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Advanced technologies in InGaN micro-LED fabrication to mitigate the sidewall effect 被引量:1
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作者 Zhiyuan Liu Haicheng Cao +5 位作者 Xiao Tang Tingang Liu Yi Lu Zixian Jiang Na Xiao Xiaohang Li 《Light(Science & Applications)》 2025年第2期307-332,共26页
The size of InGaN micro-LEDs is continuously decreasing to meet the demands of various emerging applications,especially in tiny micro-displays such as ARVR.However,the conventional pixel definition based on plasma etc... The size of InGaN micro-LEDs is continuously decreasing to meet the demands of various emerging applications,especially in tiny micro-displays such as ARVR.However,the conventional pixel definition based on plasma etching significantly damages the mesa sidewalls,leading to a severe reduction in efficiency as the micro-LED size decreases.This seriously impedes the development and application of micro-LEDs.In this work,we comprehensively explain the origin of micro-LED sidewall effects and corresponding physical models.Subsequently,we systematically review recent progress in micro-LED fabrication aiming at suppressing sidewall effects.Furthermore,we discuss advancements in micro-LED fabrication with"damage-free"techniques,which hold the potential to fundamentally address the issue of plasma damage in the micro-LED process.We believe this review will deepen the understanding of micro-LED sidewall effects and provide a better insight into the latest associated fabrication technologies for high-efficientInGaNmicro-LEDs. 展开更多
关键词 plasma etching mesa sidewallsleading sidewall effect pixel definition advanced technologies reduction efficiency
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High-performance UV polarization sensitive photodetector for a graphene(2D)/GaN(3D)junction with a non-centrosymmetric electric field
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作者 CAN Zou QING LIU +4 位作者 LU ZHANG XIAO TANG XIAOHANG LI SHUTI LI FANGLIANG GAO 《Photonics Research》 2025年第6期1544-1553,共10页
This study pioneers a high-performance UV polarization-sensitive photodetector by ingeniously integrating noncentrosymmetric metal nanostructures into a graphene(Gr)/Al_(2)O_(3)/GaN heterojunction.Unlike conventional ... This study pioneers a high-performance UV polarization-sensitive photodetector by ingeniously integrating noncentrosymmetric metal nanostructures into a graphene(Gr)/Al_(2)O_(3)/GaN heterojunction.Unlike conventional approaches constrained by graphene's intrinsic isotropy or complex nanoscale patterning,our design introduces asymmetric metal architectures(E-/T-type) to artificially create directional anisotropy.These structures generate plasmon-enhanced localized electric fields that selectively amplify photogenerated carrier momentum under polarized UV light(325 nm),synergized with Fowler-Nordheim tunneling(FNT) across an atomically thin Al_(2)O_(3) barrier.The result is a breakthrough in performance:a record anisotropy ratio of 115.5(E-type,-2 V) and exceptional responsivity(97.7 A/W),surpassing existing graphene-based detectors by over an order of magnitude.Crucially,by systematically modulating metal geometry and density,we demonstrate a universal platform adaptable to diverse 2D/3D systems.This study provides a valuable reference for developing and practically applying photodetectors with higher anisotropy than ultraviolet polarization sensitivity. 展开更多
关键词 complex nanoscale patterningour high performance UV graphenes intrinsic isotropy metal nanostructures PHOTODETECTOR polarization sensitive artificially create directional anisotropy
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Wide bandgap semiconductor-based integrated circuits
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作者 Saravanan Yuvaraja Vishal Khandelwal +1 位作者 Xiao Tang Xiaohang Li 《Chip》 EI 2023年第4期105-132,共28页
Wide-bandgap semiconductors exhibit much larger energybandgaps than traditional semiconductors such as silicon,rendering them very promising to be applied in the fields of electronics and optoelectronics.Prominent exa... Wide-bandgap semiconductors exhibit much larger energybandgaps than traditional semiconductors such as silicon,rendering them very promising to be applied in the fields of electronics and optoelectronics.Prominent examples of semiconductors include SiC,GaN,ZnO,and diamond,which exhibitdistinctive characteristics such as elevated mobility and thermalconductivity.These characteristics facilitate the operation of awide range of devices,including energy-efficient bipolar junctiontransistors(BJTs)and metal-oxide-semiconductor field-effecttransistors(MOSFETs),as well as high-frequency high-electronmobility transistors(HEMTs)and optoelectronic components suchas light-emitting diodes(LEDs)and lasers.These semiconductorsare used in building integrated circuits(ICs)to facilitate theoperation of power electronics,computer devices,RF