This review examines the state-of-the-art in spatial manipulation of ultrafast laser processing using dynamic light modulators,with a particular focus on liquid crystal-based systems.We discuss phase modulation strate...This review examines the state-of-the-art in spatial manipulation of ultrafast laser processing using dynamic light modulators,with a particular focus on liquid crystal-based systems.We discuss phase modulation strategies and highlight the current limitations and challenges in surface and bulk processing.Specifically,we emphasize the delicate balance between high-fidelity beam shaping and energy efficiency,both critical for surface and bulk processing applications.Given the inherent physical limitations of spatial light modulators such as spatial resolution,fill factor,and phase modulation range.We explore techniques developed to bridge the gap between desired intensity distributions and actual experimental beam profiles.We present various laser light modulation technologies and the main algorithmic strategies for obtaining modulation patterns.The paper includes application examples across a wide range of fields,from surgery to surface structuring,cutting,bulk photo-inscription of optical functions,and additive manufacturing,highlighting the significant enhancements in processing speed and precision due to spatial beam shaping.The diverse applications and the technological limitations underscore the need for adapted modulation pattern calculation methods.We discuss several advancements addressing these challenges,involving both experimental and algorithmic developments,including the recent incorporation of artificial intelligence.Additionally,we cover recent progress in phase and pulse front control based on spatial modulators,which introduces an extra control parameter for light excitation with high potential for achieving more controlled processing outcomes.展开更多
Aqueous zinc-ion batteries provide a most promising alternative to the existing lithium-ion batteries due to their high theoretical capacity,intrinsic safety,and low cost.However,commercializing aqueous zinc-ion batte...Aqueous zinc-ion batteries provide a most promising alternative to the existing lithium-ion batteries due to their high theoretical capacity,intrinsic safety,and low cost.However,commercializing aqueous zinc-ion batteries suffer from dendritic growth and side reactions on the surface of metallic zinc,resulting in poor reversibility.To overcome this critical challenge,here,we report a one-step ultrafast laser processing method for fabricating three-dimensional micro-/nanostructures on zinc anodes to optimize zinc nucleation and deposition processes.It is demonstrated that the three-dimensional micro-/nanostructure with increased specific surface area significantly reduces nucleation overpotential,as well as preferentially absorbs zinc ions to prevent dendritic protuberances and corrosion.As a result,the presence of threedimensional micro-/nanostructures on the zinc metal delivers stable zinc plating/stripping beyond 2500 h(2 mA cm-2/1 mAh cm-2)in symmetric cells,a high Coulombic efficiency(99.71%)in half cells,and moreover an improved capacity retention(71.8%)is also observed in full cells.Equally intriguingly,the pouch cell with three-dimensional micro-/nanostructures can operate across various bending states without severely compromising performance.This work provides an effective strategy to construct ultrafine and high-precision three-dimensional micro-/nanostructures achieving highperformance zinc metal anodes and is expected to be of immediate benefit to other metal-based electrodes.展开更多
The inspection of silicon carbide(SiC)wafer quality has attracted considerable attention because internal microstructure defects are challenging to detect in production lines.Expensive and destructive methods are usua...The inspection of silicon carbide(SiC)wafer quality has attracted considerable attention because internal microstructure defects are challenging to detect in production lines.Expensive and destructive methods are usually employed to detect dislocations and stacking faults inside SiC wafers.Fast optical methods to monitor internal defects are in demand.In this work,an ultrafast pulse laser was used to address this issue.The formation of surface nanostructures under the ultrafast laser processing of SiC wafers was explored systematically.This study discovered the origins of a typical surface nanostructure to the subsurface dislocation structure,called low-energy laser-induced nano straight lines(LLINSs),which forms under low-energy ultrafast pulse laser irradiation on a SiC