In the grinding of high quality fused silica parts with complex surface or structure using ball-headed metal bonded diamond wheel with small diameter,the existing dressing methods are not suitable to dress the ball-he...In the grinding of high quality fused silica parts with complex surface or structure using ball-headed metal bonded diamond wheel with small diameter,the existing dressing methods are not suitable to dress the ball-headed diamond wheel precisely due to that they are either on-line in process dressing which may causes collision problem or without consideration for the effects of the tool setting error and electrode wear.An on-machine precision preparation and dressing method is proposed for ball-headed diamond wheel based on electrical discharge machining.By using this method the cylindrical diamond wheel with small diameter is manufactured to hemispherical-headed form.The obtained ball-headed diamond wheel is dressed after several grinding passes to recover geometrical accuracy and sharpness which is lost due to the wheel wear.A tool setting method based on high precision optical system is presented to reduce the wheel center setting error and dimension error.The effect of electrode tool wear is investigated by electrical dressing experiments,and the electrode tool wear compensation model is established based on the experimental results which show that the value of wear ratio coefficient K’ tends to be constant with the increasing of the feed length of electrode and the mean value of K’ is 0.156.Grinding experiments of fused silica are carried out on a test bench to evaluate the performance of the preparation and dressing method.The experimental results show that the surface roughness of the finished workpiece is 0.03 μm.The effect of the grinding parameter and dressing frequency on the surface roughness is investigated based on the measurement results of the surface roughness.This research provides an on-machine preparation and dressing method for ball-headed metal bonded diamond wheel used in the grinding of fused silica,which provides a solution to the tool setting method and the effect of electrode tool wear.展开更多
While laser surface texturing(LST)is a promising manufacturing technique for surface functionalization,simultaneously realizing high precision and high efficiency in the LST of complex curved surface is challenging,du...While laser surface texturing(LST)is a promising manufacturing technique for surface functionalization,simultaneously realizing high precision and high efficiency in the LST of complex curved surface is challenging,due to continuously varied geometries of laser-matter incidence.In the present work,we propose a novel manufacturing system of 7-axis on-the-fly LST for complex curved surface,based on the integrated synchronization of 5-axis linkage motion platform with 2-axis galvanometer.Specifically,the algorithm for decomposing spatial texture trajectory on curved surface into low-frequency and high-frequency parts is established,based on which the kinematic model of synchronized 7-axis system is developed to derive the motion of each axis in both 5-axis linkage motion platform and 2-axis galvanometer simultaneously.Subsequently,the synchronized 7-axis LST system is experimentally realized,including the setup of mechanical stages integrated with optical path,the configuration of numerical control unit,and the development of processing software.Finally,case study of 7-axis on-the-fly LST of freeform aluminum surface is performed,and the advantages in terms of processing efficiency and texturing accuracy over 5-axis linkage LST are demonstrated.The correlation of reduced following errors between mechanical stages with the promoted performance of curved surface texturing by the 7-axis on-the-fly LST is further analyzed.Current work provides a feasible solution for establishing the manufacturing system for high performance LST of complex curved surface.展开更多
With the advantage of high light intensity due to low scatting, structural colors generated by metallic diffraction nanograting structures, used as a type of diffractive optical element, have shown great potential for...With the advantage of high light intensity due to low scatting, structural colors generated by metallic diffraction nanograting structures, used as a type of diffractive optical element, have shown great potential for application in industrial and scientific research fields such as optical anti-counterfeiting and sensors. Within the visible light wavelength range, the diffraction performance is highly dependent on the height and shape consistencies of the nanograting. However, there is still room for the improvement in the flexible control over structure formation through mechanical nanomachining within this scale. The novelty of this paper lies in proposing a machining strategy for nanograting structures with variable heights through precise regulation of the revolving trajectory using tip-based nano down-milling. It explores how different geometric features of trajectories impact the amount of material deformed into a grating and its distribution shape, referred to as undeformed grating area. By analyzing the forming mechanisms of nanogratings under various trajectories with finite element simulation, the desired undeformed grating area is successfully achieved, which is mainly extruded by the tip flank face to form the right facet of the grating, resulting in a small deformation degree and a high deformation efficiency. Three distinct types of revolving trajectories are filtered out according to five quantitative evaluation indicators for machining performance, namely material plastic deformation, grating profile consistency, grating height consistency, machining forces, and area transforming height, and then are compared in processing nanogratings with different heights. It is obtained that only by regulating the vertical vibration amplitude of the revolving trajectory, the semicircle trajectory with the optimal geometric features has the ability to machine high-quality nanograting structures with a continuous height variation of up to 220 nm in a spacing of 400 nm.展开更多
Micro-grinding has been widely used in aerospace and other industry.However,the small diameter of the micro-grinding tool has limited its machining performance and efficiency.In order to solve the above problems,micro...Micro-grinding has been widely used in aerospace and other industry.However,the small diameter of the micro-grinding tool has limited its machining performance and efficiency.In order to solve the above problems,micro-structure has been applied on the micro-grinding tool.A morphology modeling has been established in this study to characterize the surface of microstructured micro-grinding tool,and the grinding performance of micro-structured micro-grinding tool has been analyzed through undeformed chip thickness,abrasive edge width,and effective distance between abrasives.Then deviation analysis,path optimization and parameter optimization of microchannel array precision grinding have been finished to improve processing quality and efficiency,and the deflection angle has the most obvious effects on the rectangular slot depth,micro-structured micro-grinding tool could reduce 10%surface roughness and 20%grinding force compared to original micro-grinding tool.Finally,the microchannel array has been machined with a size deviation of 2μm and surface roughness of 0.2μm.展开更多
