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Highly sensitive MEMS three-dimensional force sensor for robot-assisted minimally invasive surgery
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作者 Dongsheng LI Aomen LI +3 位作者 Zhongbin ZHANG Tianci JI Kaiyao WANG Huicong LIU 《Science China(Technological Sciences)》 2025年第9期192-201,共10页
Robot-assisted minimally invasive surgery(RMIS)has attracted notable attention because of its numerous advantages over traditional surgery.Nevertheless,the lack of real-time force feedback in RMIS can result in surgic... Robot-assisted minimally invasive surgery(RMIS)has attracted notable attention because of its numerous advantages over traditional surgery.Nevertheless,the lack of real-time force feedback in RMIS can result in surgical errors and damage to delicate tissues.The stringent requirements for the sensitivity and volume of force sensors in RMIS make the design and fabrication of such sensors a considerable challenge.Herein,we present a high-sensitivity three-dimensional(3D)force sensing module consisting of a micro-electro-mechanical piezoresistive sensor chip and a polydimethylsiloxane cap with pyramidal microstructures for force transmission.The sensor chip incorporates four cantilevers with a circular microhole at their fixed ends to concentrate stress in piezoresistive areas;the shape of the microhole was optimized to ensure an appropriate trade-off between high sensitivity and reliability.The proposed 3D force sensor showed more than twice higher sensitivity in the X-,Y-,and Z-axis directions than the sensor based on traditional cantilevers.Furthermore,the proposed sensor exhibited little hysteresis(<1.91%),good stability,and fast response(~30 ms).An artificial neural network was adopted for 3D force decoupling;this network accurately converted resistance changes into 3D forces,showing a prediction error of<2%.Furthermore,the proposed sensor was integrated into a robot to perform various clamping tasks,exhibiting good application potential for RMIS. 展开更多
关键词 3D force sensor high sensitivity MEMS sensor piezoresistive cantilever robot-assisted minimally invasive surgery
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Force and impulse multi-sensor based on flexible gate dielectric field effect transistor
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作者 Chao Tan Junling Lü +3 位作者 Chunchi Zhang Dong Liang Lei Yang Zegao Wang 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS 2025年第1期214-220,共7页
Nowadays,force sensors play an important role in industrial production,electronic information,medical health,and many other fields.Two-dimensional material-based filed effect transistor(2D-FET)sensors are competitive ... Nowadays,force sensors play an important role in industrial production,electronic information,medical health,and many other fields.Two-dimensional material-based filed effect transistor(2D-FET)sensors are competitive with nano-level size,lower power consumption,and accurate response.However,few of them has the capability of impulse detection which is a path function,expressing the cumulative effect of the force on the particle over a period of time.Herein we fabricated the flexible polymethyl methacrylate(PMMA)gate dielectric MoS_(2)-FET for force and impulse sensor application.We systematically investigated the responses of the sensor to constant force and varying forces,and achieved the conversion factors of the drain current signals(I_(ds))to the detected impulse(I).The applied force was detected and recorded by I_(ds)with a low power consumption of~30 nW.The sensitivity of the device can reach~8000%and the 4×1 sensor array is able to detect and locate the normal force applied on it.Moreover,there was almost no performance loss for the device as left in the air for two months. 展开更多
关键词 flexible gate dielectric transistor force sensor impulse sensor force sensor array
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Design and calibration of spoke piezoelectric six-dimensional force/torque sensor for space manipulator 被引量:2
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作者 Yingjun LI Guicong WANG +3 位作者 Shuai ZHANG Yuanqin ZHOU Hongyu LI Zhenguang QI 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2024年第1期218-235,共18页