wafer.The specific laser fluence ranges to form grooves,laser-induced periodic surface structures,LLINSs,and their hybrids were identified.The formation of LLINSs required an ultrafast laser(pulse width 280 fs)energy density less than 0.224 J/mm2,whereas that of pure LLINSs required a small range of 0.1–0.08 J/mm2 for SiC.LLINSs and their surrounding microstructures were observed using scanning transmission electron microscopy to identify their origin,which is related to the subsurface dislocation structure.Molecular dynamics analysis revealed that the subsurface defect area has a high energy level,which can facilitate amorphous transformation under the irradiation of an ultrafast laser,and the amorphous area had a tendency to evolve into LLINSs.Thus,subsurface lattice defects can be detected optically.This work opens new ways to detect the subsurface quality of semiconductor wafers in a green and sustainable manner.展开更多
Precision sculpting of glass with defined surface microstructures is vital due to the miniaturization and integration of glass-based devices,while it is still challenging as the high brittleness of glass.We here creat...Precision sculpting of glass with defined surface microstructures is vital due to the miniaturization and integration of glass-based devices,while it is still challenging as the high brittleness of glass.We here create a three-dimensional multifocus laser for glass micro-sculpting through a beam-shaping technology based on the superposition of lens and grating phase diagrams.The multi-focus laser modification in tandem with chemical etching enables the fabrication of glass microstructures with highly adjustable profiles.Refractive-index-induced deviations are migrated via algorithm correction to ensure multi-focus positional accuracy.Energy un-uniformity due to equidistant laser spots arrangement is eliminated through their coordinate randomization following the target profiles.Finally,uniform laser spots with a proper point-topoint distance create connected cracks inside glass,enabling efficient etching with enhanced rates along the modified profile and the fabrication of surface microstructures.We demonstrate diverse groove arrays with profiles of trapezoid,semicircle,and triangle,revealing low roughness around 1.3μm,a high depth-width ratio of 3:1,and depth up to 300μm,which underscore broad applications such as fiber packaging.展开更多
基金supported by the French ANRT agence nationale de la recherche technologique under the CIFRE conventions industrielles de formation par la recherche framework.
文摘This review examines the state-of-the-art in spatial manipulation of ultrafast laser processing using dynamic light modulators,with a particular focus on liquid crystal-based systems.We discuss phase modulation strategies and highlight the current limitations and challenges in surface and bulk processing.Specifically,we emphasize the delicate balance between high-fidelity beam shaping and energy efficiency,both critical for surface and bulk processing applications.Given the inherent physical limitations of spatial light modulators such as spatial resolution,fill factor,and phase modulation range.We explore techniques developed to bridge the gap between desired intensity distributions and actual experimental beam profiles.We present various laser light modulation technologies and the main algorithmic strategies for obtaining modulation patterns.The paper includes application examples across a wide range of fields,from surgery to surface structuring,cutting,bulk photo-inscription of optical functions,and additive manufacturing,highlighting the significant enhancements in processing speed and precision due to spatial beam shaping.The diverse applications and the technological limitations underscore the need for adapted modulation pattern calculation methods.We discuss several advancements addressing these challenges,involving both experimental and algorithmic developments,including the recent incorporation of artificial intelligence.Additionally,we cover recent progress in phase and pulse front control based on spatial modulators,which introduces an extra control parameter for light excitation with high potential for achieving more controlled processing outcomes.
基金support of the National Key Research and Development Program(No.2023YFB4605102)National Natural Science Foundation of China(No.52105437)+2 种基金Heilongjiang Touyan Team(No.HITTY-20190036)Shanghai Aerospace Science and Technology Innovation Fund(No.SAST2021-067)National Research Foundation of Korea(NRF)grant funded by the Korea government(MSIT)(Grant RS-2023-00235596,RS-2023-00243788).
