Silicon-based MEMS resonators have shown promising potential to replace quartz crystal resonators in many fields,especially in realizing precise timing.However,the large temperature-dependent properties of single-crys...Silicon-based MEMS resonators have shown promising potential to replace quartz crystal resonators in many fields,especially in realizing precise timing.However,the large temperature-dependent properties of single-crystal silicon render the MEMS resonators suffer from severe degradation in frequency stability caused by temperature variation,thus hindering the development of silicon-based resonant devices.Although oven-controlled MEMS resonators have been demonstrated to achieve ppb-level frequency stability,the on-chip oven control scheme requires a redesign of the resonator structures or even a change in the manufacturing process,offering little post-fabrication flexibility and limiting its engineering applications.In this work,a nonlinearity-mediated temperature compensation scheme is proposed with the objective of rapidly and precisely controlling the frequency stability of the MEMS resonator.By employing the nonlinear amplitude-frequency dependence of a Duffing resonator to actively suppress the frequency drift after the first stage oven control,the reported MEMS resonator exhibits a frequency stability of±14 ppb.展开更多
基金supported by the National Key R&D Program of China(2022YFB3203600)Shaanxi Qin Chuang Yuan Program for Innovation Team(2023KXJ-108)Key R&D Program of Shaanxi Province(2023GXLH-013).
文摘Silicon-based MEMS resonators have shown promising potential to replace quartz crystal resonators in many fields,especially in realizing precise timing.However,the large temperature-dependent properties of single-crystal silicon render the MEMS resonators suffer from severe degradation in frequency stability caused by temperature variation,thus hindering the development of silicon-based resonant devices.Although oven-controlled MEMS resonators have been demonstrated to achieve ppb-level frequency stability,the on-chip oven control scheme requires a redesign of the resonator structures or even a change in the manufacturing process,offering little post-fabrication flexibility and limiting its engineering applications.In this work,a nonlinearity-mediated temperature compensation scheme is proposed with the objective of rapidly and precisely controlling the frequency stability of the MEMS resonator.By employing the nonlinear amplitude-frequency dependence of a Duffing resonator to actively suppress the frequency drift after the first stage oven control,the reported MEMS resonator exhibits a frequency stability of±14 ppb.