Particle-tool interactions,which govern the synergetic deformation of SiC particle reinforced Al matrix composites under mechanical machining,strongly depend on the geometry of particle position residing on cutting pa...Particle-tool interactions,which govern the synergetic deformation of SiC particle reinforced Al matrix composites under mechanical machining,strongly depend on the geometry of particle position residing on cutting path.In the present work,we investigate the influence of cutting path on the machinability of a SiCp/Al composite in multi-step ultra-precision diamond cutting by combining finite element simulations with experimental observations and characterization.Be consistent with experimentally characterized microstructures,the simulated SiCp/Al composite is considered to be composed of randomly distributed polygonally-shaped SiC particles with a volume fraction of 25 vol%.A multi-step cutting strategy with depths of cut ranging from 2 to 10 lm is adopted to achieve an ultimate depth of cut of 10 lm.Intrinsic material parameters and extrinsic cutting conditions utilized in finite element simulations of SiCp/Al cutting are consistent with those used in corresponding experiments.Simulation results reveal different particle-tool interactions and failure modes of SiC particles,as well as their correlations with machining force evolution,residual stress distribution and machined surface topography.A detailed comparison between numerical simulation results and experimental data of multi-step diamond cutting of SiCp/Al composite reveals a substantial impact of the number of cutting steps on particle-tool interactions and machined surface quality.These findings provide guidelines for achieving high surface finish of SiCp/Al composites by ultra-precision diamond cutting.展开更多
Structure design and fabricating methods of three-dimensional （3D） artificial spherical compound eyes have been researched by many scholars. Micro-nano optical manufacturing is mostly used to process 3D artificial c...Structure design and fabricating methods of three-dimensional （3D） artificial spherical compound eyes have been researched by many scholars. Micro-nano optical manufacturing is mostly used to process 3D artificial compound eyes. However, spherical optical compound eyes are less at optical performance than the eyes of insects, and it is difficult to further improve the imaging quality of compound eyes by means of micro-nano optical manufacturing. In this research, nonhomogeneous aspheric compound eyes （ACEs） are designed and fabricated. The nonhomogeneous aspheric structure is applied to calibrate the spherical aberration. Micro milling with advantages in processing three-dimensional micro structures is adopted to manufacture ACEs. In order to obtain ACEs with high imaging quality, the tool paths are optimized by analyzing the influence factors consisting of interpolation allowable error, scallop height and tool path pattern. In the experiments, two kinds of ACEs are manufactured by micro-milling with different too path patterns and cutting parameter on the miniature precision five-axis milling machine tool. The experimental results indicate that the ACEs of high surface quality can be achieved by circularly milling small micro-lens individually with changeable cutting depth. A prototype of the aspheric compound eye （ACE） with surface roughness （Ra） below 0.12 p.m is obtained with good imaging performance. This research ameliorates the imaging quality of 3D artificial compound eyes, and the proposed method of micro-milling can improve surface processing quality of compound eyes.展开更多
Ultra-precision machine tool is the most important physical tool to machining the workpiece with the frequency domain error requirement, in the design process of which the dynamic accuracy design(DAD) is indispensable...Ultra-precision machine tool is the most important physical tool to machining the workpiece with the frequency domain error requirement, in the design process of which the dynamic accuracy design(DAD) is indispensable and the related research is rarely available. In light of above reasons, a DAD method of ultra-precision machine tool is proposed in this paper, which is based on the frequency domain error allocation.The basic procedure and enabling knowledge of the DAD method is introduced. The application case of DAD method in the ultra-precision flycutting machine tool for KDP crystal machining is described to show the procedure detailedly. In this case, the KDP workpiece surface has the requirements in four different spatial frequency bands, and the emphasis for this study is put on the middle-frequency band with the PSD specifications. The results of the application case basically show the feasibility of the proposed DAD method. The DAD method of ultra-precision machine tool can effectively minimize the technical risk and improve the machining reliability of the designed machine tool. This paper will play an important role in the design and manufacture of new ultra-precision machine tool.展开更多
As for ultra-precision grinding of difficult-to-process thin-walled complex components with ball-end grinding wheels,interference is easy to occur.According to screw theory and grinding kinematics,a mathematical model...As for ultra-precision grinding of difficult-to-process thin-walled complex components with ball-end grinding wheels,interference is easy to occur.According to screw theory and grinding kinematics,a mathematical model is established to investigate the interference and grinding characteristics of the ball-end wheel.The relationship between grinding wheel inclination angle,C axis rotation angle,grinding position angle and grinding wheel wear are analyzed.As the grinding wheel inclination angle increases,the C axis rotatable range decreases and the grinding position angle increases.The grinding position angle and wheel radius wear show a negative correlation with the C axis rotation angle.Therefore,a trajectory planning criteria for increasing grinding speed as much as possible under the premise of avoiding interference is proposed to design the grinding trajectory.Then grinding point distribution on the ball-end wheel is calculated,and the grinding characteristics,grinding speed and maximum undeformed chip thickness,are investigated.Finally,a complex structural component can be ground without interference,and surface roughness and profile accuracy are improved to 40.2 nm and 0.399 lm,compared with 556 nm and 3.427 lm before ultra-precision grinding.The mathematical model can provide theoretical guidance for the analysis of interference and grinding characteristics in complex components grinding to improve its grinding quality.展开更多
Ultra-precision diamond cutting is a promising machining technique for realizing ultra-smooth surface of different kinds of materials.While fundamental understanding of the impact of workpiece material properties on c...Ultra-precision diamond cutting is a promising machining technique for realizing ultra-smooth surface of different kinds of materials.While fundamental understanding of the impact of workpiece material properties on cutting mechanisms is crucial for promoting the capability of the machining technique,numerical simulation methods at different length and time scales act as important supplements to experimental investigations.In this work,we present a compact review on recent advancements in the numerical simulations of material-oriented diamond cutting,in which representative machining phenomena are systematically summarized and discussed by multiscale simulations such as molecular dynamics simulation and finite element simulation:the anisotropy cutting behavior of polycrystalline material,the thermo-mechanical coupling tool-chip friction states,the synergetic cutting responses of individual phase in composite materials,and the impact of various external energetic fields on cutting processes.In particular,the novel physics-based numerical models,which involve the high precision constitutive law associated with heterogeneous deformation behavior,the thermo-mechanical coupling algorithm associated with tool-chip friction,the configurations of individual phases in line with real microstructural characteristics of composite materials,and the integration of external energetic fields into cutting models,are highlighted.Finally,insights into the future development of advanced numerical simulation techniques for diamond cutting of advanced structured materials are also provided.The aspects reported in this review present guidelines for the numerical simulations of ultra-precision mechanical machining responses for a variety of materials.展开更多
