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Experimental demonstration of silicon nitride waveguide gratings with excellent efficiency and divergence angle
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作者 Zhaozhen Chen Wenling Li +4 位作者 Qian Wang Enfeng Liu Xinqun Zhang Jingwei Liu Zhengsheng Han 《Chinese Physics B》 2025年第5期431-435,共5页
Silicon nitride(Si_(3)N_(4))photonic platform has recently attracted increasing attention for Si_(3)N_(4) photonic integrated circuits(PIC).A diffraction grating with the only etched top-layer in tri-layer Si3N4 optic... Silicon nitride(Si_(3)N_(4))photonic platform has recently attracted increasing attention for Si_(3)N_(4) photonic integrated circuits(PIC).A diffraction grating with the only etched top-layer in tri-layer Si3N4 optical waveguides is proposed,which shows a simple fabrication process,high upward diffraction efficiency,and lower far-field divergence angle.The measured results of the diffraction grating at a wavelength of 905 nm show the average upward diffraction efficiency of 90.5% and average far-field divergence angle of 0.154°,which shows a good agreement with the design results with the upward diffraction efficiency of 91.6%and far-field divergence angle of 0.105°. 展开更多
关键词 silicon nitride photonic platform optical waveguides
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Guiding and magneto–optical properties of TGG waveguide by proton implantation combined with femtosecond laser ablation
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作者 Chun-Xiao Liu Zi-Hao Wang +6 位作者 Bei-Er Guo Rui Yuan Yi-Fan Wang Yu-Hang Zhou Jia-Bin Sun Liao-Lin Zhang Hai-Tao Guo 《Chinese Physics B》 2025年第5期437-442,共6页
Integrating the magneto-optical effect into a waveguide-based photonic device becomes more and more interesting.In the work,the planar optical waveguide firstly was prepared in a terbium gallium garnet crystal(TGG)via... Integrating the magneto-optical effect into a waveguide-based photonic device becomes more and more interesting.In the work,the planar optical waveguide firstly was prepared in a terbium gallium garnet crystal(TGG)via the proton implantation with the energy of 4×10^(-1)MeV and the fluence of 6×10^(8)ions/μm^(2).Subsequently,a femtosecond laser with a central wavelength of 800 nm and a power of 3 mW was used to ablate the surface of the planar waveguide,forming the ridge optical waveguide.The dark-mode curve of the planar waveguide was measured by a prism coupling technique.The top-view morphology of the ridge waveguide was observed via a Nikon microscope.The mode field distributions of the planar and ridge waveguides were obtained by an end-face coupling system,and the propagation losses of the two waveguides were measured to be 2.26 dB/cm and 2.58 dB/cm,respectively.The Verdet constants were measured to be-72.7°/T·cm for the TGG substrate and-60.7°/T·cm for the ridge waveguide.The TGG waveguides have a potential in the fabrication of magneto-optical waveguide devices. 展开更多
关键词 optical waveguide ion implantation terbium gallium garnet crystal(TGG) magneto-optical effect femtosecond laser ablation
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Unidirectional and robust propagating surface magnetoplasmon in magneto-optical cylindrical waveguides with remanence
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作者 WANG Zhuoyuan CHENG Peihong YU Ping 《Optoelectronics Letters》 2025年第10期577-581,共5页
Ferrimagnetic materials exhibiting remanence can be used to achieve unidirectional electromagnetic-field propagation in the form of magnetoplasmons(MPs)in the subwavelength regime.This study investigates the MP proper... Ferrimagnetic materials exhibiting remanence can be used to achieve unidirectional electromagnetic-field propagation in the form of magnetoplasmons(MPs)in the subwavelength regime.This study investigates the MP properties and various guiding modes in a hollow cylindrical waveguide made of materials that exhibit remanence.Pattern analysis and numerical simulations are used to demonstrate that dispersion relationships and electromagnetic-field distribution are strongly affected by the operating frequency and physical dimensions of the structure.In addition,the existence of two different guiding modes is proved,namely regular and surface-wave modes.By adjusting the operating frequency and reducing the diameter of the hollow cylinder,the regular mode can be suppressed so as to only retain the surface-wave mode,which enables unidirectional MP propagation in the cylindrical waveguide.Moreover,the unidirectional surface-wave mode is robust to backscattering due to surface roughness and defects,which makes it very useful for application in field-enhancement devices. 展开更多
关键词 guiding modes numerical simulations remanence ferrimagnetic materials hollow cylindrical waveguide dispersion relationships ferrimagnetic materials magneto optical cylindrical waveguides unidirectional propagation
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Optimization of Plasma Etching Parameters and Mask for Silica Optical Waveguides 被引量:1
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作者 周立兵 刘文 吴国阳 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第6期1104-1110,共7页
