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GRADIENT SURFACE PLY MODEL OF SH WAVE PROPAGATION IN SAW SENSORS 被引量:3
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作者 梁伟 沈亚鹏 《Acta Mechanica Sinica》 SCIE EI CAS CSCD 1999年第2期155-163,共9页
Investigation of the propagation of the wave in SAW sensors is a basis for the research and design of the sensors. With the advance of the sensor, both the effect of environment on the surface ply and the geometry of ... Investigation of the propagation of the wave in SAW sensors is a basis for the research and design of the sensors. With the advance of the sensor, both the effect of environment on the surface ply and the geometry of waveguide are complicated. To consider the complication, a model with gradient surface ply and multilayer waveguide of SH wave propagation in sensor is proposed. The equation of wave velocity is derived by a transfer matrix method. Through the equation, the function of wave velocity increment via the change of parameters in the surface ply is obtained. The effect of the inhomogeneity on the function is also studied. Finally, some influencing factors of the behavior of the sensor are discussed. 展开更多
关键词 saw sensor gradient materials PIEZOELECTRICITY SH wave
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LiTaO_(3)/SiO_(2)/Poly-Si/Si衬底SAW谐振器高阶模态抑制
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作者 周增毅 帅垚 +3 位作者 吴传贵 彭斌 潘忻强 张万里 《压电与声光》 北大核心 2026年第1期6-11,共6页
通过优化Si的晶体取向,将Si相对于LiTaO_(3)单晶薄膜进行面内旋转,可抑制LiTaO_(3)/SiO_(2)/poly-Si/Si(LTOI)衬底SAW谐振器中高阶模态。通过(110)Si、(100)Si、(111)Si体波声速曲线与主模声速Vmain、高阶模态声速V_(p-h)的对比分析,可... 通过优化Si的晶体取向,将Si相对于LiTaO_(3)单晶薄膜进行面内旋转,可抑制LiTaO_(3)/SiO_(2)/poly-Si/Si(LTOI)衬底SAW谐振器中高阶模态。通过(110)Si、(100)Si、(111)Si体波声速曲线与主模声速Vmain、高阶模态声速V_(p-h)的对比分析,可知当(110)Si面内旋转角度a110=90°/160°/270°/340°时,Si衬底水平剪切体声波声速V_(SH)和垂直剪切体声波声速V_(SV)同时达到较小的值,高阶模态杂波声速V_(p-h)>V_(SH),V_(p-h)>V_(SV),高阶模态杂波的能量辐射到Si衬底中发生泄露,从而达到抑制高阶模态的目的。仿真和流片实验表明,对于使用逆时针旋转270°的(110)Si的LTOI衬底SAW谐振器,其仿真、流片实验的阻抗曲线均未观察到高阶模态杂散响应。 展开更多
关键词 高阶模态抑制 声表面波谐振器 声表面波(saw) LTOI Si的晶体取向
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Temperature sensor based on polymer thin film optical waveguide
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作者 王龙德 张彤 +2 位作者 张晓阳 李若舟 汪鲁宁 《Journal of Southeast University(English Edition)》 EI CAS 2013年第2期152-157,共6页
Based on attenuated total reflection (ATR) and thermo-optic effect, the polymeric thin film planar optical waveguide is used as the temperature sensor, and the factors influencing the sensitivity of the temperature ... Based on attenuated total reflection (ATR) and thermo-optic effect, the polymeric thin film planar optical waveguide is used as the temperature sensor, and the factors influencing the sensitivity of the temperature sensor are comprehensively analyzed. Combined with theoretical analysis and experimental investigation, the sensitivity of the temperature sensor is related to the thicknesses of the upper cladding layer, the waveguide layer, the optical loss of the polymer material and the guided wave modes. The results show that the slope value about reflectivity and temperature, which stands for the sensitivity of the polymer thin film temperature sensor, is associated with the waveguide film thickness and the guided wave modes, and the slope value is the highest in the zero reflectance of a certain transverse electric (TE) mode. To improve the sensitivity of the temperature sensor, the sensor's working incident light exterior angle α should be chosen under a certain TE mode with the reflectivity to be zero. This temperature sensor is characterized by high sensitivity and simple structure and it is easily fabricated. 展开更多
关键词 temperature sensor planar optical waveguide guided wave mode thermo-optic effect prism coupling
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Dynamic compensation and its application of shock wave pressure sensor 被引量:4
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作者 夏永乐 翟永 《Journal of Measurement Science and Instrumentation》 CAS CSCD 2016年第1期48-53,共6页
In order to correct the test error caused by the dynamic characteristics of pressure sensor and avoid the influence of the error of sensor's dynamic model on compensation results,a dynamic compensation method of the ... In order to correct the test error caused by the dynamic characteristics of pressure sensor and avoid the influence of the error of sensor's dynamic model on compensation results,a dynamic compensation method of the pressure sensor is presented,which is based on quantum-behaved particle swarm optimization(QPSO)algorithm and the mean square error(MSE).By using this method,the inverse model of the sensor is built and optimized and then the coefficients of the optimal compensator are got.This method is verified by the dynamic calibration with shock tube and the dynamic characteristics of the sensor before and after compensation are analyzed in time domain and frequency domain.The results show that the working bandwidth of the sensor is extended effectively.This method can reduce dynamic measuring error and improve test accuracy in actual measurement experiments. 展开更多