The large manipulator outside the space cabin is a multi-degree of freedom actuator for space operations.In order to realize the automatic control and flexible operation of the space manipulator,a novel spoke structur... The large manipulator outside the space cabin is a multi-degree of freedom actuator for space operations.In order to realize the automatic control and flexible operation of the space manipulator,a novel spoke structure piezoelectric six-dimensional force/torque sensor with redundancy ability,high stiffness and good decoupling performance is innovatively proposed.Based on the deformation coordination relationship,the redundancy measurement mechanism is revealed.The mathematical models of the sensor with and without branch fault are established respectively.The finite element model is established to verify the feasibility of structure and redundancy measuring principle of the sensor.Depending on the theoretical analysis and simulation analysis,the prototype of the sensor is developed.Static and dynamic calibration experiments are carried out.The actual output voltage signal of the six-dimensional force/torque sensor is collected to establish the equation between the standard input applied load and the actual output voltage signal.Based on ant colony optimized BP algorithm,performance indexes of the sensor with and without branch fault are analyzed respectively.The experimental results show that the spoke piezoelectric sixdimensional force/torque sensor with the eight-point support structure has good accuracy and reliability.Meanwhile,it has strong decoupling characteristic that can effectively shield the coupling between dimensions.The nonlinear errors and maximum interference errors of decoupled data with and without branch faults are less than 1% and 2%,respectively.The natural frequency of the sixdimensional force sensor can reach 2856.45 Hz and has good dynamic characteristics.The research content lays a theoretical and experimental foundation for the design,development and application of the new six-dimensional force/torque sensors with redundancy.Meanwhile,it will significantly improve the research level in this field,and provide a strong guarantee for the smooth implementation of force feedback control of the space station manipulator project. 展开更多
关键词 Decoupling algorithm PIEZOELECTRIC REDUNDANCY Six-dimensional force/torque sensor Space manipulator
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A semi-analytical model and mechanism analysis for force-frequency effect and coefficient of square quartz
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作者 Lixia MA Qiang ZHOU +1 位作者 Lijun YI Ji WANG 《Applied Mathematics and Mechanics(English Edition)》 2025年第6期1089-1106,共18页
This study presents a closed-form solution for central stress,a semi-analytical model,and a modified anisotropic semi-analytical model to efficiently calculate the forcefrequency coefficients(FFCs)of square quartz cry... This study presents a closed-form solution for central stress,a semi-analytical model,and a modified anisotropic semi-analytical model to efficiently calculate the forcefrequency coefficients(FFCs)of square quartz crystal resonators(QCRs)with different side lengths and azimuth angles under eccentrically concentrated and distributed loads.The semi-analytical model is validated by comparisons between the experimental results and the nonlinear finite element method(FEM)simulation results.Based on the semi-analytical model for the FFC and nonlinear FEM simulations,the FFC variations of square QCRs under external loads and the related mechanisms are investigated.Among the initial stresses caused by external loads,the central stress parallel to the xcrystallographic axis is the primary factor influencing the FFC of quartz.Our findings can provide practical tools for calculating the FFC,and help the design and development of square quartz force sensors. 展开更多
关键词 square quartz quartz crystal resonator(QCR) force-frequency effect eccentrically concentrated load distributed load force sensor
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Recent advances and future prospects in tactile sensors for normal and shear force detection,decoupling,and applications
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作者 Jinrong Huang Yuchen Guo +3 位作者 Yongchang Jiang Feiyu Wang Lijia Pan Yi Shi 《Journal of Semiconductors》 EI CAS CSCD 2024年第12期17-31,共15页
Human skin,through its complex mechanoreceptor system,possesses the exceptional ability to finely perceive and dif-ferentiate multimodal mechanical stimuli,forming the biological foundation for dexterous manipulation,... Human skin,through its complex mechanoreceptor system,possesses the exceptional ability to finely perceive and dif-ferentiate multimodal mechanical stimuli,forming the biological foundation for dexterous manipulation,environmental explo-ration,and tactile perception.Tactile sensors that emulate this sensory capability,particularly in the detection,decoupling,and application of normal and shear forces,have made significant strides in recent years.This review comprehensively examines the latest research advancements in tactile sensors for normal and shear force sensing,delving into the design and decoupling methods of multi-unit structures,multilayer encapsulation structures,and bionic structures.It analyzes the advantages and disadvantages of various sensing principles,including piezoresistive,capacitive,and self-powered mechanisms,and evalu-ates their application potential in health monitoring,robotics,wearable devices,smart prosthetics,and human-machine interaction.By systematically summarizing current research progress and technical challenges,this review aims to provide forward-looking insights into future research directions,driving the development of electronic skin technology to ultimately achieve tactile perception capabilities comparable to human skin. 展开更多
