To understand the deformation and removal mechanism of material on nano-scale at ultralow loads,a systemic study on AFM micro/nano-machining on single crystal ailicon is conducted. The results indicate that AFM nano- ...To understand the deformation and removal mechanism of material on nano-scale at ultralow loads,a systemic study on AFM micro/nano-machining on single crystal ailicon is conducted. The results indicate that AFM nano- machining has a precisely dimensional controllability and a good surface quality on nanometer scale.A SEM is adopted to observe nano-machined region and chips,the results indicate that the material removal mechanisms change with the applied normal load. An XPS is used to analyze the changes of chemical composition inside and outside the nano-machined region respectively.The nano-indentation which is conducted with the same AFM diamond tip on the machined region shows a big discrepancy compared with that on the macro-scale. The calculated results show higher nano-hardness and elastic modulus than normal values .This phenomenon on be regarded as the indentation size effect(ISE).展开更多
Adhesive forces commonly exhibit a monotonic increase or a maximum with increasing relative humidity. However, anomalous behavior has been reported. Here, a numerical model of adhesive forces, comprised mainly of capi...Adhesive forces commonly exhibit a monotonic increase or a maximum with increasing relative humidity. However, anomalous behavior has been reported. Here, a numerical model of adhesive forces, comprised mainly of capillary and van der Waals forces, between a tip and a surface is established. It is described by a power law that considers the geometry, the liquid bridge wetting radius, the contact angle, and the separation distance. Capillary forces （sum of surface tension and Laplace pressure） and van der Waals forces are calculated. The latter cannot be neglected in the adhesion even at high humidity. Decrease in adhesion with increasing relative humidity can be attributed to a blunt tip shape, which is validated by experimental data. Specifically, the decrease in adhesion is attributed primarily to a transition from a rounded to a blunt tip shape. Structuring objects at the micro- or nanoscale can either increase or decrease adhesion as a function of relative humidity. This has a wide range of applications in robotic manipulation and can provide a better understanding of adhesion mechanisms in atomic force microscopy in ambient air.展开更多
基金This project is supported by National Natural ScienceFoundation of China (No.59835180) and Science andTechnology Foundatio
文摘To understand the deformation and removal mechanism of material on nano-scale at ultralow loads,a systemic study on AFM micro/nano-machining on single crystal ailicon is conducted. The results indicate that AFM nano- machining has a precisely dimensional controllability and a good surface quality on nanometer scale.A SEM is adopted to observe nano-machined region and chips,the results indicate that the material removal mechanisms change with the applied normal load. An XPS is used to analyze the changes of chemical composition inside and outside the nano-machined region respectively.The nano-indentation which is conducted with the same AFM diamond tip on the machined region shows a big discrepancy compared with that on the macro-scale. The calculated results show higher nano-hardness and elastic modulus than normal values .This phenomenon on be regarded as the indentation size effect(ISE).
文摘Adhesive forces commonly exhibit a monotonic increase or a maximum with increasing relative humidity. However, anomalous behavior has been reported. Here, a numerical model of adhesive forces, comprised mainly of capillary and van der Waals forces, between a tip and a surface is established. It is described by a power law that considers the geometry, the liquid bridge wetting radius, the contact angle, and the separation distance. Capillary forces （sum of surface tension and Laplace pressure） and van der Waals forces are calculated. The latter cannot be neglected in the adhesion even at high humidity. Decrease in adhesion with increasing relative humidity can be attributed to a blunt tip shape, which is validated by experimental data. Specifically, the decrease in adhesion is attributed primarily to a transition from a rounded to a blunt tip shape. Structuring objects at the micro- or nanoscale can either increase or decrease adhesion as a function of relative humidity. This has a wide range of applications in robotic manipulation and can provide a better understanding of adhesion mechanisms in atomic force microscopy in ambient air.
