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65nm工艺节点下的光刻掩模版优化算法 被引量:2
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作者 熊伟 张进宇 +2 位作者 Tsai Min-Chun 王燕 余志平 《计算机辅助设计与图形学学报》 EI CSCD 北大核心 2008年第5期577-584,共8页
在模拟退火算法中引入了准梯度的概念,改进了以模拟退火算法为基础的光刻掩模版优化算法.该算法优先搜索由准梯度确定的关键区域,减少了模拟退火算法的无效搜索次数,在保证优化效果的基础上,可以提高原算法的收敛效率.实验结果表明,在65... 在模拟退火算法中引入了准梯度的概念,改进了以模拟退火算法为基础的光刻掩模版优化算法.该算法优先搜索由准梯度确定的关键区域,减少了模拟退火算法的无效搜索次数,在保证优化效果的基础上,可以提高原算法的收敛效率.实验结果表明,在65nm CMOS工艺节点下,该算法使得收敛速度大幅提高,优化效果更好. 展开更多
关键词 掩模 逆向光刻 模拟退火算法
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Thermal stress-induced depolarization compensation in wide-bandwidth,high-energy,high-repetition-rate multi-slab laser amplifiers
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作者 Saumyabrata Banerjee Anthony J.Vella +4 位作者 Frantisek Batysta Thomas Galvin Emily Link Brendan A.Reagan Thomas Spinka 《High Power Laser Science and Engineering》 2025年第1期101-108,共8页
We present an innovative design for a two-head,gas-cooled multi-slab high-energy,high-repetition-rate amplifier aimed at mitigating thermally induced depolarization in a wide-bandwidth neodymium-doped glass gain mediu... We present an innovative design for a two-head,gas-cooled multi-slab high-energy,high-repetition-rate amplifier aimed at mitigating thermally induced depolarization in a wide-bandwidth neodymium-doped glass gain medium.This architecture employs two quartz rotators(QRs)with opposite-handedness,strategically positioned within each multi-slab amplifier head,to enhance depolarization compensation.Theoretical modeling of this amplifier configuration demonstrates a 20×reduction in depolarization losses for a 70 mm beam operating at the central wavelength,compared to conventional approaches that utilize a single QR positioned between the amplifier heads.In addition,for a wide bandwidth source,the integration of QRs with opposite-handedness yields a 9×improvement in depolarization losses at the spectral extremes compared to the use of two QRs exhibiting the same optical handedness in both amplifier heads. 展开更多
关键词 multi-slab amplifier Nd:APG-1 thermal stress-induced depolarization
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Modular architecture for fully non-blocking silicon photonic switch fabric 被引量:4
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作者 Dessislava Nikolova David M.Calhoun +5 位作者 Yang Liu Sébastien Rumley Ari Novack Tom Baehr-Jones Michael Hochberg Keren Bergman 《Microsystems & Nanoengineering》 EI CSCD 2017年第1期430-438,共9页
Integrated photonics offers the possibility of compact,low energy,bandwidth-dense interconnects for large port count spatial optical switches,facilitating flexible and energy efficient data movement in future data com... Integrated photonics offers the possibility of compact,low energy,bandwidth-dense interconnects for large port count spatial optical switches,facilitating flexible and energy efficient data movement in future data communications systems.To achieve widespread adoption,intimate integration with electronics has to be possible,requiring switch design using standard microelectronic foundry processes and available devices.We report on the feasibility of a switch fabric comprised of ubiquitous silicon photonic building blocks,opening the possibility to combine technologies,and materials towards a new path for switch fabric design.Rather than focus on integrating all devices on a single silicon chip die to achieve large port count optical switching,this work shifts the focus towards innovative packaging and integration schemes.In this work,we demonstrate 1×8 and 8×1 microring-based silicon photonic switch building blocks with software control,providing the feasibility of a full 8×8 architecture composed of silicon photonic building blocks.The proposed switch is fully non-blocking,has path-independent insertion loss,low crosstalk,and is straightforward to control.We further analyze this architecture and compare it with other common switching architectures for varying underlying technologies and radices,showing that the proposed architecture favorably scales to very large port counts when considering both crosstalk and architectural footprint.Separating a switch fabric into functional building blocks via multiple photonic integrated circuits offers the advantage of piece-wise manufacturing,packaging,and assembly,potentially reducing the number of optical I/O and electrical contacts on a single die. 展开更多
关键词 data communications optical switching silicon photonics
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ILT Approach for Compensating 3-D Mask Effects
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作者 熊伟 张进宇 +2 位作者 Min-Chun Tsai 王燕 余志平 《Tsinghua Science and Technology》 SCIE EI CAS 2009年第1期68-74,共7页
As mask features scale to smaller dimensions, the so-called "3-D mask effects" which have mostly been neglected before, become important. This paper properly models the 3-D thick mask effects, and then analyses the ... As mask features scale to smaller dimensions, the so-called "3-D mask effects" which have mostly been neglected before, become important. This paper properly models the 3-D thick mask effects, and then analyses the object-based inverse lithography technique using a simulated annealing algorithm to determine the mask shapes that produce the desired on-wafer results. Evaluations against rigorous simulations show that the synthesized masks provide good image fidelity up to 0.94, and this approach gives improved accuracy and faster results than existing methods. 展开更多
关键词 inverse lithography technique (ILT) 3-D mask effect simulated annealing
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Mechanical characterization and induced crystallization in nanocomposites of thermoplastics and carbon nanotubes
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作者 Eduardo R.Cruz-Chú Gonzalo J.Villegas-Rodríguez +4 位作者 Tobias Jäger Luca Valentini Nicola M.Pugno Konstantinos Gkagkas Frauke Gräter 《npj Computational Materials》 SCIE EI CSCD 2020年第1期413-423,共11页
Nanocomposites built from polymers and carbon nanotubes(CNTs)are a promising class of materials.Computer modeling can provide nanoscale views of the polymer–CNT interface,which are much needed to foster the manufactu... Nanocomposites built from polymers and carbon nanotubes(CNTs)are a promising class of materials.Computer modeling can provide nanoscale views of the polymer–CNT interface,which are much needed to foster the manufacturing and development of such materials.However,setting up periodic nanocomposite models is a challenging task.Here we propose a computational workflow based on Molecular Dynamics simulations. 展开更多
关键词 MATERIALS COMPOSITES CRYSTALLIZATION
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