Wide-range vacuum sensors(0.1–10^(5) Pa)are crucial for a variety of applications,particularly in semiconductor equipment.However,existing sensors often face a trade-off between measurement range and accuracy,with so...Wide-range vacuum sensors(0.1–10^(5) Pa)are crucial for a variety of applications,particularly in semiconductor equipment.However,existing sensors often face a trade-off between measurement range and accuracy,with some offering a wide range at the expense of low accuracy,and others providing high accuracy within a limited range.This restricts their applicability in advanced technologies.The primary challenge lies in the sensitivity constraints at medium vacuum,the accuracy limitations at low vacuum,and the dependence of gas types.In this study,a new paradigm of high-performance wide-range MEMS diaphragm-based vacuum sensor is proposed,which is inherently small volume and independent of gas types.The sensor measures the vacuum pressure based on a two degree of freedom weak-coupling resonator,which operates in two distinct modes.In the range from 0.3 Pa to 10^(3) Pa,it works in mode-localized mode,where amplitude ratio serves as the output to enhance sensitivity and resolution.For pressure ranging from 10^(3) Pa to 10^(5) Pa,it works in traditional resonance mode,with frequency serving as the output to achieve high accuracy.Experimental results demonstrate that the proposed sensor outperforms conventional vacuum sensors.展开更多
基金supported in part by the National Key R&D Program of China under Grant 2023YFC2410600in part by the National Natural Science Foundation of China under Grant 62301536 and Grant 62121003+2 种基金in part by the Youth Innovation Promotion Association CAS Grant 2023134 and Grant 2022121in part by the Instrument Research and Development of CAS under Grant PTYQ2024BJ0009in part by Science and Technology Program of Shandong Province under Grant 2023TSGC0211.
文摘Wide-range vacuum sensors(0.1–10^(5) Pa)are crucial for a variety of applications,particularly in semiconductor equipment.However,existing sensors often face a trade-off between measurement range and accuracy,with some offering a wide range at the expense of low accuracy,and others providing high accuracy within a limited range.This restricts their applicability in advanced technologies.The primary challenge lies in the sensitivity constraints at medium vacuum,the accuracy limitations at low vacuum,and the dependence of gas types.In this study,a new paradigm of high-performance wide-range MEMS diaphragm-based vacuum sensor is proposed,which is inherently small volume and independent of gas types.The sensor measures the vacuum pressure based on a two degree of freedom weak-coupling resonator,which operates in two distinct modes.In the range from 0.3 Pa to 10^(3) Pa,it works in mode-localized mode,where amplitude ratio serves as the output to enhance sensitivity and resolution.For pressure ranging from 10^(3) Pa to 10^(5) Pa,it works in traditional resonance mode,with frequency serving as the output to achieve high accuracy.Experimental results demonstrate that the proposed sensor outperforms conventional vacuum sensors.
