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用于MEMS结构的光刻胶牺牲层接触平坦化技术 被引量:3
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作者 邢向龙 焦继伟 +2 位作者 Mark Daffron 王跃林 Hyung Choi 《功能材料与器件学报》 EI CAS CSCD 北大核心 2006年第2期135-138,154,共5页
实验研究一种新颖的光刻胶牺牲层的接触平坦化(contact planarization)技术,应用于MEMS结构制作。实验研究了温度与光刻胶流动性的关系,以及牺牲层厚度、施加压力和温度、MEMS结构密度等因素对平坦化效果的影响,在优化条件下,牺... 实验研究一种新颖的光刻胶牺牲层的接触平坦化(contact planarization)技术,应用于MEMS结构制作。实验研究了温度与光刻胶流动性的关系,以及牺牲层厚度、施加压力和温度、MEMS结构密度等因素对平坦化效果的影响,在优化条件下,牺牲层的起伏台阶从2μm减小到20~40nm。与化学机械抛光技术相比,接触平坦化无明显凹陷(Dishing)效应,无衬底损伤,同时呈现出良好的局部和总体均匀性。 展开更多
关键词 MEMS 接触平坦化 化学机械抛光 均匀性 凹陷效应
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解决高级半导体封装应用难题的临时接合技术发展 被引量:5
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作者 Ramachandran K.Trichur Tony D.Flaim 《电子工业专用设备》 2018年第1期29-35,共7页
薄晶圆处理(TWH)技术的应用在逐渐增长和多样化,该技术将设备基材临时接合到支撑载体上。TWH技术广泛用于高级半导体封装的应用中,例如用于制造具有TSV、3D-IC和扇出型晶圆级封装的2.5-D中介层。临时接合技术已得到成功运用,可以在这些... 薄晶圆处理(TWH)技术的应用在逐渐增长和多样化,该技术将设备基材临时接合到支撑载体上。TWH技术广泛用于高级半导体封装的应用中,例如用于制造具有TSV、3D-IC和扇出型晶圆级封装的2.5-D中介层。临时接合技术已得到成功运用,可以在这些高级封装形式的制造过程中,对常见的所有背面加工中的薄基材进行处理。在解决每项应用中独特难题的过程中,引入了多代的粘合剂接合材料和新的接合与分离(剥离)技术。回顾了TWH技术的发展,并对加工的要求和复杂性(可对选择的接合材料与剥离方法进行界定)进行说明。 展开更多
关键词 薄晶圆处理 临时接合 剥离 高级封装 扇出型晶圆级封装 中介层 硅通孔
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半导体设备加工的临时接合与薄晶圆处理策略:保持领先 被引量:1
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作者 Ramachandran K.Trichur Tony D.Flaim 《中国集成电路》 2018年第3期43-47,共5页
前言 物联网(IoT)带来的诸如大数据、增强与虚拟现实、自动驾驶汽车、人工智能等巨大的芯片应用市场,已经将半导体行业的重点从摩尔定律转向了异构集成和先进高密度封装。晶圆级封装(WLP)的新领域,并发展到能够实现系统级封装(Si... 前言 物联网(IoT)带来的诸如大数据、增强与虚拟现实、自动驾驶汽车、人工智能等巨大的芯片应用市场,已经将半导体行业的重点从摩尔定律转向了异构集成和先进高密度封装。晶圆级封装(WLP)的新领域,并发展到能够实现系统级封装(SiP)集成时代。 展开更多
关键词 晶圆级封装 半导体设备 加工 自动驾驶汽车 异构集成 高密度封装 半导体行业 系统级封装
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未来节点的缺陷减少要求
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作者 darin collins 《电子工业专用设备》 2017年第6期75-77,共3页
随着半导体工业向10nm节点及更高的先进光刻技术的转移,减少缺陷的标准最佳实践将有所不足。污染水平将需要以万亿分之一(ppt)来衡最。这一级别的缺陷减少需要在分析工具、质量控制(QC)和质量工程(QE)方面进行改进。
关键词 缺陷 节点 半导体工业 光刻技术 污染水平 分析工具 质量控制 工程
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用于柔性杂化电子器件制造的新型结构性塑料
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作者 Tony D.Flaim Jennifer See 《电子工业专用设备》 2019年第5期38-42,共5页
激光钻孔与激光蚀刻是大面积电子基板(如印刷电路板)的主要制图方法,毫无疑问也将大量应用在柔性电路和印刷电子产品中。然而,许多应用在这些制程中的塑性材料并不能有效地被激光蚀刻,并且残留物难以移除。此外,同样的材料有些要求经高... 激光钻孔与激光蚀刻是大面积电子基板(如印刷电路板)的主要制图方法,毫无疑问也将大量应用在柔性电路和印刷电子产品中。然而,许多应用在这些制程中的塑性材料并不能有效地被激光蚀刻,并且残留物难以移除。此外,同样的材料有些要求经高温处理,这也和一些设备要求并不兼容。这种新型可光固化热塑性材料在激光钻孔和蚀刻中常用的中紫外(UV)波段拥有高光密度。因此,这种新材料展现出快速清洁蚀刻的特性。这种新型材料具有热塑性,紫外光固化,以及热固化等性质,可在低于200℃的温度下进行处理,并且拥有所需的机械强度与韧性,以及热稳定性和化学稳定性,因此可用作微电子基板、介电材料、粘性材料、填缝涂料以及钝化层。 展开更多
关键词 聚合材料 可光固化热塑性材料 柔性杂化电子产品
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将中国的半导体挑战转化为2018年的发展机遇
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作者 Kim Arnold 《电子工业专用设备》 2018年第1期1-1,20,共2页
2018年,世界各地都将展现前所未有的综合经济发展实力。由Alpha One Capital Partners开展的研究表明,在2017年,经济合作与发展组织(OECD)追踪的所有45个国家/地区的经济自2007年以来均实现了首次增长,其中33个国家/地区的经济在2017... 2018年,世界各地都将展现前所未有的综合经济发展实力。由Alpha One Capital Partners开展的研究表明,在2017年,经济合作与发展组织(OECD)追踪的所有45个国家/地区的经济自2007年以来均实现了首次增长,其中33个国家/地区的经济在2017年经历了加速增长。例如,美国国内生产总值从2016年的1.5%加速增长到2017年的2.2%,而且2018年预计将达到2.5%。由于面向全球市场, 展开更多
关键词 解决方案 晶圆制造
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An Efficient Protective Layer with High Ionic Conductivity Enables Long-Life and Dendrite-Free Li Metal Anodes 被引量:1
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作者 Yuanyuan Yu Chen Yang +3 位作者 Yan Jiang Jiadeng Zhu Junhua Zhang Mengjin Jiang 《CCS Chemistry》 2025年第3期657-667,共11页