systems,andother optoelectronic advancements.These breakthroughs includevarious applications such as imaging,optical communication,andsensing.Among them,the field of power electronics has witnessedtremendous progress in recent years with the development of widebandgap(WBG)semiconductor devices,which is capable ofswitching large currents and voltages rapidly with low losses.However,it has been proven challenging to integrate these deviceswith silicon complementary metal oxide semiconductor(CMOS)logic circuits required for complex control functions.The monolithic integration of silicon CMOS with WBG devices increases thecomplexity of fabricating monolithically integrated smart integrated circuits(ICs).This review article proposes implementingCMOS logic directly on the WBG platform as a solution.However,achieving the CMOS functionalities with the adoption of WBGmaterials still remains a significant hurdle.This article summarizesthe research progress in the fabrication of integrated circuitsadopting various WBG materials ranging from SiC to diamond,with the goal of building future smart power ICs. 展开更多
关键词 Wide bandgap semiconductors Integrated circuits TRANSISTORS Power electronics
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Semiconductor UV photonics: feature introduction
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作者 XIAOHANG LI RUSSELL D.DUPUIS TIM WERNICKE 《Photonics Research》 SCIE EI CSCD 2019年第12期I0003-I0004,共2页
Semiconductor UV photonics research has emerged as one of the most heavily invested areas among semiconductor photonics research due to numerous crucial applications such as sterilization,sensing,curing,and communicat... Semiconductor UV photonics research has emerged as one of the most heavily invested areas among semiconductor photonics research due to numerous crucial applications such as sterilization,sensing,curing,and communication.The feature issue disseminates nine timely original research and two review papers from leading research groups and companies,covering most frontiers of the semiconductor UV photonics research,from epitaxy,device physics and design,nanostructures,fabrication,packaging,reliability,and application for light-emitting diodes,laser diodes,and photodetectors. 展开更多
关键词 COMPANIES PHOTONICS FRONTIER
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Etching-free pixel definition in InGaN green micro-LEDs 被引量:2
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作者 Zhiyuan Liu Yi Lu +7 位作者 Haicheng Cao Glen Isaac Maciel Garcia Tingang Liu Xiao Tang Na Xiao Raul Aguileta Vazquez Mingtao Nong Xiaohang Li 《Light(Science & Applications)》 SCIE EI CSCD 2024年第8期1655-1665,共11页
The traditional plasma etching process for defining micro-LED pixels could lead to significant sidewall damage.Defects near sidewall regions act as non-radiative recombination centers and paths for current leakage,sig... The traditional plasma etching process for defining micro-LED pixels could lead to significant sidewall damage.Defects near sidewall regions act as non-radiative recombination centers and paths for current leakage,significantly deteriorating device performance.In this study,we demonstrated a novel selective thermal oxidation(STO)method that allowed pixel definition without undergoing plasma damage and subsequent dielectric passivation.Thermal annealing in ambient air oxidized and reshaped the LED structure,such as p-layers and InGaN/GaN multiple quantum wells.Simultaneously,the pixel areas beneath the pre-deposited SiO_(2)layer were selectively and effectively protected.It was demonstrated that prolonged thermal annealing time enhanced the insulating properties of the oxide,significantly reducing LED leakage current.Furthermore,applying a thicker SiO_(2)protective layer minimized device resistance and boosted device efficiency effectively.Utilizing the STO method,InGaN green micro-LED arrays with 50-,30-,and 10-μm pixel sizes were manufactured and characterized.The results indicated that after 4 h of air annealing and with a 3.5-μm SiO_(2)protective layer,the 10-μm pixel array exhibited leakage currents density 1.2×10^(-6)A/cm^(2)at-10 V voltage and a peak on-wafer external quantum efficiency of~6.48%.This work suggests that the STO method could become an effective approach for future micro-LED manufacturing to mitigate adverse LED efficiency size effects due to the plasma etching and improve device efficiency.Micro-LEDs fabricated through the STO method can be applied to micro-displays,visible light communication,and optical interconnect-based memories.Almost planar pixel geometry will provide more possibilities for the monolithic integration of driving circuits with micro-LEDs.Moreover,the STO method is not limited to micro-LED fabrication and can be extended to design other III-nitride devices,such as photodetectors,laser diodes,high-electron-mobility transistors,and Schottky barrier diodes. 展开更多
关键词 ANNEALING protective QUANTUM