文摘Aqueous zinc-ion batteries provide a most promising alternative to the existing lithium-ion batteries due to their high theoretical capacity,intrinsic safety,and low cost.However,commercializing aqueous zinc-ion batteries suffer from dendritic growth and side reactions on the surface of metallic zinc,resulting in poor reversibility.To overcome this critical challenge,here,we report a one-step ultrafast laser processing method for fabricating three-dimensional micro-/nanostructures on zinc anodes to optimize zinc nucleation and deposition processes.It is demonstrated that the three-dimensional micro-/nanostructure with increased specific surface area significantly reduces nucleation overpotential,as well as preferentially absorbs zinc ions to prevent dendritic protuberances and corrosion.As a result,the presence of threedimensional micro-/nanostructures on the zinc metal delivers stable zinc plating/stripping beyond 2500 h(2 mA cm-2/1 mAh cm-2)in symmetric cells,a high Coulombic efficiency(99.71%)in half cells,and moreover an improved capacity retention(71.8%)is also observed in full cells.Equally intriguingly,the pouch cell with three-dimensional micro-/nanostructures can operate across various bending states without severely compromising performance.This work provides an effective strategy to construct ultrafine and high-precision three-dimensional micro-/nanostructures achieving highperformance zinc metal anodes and is expected to be of immediate benefit to other metal-based electrodes.
基金financially supported by the National Key Research and Development Program of China(grant No.2018YFB1107701)。
文摘The inspection of silicon carbide(SiC)wafer quality has attracted considerable attention because internal microstructure defects are challenging to detect in production lines.Expensive and destructive methods are usually employed to detect dislocations and stacking faults inside SiC wafers.Fast optical methods to monitor internal defects are in demand.In this work,an ultrafast pulse laser was used to address this issue.The formation of surface nanostructures under the ultrafast laser processing of SiC wafers was explored systematically.This study discovered the origins of a typical surface nanostructure to the subsurface dislocation structure,called low-energy laser-induced nano straight lines(LLINSs),which forms under low-energy ultrafast pulse laser irradiation on a SiC wafer.The specific laser fluence ranges to form grooves,laser-induced periodic surface structures,LLINSs,and their hybrids were identified.The formation of LLINSs required an ultrafast laser(pulse width 280 fs)energy density less than 0.224 J/mm2,whereas that of pure LLINSs required a small range of 0.1–0.08 J/mm2 for SiC.LLINSs and their surrounding microstructures were observed using scanning transmission electron microscopy to identify their origin,which is related to the subsurface dislocation structure.Molecular dynamics analysis revealed that the subsurface defect area has a high energy level,which can facilitate amorphous transformation under the irradiation of an ultrafast laser,and the amorphous area had a tendency to evolve into LLINSs.Thus,subsurface lattice defects can be detected optically.This work opens new ways to detect the subsurface quality of semiconductor wafers in a green and sustainable manner.
基金National Natural Science Foundation of China(Grant No.52375438)Shenzhen Science and Technology Programs(Grant No.JCYJ20220818100408019,JSGG20220831101401003)Jiangyin-SUSTech Innovation Fund.
文摘Precision sculpting of glass with defined surface microstructures is vital due to the miniaturization and integration of glass-based devices,while it is still challenging as the high brittleness of glass.We here create a three-dimensional multifocus laser for glass micro-sculpting through a beam-shaping technology based on the superposition of lens and grating phase diagrams.The multi-focus laser modification in tandem with chemical etching enables the fabrication of glass microstructures with highly adjustable profiles.Refractive-index-induced deviations are migrated via algorithm correction to ensure multi-focus positional accuracy.Energy un-uniformity due to equidistant laser spots arrangement is eliminated through their coordinate randomization following the target profiles.Finally,uniform laser spots with a proper point-topoint distance create connected cracks inside glass,enabling efficient etching with enhanced rates along the modified profile and the fabrication of surface microstructures.We demonstrate diverse groove arrays with profiles of trapezoid,semicircle,and triangle,revealing low roughness around 1.3μm,a high depth-width ratio of 3:1,and depth up to 300μm,which underscore broad applications such as fiber packaging.