The practical application of the Li metal anode has long been hindered by the uncontrolled growth of Li dendrites,heterogeneous and fragile solid electrolyte interface(SEI)layer,and large volume swelling.Herein,a robu... The practical application of the Li metal anode has long been hindered by the uncontrolled growth of Li dendrites,heterogeneous and fragile solid electrolyte interface(SEI)layer,and large volume swelling.Herein,a robust artificial SEI layer,polyaryoxadiazole lithium sulfonate(PODLi),was successfully fabricated to stabilize the interface between the Li metal and electrolyte.The lithiophilic PODLi film afforded fast ionic transport channels to form a dendrite-free,lithium fluoride-rich anode.The Li@Cu-PODLi symmetric cell achieved excellent cycling performance at a high current density of 10 mA cm^(−2) with an areal capacity of 10 mAh cm^(−2) for more than 770 h.A full cell with the LiFPO_(4) cathode exhibited ultralong-term stable operation over 500 cycles at a high current density of 3.45 mA cm^(−2) with a low-capacity decay rate of 0.038%per cycle.This work demonstrates a cost-effective and scalable strategy for high-energy-density Li metal batteries. 展开更多
关键词 artificial SEI layer Li dendrites Li metal batteries fast ionic transport channels dendrite-free
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Wet Spinning Enabled Advanced PEDOT:PSS Composite Fibers for Smart Devices
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作者 Haodi Zeng Chunxia Gao +3 位作者 Yuanyuan Yu Mengjin Jiang Tingyin Deng Jiadeng Zhu 《Accounts of Materials Research》 2025年第8期952-963,共12页
CONSPECTUS:Poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate)(PEDOT:PSS)is a derivative of polythiophene and an intrinsically conductive polymer(CP).Due to its excellent conductivity,processability,and biocompati... CONSPECTUS:Poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate)(PEDOT:PSS)is a derivative of polythiophene and an intrinsically conductive polymer(CP).Due to its excellent conductivity,processability,and biocompatibility,it has received widespread attention in the past decade and has become a popular material for wearable electronic devices.Thin films and fibers are the two primary dimensions that PEDOT:PSS has been made into.Compared with two-dimensional(2D)thin films,1D fibers have natural advantages in integration and structural design,remarkably accelerating practical applications.Wet spinning has been considered the primary method to fabricate 1D PEDOT:PSS fibers,which can continuously produce fibers on a large scale with the outstanding capability of fine-tuning the compositions and morphologies to achieve the desired properties.For example,untreated wet-spun PEDOT:PSS fibers generally have relatively lower conductivity(0.1 S·cm−1),while the coagulation bath obtained by mixing acetone and isopropanol significantly increases the conductivity(310 S·cm−1),which has become a classic combination.Nevertheless,the extensive use of such solvents does not meet the requirements of environmental friendliness,and researchers have been searching for suitable alternatives.Even though the coagulation bath composed of ethanol,water,and metal salts compensates for improving that,the performance needs further enhancement,including conductivity,elongation at break,and capacitance.Thus,intensive efforts have been taken to boost the performance of PEDOT:PSS by changing the formula of the coagulation bath,blending other additives with the starting