Multilayer ceramic actuator(MLCA)has been widely employed in actuators due to the large cumulative displacement under the low driving voltage.In this work,the MLCA devices consisting of a lead-free MnCO_(3-)and CuO-do...Multilayer ceramic actuator(MLCA)has been widely employed in actuators due to the large cumulative displacement under the low driving voltage.In this work,the MLCA devices consisting of a lead-free MnCO_(3-)and CuO-doped 0.96(K_(0.48)Na_(0.52))(Nb_(0.96)Ta_(0.04))O_(3)-0.04CaZrO_(3) piezoelectric ceramics and a base nickel(Ni)metal inner electrode were well co-fired by the two-step sintering process in a reducing atmosphere.The ceramic layer/electrode interface is well-integrated and clearly continuous without distinct interdiffusion and chemical reaction,which is beneficial to the electrical reliability of the MLCA.As a result,the MLCA laminated with nine active ceramic layers obtains an ultrahigh piezoelectric coefficient d_(33) of 3157 pC/N,about 9 times than bulk ceramics.The 0.5 mm-thick MLCA composed of a series of~50μm-thick ceramic layers and~3μm-thick Ni electrodes reaches a high 1.8μm displacement under the low applied voltage of 200 V(the same displacement requires a voltage as high as 3700 V for~1 mm-thick bulk ceramics).The excellent electrical performance and low-cost base electrode reveal that the(K,Na)NbO_(3)(KNN)-based MLCAs are promising lead-free candidate for actuator application.展开更多
基金supported by the National Natural Science Foundation of China(GrantNos.52072150 and 51972146)Shandong Province Key Fundamental Research Program(Grant No.ZR2022ZD39)+1 种基金State Key Laboratory of New Ceramics and Fine Processing,Tsinghua University(Grant No.KF202002)Open Foundation of Guangdong Key Laboratory of Electronic Functional Materials andDevices(Grant No.EFMD2021002Z).
文摘Multilayer ceramic actuator(MLCA)has been widely employed in actuators due to the large cumulative displacement under the low driving voltage.In this work,the MLCA devices consisting of a lead-free MnCO_(3-)and CuO-doped 0.96(K_(0.48)Na_(0.52))(Nb_(0.96)Ta_(0.04))O_(3)-0.04CaZrO_(3) piezoelectric ceramics and a base nickel(Ni)metal inner electrode were well co-fired by the two-step sintering process in a reducing atmosphere.The ceramic layer/electrode interface is well-integrated and clearly continuous without distinct interdiffusion and chemical reaction,which is beneficial to the electrical reliability of the MLCA.As a result,the MLCA laminated with nine active ceramic layers obtains an ultrahigh piezoelectric coefficient d_(33) of 3157 pC/N,about 9 times than bulk ceramics.The 0.5 mm-thick MLCA composed of a series of~50μm-thick ceramic layers and~3μm-thick Ni electrodes reaches a high 1.8μm displacement under the low applied voltage of 200 V(the same displacement requires a voltage as high as 3700 V for~1 mm-thick bulk ceramics).The excellent electrical performance and low-cost base electrode reveal that the(K,Na)NbO_(3)(KNN)-based MLCAs are promising lead-free candidate for actuator application.