The interaction between the machining process and the machine tool （IMPMT） plays an important role on high precision components manufacturing. However, most researches are focused on the machining process or the mac...The interaction between the machining process and the machine tool （IMPMT） plays an important role on high precision components manufacturing. However, most researches are focused on the machining process or the machine tool separately, and the interaction between them has been always overlooked. In this paper, a novel simplified method is proposed to realize the simulation of IMPMT by combining use the finite element method and state space method. In this method, the transfer function of the machine tool is built as a small state space. The small state space is obtained from the complicated finite element model of the whole machine tool. Furthermore, the control system of the machine tool is integrated with the transfer function of the machine tool to generate the cutting trajectory. Then, the tool tip response under the cutting force is used to predict the machined surface. Finally, a case study is carried out for a fly-cutting machining process, the dynamic response analysis of an ultra-precision fly-cutting machine tool and the machined surface verifies the effectiveness of this method. This research proposes a simplified method to study the IMPMT, the relationships between the machining process and the machine tool are established and the surface generation is obtained.展开更多
The infrared conformal window is one of the most critical components in aircraft.Conformal windows with high performance bring low aberrations,high aerodynamic performance,reliability in extreme working environments,a...The infrared conformal window is one of the most critical components in aircraft.Conformal windows with high performance bring low aberrations,high aerodynamic performance,reliability in extreme working environments,and added value for aircraft.Through the past decades,remarkable advances have been achieved in manufacturing technologies for conformal windows,where the machining accuracy approaches the nanometer level,and the surface form becomes more complex.These advances are critical to aircraft development,and these manufacturing technologies also have significant reference values for other directions of the ultra-precision machining field.In this review,the infrared materials suitable for manufacturing conformal windows are introduced and compared with insights into their performances.The remarkable advances and concrete work accomplished by researchers are reviewed.The challenges in manufacturing conformal windows that should be faced in the future are discussed.展开更多
Hemispherical shell resonator(HSR)is the core component of hemispherical resonator gyro.It is aφ-shaped small-bore complex component with minimum curvature radius less than 3 mm.Thus,traditional polishing methods are...Hemispherical shell resonator(HSR)is the core component of hemispherical resonator gyro.It is aφ-shaped small-bore complex component with minimum curvature radius less than 3 mm.Thus,traditional polishing methods are difficult to polish it.Small ball-end magnetorheological polishing method can polish the small components with complicated three-dimensional surface and obtain non-destructive surface.Therefore,this method is suitable for polishing HSR.However,the material removal rate of the ordinary small ball-end magnetorheological polishing is low,leading to long polishing time and low output of HSR.To solve this problem,a water bath heating assisted small ball-end magnetorheological polishing method is proposed in this research.The influence rule of processing parameters on the material removal rate is studied experimentally.A set of optimal processing parameters is obtained to maximize the material removal rate.Compared with the ordinary method,the material removal rate of the new method can be improved by 143%.Subsequently,an HSR is polished by the new method.The results show that the polishing time can be reduced by 55%,and the polished surface roughness can reach 7.7 nm.The new method has the great potential to be used in actual production to improve the polishing efficiency of HSR.展开更多
This paper investigates the coordinated attitude control problem for flexible spacecraft formation with the consideration of actuator configuration misalignment.First,an integral-type sliding mode adaptive control law...This paper investigates the coordinated attitude control problem for flexible spacecraft formation with the consideration of actuator configuration misalignment.First,an integral-type sliding mode adaptive control law is designed to compensate the effects of flexible mode,environmental disturbance and actuator installation deviation.The basic idea of the Integral-type Sliding Mode Control(ISMC)is to design a proper sliding manifold so that the sliding mode starts from the initial time instant,and thus the robustness of the system can be guaranteed from the beginning of the process and the reaching phase is eliminated.Then,considering the nominal system of spacecraft formation based on directed topology,an attitude cooperative control strategy is developed for the nominal system with or without communication delay.The proposed control law can guarantee that for each spacecraft in the spacecraft formation,the desired attitude objective can be achieved and the attitude synchronization can be maintained with other spacecraft in the formation.Finally,simulation results are given to show the effectiveness of the proposed control algorithm.展开更多
A modified five-axis cutting system using a force control cutting strategy was to machine indentations in different annuli on the entire surface of a target ball.The relationship between the cutting depths and the app...A modified five-axis cutting system using a force control cutting strategy was to machine indentations in different annuli on the entire surface of a target ball.The relationship between the cutting depths and the applied load as well as the microsphere rotation speed were studied experimentally to reveal the micromachining mechanism.In particular,aligning the rotating center of the high precision spindle with the microsphere center is essential for guaranteeing the machining accuracy of indentations.The distance between adjacent indentations on the same annulus and the vertical distance between adjacent annuli were determined by the rotating speed of the micro-ball and the controllable movement of the high-precision stage,respectively.In order to verify the feasibility and effect of the proposed cutting strategy,indentations with constant and expected depths were conducted on the entire surface of a hollow thin-walled micro-ball with a diameter of 1 mm.The results imply that this machining methodology has the potential to provide the target ball with desired modulated defects for simulating the inertial confinement fusion implosion experiment.展开更多
A DC motor and ball-screw-driven stage is studied for long-range nanometer positioning.The closed-loop system with high-gain PID controller is specially designed for high-precision point-to-point (PTP) positioning.A p...A DC motor and ball-screw-driven stage is studied for long-range nanometer positioning.The closed-loop system with high-gain PID controller is specially designed for high-precision point-to-point (PTP) positioning.A particular input shape of the closed-loop system is proposed to avoid overshoot and vibration by taking into account the nonlinear characteristics of the feed drive.Friction modeling and identification are avoided and the effect of friction is greatly suppressed by the controller.Experimental and simulated results demonstrate long-range nanometer positioning is achieved without overshoot.In PTP positioning from 10 mm down to 5 nm,the positioning error is within ±5 nm and response dynamic is satisfactory.展开更多
