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Pulse-driven MEMS gas sensor combined with machine learning for selective gas identification
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作者 Wenxin Luo Fa Dai +2 位作者 Yijun Liu Xin Wang Mingjie Li 《Microsystems & Nanoengineering》 2025年第2期413-424,共12页
The sensing and identification of trace gases are essential for ensuring chemical safety and protecting human health.This study introduces a low-power electronic nose system that utilizes a single sensor driven by rep... The sensing and identification of trace gases are essential for ensuring chemical safety and protecting human health.This study introduces a low-power electronic nose system that utilizes a single sensor driven by repeated pulsed power inputs,offering a viable alternative to conventional sensor array-based methods.The sensor’s compact design and suspended architecture facilitate a rapid thermal response,effectively decoupling the influences of temperature,physisorption,and charge exchange on the conductivity of the sensing material.This mechanism generates distinct gas sensing responses,characterized by alternating dual responses within a single time period.The unique dynamics of the dual signals,which vary with gas type and concentration,enable precise identification of multiple gas species using machine learning(ML)algorithms.Microfabricated through wafer-level batch processing,our innovative electronic nose system holds significant potential for battery-powered mobile devices and IoT-based monitoring applications. 展开更多
关键词 machine learning low power identification trace gases chemical safety pulsed power inputsoffering MEMS selective gas identification pulse driven
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