Optical waveguides in silica-on-silicon are one of the key elements in optical communications.The processes of deep etching silica waveguides using resist and metal masks in RIE plasma are investigated.The etching res... Optical waveguides in silica-on-silicon are one of the key elements in optical communications.The processes of deep etching silica waveguides using resist and metal masks in RIE plasma are investigated.The etching responses,including etching rate and selectivity as functions of variation of parameters,are modeled with a 3D neural network.A novel resist/metal combined mask that can overcome the single-layer masks’ limitations is developed for enhancing the waveguides deep etching and low-loss optical waveguides are fabricated at last. 展开更多
关键词 reactive ion etching silica-on-silicon optical waveguides 3D neural network
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Temperature sensor based on polymer thin film optical waveguide
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作者 王龙德 张彤 +2 位作者 张晓阳 李若舟 汪鲁宁 《Journal of Southeast University(English Edition)》 EI CAS 2013年第2期152-157,共6页
Based on attenuated total reflection (ATR) and thermo-optic effect, the polymeric thin film planar optical waveguide is used as the temperature sensor, and the factors influencing the sensitivity of the temperature ... Based on attenuated total reflection (ATR) and thermo-optic effect, the polymeric thin film planar optical waveguide is used as the temperature sensor, and the factors influencing the sensitivity of the temperature sensor are comprehensively analyzed. Combined with theoretical analysis and experimental investigation, the sensitivity of the temperature sensor is related to the thicknesses of the upper cladding layer, the waveguide layer, the optical loss of the polymer material and the guided wave modes. The results show that the slope value about reflectivity and temperature, which stands for the sensitivity of the polymer thin film temperature sensor, is associated with the waveguide film thickness and the guided wave modes, and the slope value is the highest in the zero reflectance of a certain transverse electric (TE) mode. To improve the sensitivity of the temperature sensor, the sensor's working incident light exterior angle α should be chosen under a certain TE mode with the reflectivity to be zero. This temperature sensor is characterized by high sensitivity and simple structure and it is easily fabricated. 展开更多
关键词 temperature sensor planar optical waveguide guided wave mode thermo-optic effect prism coupling
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Design,Fabrication,and Testing of Single-Side Alignment of 16×0.8nm Arrayed-Waveguide Grating
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作者 李健 安俊明 +2 位作者 王红杰 夏君磊 胡雄伟 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第2期254-257,共4页
A novel design of 100GHz-spaced 16channel arrayed-waveguide grating (AWG) based on silica-on-silicon chip is reported.AWG is achieved by adding a Y-branch to the AWG and arranging the input/output channel in a neat ro... A novel design of 100GHz-spaced 16channel arrayed-waveguide grating (AWG) based on silica-on-silicon chip is reported.AWG is achieved by adding a Y-branch to the AWG and arranging the input/output channel in a neat row,so the whole configuration can be aligned and packaged using only one fiber-array.This configuration can decrease the device’s size,enlarge the minimum radius of curvature,save time on polishing and alignment,and reduce the chip’s fabrication cost. 展开更多
关键词 optical planar waveguide phased arrays wavelength division multiplexing
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Femtosecond laser direct writing of flexibly configured waveguide geometries in optical crystals:fabrication and application 被引量:44
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作者 Yuechen Jia Shixiang Wang Feng Chen 《Opto-Electronic Advances》 2020年第10期1-12,共12页
Optical waveguides are far more than mere connecting elements in integrated optical systems and circuits.Benefiting from their high optical confinement and miniaturized footprints,waveguide structures established base... Optical waveguides are far more than mere connecting elements in integrated optical systems and circuits.Benefiting from their high optical confinement and miniaturized footprints,waveguide structures established based on crystalline materials,particularly,are opening exciting possibilities and opportunities in photonic chips by facilitating their on-chip integration with different functionalities and highly compact photonic circuits.Femtosecond-laser-direct writing(FsLDW),as a true three-dimensional(3D)micromachining and microfabrication technology,allows rapid prototyping of on-demand waveguide geometries inside transparent materials via localized material modification.The success of FsLDW lies not only in its unsurpassed aptitude for realizing 3D devices but also in its remarkable material-independence that enables cross-platform solutions.This review emphasizes FsLDW fabrication of waveguide structures with 3D layouts in dielectric crystals.Their functionalities as passive and active photonic devices are also demonstrated and discussed. 展开更多