This paper presents a probe-based force-controlled nanoindentation method to fabricate ordered micro/nanostructures.Both the experimental and finite element simulation approaches are employed to investigate the influe...This paper presents a probe-based force-controlled nanoindentation method to fabricate ordered micro/nanostructures.Both the experimental and finite element simulation approaches are employed to investigate the influence of the interval between the adjacent indentations and the rotation angle of the probe on the formed micro/nanostructures.The non-contacting part between indenter and the sample material and the height of the material pile-up are two competing factors to determine the depth relationship between the adjacent indentations.For the one array indentations,nanostructures with good depth consistency and periodicity can be formed after the depth of the indentation becoming stable,and the variation of the rotation angle results in the large difference between the morphology of the formed nanostructures at the bottom of the one array indentation.In addition,for the indentation arrays,the nanostructures with good consistency and periodicity of the shape and depth can be generated with the spacing greater than 1μm.Finally,Raman tests are also carried out based on the obtained ordered micro/nanostructures with Rhodamine probe molecule.The indentation arrays with a smaller spacing lead to better the enhancement effect of the substrate,which has the potential applications in the fields of biological or chemical molecular detection.展开更多
A New method,named atmospheric pressure plasma polishing,for the ultra-smooth machining of the silicon based materials is introduced.By inputting the CF4 gas into the atmospheric pressure plasma flame,high density rea...A New method,named atmospheric pressure plasma polishing,for the ultra-smooth machining of the silicon based materials is introduced.By inputting the CF4 gas into the atmospheric pressure plasma flame,high density reactive radicals will be generated,which will then react with the silicon based materials.The reaction product is the vaporization of the SiF4,which can be easily processed.In this way,the atomic scale material removal can be realized and the defect free ultra-smooth surface can be obtained.An experimental setup is built up,and the SiC polishing experiment is carried out.The AFM test result shows that the finished surface roughness (Ra) can be improved from 4.529 nm to 0.926 nm in 3 minutes.展开更多
Micro milling has many advantages in fabricating three-dimensional(3D) structure in micrometer scale. The micro milling machine tool with high positioning accuracy is of great importance for getting micro structure wi...Micro milling has many advantages in fabricating three-dimensional(3D) structure in micrometer scale. The micro milling machine tool with high positioning accuracy is of great importance for getting micro structure with high profile precision and good surface quality. Meanwhile, the method of position error compensation is a good way to improve the accuracy of the micro milling machine tools. In this paper,a software method is adopted to compensate the positioning error and improve the positioning accuracy. According to error cancellation theory,the compensation values are generated and compensation tables are built to adjust the positioning error in the NC system based on Industrial Motion and Automation Control( IMAC). The positioning accuracy of linear motor is ± 0. 3 μm without backlash after compensation. In order to verify the effectiveness of compensation on the machining performance,concave spherical surfaces are processed on the micro milling machine tool. The experimental results show that the profile radius error of the spherical surface machined with compensation decreases more than 60%.展开更多
Because the grinding temperature is high when grinding using conventional disordered grinding wheels,the grinding quality improvement is limited when using single abrasive ordered grinding wheels,and the wheel prepara...Because the grinding temperature is high when grinding using conventional disordered grinding wheels,the grinding quality improvement is limited when using single abrasive ordered grinding wheels,and the wheel preparation process is complex and costly when using microstructured grinding wheels,abrasive groups ordered grinding wheels are widely investigated.However,there is a paucity of systematic analyses and comprehensive reviews focused on abrasive groups ordered grinding wheels.Therefore,this paper defines abrasive groups ordered grinding wheels and classifies them,based on their unique characteristics,into groups such as abrasive blocks ordered grinding wheel,fine grain structured grinding wheel,abrasive clusters ordered grinding wheel,and abrasive fibers ordered grinding wheel.We provide an overview of the latest advances in wheel structures,preparation methods,and abrasive selection for various types of abrasive groups ordered grinding wheels.Furthermore,we conduct a comparative analysis of the existing types,significant advantages,and challenges associated with the four types of abrasive groups ordered grinding wheels.Looking ahead,given the potential of abrasive groups ordered grinding wheels in reducing grinding force and temperature,we recommend further exploration of their application in combination with special processing techniques.This could pave the way for the development of machining processes that are more environmentally friendly,energy-efficient,and precise.展开更多
In this paper,three different tips are employed,i.e.,the carbon nanotube tip,monocrystalline silicon tip and silicon nitride tip.Resorting to atomic force microscope(AFM),they are used for measuring the surface roughn...In this paper,three different tips are employed,i.e.,the carbon nanotube tip,monocrystalline silicon tip and silicon nitride tip.Resorting to atomic force microscope(AFM),they are used for measuring the surface roughness of indium tin oxide(ITO)film and the immunoglobulin G(IgG)proteins within the scanning area of 10μm×10μm and 0.5μm×0.5μm,respectively.Subsequently,the scanned surface of the ITO film and IgG proteins are analyzed by using fractal dimension.The results show that the ffactal dimension measured by carbon nanotube tip is biggest with the highest frequency components and the most microscopic information.Therefore,the carbon nanotube tip is the ideal measuring tool for measuring super-smooth surface,which will play a more and more important role in the high-resolution imaging field.展开更多
基金supported by National Natural Science Foundation of China(Grant No.50935003)National Numerical Control Major Projects of China(Grant No.2013ZX04001000-215)
文摘In the grinding of high quality fused silica parts with complex surface or structure using ball-headed metal bonded diamond wheel with small diameter,the existing dressing methods are not suitable to dress the ball-headed diamond wheel precisely due to that they are either on-line in process dressing which may causes collision problem or without consideration for the effects of the tool setting error and electrode wear.An on-machine precision preparation and dressing method is proposed for ball-headed diamond wheel based on electrical discharge machining.By using this method the cylindrical diamond wheel with small diameter is manufactured to hemispherical-headed form.The obtained ball-headed diamond wheel is dressed after several grinding passes to recover geometrical accuracy and sharpness which is lost due to the wheel wear.A tool setting method based on high precision optical system is presented to reduce the wheel center setting error and dimension error.The effect of electrode tool wear is investigated by electrical dressing experiments,and the electrode tool wear compensation model is established based on the experimental results which show that the value of wear ratio coefficient K’ tends to be constant with the increasing of the feed length of electrode and the mean value of K’ is 0.156.Grinding experiments of fused silica are carried out on a test bench to evaluate the performance of the preparation and dressing method.The experimental results show that the surface roughness of the finished workpiece is 0.03 μm.The effect of the grinding parameter and dressing frequency on the surface roughness is investigated based on the measurement results of the surface roughness.This research provides an on-machine preparation and dressing method for ball-headed metal bonded diamond wheel used in the grinding of fused silica,which provides a solution to the tool setting method and the effect of electrode tool wear.