关键词 pressure sensor dynamic compensation quantum-behaved particle swarm optimization(QPSO) shock wave test band expansion
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Effect of sensor quantity on measurement accuracy of log inner defects by using stress wave 被引量:10
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作者 WANG Li-hai XU Hua-dong ZHOU Ci-lin LI Li YANG Xue-chun 《Journal of Forestry Research》 SCIE CAS CSCD 2007年第3期221-225,共5页
Wood nondestructive testing (NDT) is one of the high efficient methods in utilizing wood. This paper explained the principle of log defect testing by using stress wave, and analyzed the effects of sensor quantity on... Wood nondestructive testing (NDT) is one of the high efficient methods in utilizing wood. This paper explained the principle of log defect testing by using stress wave, and analyzed the effects of sensor quantity on defect testing results by using stress wave in terms of image fitting degree and error rate. The results showed that for logs with diameter ranging from 20 to 40 cm, at least 12 sensors were needed to meet the requirement which ensure a high testing accuracy of roughly 90% of fitness with 0.1 of error rate. And 10 sensors were recommended to judge the possible locations of defects and 6 sensors were sufficient to decide whether there were defects or not. 展开更多
关键词 sensor quantity Log defect testing Stress wave Image fitting degree
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Transparent ZnO/glass surface acoustic wave based high performance ultraviolet light sensors 被引量:2
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作者 王文博 谷航 +4 位作者 何兴理 轩伟鹏 陈金凯 汪小知 骆季奎 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第5期563-566,共4页
Surface acoustic wave (SAW) resonators are a type of ultraviolet (UV) light sensors with high sensitivity, and they have been extensively studied. Transparent SAW devices are very useful and can be developed into ... Surface acoustic wave (SAW) resonators are a type of ultraviolet (UV) light sensors with high sensitivity, and they have been extensively studied. Transparent SAW devices are very useful and can be developed into various sensors and microfluidics for sensing/monitoring and lab-on-chip applications. We report the fabrication of high sensitivity SAW UV sensors based on piezoelectric (PE) ZnO thin films deposited on glass substrates. The sensors were fabricated and their performances against the post-deposition annealing condition were investigated. It was found that the UV-light sensitivity is improved by more than one order of magnitude after annealing. The frequency response increases significantly and the response becomes much faster. The optimized devices also show a small temperature coefficient of frequency and excellent repeatability and stability, demonstrating its potential for UV-light sensing application. 展开更多
关键词 surface acoustic wave ultraviolet sensor ZNO thermal annealing
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Possibility of the Application of the Ultra-long Electromagnetic Wave Remote Sensor to Marine Geological Exploration 被引量:6
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作者 HOU Guiting QIAN Xianglin +1 位作者 WANG Shuyuan SUN Jing 《Acta Geologica Sinica(English Edition)》 SCIE CAS CSCD 2000年第2期391-393,共3页
The ultra-long electromagnetic wave remote sensing technique developed by Peking University is one of new future techniques, which can detect the submarine geological information from the depth of 20 to 10000 m below ... The ultra-long electromagnetic wave remote sensing technique developed by Peking University is one of new future techniques, which can detect the submarine geological information from the depth of 20 to 10000 m below the surface by receiving natural ultra-long electromagnetic waves (n Hz to n 100 Hz). The new remote sensor is composed of three parts: a main instrument with a portable computer, an antenna with an amplifier and an external power. 展开更多
关键词 ultra-long electromagnetic wave new remote sensor lithologic interface submarine information
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Viscoelastic Analysis of a Surface Acoustic Wave Gas Sensor Coated by a New Deposition Technique 被引量:4
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作者 Wen Wang Shi-tang He Yong Pan 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 北大核心 2006年第1期47-53,共7页
