2/Mn2O3)0.302 has been found to show the greatest magnetoresistance in the samples. Its room-temperature MR ratio reaches 24% under a field of 1.8T. These phenomena suggest a percolation transformation and a kind of field-induced fluctuation in percolation in the samples investigated. 展开更多
关键词 GIANT NEGATIVE MAGNETORESISTANCE ELECTRICAL-TRANSPORT FILMS MANGANITE RESISTIVITY BEHAVIOR SYSTEM
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Development of MEMS-based micro capacitive tactile probe
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作者 雷李华 李源 +4 位作者 范国芳 吴俊杰 简黎 蔡潇雨 李同保 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第11期646-650,共5页
In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS (micro electromechanical systems) non-silicon tech... In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS (micro electromechanical systems) non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine (NMM). The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy. 展开更多
关键词 micro tactile probe micro capacitive sensor MEMS nano measuring machine
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Nano-Traceability Study of a Cr Standard Grating Fabricated by Laser-Focused Atomic Deposition
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作者 雷李华 李源 +4 位作者 范国芳 翁浚婧 邓晓 蔡潇雨 李同保 《Chinese Physics Letters》 SCIE CAS CSCD 2014年第7期46-49,共4页
A dimensional artifact is developed, which is a chromium (Cr) deposition grating fabricated by a laser-focused atomic deposition technique. The mean pitch of the grating is measured by using a metrological atomic fo... A dimensional artifact is developed, which is a chromium (Cr) deposition grating fabricated by a laser-focused atomic deposition technique. The mean pitch of the grating is measured by using a metrological atomic force microscope with a large range, where a series of reference signs have been performed to locate the deposition area. Cosine error of the measurement result is analyzed and eliminated by the iterative angle calibration. The measurement result shows that the mean pitch of the grating is 212.66 ±0.02nm, which is very close to half of the standing laser wavelength (λ = 425.55 nm). This means that the grating has traceability with high accuracy and can substitute the laser interference technology for instrument calibration. Moreover, using the Cr deposition grating as a nano standard can shorten the traceability chain and improve the practical application. 展开更多
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Electron-transfer reactions between alkali metal and C_(60) mediated by 1-methylnaphthalene
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作者 黄祖恩 陈键 +4 位作者 蔡瑞芳 邵倩芬 陈士明 耿鸿芝 叶红娟 《Chinese Science Bulletin》 SCIE EI CAS 1995年第15期1263-1266,共4页
Alkali metal fullerides (A<sub>n</sub>C<sub>60</sub>) are versatile reagents in synthetic chemistry ofbuckminsterfullerene, for example, controlled chemical functionalizations of buckminster-fu... Alkali metal fullerides (A<sub>n</sub>C<sub>60</sub>) are versatile reagents in synthetic chemistry ofbuckminsterfullerene, for example, controlled chemical functionalizations of buckminster-fullerene might be achieved by using precursors C<sub>60</sub><sup>n-</sup>M in a desired oxidation state.Vapor-transport technique was widely used to investigate the electron-transfer reactionsbetween C<sub>60</sub> and alkali metal. This method, however, required higher temperature condi-tions (200—400℃) and a longer period of reaction time (10—15 d). Direct reactions of C<sub>60</sub> 展开更多
关键词 C60 ALKALI metal 1-methylnaphthalene ELECTRON-TRANSFER reactions.
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