基金the support by the Harbin Manufacturing Science and Technology Innovation Talent Project(No.2023CXRCGD035)the Open Research Foundation of State Key Laboratory of Digital Manufacturing Equipment and Technology in Huazhong University of Science and Technology,China(No.IMETKF2023012).
文摘While laser surface texturing(LST)is a promising manufacturing technique for surface functionalization,simultaneously realizing high precision and high efficiency in the LST of complex curved surface is challenging,due to continuously varied geometries of laser-matter incidence.In the present work,we propose a novel manufacturing system of 7-axis on-the-fly LST for complex curved surface,based on the integrated synchronization of 5-axis linkage motion platform with 2-axis galvanometer.Specifically,the algorithm for decomposing spatial texture trajectory on curved surface into low-frequency and high-frequency parts is established,based on which the kinematic model of synchronized 7-axis system is developed to derive the motion of each axis in both 5-axis linkage motion platform and 2-axis galvanometer simultaneously.Subsequently,the synchronized 7-axis LST system is experimentally realized,including the setup of mechanical stages integrated with optical path,the configuration of numerical control unit,and the development of processing software.Finally,case study of 7-axis on-the-fly LST of freeform aluminum surface is performed,and the advantages in terms of processing efficiency and texturing accuracy over 5-axis linkage LST are demonstrated.The correlation of reduced following errors between mechanical stages with the promoted performance of curved surface texturing by the 7-axis on-the-fly LST is further analyzed.Current work provides a feasible solution for establishing the manufacturing system for high performance LST of complex curved surface.
基金financial supports from the National Natural Science Foundation of China(52105434)China Postdoctoral Science Foundation(2022M710642).
文摘With the advantage of high light intensity due to low scatting, structural colors generated by metallic diffraction nanograting structures, used as a type of diffractive optical element, have shown great potential for application in industrial and scientific research fields such as optical anti-counterfeiting and sensors. Within the visible light wavelength range, the diffraction performance is highly dependent on the height and shape consistencies of the nanograting. However, there is still room for the improvement in the flexible control over structure formation through mechanical nanomachining within this scale. The novelty of this paper lies in proposing a machining strategy for nanograting structures with variable heights through precise regulation of the revolving trajectory using tip-based nano down-milling. It explores how different geometric features of trajectories impact the amount of material deformed into a grating and its distribution shape, referred to as undeformed grating area. By analyzing the forming mechanisms of nanogratings under various trajectories with finite element simulation, the desired undeformed grating area is successfully achieved, which is mainly extruded by the tip flank face to form the right facet of the grating, resulting in a small deformation degree and a high deformation efficiency. Three distinct types of revolving trajectories are filtered out according to five quantitative evaluation indicators for machining performance, namely material plastic deformation, grating profile consistency, grating height consistency, machining forces, and area transforming height, and then are compared in processing nanogratings with different heights. It is obtained that only by regulating the vertical vibration amplitude of the revolving trajectory, the semicircle trajectory with the optimal geometric features has the ability to machine high-quality nanograting structures with a continuous height variation of up to 220 nm in a spacing of 400 nm.
基金co-supported by the Enterprise Innovation and Development Joint Program of the National Natural Science Foundation of China(No.U20B2032)Open Project Funding of State Key Laboratory for High Performance Tools(GXNGJSKL-2024-08)+1 种基金Open Foundation of the State Key Laboratory of Intelligent Manufacturing Equipment and Technology(IMETKF2023005)Introduced Innovative Scientific Research Team Project of Zhongshan(the tenth batch)(CXTD2023008)。
文摘Micro-grinding has been widely used in aerospace and other industry.However,the small diameter of the micro-grinding tool has limited its machining performance and efficiency.In order to solve the above problems,micro-structure has been applied on the micro-grinding tool.A morphology modeling has been established in this study to characterize the surface of microstructured micro-grinding tool,and the grinding performance of micro-structured micro-grinding tool has been analyzed through undeformed chip thickness,abrasive edge width,and effective distance between abrasives.Then deviation analysis,path optimization and parameter optimization of microchannel array precision grinding have been finished to improve processing quality and efficiency,and the deflection angle has the most obvious effects on the rectangular slot depth,micro-structured micro-grinding tool could reduce 10%surface roughness and 20%grinding force compared to original micro-grinding tool.Finally,the microchannel array has been machined with a size deviation of 2μm and surface roughness of 0.2μm.