An analysis of the response of surface acoustic wave sensors coated with polymer film based on new coating deposition (self-assemble and molecularly imprinted technology) is described and the response formulas are h... An analysis of the response of surface acoustic wave sensors coated with polymer film based on new coating deposition (self-assemble and molecularly imprinted technology) is described and the response formulas are hence deduced. Using the real part of shear modulus, the polymer can be classified into three types: glassy film, glassy-rubbery film and rubbery film, Experimental results show that the attenuation response is in better consistence with the simulation than in Martin's theory, but the velocity response does not accord with the calculation exactly. Maybe it is influenced by the experimental methods and environment. In addition, simulations of gas sorption for polymer films are performed. As for glassy film, the SAW sensor response increases with increasing fihn thickness, and the relationship between the sensor response and the concentration of gas is pretty linear, while as for glassy-rubbery flint and rubbery film, the relationship between the sensor sensitivity anti concentration of gas is very complicated. The ultimately calculated results indicate that the relationship between the sensor response and frequency is not always linear due to the viscoelastic prooerties of the polymer. 展开更多
关键词 Surface acoustic wave Gas sensor POLYMER Viscoelastic property
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Hydrogen and Ozone SAW Based Gas Sensors with RF Magnetron Sputtered InO_x and Electron Beam Evaporated SiN_y 被引量:1
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作者 A.C.Fechete A.Wisitsora-at +3 位作者 W.Wlodarskil K.Kalantar-zadeh S.Kandasamy A.S.Holland 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2006年第A03期206-209,共4页
Layered Surface Acoustic Wave (SAW) devices with an InO_x/SiN_u/36°YX LiTaO_3 structure were investigated for sensing low concentrations of hydrogen (H_2) and ozone (O_3) at different operating temperatures.The s... Layered Surface Acoustic Wave (SAW) devices with an InO_x/SiN_u/36°YX LiTaO_3 structure were investigated for sensing low concentrations of hydrogen (H_2) and ozone (O_3) at different operating temperatures.The sensor consists of a 1μm thick silicon nitride (SiN_y) intermediate layer deposited by electron beam evaporation on a 36°Y-cut X-propagating piezoelectric lithium tantalate (LiTaO_3) substrate and a 100 nm thin indium oxide (InO_x) sensing layer deposited by R.F.magnetron sputtering.The device fabrication is described and the performance of the sensor is analyzed in terms of response magnitude as a function of operating temperature.Large frequency shifts of 360 kHz for 600μg/g of H_2 and 92 kHz for 40 ng/g O_3 were recorded.In addition,the surface morphology of the deposited films were investigated by Atomic Force Microscopy (AFM) and the chemical composition by X-Ray Photoelectron Spectroscopy (XPS) to correlate gas-sensing behavior to structural characteristics of the thin film. 展开更多
关键词 saw gas sensors E-beam evaporated SiN_y InO_x O3 H2
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Organic semiconductors-coated polyacrylonitrile(PAN) electrospun nanofibrous mats for highly sensitive chemosensors via evanescent-wave guiding effect 被引量:4
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作者 Kang-Yi Hua Chang-Min Deng +4 位作者 Chao He Li-Qi Shi De-Feng Zhu Qing-Guo He Jian-Gong Cheng 《Chinese Chemical Letters》 SCIE CAS CSCD 2013年第7期643-646,共4页
We report the first use of organic semiconductors (OSCs)-coated PAN nanofibrous mats as highly responsive fluorescence quenching-based chemosensors for 2,4,6-trinitrotoluene (TNT) and H2O2 detection in vapor phase... We report the first use of organic semiconductors (OSCs)-coated PAN nanofibrous mats as highly responsive fluorescence quenching-based chemosensors for 2,4,6-trinitrotoluene (TNT) and H2O2 detection in vapor phase. Conjugated polymers, poly(triphenylaminealt-biphenylene vinylene) (TPA- PBPV), and small organic molecules, l-horonic-ester pyrene and 1,6-bisboron-ester pyrene, were coated onto the nanofibers fabricated by electrospinning. By introducing the nanofibers structure, a 9-fold fluorescence intensity enhancement and a 14-fold sensitivity enhancement were achieved, which could be attributed to its high area-to-volume ratio, excellent gas permeability, and more importantly, the evanescent-wave effect occurred once the diameters of the fibers were small enough. Since the organic semiconductors coated onto the nanofibrous mats could be replaced by other functional materials, the nanofibers-enhanced detection strategies could be extended to more general domains including chemical and environmental detection. 展开更多