关键词 femtosecond laser micromachining optical waveguide dielectric crystals photonic devices
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Multifunctional flexible optical waveguide sensor: on the bioinspiration for ultrasensitive sensors development 被引量:9
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作者 Arnaldo Leal-Junior Leticia Avellar +3 位作者 Vitorino Biazi M.Simone Soares Anselmo Frizera Carlos Marques 《Opto-Electronic Advances》 SCIE EI CAS 2022年第10期1-11,共11页
This paper presents the development of a bioinspired multifunctional flexible optical sensor(BioMFOS)as an ultrasensitive tool for force(intensity and location)and orientation sensing.The sensor structure is bioinspir... This paper presents the development of a bioinspired multifunctional flexible optical sensor(BioMFOS)as an ultrasensitive tool for force(intensity and location)and orientation sensing.The sensor structure is bioinspired in orb webs,which are multifunctional devices for prey capturing and vibration transmission.The multifunctional feature of the structure is achieved by using transparent resins that present both mechanical and optical properties for structural integrity and strain/deflection transmission as well as the optical signal transmission properties with core/cladding configuration of a waveguide.In this case,photocurable and polydimethylsiloxane(PDMS)resins are used for the core and cladding,respectively.The optical transmission,tensile tests,and dynamic mechanical analysis are performed in the resins and show the possibility of light transmission at the visible wavelength range in conjunction with high flexibility and a dynamic range up to 150 Hz,suitable for wearable applications.The BioMFOS has small dimensions(around 2 cm)and lightweight(0.8 g),making it suitable for wearable application and clothing integration.Characterization tests are performed in the structure by means of applying forces at different locations of the structure.The results show an ultra-high sensitivity and resolution,where forces in theμN range can be detected and the location of the applied force can also be detected with a sub-millimeter spatial resolution.Then,the BioMFOS is tested on the orientation detection in 3D plane,where a correlation coefficient higher than 0.9 is obtained when compared with a gold-standard inertial measurement unit(IMU).Furthermore,the device also shows its capabilities on the movement analysis and classification in two protocols:finger position detection(with the BioMFOS positioned on the top of the hand)and trunk orientation assessment(with the sensor integrated on the clothing).In both cases,the sensor is able of classifying the movement,especially when analyzed in conjunction with preprocessing and clustering techniques.As another wearable application,the respiratory rate is successfully estimated with the BioMFOS integrated into the clothing.Thus,the proposed multifunctional device opens new avenues for novel bioinspired photonic devices and can be used in many applications of biomedical,biomechanics,and micro/nanotechnology. 展开更多
关键词 optical sensors optical waveguides bioinspired design multifunctional structures wearable sensors
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Cyclodextrin Polymer Films Optical Waveguide Sensor for Volatile Organic Gas Detection 被引量:6
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作者 YASIN Patime YIMIT Abliz +1 位作者 RAHMAN Ebeyla NIZAMIDIN Patima 《Chemical Research in Chinese Universities》 SCIE CAS CSCD 2012年第4期682-685,共4页
A sensitive optical waveguide(OWG) sensor which can be used to detect volatile organic compounds(VOCs) was presented.The sensing device(element) was fabricated by means of the immobilization of polyvinyl pyrroli... A sensitive optical waveguide(OWG) sensor which can be used to detect volatile organic compounds(VOCs) was presented.The sensing device(element) was fabricated by means of the immobilization of polyvinyl pyrrolidone(PVP)-cyclodextrin(CD) composite film over a single-mode potassium ion exchanged glass OWG via spin-coating method.The sensor shows higher response to styrene gas than to other VOCs and displays a linear response to styrene gas in a range of 1―1000 μL/L. 展开更多
关键词 Optical waveguide gas sensor CYCLODEXTRIN Volatile organic compound
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Gain-assisted indented plasmonic waveguide for low-threshold nanolaser applications 被引量:3
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作者 刘杰涛 许斌宗 +2 位作者 张晶 蔡利康 宋国峰 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第10期424-428,共5页
A subwavelength plasmonic indented waveguide with an active InGaAsP core is proposed.The characteristics of the gap plasmon mode and gain required for lossless propagation are investigated and analyzed by the finite e... A subwavelength plasmonic indented waveguide with an active InGaAsP core is proposed.The characteristics of the gap plasmon mode and gain required for lossless propagation are investigated and analyzed by the finite element method.We numerically calculate the normalized mode areas and percentages of energy confined in InGaAsP and metal for plasmonic nanolaser applications.It is shown that the indentation of the sidewalls has an optimal value for which the lasing threshold gain is minimal.The structure could enable low-threshold subwavelength lasing and applications for optoelectronic integrated circuits. 展开更多