基金supports from the National Natural Science Foundation of China(NSFC)-German Research Foundation(DFG)International Joint Research Programme(51761135106)the Open Research Foundation of State Key Laboratory of Digital Manufacturing Equipment and Technology in Huazhong University of Science and Technology,China(DMETKF2019016)+1 种基金the Shandong Key R&D Program(2019GGX104027)the Fundamental Research Funds for the Central Universities。
文摘Particle-tool interactions,which govern the synergetic deformation of SiC particle reinforced Al matrix composites under mechanical machining,strongly depend on the geometry of particle position residing on cutting path.In the present work,we investigate the influence of cutting path on the machinability of a SiCp/Al composite in multi-step ultra-precision diamond cutting by combining finite element simulations with experimental observations and characterization.Be consistent with experimentally characterized microstructures,the simulated SiCp/Al composite is considered to be composed of randomly distributed polygonally-shaped SiC particles with a volume fraction of 25 vol%.A multi-step cutting strategy with depths of cut ranging from 2 to 10 lm is adopted to achieve an ultimate depth of cut of 10 lm.Intrinsic material parameters and extrinsic cutting conditions utilized in finite element simulations of SiCp/Al cutting are consistent with those used in corresponding experiments.Simulation results reveal different particle-tool interactions and failure modes of SiC particles,as well as their correlations with machining force evolution,residual stress distribution and machined surface topography.A detailed comparison between numerical simulation results and experimental data of multi-step diamond cutting of SiCp/Al composite reveals a substantial impact of the number of cutting steps on particle-tool interactions and machined surface quality.These findings provide guidelines for achieving high surface finish of SiCp/Al composites by ultra-precision diamond cutting.
基金Supported by National Natural Science Foundation of China(Grant No.50935003)National Numerical Control Major Projects of China(Grant No.2013ZX04001000215)
文摘Structure design and fabricating methods of three-dimensional （3D） artificial spherical compound eyes have been researched by many scholars. Micro-nano optical manufacturing is mostly used to process 3D artificial compound eyes. However, spherical optical compound eyes are less at optical performance than the eyes of insects, and it is difficult to further improve the imaging quality of compound eyes by means of micro-nano optical manufacturing. In this research, nonhomogeneous aspheric compound eyes （ACEs） are designed and fabricated. The nonhomogeneous aspheric structure is applied to calibrate the spherical aberration. Micro milling with advantages in processing three-dimensional micro structures is adopted to manufacture ACEs. In order to obtain ACEs with high imaging quality, the tool paths are optimized by analyzing the influence factors consisting of interpolation allowable error, scallop height and tool path pattern. In the experiments, two kinds of ACEs are manufactured by micro-milling with different too path patterns and cutting parameter on the miniature precision five-axis milling machine tool. The experimental results indicate that the ACEs of high surface quality can be achieved by circularly milling small micro-lens individually with changeable cutting depth. A prototype of the aspheric compound eye （ACE） with surface roughness （Ra） below 0.12 p.m is obtained with good imaging performance. This research ameliorates the imaging quality of 3D artificial compound eyes, and the proposed method of micro-milling can improve surface processing quality of compound eyes.
基金Supported by Zhejiang Provincial Natural Science Foundation of China(Grant No.LQ16E050012)National Natural Science Foundation of China(Grant Nos.51705462 and 51275115)International Science and Technology Cooperation Program of China(Grant No.2015DFA70630)
文摘Ultra-precision machine tool is the most important physical tool to machining the workpiece with the frequency domain error requirement, in the design process of which the dynamic accuracy design(DAD) is indispensable and the related research is rarely available. In light of above reasons, a DAD method of ultra-precision machine tool is proposed in this paper, which is based on the frequency domain error allocation.The basic procedure and enabling knowledge of the DAD method is introduced. The application case of DAD method in the ultra-precision flycutting machine tool for KDP crystal machining is described to show the procedure detailedly. In this case, the KDP workpiece surface has the requirements in four different spatial frequency bands, and the emphasis for this study is put on the middle-frequency band with the PSD specifications. The results of the application case basically show the feasibility of the proposed DAD method. The DAD method of ultra-precision machine tool can effectively minimize the technical risk and improve the machining reliability of the designed machine tool. This paper will play an important role in the design and manufacture of new ultra-precision machine tool.
基金the National Key Research and Development Program of China(No.2018YFB 1107600)。
文摘As for ultra-precision grinding of difficult-to-process thin-walled complex components with ball-end grinding wheels,interference is easy to occur.According to screw theory and grinding kinematics,a mathematical model is established to investigate the interference and grinding characteristics of the ball-end wheel.The relationship between grinding wheel inclination angle,C axis rotation angle,grinding position angle and grinding wheel wear are analyzed.As the grinding wheel inclination angle increases,the C axis rotatable range decreases and the grinding position angle increases.The grinding position angle and wheel radius wear show a negative correlation with the C axis rotation angle.Therefore,a trajectory planning criteria for increasing grinding speed as much as possible under the premise of avoiding interference is proposed to design the grinding trajectory.Then grinding point distribution on the ball-end wheel is calculated,and the grinding characteristics,grinding speed and maximum undeformed chip thickness,are investigated.Finally,a complex structural component can be ground without interference,and surface roughness and profile accuracy are improved to 40.2 nm and 0.399 lm,compared with 556 nm and 3.427 lm before ultra-precision grinding.The mathematical model can provide theoretical guidance for the analysis of interference and grinding characteristics in complex components grinding to improve its grinding quality.
基金support from the National Natural Science Foundation of China(52275416 and 51905194)National Key Research and Development Program(2021YFC2202303)Science Challenge Project(No.TZ2018006-0201-02)。
文摘Ultra-precision diamond cutting is a promising machining technique for realizing ultra-smooth surface of different kinds of materials.While fundamental understanding of the impact of workpiece material properties on cutting mechanisms is crucial for promoting the capability of the machining technique,numerical simulation methods at different length and time scales act as important supplements to experimental investigations.In this work,we present a compact review on recent advancements in the numerical simulations of material-oriented diamond cutting,in which representative machining phenomena are systematically summarized and discussed by multiscale simulations such as molecular dynamics simulation and finite element simulation:the anisotropy cutting behavior of polycrystalline material,the thermo-mechanical coupling tool-chip friction states,the synergetic cutting responses of individual phase in composite materials,and the impact of various external energetic fields on cutting processes.In particular,the novel physics-based numerical models,which involve the high precision constitutive law associated with heterogeneous deformation behavior,the thermo-mechanical coupling algorithm associated with tool-chip friction,the configurations of individual phases in line with real microstructural characteristics of composite materials,and the integration of external energetic fields into cutting models,are highlighted.Finally,insights into the future development of advanced numerical simulation techniques for diamond cutting of advanced structured materials are also provided.The aspects reported in this review present guidelines for the numerical simulations of ultra-precision mechanical machining responses for a variety of materials.
