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Electric-Field-Driven Generative Nanoimprinting for Tilted Metasurface Nanostructures
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作者 Yu Fan Chunhui Wang +6 位作者 Hongmiao Tian Xiaoming Chen Ben QLi Zhaomin Wang Xiangming Li Xiaoliang Chen Jinyou Shao 《Nano-Micro Letters》 2026年第1期290-305,共16页
Tilted metasurface nanostructures,with excellent physical properties and enormous application potential,pose an urgent need for manufacturing methods.Here,electric-field-driven generative-nanoimprinting technique is p... Tilted metasurface nanostructures,with excellent physical properties and enormous application potential,pose an urgent need for manufacturing methods.Here,electric-field-driven generative-nanoimprinting technique is proposed.The electric field applied between the template and the substrate drives the contact,tilting,filling,and holding processes.By accurately controlling the introduced included angle between the flexible template and the substrate,tilted nanostructures with a controllable angle are imprinted onto the substrate,although they are vertical on the template.By flexibly adjusting the electric field intensity and the included angle,large-area uniform-tilted,gradient-tilted,and high-angle-tilted nanostructures are fabricated.In contrast to traditional replication,the morphology of the nanoimprinting structure is extended to customized control.This work provides a cost-effective,efficient,and versatile technology for the fabrication of various large-area tilted metasurface structures.As an illustration,a tilted nanograting with a high coupling efficiency is fabricated and integrated into augmented reality displays,demonstrating superior imaging quality. 展开更多
关键词 Generative nanoimprinting Electric field assistance Tilted metasurface structures Large-area fabrication
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Metalens with tilted structures for high-efficiency focusing at large-angle incidences
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作者 王月 陈晨 +3 位作者 吴圣杰 叶欣 祝世宁 李涛 《Chinese Optics Letters》 SCIE EI CAS CSCD 2024年第5期117-123,共7页
The metalens has attracted remarkable attention due to its ultra-thin and ultra-light characteristics,which indicate great potential for compact imaging.However,the limited efficiency at a large angle incidence severe... The metalens has attracted remarkable attention due to its ultra-thin and ultra-light characteristics,which indicate great potential for compact imaging.However,the limited efficiency at a large angle incidence severely hinders the application of wide-angle focusing and imaging,which is pursued in the fast-developing imaging systems.Therefore,new strategies to improve the lens performance at large incident angles are in demand.In this work,we propose tilted structures for largeangle focusing with improved efficiency.Metalenses based on dynamic phase and geometric phase are designed and systematically characterized by numerical simulations.We show that tilted structures of unit cells significantly improve the lens performance at oblique incidences.In detail,the focusing efficiency of the metalens with tilted structures is increased over 25%at 30°incidence,as well as the modulation transfer function.In addition,we develop a hybrid metalens array achieving highly efficient wide-angle imaging up to 120°.We believe this design provides a feasible route toward wide-field and high-performance imaging applications. 展开更多
关键词 metalenses tilted structures large-angle incidence high efficiency
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