A stacked metamaterial MEMS(meta-MEMS)chip is proposed,which can perfectly absorb electromagnetic waves,convert them into mechanical energy,drive movement of the optical micro-reflectors array,and detect millimeter wa...A stacked metamaterial MEMS(meta-MEMS)chip is proposed,which can perfectly absorb electromagnetic waves,convert them into mechanical energy,drive movement of the optical micro-reflectors array,and detect millimeter waves.It is equivalent to using visible light to image a millimeter wave.The meta-MEMS adopts the design of upper and lower chip separation and then stacking to achieve the"dielectric-resonant-air-ground"structure,reduce the thickness of the metamaterial and MEMS structures,and improve the performance of millimeter wave imaging.For verification,we designed and prepared a 94 GHz meta-MEMS focal plane array chip,in which the sum of the thickness of the metamaterial and MEMS structures is only 1/2500 wavelength,the pixel size is less than 1/3 wavelength,but the absorption rate is as high as 99.8%.Moreover,a light readout module was constructed to test the millimeter wave imaging performance.The results show that the response speed can reach 144 Hz and the lens-less imaging resolution is 1.5mm.展开更多
文摘A stacked metamaterial MEMS(meta-MEMS)chip is proposed,which can perfectly absorb electromagnetic waves,convert them into mechanical energy,drive movement of the optical micro-reflectors array,and detect millimeter waves.It is equivalent to using visible light to image a millimeter wave.The meta-MEMS adopts the design of upper and lower chip separation and then stacking to achieve the"dielectric-resonant-air-ground"structure,reduce the thickness of the metamaterial and MEMS structures,and improve the performance of millimeter wave imaging.For verification,we designed and prepared a 94 GHz meta-MEMS focal plane array chip,in which the sum of the thickness of the metamaterial and MEMS structures is only 1/2500 wavelength,the pixel size is less than 1/3 wavelength,but the absorption rate is as high as 99.8%.Moreover,a light readout module was constructed to test the millimeter wave imaging performance.The results show that the response speed can reach 144 Hz and the lens-less imaging resolution is 1.5mm.