基金Supported by National Natural Science Foundation of China(Grant No.51505107)Natural Scientific Research Innovation Foundation in Harbin Institute of Technology of China(Grant No.HIT.NSRIF.2017029)
文摘The interaction between the machining process and the machine tool （IMPMT） plays an important role on high precision components manufacturing. However, most researches are focused on the machining process or the machine tool separately, and the interaction between them has been always overlooked. In this paper, a novel simplified method is proposed to realize the simulation of IMPMT by combining use the finite element method and state space method. In this method, the transfer function of the machine tool is built as a small state space. The small state space is obtained from the complicated finite element model of the whole machine tool. Furthermore, the control system of the machine tool is integrated with the transfer function of the machine tool to generate the cutting trajectory. Then, the tool tip response under the cutting force is used to predict the machined surface. Finally, a case study is carried out for a fly-cutting machining process, the dynamic response analysis of an ultra-precision fly-cutting machine tool and the machined surface verifies the effectiveness of this method. This research proposes a simplified method to study the IMPMT, the relationships between the machining process and the machine tool are established and the surface generation is obtained.
基金the support from the National Key Research and Development Program of China[2018YFA0703400].
文摘The infrared conformal window is one of the most critical components in aircraft.Conformal windows with high performance bring low aberrations,high aerodynamic performance,reliability in extreme working environments,and added value for aircraft.Through the past decades,remarkable advances have been achieved in manufacturing technologies for conformal windows,where the machining accuracy approaches the nanometer level,and the surface form becomes more complex.These advances are critical to aircraft development,and these manufacturing technologies also have significant reference values for other directions of the ultra-precision machining field.In this review,the infrared materials suitable for manufacturing conformal windows are introduced and compared with insights into their performances.The remarkable advances and concrete work accomplished by researchers are reviewed.The challenges in manufacturing conformal windows that should be faced in the future are discussed.
基金supported by the National Key Research and Development Program of China(No.2022YFB3403600)the National Natural Science Foundation of China(No.52293403)Self-Planned Task of State Key Laboratory of Robotics and System(HIT)(No.SKLRS202204C)。
文摘Hemispherical shell resonator(HSR)is the core component of hemispherical resonator gyro.It is aφ-shaped small-bore complex component with minimum curvature radius less than 3 mm.Thus,traditional polishing methods are difficult to polish it.Small ball-end magnetorheological polishing method can polish the small components with complicated three-dimensional surface and obtain non-destructive surface.Therefore,this method is suitable for polishing HSR.However,the material removal rate of the ordinary small ball-end magnetorheological polishing is low,leading to long polishing time and low output of HSR.To solve this problem,a water bath heating assisted small ball-end magnetorheological polishing method is proposed in this research.The influence rule of processing parameters on the material removal rate is studied experimentally.A set of optimal processing parameters is obtained to maximize the material removal rate.Compared with the ordinary method,the material removal rate of the new method can be improved by 143%.Subsequently,an HSR is polished by the new method.The results show that the polishing time can be reduced by 55%,and the polished surface roughness can reach 7.7 nm.The new method has the great potential to be used in actual production to improve the polishing efficiency of HSR.
基金supported by the National Natural Science Foundation of China(Nos.61833009,61690212 and 51875119)the National Key Research and Development Project(No.2016YFB0501203)。
文摘This paper investigates the coordinated attitude control problem for flexible spacecraft formation with the consideration of actuator configuration misalignment.First,an integral-type sliding mode adaptive control law is designed to compensate the effects of flexible mode,environmental disturbance and actuator installation deviation.The basic idea of the Integral-type Sliding Mode Control(ISMC)is to design a proper sliding manifold so that the sliding mode starts from the initial time instant,and thus the robustness of the system can be guaranteed from the beginning of the process and the reaching phase is eliminated.Then,considering the nominal system of spacecraft formation based on directed topology,an attitude cooperative control strategy is developed for the nominal system with or without communication delay.The proposed control law can guarantee that for each spacecraft in the spacecraft formation,the desired attitude objective can be achieved and the attitude synchronization can be maintained with other spacecraft in the formation.Finally,simulation results are given to show the effectiveness of the proposed control algorithm.
基金the financial support of the National Natural Science Foundation of China(52035004,21827802)Natural Science Foundation of Heilongjiang Province of China(YQ2020E015)+1 种基金Self-Planned Task(No.SKLRS202001C)of State Key Laboratory of Robotics and System(HIT)‘Youth Talent Support Project’of the Chinese Association for Science and Technology。
文摘A modified five-axis cutting system using a force control cutting strategy was to machine indentations in different annuli on the entire surface of a target ball.The relationship between the cutting depths and the applied load as well as the microsphere rotation speed were studied experimentally to reveal the micromachining mechanism.In particular,aligning the rotating center of the high precision spindle with the microsphere center is essential for guaranteeing the machining accuracy of indentations.The distance between adjacent indentations on the same annulus and the vertical distance between adjacent annuli were determined by the rotating speed of the micro-ball and the controllable movement of the high-precision stage,respectively.In order to verify the feasibility and effect of the proposed cutting strategy,indentations with constant and expected depths were conducted on the entire surface of a hollow thin-walled micro-ball with a diameter of 1 mm.The results imply that this machining methodology has the potential to provide the target ball with desired modulated defects for simulating the inertial confinement fusion implosion experiment.