materials,and secondary treatment for the obtained fibers.In addition to ethanol and water,other coagulation baths are also being developed,such as sulfuric acid,N,N-dimethylacetamide,etc.,which play a critical role in the above solutions due to the excellent performance of the resultant fibers.In this Account,the efforts are mainly concentrated on the advancements and progress in achieving high-performance wet-spun PEDOT:PSS fibers,from coagulation bath regulation to secondary treatment of spinning solution blending.The fundamental electrochemistry and challenges of PEDOT:PSS fibers will also be discussed.It will then focus on the advantages and control mechanisms of preparing PEDOT:PSS fibers through wet spinning from three perspectives:(i)coagulation bath control;(ii)polymer blending;and(iii)post-treatment.For example,we will discuss:1)how different additives in the coagulation bath regulate the structure and properties of PEDOT:PSS fibers;2)how polymer blending can improve the stability and durability of PEDOT:PSS fibers;and 3)how post-treatment can endow PEDOT:PSS fibers with unique structures,enhancing their strength and conductivity.Finally,the key research directions required in this field and the remaining challenges to be addressed will be summarized and proposed. 展开更多
关键词 wet spinning coagulation bath post treatment composite fibers CONDUCTIVITY pedot pss wearable electronic devicesthin films smart devices
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Nanofibers enabled advanced gas sensors:A review
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作者 Kening Lang Tianyi Liu +8 位作者 Daniel J.Padilla Marriana Nelson Christopher W.Landorf Rishi J.Patel Mark L.Ballentine Alan J.Kennedy Wu-Sheng Shih Adam Scotch Jiadeng Zhu 《Advanced Sensor and Energy Materials》 2024年第2期24-40,共17页
The advancement of gas sensor technology over the past decades has led to remarkable progress and achievements in pollution control and environmental protection.Compared with other sensing materials,electrospun nanofi... The advancement of gas sensor technology over the past decades has led to remarkable progress and achievements in pollution control and environmental protection.Compared with other sensing materials,electrospun nanofibers have attracted significant attention,which is mainly due to their unique characteristics,including but not limited to high surface area,easy structure design,facile facility setup,multifunctional properties,etc.,making them outstanding candidates for potential applications in this field.This review provides an overview of the applications of electrospun nanofibers in gas sensors,concentrating on carbon monoxide,hydrogen,carbon dioxide,hydrogen sulfide,ammonia,nitrogen oxides,oxygen,and volatile organic compounds.It begins with a brief introduction to sensing materials and the advantages of electrospun nanofibers along with their ongoing research.The principles and progress of electrospinning are then discussed.Afterward,the corresponding properties of electrospun nanofibers in diverse gas sensors are thoroughly reviewed.Finally,a future vision regarding challenges and perspectives in this area is proposed.This review provides an extensive and comprehensive reference to utilize advanced electrospun nanofibers to generate novel sensors,facilitating their performance in high-demand areas. 展开更多
关键词 NANOFIBERS Gas sensors ELECTROSPINNING Structure design Environmental protection
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