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Engineering of multiple bound states in the continuum by latent representation of freeform structures 被引量:5
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作者 Ronghui Lin Zahrah Alnakhli Xiaohang Li 《Photonics Research》 SCIE EI CAS CSCD 2021年第4期I0016-I0023,共8页
We demonstrate a neural network capable of designing on-demand multiple symmetry-protected bound states in the continuum(BICs)in freeform structures with predefined symmetry.The latent representation of the freeform s... We demonstrate a neural network capable of designing on-demand multiple symmetry-protected bound states in the continuum(BICs)in freeform structures with predefined symmetry.The latent representation of the freeform structures allows the tuning of the geometry in a differentiable,continuous way.We show the rich band inversion and accidental degeneracy in these freeform structures by interacting with the latent representation directly.Moreover,a high design accuracy is demonstrated for arbitrary control of multiple BIC frequencies by using a photonic property readout network to interpret the latent representation. 展开更多
关键词 REPRESENTATION CONTINUUM DIFFERENTIABLE
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Tapering-induced enhancement of light extraction efficiency of nanowire deep ultraviolet LED by theoretical simulations 被引量:3
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作者 RONGHUI LIN SERGIO VALDES GALAN +6 位作者 HAIDING SUN YANGRUI HU MOHD SHARIZAL ALIAS BILAL JANJUA TIEN KHEE NG BOON S.OOI XIAOHANG LI 《Photonics Research》 SCIE EI 2018年第5期457-462,共6页
A nanowire (NW) structure provides an alternative scheme for deep ultraviolet light emitting diodes (DUV-LEDs) that promises high material quality and better light extraction efficiency (LEE). In this report, we... A nanowire (NW) structure provides an alternative scheme for deep ultraviolet light emitting diodes (DUV-LEDs) that promises high material quality and better light extraction efficiency (LEE). In this report, we investigate the influence of the tapering angle of closely packed AIGaN NWs, which is found to exist naturally in molecular beam epitaxy (MBE) grown NW structures, on the LEE of NW DUV-LEDs. It is observed that, by having a small tapering angle, the vertical extraction is greatly enhanced for both transverse magnetic (TM) and transverse elec- tric (TE) polarizations. Most notably, the vertical extraction of TM emission increased from 4.8% to 24.3%, which makes the LEE reasonably large to achieve high-performance DUV-LEDs. This is because the breaking of symmetry in the vertical direction changes the propagation of the light significantly to allow more coupling into radiation modes. Finally, we introduce errors to the NW positions to show the advantages of the tapered NW structures can be projected to random closely packed NW arrays. The results obtained in this paper can provide guidelines for designing efficient NW DUV-LEDs. 展开更多
关键词 Tapering-induced enhancement light extraction efficiency of nanowire deep ultraviolet LED theoretical simulations
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Enhanced complete photonic bandgap in a moderate refractive index contrast chalcogenide-air system with connected-annular-rods photonic crystals 被引量:2
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作者 JIN HOU CHUNYONG YANG +2 位作者 XIAOHANG LI ZHENZHOU CAO SHAOPING CHEN 《Photonics Research》 SCIE EI 2018年第4期282-289,共8页
Connected-annular-rods photonic crystals(CARPCs) in both triangular and square lattices are proposed to enhance the two-dimensional complete photonic bandgap(CPBG) for chalcogenide material systems with moderate refra... Connected-annular-rods photonic crystals(CARPCs) in both triangular and square lattices are proposed to enhance the two-dimensional complete photonic bandgap(CPBG) for chalcogenide material systems with moderate refractive index contrast. For the typical chalcogenide-glass–air system with an index contrast of 2.8:1, the optimized square lattice CARPC exhibits a significantly larger normalized CPBG of about 13.50%, though the use of triangular lattice CARPC is unable to enhance the CPBG. It is almost twice as large as our previously reported result [IEEE J. Sel. Top. Quantum Electron. 22, 4900108(2016)]. Moreover, the CPBG of the square-lattice CARPC could remain until an index contrast as low as 2.24:1. The result not only favors wideband CPBG applications for index contrast systems near 2.8:1, but also makes various optical applications that are dependent on CPBG possible for more widely refractive index contrast systems. 展开更多
关键词 光子晶体 折射率 通讯技术 发展现状
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Revealing the surface electronic structures of AIGaN deep-ultraviolet multiple quantum wells with lateral polarity domains 被引量:2
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作者 WEI GUO LI CHEN +11 位作者 HOUQIANG XU YINGDA QIAN MOHEB SHEIKHI JASON HOO SHIPING GUO LIANG XU JIANZHE LU FERAS ALQATARI XIAOHANG LI KAIYAN HE ZHE CHUAN FENG JICHUN YE 《Photonics Research》 SCIE EI CSCD 2020年第6期812-818,共7页