关键词 optical waveguide nanolasers surface plasmon GAIN
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Propagation properties of a modified surface plasmonic waveguide with an arc slot 被引量:3
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作者 薛文瑞 郭亚楠 张文梅 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第6期2529-2534,共6页
We introduce a modified surface plasmonic waveguide with an arc slot. The dependences of distribution of energy flux density, effective index, propagation length and mode area of the symmetric mode supported by this w... We introduce a modified surface plasmonic waveguide with an arc slot. The dependences of distribution of energy flux density, effective index, propagation length and mode area of the symmetric mode supported by this waveguide on geometrical parameters and working wavelength are analysed by using the finite-difference frequency-domain (FDFD) method. Results show that the energy flux density distributes mainly in four corners which are formed by two arcs, and the closer to the corners it is, the stronger the energy flux density will be. The effective index, the propagation length and the mode area are influenced by geometrical parameters, including the width, the thickness and the arc radius of the surface plasmonic waveguide, as well as the working wavelength. It has been shown that the surface plasmonic waveguide with an arc slot has better propagation properties than the surface plasmonic waveguide with a straight slot. This work may be helpful for applying the slot surface plasmonic waveguide to integrated photonics. 展开更多
关键词 surface plasmons optical waveguides
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Rational self-assembly of polygonal organic microcrystals for shape-dependent multi-directional 2D optical waveguides 被引量:1
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作者 Chao-Fei Xu Yue Yu +3 位作者 Qiang Lv Chang-Cun Yan Xue-Dong Wang Liang-Sheng Liao 《Chinese Chemical Letters》 SCIE CAS CSCD 2022年第6期3255-3258,共4页
Micro-nano-level photonic waveguide regulation is essential for future on-chip photonic integrated systems and is still of great challenges.We report a molecular design strategy,changing the position of the methyl sub... Micro-nano-level photonic waveguide regulation is essential for future on-chip photonic integrated systems and is still of great challenges.We report a molecular design strategy,changing the position of the methyl substituent makes the arrangement of the three isomer molecules different in their respective crystals.Based on this strategy,three sheet-like crystals with different polygonal morphologies were prepared via solution self-assembly approach.The in-depth optical measurements demonstrated that these three microsheet crystals have different 2D optical waveguide performances related to the shapes.Our work provides a feasible design strategy and material preparation method for realizing precise 2D optical waveguide modulation,which lays the foundation for complex photonic integrated systems in the future. 展开更多
关键词 2D optical waveguide Polygonal organic microcrystals Optical waveguide modulation Precise self-assembly Molecular design
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Automated visual position detection and adjustment for optical waveguide chips and optical fiber arrays 被引量:1
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作者 郑煜 开小超 +1 位作者 段吉安 李白冰 《Journal of Central South University》 SCIE EI CAS CSCD 2015年第10期3868-3875,共8页
The alignment coupling between optical waveguide chips and optical fiber arrays is the basis of the alignment coupling of planar optical waveguide devices, and the precise position detection with angle and spacing adj... The alignment coupling between optical waveguide chips and optical fiber arrays is the basis of the alignment coupling of planar optical waveguide devices, and the precise position detection with angle and spacing adjustments is one of the key steps of alignment coupling. A methodology for position detection, and angle and spacing adjustment was proposed for optical waveguide chips and optical fiber arrays based on machine vision. The experimental results show angle detection precision levels higher than 0.05°, line detection precision levels higher than 0.1 μm, and detection time less than 2 s. Therefore, the system developed herein meets the precise requirements necessary for position detection, and angle and spacing adjustments for optical waveguide chips and optical fiber arrays. 展开更多
关键词 planar optical waveguide alignment coupling automated alignment machine vision
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Optimization design of optical waveguide in mach-zehnder electro-optical polymer modulator 被引量:1
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作者 高原 张晓霞 廖进昆 《Optoelectronics Letters》 EI 2011年第1期1-4,共4页