关键词 Electrospinning Nanofiber Evanescent wave sensor Vapor
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Piezoelectric Actuator/Sensor Wave Propagation Based Nondestructive Active Monitoring Method of Concrete Structures 被引量:5
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作者 朱劲松 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2011年第3期541-547,共7页
In order to monitor the basic mechanical properties and interior damage of concrete structures,the piezoelectric actuator/sensor based wave propagation method was investigated experimentally in the laboratory using a ... In order to monitor the basic mechanical properties and interior damage of concrete structures,the piezoelectric actuator/sensor based wave propagation method was investigated experimentally in the laboratory using a specifically designed test setup.The energy attenuation of stress waves was measured by the relative index between the output voltage of sensors and the excitation voltage at the actuator.Based on the experimental results of concrete cube and cylinder specimens,the effect of excitation frequencies,excitation amplitude,wave propagation paths and the curing age on the output signals of sensors are evaluated.The results show that the relative voltage attenuation coefficient RVAC is an effective indicator for measuring the attenuation of stress waves through the interior of concrete. 展开更多
关键词 piezoceramics actuator/sensor wave propagation method non-destructive evaluation (NDE) active monitoring concrete
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Optimization of an Underwater Wireless Sensor Network Architecture with Wave Glider as a Mobile Gateway 被引量:2
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作者 Tatiana A.Fedorova Vladimir A.Ryzhov +1 位作者 Nikolay N.Semenov Shaharin A.Sulaiman 《Journal of Marine Science and Application》 CSCD 2022年第2期179-196,共18页
This paper presents an original probabilistic model of a hybrid underwater wireless sensor network(UWSN),which includes a network of stationary sensors placed on the seabed and a mobile gateway.The mobile gateway is a... This paper presents an original probabilistic model of a hybrid underwater wireless sensor network(UWSN),which includes a network of stationary sensors placed on the seabed and a mobile gateway.The mobile gateway is a wave glider that collects data from the underwater network segment and retransmits it to the processing center.The authors consider the joint problem of optimal localization of stationary network nodes and the corresponding model for bypassing reference nodes by a wave glider.The optimality of the network is evaluated according to the criteria of energy efficiency and reliability.The influence of various physical and technical parameters of the network on its energy efficiency and on the lifespan of sensor nodes is analyzed.The analysis is carried out for networks of various scales,depending on the localization of stationary nodes and the model of bypassing the network with a wave glider.As a model example,the simulation of the functional characteristics of the network for a given size of the water area is carried out.It is shown that in the case of a medium-sized water area,the model of“bypassing the perimeter”by a wave glider is practically feasible,energy efficient and reliable for hourly data measurements.In the case of a large water area,the cluster bypass model becomes more efficient. 展开更多
关键词 Underwater wireless sensor network(UWSN) wave glider(WG) sensor network architecture Mobile gateway Hydroacoustic communication
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Wireless and batteryless SAW sensors,a promising solution for harsh environments 被引量:4
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作者 H.M'Jahed T.Aubert +1 位作者 G.Prieur O.Elmazria 《电子测量与仪器学报》 CSCD 2011年第7期582-590,共9页
In this paper,general principle of the Surface Acoustic Wave(SAW) sensor in wired and wireless con-figurations will be developed and a review of recent works concerning the field of high temperature applications will ... In this paper,general principle of the Surface Acoustic Wave(SAW) sensor in wired and wireless con-figurations will be developed and a review of recent works concerning the field of high temperature applications will be presented.The first part will be devoted to aspects of data transmission and processing.Both configurations of SAW de-vice,delay line and resonator,will be discussed as well as the remote interrogation techniques used to collect and to proc-ess signal.The second part will be devoted to the material aspects.Indeed,knowing that the conventional piezoelectric substrates such as quartz or lithium niobate cannot be used at high temperature,the choice of the material constituting the SAW device(substrate & electrodes) is one of the challenges to face.We will focus our discussion on the Langasite,the current reference for high temperature applications,and on the AlN/Sapphire structure,the very promising alternative for application where the use of high frequency is required. 展开更多