We report on the carrier dynamic and electronic structure investigations on AlGaN-based deep-ultraviolet multiple quantum wells (MQWs)with lateral polarity domains.The localized potential maximum is predicted near the... We report on the carrier dynamic and electronic structure investigations on AlGaN-based deep-ultraviolet multiple quantum wells (MQWs)with lateral polarity domains.The localized potential maximum is predicted near the domain boundaries by first-principle calculation,suggesting carrier localization and efficient radiative recombination.More importantly,lateral band diagrams of the MQWs are proposed based on electron affinities and valance band levels calculated from ultraviolet(UV)photoelectron spectroscopy.The proposed lateral band diagram is further demonstrated by surface potential distribution collected by Kelvin probe microscopy and the density-of-state calculation of energy bands.This work illustrates that lateral polarity structures are playing essential roles in the electronic properties of II nitride photonic devices and may provide novel perspective in the realization of high-efficiency UV emitters. 展开更多
关键词 ULTRAVIOLET electronic QUANTUM
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Carrier behavior in the vicinity of pit defects in GaN characterized by ultraviolet light-assisted Kelvin probe force microscopy
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作者 CuiHong Kai XiaoJuan Sun +8 位作者 Yu Ping Jia ZhiMing Shi Ke Jiang JianWei Ben You Wu Yong Wang HeNan Liu XiaoHang Li DaBing Li 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS CSCD 2019年第6期87-92,共6页
Surface potentials in the vicinity of V-pits(cone bottom) and U-pits(blunt bottom) on epitaxial GaN surface have been systematically studied using ultraviolet(UV) light-assisted Kelvin probe force microscopy(KPFM). Th... Surface potentials in the vicinity of V-pits(cone bottom) and U-pits(blunt bottom) on epitaxial GaN surface have been systematically studied using ultraviolet(UV) light-assisted Kelvin probe force microscopy(KPFM). The band structure models are established to understand variation of the surface potentials at the pits and planar surface with and without UV light. The photo-generated carrier behavior at the pit defects is studied. According to the surface potential results, it can be deduced that the carrier distributions around the V-and U-pits are uneven. In dark, the electron concentration at the bottom of V-pit(30 n_0) and Upit(15 n_0) are higher than that at planar surface(n_0). Under UV light, for V-pit, the electron concentration at the cone bottom(4.93×10^(11) n_0) is lower than that at the surrounding planar surface(5.68×10^(13) n_0). For U-pit, the electron concentration at the blunt bottom is 1.35×10^(12) n_0, which is lower than that at the surrounding planar surface(6.13×10^(13) n_0). The non-equilibrium electron concentrations at different locations are calculated. Based on the non-equilibrium electron concentration, it can be concluded that the carrier recombination rate at pit defects is higher than that at planar surface. 展开更多
关键词 PIT DEFECTS surface potential ELECTRON CONCENTRATION
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Predicting solid state material platforms for quantum technologies
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作者 Oliver Lerstøl Hebnes Marianne Etzelmüller Bathen +3 位作者 Øyvind Sigmundson Schøyen Sebastian GWinther-Larsen Lasse Vines Morten Hjorth-Jensen 《npj Computational Materials》 SCIE EI CSCD 2022年第1期1983-1997,共15页
Semiconductor materials provide a compelling platform for quantum technologies(QT).However,identifying promising material hosts among the plethora of candidates is a major challenge.Therefore,we have developed a frame... Semiconductor materials provide a compelling platform for quantum technologies(QT).However,identifying promising material hosts among the plethora of candidates is a major challenge.Therefore,we have developed a framework for the automated discovery of semiconductor platforms for QT using material informatics and machine learning methods.Different approaches were implemented to label data for training the supervised machine learning(ML)algorithms logistic regression,decision trees,random forests and gradient boosting.We find that an empirical approach relying exclusively on findings from the literature yields a clear separation between predicted suitable and unsuitable candidates.In contrast to expectations from the literature focusing on band gap and ionic character as important properties for QT compatibility,the ML methods highlight features related to symmetry and crystal structure,including bond length,orientation and radial distribution,as influential when predicting a material as suitable for QT. 展开更多
关键词 QUANTUM SYMMETRY SEPARATION
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