Improving plasma uniformity is a critical issue in the development of large-area radio-frequency(RF)inductively coupled plasma(ICP)sources.In this work,the effects of coil structure and electromagnetic shielding on th...Improving plasma uniformity is a critical issue in the development of large-area radio-frequency(RF)inductively coupled plasma(ICP)sources.In this work,the effects of coil structure and electromagnetic shielding on the spatial distribution and uniformity of the plasma are systematically investigated using a three-dimensional fluid model.The model integrates plasma and electromagnetic field modules to simulate the discharge characteristics of a large-area RF ICP source with dimensions of 100 cm×50 cm.The results reveal that the electron density distribution varies significantly with the coil structure.For the rotating and translating coil structures,the electron density is high at off-axis positions and low at the center.In contrast,the mirror coil structure exhibits a significantly higher electron density at the chamber center,resulting in a high-center and low-edge density distribution.Among the three configurations,the rotating coil structure provides the best plasma uniformity.The incorporation of electromagnetic shielding further improves plasma uniformity,particularly for the mirror coil structure.For the rotating and translating coil structures,the electron density exhibits a saddle-shaped distribution regardless of electromagnetic shielding.However,introducing electromagnetic shielding into the mirror coil structure reduces the electron density at the chamber center and decreases the non-uniformity degree by 18.4%.Overall,the mirror coil structure with electromagnetic shielding achieves the highest uniformity,with an exceptional plasma uniformity of 94%.This work offers valuable insights for the design of large-area ICP sources in advanced plasma processing systems.展开更多
基金supported by the National Natural Science Foundation of China(Grant Nos.12075049 and 11935005)。
文摘Improving plasma uniformity is a critical issue in the development of large-area radio-frequency(RF)inductively coupled plasma(ICP)sources.In this work,the effects of coil structure and electromagnetic shielding on the spatial distribution and uniformity of the plasma are systematically investigated using a three-dimensional fluid model.The model integrates plasma and electromagnetic field modules to simulate the discharge characteristics of a large-area RF ICP source with dimensions of 100 cm×50 cm.The results reveal that the electron density distribution varies significantly with the coil structure.For the rotating and translating coil structures,the electron density is high at off-axis positions and low at the center.In contrast,the mirror coil structure exhibits a significantly higher electron density at the chamber center,resulting in a high-center and low-edge density distribution.Among the three configurations,the rotating coil structure provides the best plasma uniformity.The incorporation of electromagnetic shielding further improves plasma uniformity,particularly for the mirror coil structure.For the rotating and translating coil structures,the electron density exhibits a saddle-shaped distribution regardless of electromagnetic shielding.However,introducing electromagnetic shielding into the mirror coil structure reduces the electron density at the chamber center and decreases the non-uniformity degree by 18.4%.Overall,the mirror coil structure with electromagnetic shielding achieves the highest uniformity,with an exceptional plasma uniformity of 94%.This work offers valuable insights for the design of large-area ICP sources in advanced plasma processing systems.
文摘信息资源在分发共享过程中存在带宽拥塞、内容冗余等问题,播存网络借助"一点对无限点"的物理广播分发共享信息资源,对解决此类问题有独特优势.播存网络采用统一内容标签(uniform content label,UCL)适配用户兴趣和推荐信息资源,用户如何高效地获得自己感兴趣的UCL是播存网络中的关键问题.针对该问题,提出一种播存网络环境下的UCL协同过滤推荐方法(unifying collaborative filtering with popularity and timing,UCF-PT).首先,通过设定一对相似度阈值来计算用户与UCL数据的稀疏情况,根据稀疏情况决定二者对UCL评分的影响权值,并基于二者权值预测用户对UCL的评分,生成推荐结果集.其次,依据UCL热度调整推荐结果集的UCL顺序,从而使热门UCL更容易推荐给用户;最后提出UCL价值衰减函数,保证较新的UCL具备较高的推荐优先级.实验结果表明:与传统推荐方法相比,该方法不仅具有良好的推荐精度,还可保证所推荐UCL的热度与时效性,更适用于在播存网络环境下推荐UCL.