关键词 摘要 编辑部 编辑工作 读者 作者
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Surface Acoustic Wave Humidity Sensors Based on(1120) ZnO Piezoelectric Films Sputtered on R-Sapphire Substrates 被引量:3
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作者 王艳 张淑仪 +2 位作者 范理 水修基 杨跃涛 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第8期123-126,共4页
ZnO films on R-sapphire substrates are prepared and characterized by x-ray diffraction and scanning electron microscopy, which indicate that the thin films are well crystallized with (1120) texture. Love wave and Ra... ZnO films on R-sapphire substrates are prepared and characterized by x-ray diffraction and scanning electron microscopy, which indicate that the thin films are well crystallized with (1120) texture. Love wave and Rayleigh wave are used for fabrications of humidity sensors, which are excited in [1100] and [0001] directions of the (1120) ZnO piezoelectric films, respectively. The experimental results show that both kinds of sensors have good humidity response and repeatability, and the performances of the Love wave sensors are better than those of the Rayleigh wave sensors at room temperature. Moreover, the theoretical calculations of the mass sensitivity of the sensors are a/so carried out and the calculated results are in good agreement with the experimental measurements. 展开更多
关键词 ZnO Piezoelectric Films Sputtered on R-Sapphire Substrates Surface Acoustic wave Humidity sensors Based on
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Modeling of wireless SAW temperature sensor and associated antenna 被引量:10
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作者 Laurent ALLIES Eloi BLAMPAIN +2 位作者 Hamid M'JAHED Gerard PRIEUR Omar ELMAZRIA 《Instrumentation》 2014年第1期8-14,共7页
Surface acoustic wave(SAW)resonator used as wireless sensor was characterized and the parameters of its MBVD(Modified Butterworth-Van Dyke)model were extracted versus temperature.The extracted parameters lead toevalua... Surface acoustic wave(SAW)resonator used as wireless sensor was characterized and the parameters of its MBVD(Modified Butterworth-Van Dyke)model were extracted versus temperature.The extracted parameters lead toevaluate the resonator performancesin terms of Temperature coefficient of frequency(TCF)and quality factor(Q).An antenna was then associated with the SAW resonator and the entire system has been characterized and modeled.The good agreement experiment-simulation allows to define the optimum operating conditions of the wireless sensor. 展开更多
关键词 saw resonator MBVD model Wireless sensor
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Effect of Fluid Electrical Property Changes on Surface Transverse Wave Sensors
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作者 Chao Zhang Wenyan Wang +2 位作者 Yonggui Dong Yan Liu Guanping Feng 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2006年第A03期514-518,共5页
A fluid sensor based on the surface transverse wave (STW) delay line on ST-cut quartz has been developed and tested in a large number of fluids with different viscosity and permittivity levels.Influence of fluid mech... A fluid sensor based on the surface transverse wave (STW) delay line on ST-cut quartz has been developed and tested in a large number of fluids with different viscosity and permittivity levels.Influence of fluid mechanical and electrical properties on the sensor's response has been determined and the sensor's performance has been compared with a bulk acoustic wave (BAW) viscosity sensor.The result shows that the viscosity sensitivity of the developed STW sensor represented by the signal to noise ratio is lower than that of a 5 MHz BAW sensor.Applications of the sensor in detecting the quality of industrial fluids are discussed. 展开更多
关键词 surface transverse wave surface acoustic wave fluid sensor electrical property
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Strain transfer mechanism of passive wireless surface acoustic wave torque sensors using shear lag theory
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作者 张运涛 徐春广 +2 位作者 潘勤学 刘婧 李喜朋 《Journal of Beijing Institute of Technology》 EI CAS 2011年第2期221-226,共6页