In order to reduce transmission loss of the optical waveguide in Mach-Zehnder (M-Z) electro-optical (EO) polymer modulator,the basic iterative formula of semi-vector finite-difference beam propagation method (FD-BPM) ... In order to reduce transmission loss of the optical waveguide in Mach-Zehnder (M-Z) electro-optical (EO) polymer modulator,the basic iterative formula of semi-vector finite-difference beam propagation method (FD-BPM) is obtained from the scalar wave equation. The transition waveguide is combined with S-type bend branch waveguide for the M-Z EO modulator in the branch waveguide. The effects of structure parameters such as ridge width,length of the branch waveguide and interferometer spacing on the transmission loss are systematically studied by using the semi-vector FD-BPM method. The structure is optimized as an S-sine bend branch waveguide,with rib width w=7μm,length of branch waveguide L=1200μm and interferometer spacing G=22 μm. The results show that the optimized structure can reduce transmission loss to 0.083 dB,which have a certain reference value to the design of optical waveguide in M-Z polymer modulator. 展开更多
关键词 Beam propagation method Dense wavelength division multiplexing Finite difference method INTERFEROMETERS Light propagation Light transmission Optical waveguides Optimization Polymers Wave transmission waveguides
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Research and Design of Ge_(0.6)Si_(0.4)/Si Strained-layer Superlattice Planar Optical Waveguide 被引量:1
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作者 LIU Shu ping (Taiyuan Heavy Machinery Institute, Taiyuan 030024, CHN) 《Semiconductor Photonics and Technology》 CAS 2002年第1期19-21,共3页
Calculation shown that the refraction index of Ge_0.6Si_0.4/Sistrained-layer superlattice n≈3.64, when L_w=9 nm and L_b=24 nm. Analgorithm of numerical iteration for effective refraction index isemployed to obtain di... Calculation shown that the refraction index of Ge_0.6Si_0.4/Sistrained-layer superlattice n≈3.64, when L_w=9 nm and L_b=24 nm. Analgorithm of numerical iteration for effective refraction index isemployed to obtain different effective refraction indexes atdifferent thickness (L). As a result, the thickness ofGe_0.6Si_0.4/Si strained-layer superlattice optical waveguide, L≤363nm, can be determined, which is very important for designingwaveguide devices. An optical waveguide can be made into a nanometerdevice by using Ge_0.6 Si_0.4/Si strained-layer superlattice. 展开更多
关键词 Ge_0.6Si_0.4/Si SUPERLATTICE optical waveguide effective refractionindex
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Compact surface plasmon amplifier in nonlinear hybrid waveguide 被引量:1
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作者 王曙曙 王丹青 +2 位作者 胡小鹏 李涛 祝世宁 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第7期373-377,共5页
Surface plasmon polariton(SPP), a sub-wavelength surface wave promising for photonic integration, always suffers from the large metallic loss that seriously restricts its practical application. Here, we propose a co... Surface plasmon polariton(SPP), a sub-wavelength surface wave promising for photonic integration, always suffers from the large metallic loss that seriously restricts its practical application. Here, we propose a compact SPP amplifier based on a nonlinear hybrid waveguide(a combination of silver, LiNbO3, and SiO2), where a couple of Bragg gratings are introduced in the waveguide to construct a cavity. This special waveguide is demonstrated to support a highly localized SPP-like hybrid mode and a low loss waveguide-like hybrid mode. To provide a large nonlinear gain, a pumping wave input from the LiNbO3 waveguide is designed to resonate inside the cavity and satisfy the cavity phase matching to fulfill the optical parametric amplification(OPA) of the SPP signal. Proper periods of gratings and the cavity length are chosen to satisfy the impedance matching condition to ensure the high input efficiency of the pump wave from the outside into the cavity. In theoretical calculations, this device demonstrates a high performance in a very compact scheme(~3.32 μm) and a much lower pumping power for OPA compared with single-pass pumping. To obtain a comprehensive insight into this cavity OPA, the influences of the pumping power, cavity length, and the initial phase are discussed in detail. 展开更多
关键词 surface plasmons optical parametric amplification waveguides
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Mode-field half-widths of Gaussian approximation for the fundamental mode of two kinds of optical waveguides
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作者 李连煌 郭福源 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第6期2398-2403,共6页
This paper analyzes the characteristic of matching efficiency between the fundamental mode of two kinds of optical waveguides and its Gaussian approximate field.Then, it presents a new method where the mode-field half... This paper analyzes the characteristic of matching efficiency between the fundamental mode of two kinds of optical waveguides and its Gaussian approximate field.Then, it presents a new method where the mode-field half-width of Caussian approximation for the fundamental mode should be defined according to the maximal matching efficiency method. The relationship between the mode-field half-width of the Gaussian approximate field obtained from the maximal matching efficiency and normalized frequency is studied; furthermore, two formulas of mode-field half-widths as a function of normalized frequency are proposed. 展开更多