基金Funded by Development Program for Outstanding Young Teachers in Harbin Institute of Technology (HITQNJS.2008.013)
文摘A DC motor and ball-screw-driven stage is studied for long-range nanometer positioning.The closed-loop system with high-gain PID controller is specially designed for high-precision point-to-point (PTP) positioning.A particular input shape of the closed-loop system is proposed to avoid overshoot and vibration by taking into account the nonlinear characteristics of the feed drive.Friction modeling and identification are avoided and the effect of friction is greatly suppressed by the controller.Experimental and simulated results demonstrate long-range nanometer positioning is achieved without overshoot.In PTP positioning from 10 mm down to 5 nm,the positioning error is within ±5 nm and response dynamic is satisfactory.
基金National Natural Science Foundation of China(Grant Nos.52035004,51911530206,51905047)Heilongjiang Provincial Natural Science Foundation of China(Grant No.YQ2020E015)+1 种基金Self-Planned Task of State Key Laboratory of Robotics and System(HIT)(Grant No.SKLRS202001C)Young Elite Scientist Sponsorship Program by CAST(Grant No.YESS20200155).
文摘This paper presents a probe-based force-controlled nanoindentation method to fabricate ordered micro/nanostructures.Both the experimental and finite element simulation approaches are employed to investigate the influence of the interval between the adjacent indentations and the rotation angle of the probe on the formed micro/nanostructures.The non-contacting part between indenter and the sample material and the height of the material pile-up are two competing factors to determine the depth relationship between the adjacent indentations.For the one array indentations,nanostructures with good depth consistency and periodicity can be formed after the depth of the indentation becoming stable,and the variation of the rotation angle results in the large difference between the morphology of the formed nanostructures at the bottom of the one array indentation.In addition,for the indentation arrays,the nanostructures with good consistency and periodicity of the shape and depth can be generated with the spacing greater than 1μm.Finally,Raman tests are also carried out based on the obtained ordered micro/nanostructures with Rhodamine probe molecule.The indentation arrays with a smaller spacing lead to better the enhancement effect of the substrate,which has the potential applications in the fields of biological or chemical molecular detection.
文摘A New method,named atmospheric pressure plasma polishing,for the ultra-smooth machining of the silicon based materials is introduced.By inputting the CF4 gas into the atmospheric pressure plasma flame,high density reactive radicals will be generated,which will then react with the silicon based materials.The reaction product is the vaporization of the SiF4,which can be easily processed.In this way,the atomic scale material removal can be realized and the defect free ultra-smooth surface can be obtained.An experimental setup is built up,and the SiC polishing experiment is carried out.The AFM test result shows that the finished surface roughness (Ra) can be improved from 4.529 nm to 0.926 nm in 3 minutes.
基金Sponsored by the National Natural Science Foundation of China(Grant No.50935003)
文摘Micro milling has many advantages in fabricating three-dimensional(3D) structure in micrometer scale. The micro milling machine tool with high positioning accuracy is of great importance for getting micro structure with high profile precision and good surface quality. Meanwhile, the method of position error compensation is a good way to improve the accuracy of the micro milling machine tools. In this paper,a software method is adopted to compensate the positioning error and improve the positioning accuracy. According to error cancellation theory,the compensation values are generated and compensation tables are built to adjust the positioning error in the NC system based on Industrial Motion and Automation Control( IMAC). The positioning accuracy of linear motor is ± 0. 3 μm without backlash after compensation. In order to verify the effectiveness of compensation on the machining performance,concave spherical surfaces are processed on the micro milling machine tool. The experimental results show that the profile radius error of the spherical surface machined with compensation decreases more than 60%.
基金Supported by National Natural Science Foundation of China(Grant No.52175401)Hunan Provincial Postgraduate Scientific Research Innovation Project(Grant No.QL20230244)+1 种基金Enterprise Innovation and Development Joint Program of National Natural Science Foundation of China(Grant No.U20B2032)Hunan Provincial Science and Technology Innovation Program(Grant No.2022RC1050).
文摘Because the grinding temperature is high when grinding using conventional disordered grinding wheels,the grinding quality improvement is limited when using single abrasive ordered grinding wheels,and the wheel preparation process is complex and costly when using microstructured grinding wheels,abrasive groups ordered grinding wheels are widely investigated.However,there is a paucity of systematic analyses and comprehensive reviews focused on abrasive groups ordered grinding wheels.Therefore,this paper defines abrasive groups ordered grinding wheels and classifies them,based on their unique characteristics,into groups such as abrasive blocks ordered grinding wheel,fine grain structured grinding wheel,abrasive clusters ordered grinding wheel,and abrasive fibers ordered grinding wheel.We provide an overview of the latest advances in wheel structures,preparation methods,and abrasive selection for various types of abrasive groups ordered grinding wheels.Furthermore,we conduct a comparative analysis of the existing types,significant advantages,and challenges associated with the four types of abrasive groups ordered grinding wheels.Looking ahead,given the potential of abrasive groups ordered grinding wheels in reducing grinding force and temperature,we recommend further exploration of their application in combination with special processing techniques.This could pave the way for the development of machining processes that are more environmentally friendly,energy-efficient,and precise.
基金National Natural Science Foundation of China(No.50605012).
文摘In this paper,three different tips are employed,i.e.,the carbon nanotube tip,monocrystalline silicon tip and silicon nitride tip.Resorting to atomic force microscope(AFM),they are used for measuring the surface roughness of indium tin oxide(ITO)film and the immunoglobulin G(IgG)proteins within the scanning area of 10μm×10μm and 0.5μm×0.5μm,respectively.Subsequently,the scanned surface of the ITO film and IgG proteins are analyzed by using fractal dimension.The results show that the ffactal dimension measured by carbon nanotube tip is biggest with the highest frequency components and the most microscopic information.Therefore,the carbon nanotube tip is the ideal measuring tool for measuring super-smooth surface,which will play a more and more important role in the high-resolution imaging field.