A shear-lag theory was developed to investigate the strain transfer from the metal substrate to the surface acoustic wave (SAW) resonator through a bonding layer. A three-layer model of host structure-adhesive layer... A shear-lag theory was developed to investigate the strain transfer from the metal substrate to the surface acoustic wave (SAW) resonator through a bonding layer. A three-layer model of host structure-adhesive layer-resonator layer was established. The strain transfer was theoretically analyzed, and the main factors impacting the SAW sensor measurement were studied. The relationship between the sensor response and the individual effect of all these factors under static loads was discussed. Results showed that better accuracy could be achieved with increase in the adhesive stiffness or resonator length, or decrease in the adhesive thickness. The values of the strain transfer rate calculated from the analytical model agreed well with that from the available experiment data. 展开更多
关键词 passive wireless surface acoustic wave saw TORQUE strain transfer shear lag
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Development of A Surface Acoustic Wave LB Membrane Immunity Sensor
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作者 沈杰 苏娜 +1 位作者 任恕 周先明 《Journal of Huazhong University of Science and Technology(Medical Sciences)》 SCIE CAS 2000年第1期20-22,共3页
Summary: A new kind of biosensor for immunology was developed by ultrasonic technique and LB membrane. A double delay-line resonator was made by using ST-cut quartz crystal with working frequency of 149. 7 MHz. Then a... Summary: A new kind of biosensor for immunology was developed by ultrasonic technique and LB membrane. A double delay-line resonator was made by using ST-cut quartz crystal with working frequency of 149. 7 MHz. Then a layer of LB membrane was covered on it. When anti-IgM anti- body of various concentrations was added to it, the sensor can be used to detect IgM antigen. The biosensor was highly sensitive, small and light. The experimental results showed that the working frequency change of the sensor was proportional to the concentration of antibody with its dilution ratio between 1: 10000 and 1: 100. It was also first observed that the frequency curve of the sen- sor resulting from the reaction of IgM antigen and antibody undulated in the experiment. 展开更多
关键词 sensor IMMUNOLOGY surface acoustic wave LB membrane
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Study on the Surface Acoustic Wave Sensor with Self-Assembly Imprinted Film of Calixarene Derivatives to Detect Organophosphorus Compounds
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作者 Bing-Qing Cao Qi-Bin Huang Yong Pan 《American Journal of Analytical Chemistry》 2012年第9期664-668,共5页
The molecularly imprinted technology and the self-assembly technique were used together on the calixarene surface acoustic wave (SAW) chemical sensors to detect organophosphorus compounds. 25-(thioalkyl-alkoxy)-p-tert... The molecularly imprinted technology and the self-assembly technique were used together on the calixarene surface acoustic wave (SAW) chemical sensors to detect organophosphorus compounds. 25-(thioalkyl-alkoxy)-p-tertbutylcalix[4] arene with self-assembled monolayer character was the sensitive coating of the sensors. The sensors had a special response to organophosphorus compounds and the response frequency shift of this sensor to organophosphorus compounds in 0.1 mg/m3 was 350 Hz. The response frequency increased linearly with the increase of the concentration of DMMP in the range from 0.1 to 0.6 mg/m3. The possible explanation of the interaction between the coatings and organophosphorus compounds was discussed. 展开更多
关键词 CALIXARENE SELF-ASSEMBLY Molecular Imprinted saw sensor DMMP Detection
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Design and Analysis of a Novel Surface Acoustic Wave Micro Position Sensor
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作者 Kai Yang Zhigang Li +1 位作者 Liwei Shang Weidong Yi 《Journal of Electromagnetic Analysis and Applications》 2011年第11期439-442,共4页
In order to realize the micromation of position sensors, and extend the application area into micro scale, this paper designs a novel micro position sensor, Mace SAW (Surface Acoustic Wave) position sensor, which can ... In order to realize the micromation of position sensors, and extend the application area into micro scale, this paper designs a novel micro position sensor, Mace SAW (Surface Acoustic Wave) position sensor, which can be fabricated with MEMS technology. Its key components are IDTs (Interdigital Transducers) and reflective grooves. The structure and working principles of the sensor are introduced theoretically, and the manufacture process is then put forward. 展开更多
关键词 saw POSITION sensor REFLECTIVE GROOVES
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