关键词 mode-field half-width Gaussian approximation normalized frequency optical waveguide
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Single-photon scattering and quantum entanglement of two giant atoms with azimuthal angle differences in a waveguide system
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作者 黄劲松 黄红武 +1 位作者 李艳玲 徐中辉 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第5期337-342,共6页
We theoretically investigate coherent scattering of single photons and quantum entanglement of two giant atoms with azimuthal angle differences in a waveguide system.Using the real-space Hamiltonian,analytical express... We theoretically investigate coherent scattering of single photons and quantum entanglement of two giant atoms with azimuthal angle differences in a waveguide system.Using the real-space Hamiltonian,analytical expressions are derived for the transport spectra scattered by these two giant atoms with four azimuthal angles.Fano-like resonance can be exhibited in the scattering spectra by adjusting the azimuthal angle difference.High concurrence of the entangled state for two atoms can be implemented in a wide angle-difference range,and the entanglement of the atomic states can be switched on/off by modulating the additional azimuthal angle differences from the giant atoms.This suggests a novel handle to effectively control the single-photon scattering and quantum entanglement. 展开更多
关键词 quantum transport quantum entanglement scattering theory optical waveguide
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Design and fabrication of GeAsSeS chalcogenide waveguides with thermal annealing
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作者 Limeng Zhang Jinbo Chen +4 位作者 Jierong Gu Yixiao Gao Xiang Shen Yimin Chen Tiefeng Xu 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第3期320-325,共6页
We reported a chalcogenide glass-based rib waveguide fabricated using photolithography and dry etching method. A commercial software(COMSOL Multiphysics) was used to optimize the waveguide structure and the distributi... We reported a chalcogenide glass-based rib waveguide fabricated using photolithography and dry etching method. A commercial software(COMSOL Multiphysics) was used to optimize the waveguide structure and the distribution of the fundamental modes in the waveguide based on the complete vector finite component. We further employed thermal annealing to optimize the surface and sidewalls of the rib waveguides. It was found that the optimal annealing temperature for Ge As Se S films is 220℃, and the roughness of the films could be significantly reduced by annealing. The zero-dispersion wavelength(ZDW) could be shifted to a short wavelength around ~2.1 μm via waveguide structural optimization, which promotes supercontinuum generation with a short wavelength pump laser source. The insertion loss of the waveguides with cross-sectional areas of 4.0 μm×3.5 μm and 6.0 μm×3.5 μm was measured using lens fiber and the cut-back method. The propagation loss of the 220℃ annealed waveguides could be as low as 1.9 d B/cm at 1550 nm. 展开更多
关键词 chalcogenide film dispersion engineering optical waveguide thermal annealing
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Effects of electron beam lithography process parameters on structure of silicon optical waveguide based on SOI
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作者 ZHENG Yu GAO Piao-piao +2 位作者 TANG Xin LIU Jian-zhe DUAN Ji-an 《Journal of Central South University》 SCIE EI CAS CSCD 2022年第10期3335-3345,共11页
Electron beam lithography(EBL) is a key technology in the fabrication of nanoscale silicon optical waveguide. The influence of exposure dose, the main process parameter of EBL, on the structure profile of poly-methyl ... Electron beam lithography(EBL) is a key technology in the fabrication of nanoscale silicon optical waveguide. The influence of exposure dose, the main process parameter of EBL, on the structure profile of poly-methyl methacrylate(PMMA) after development was studied using a silicon on insulator(SOI) wafer with 220 nm top silicon as the substrate. The relationship between exposure dose and structure pattern width after development was analyzed according to the measurement results. The optimum exposure dose of 220 μC/cm^(2) was found to obtain a final structure consistent with the designed mask value through subsequent processes. At the same time, according to the image segmentation curve tracking technology, the contour extraction process of the dose test results was carried out, and the relationship among mask design value, exposure dose and two-dimensional roughness of boundary contour was analyzed, which can provide reference for the subsequent electron beam lithography of the same substrate material. 展开更多
关键词 silicon optical waveguide electron beam lithography exposure dose ROUGHNESS
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