关键词 tactile sensors shear force force decoupling e-skin
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Limit analysis of roof collapse in tunnels under seepage forces condition with three-dimensional failure mechanism 被引量:10
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作者 覃长兵 孙志彬 梁桥 《Journal of Central South University》 SCIE EI CAS 2013年第8期2314-2322,共9页
The state of roof collapse in tunnels is actually three-dimensional, so constructing a three-dimensional failure collapse mechanism is crucial so as to reflect the realistic collapsing scopes more reasonably. Accordin... The state of roof collapse in tunnels is actually three-dimensional, so constructing a three-dimensional failure collapse mechanism is crucial so as to reflect the realistic collapsing scopes more reasonably. According to Hoek-Brown failure criterion and the upper bound theorem of limit analysis, the solution for describing the shape of roof collapse in circular or rectangular tunnels subjected to seepage forces is derived by virtue of variational calculation. The seepage forces calculated from the gradient of excess pore pressure distribution are taken as external loading in the limit analysis, and it is of great convenience to compute the pore pressure with pore pressure coefficient. Consequently, the effect of seepage forces is taken as a work rate of external force and incorporated into the upper bound limit analysis. The numerical results of collapse dimensions with different rock parameters show great validity and agreement by comparing with the results of that with two-dimensional failure mechanism. 展开更多
关键词 TUNNEL Hoek-Brown criterion three-dimensional collapse mechanism seepage force
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Three-dimensional atomic force microscopy based on tailored cantilever probe with flared tip
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作者 ZHANG Rui WU Sen +3 位作者 XIAO Sha-sha HU Xiao-dong SHI Yu-shu FU Xing 《Journal of Measurement Science and Instrumentation》 CAS CSCD 2020年第4期388-396,共9页
In order to meet the requirements of nondestructive testing of true 3D topography of micro-nano structures,a novel three-dimensional atomic force microscope(3D-AFM)based on flared tip is developed.A high-precision sca... In order to meet the requirements of nondestructive testing of true 3D topography of micro-nano structures,a novel three-dimensional atomic force microscope(3D-AFM)based on flared tip is developed.A high-precision scanning platform is designed to achieve fast servo through moving probe and sample simultaneously,and several combined nanopositioning stages are used to guarantee linearity and orthogonality of displacement.To eliminate the signal deviation caused by AFM-head movement,a traceable optical lever system is designed for cantilever deformation detection.In addition,a method of tailoring the cantilever of commercial probe with flared tip is proposed to reduce the lateral force applied on the tip in measurement.The tailored probe is mounted on the 3D-AFM,and 3D imaging experiments are conducted on different samples by use of adaptive-angle scanning strategy.The results show the roob-mean-square value of the vertical displacement noise(RMS)of the prototype is less than 0.1 nm and the high/width measurement repeatability(peak-to-peak)is less than 2.5 nm. 展开更多
关键词 three-dimensional atomic force microscope(3D-AFM) flared tip SCANNER optical lever vector scanning
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Flexible Tactile Electronic Skin Sensor with 3D Force Detection Based on Porous CNTs/PDMS Nanocomposites 被引量:24
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作者 Xuguang Sun Jianhai Sun +9 位作者 Tong Li Shuaikang Zheng Chunkai Wang Wenshuo Tan Jingong Zhang Chang Liu Tianjun Ma Zhimei Qi Chunxiu Liu Ning Xue 《Nano-Micro Letters》 SCIE EI CAS CSCD 2019年第4期35-48,共14页
Flexible tactile sensors have broad applications in human physiological monitoring,robotic operation and human-machine interaction.However,the research of wearable and flexible tactile sensors with high sensitivity,wi... Flexible tactile sensors have broad applications in human physiological monitoring,robotic operation and human-machine interaction.However,the research of wearable and flexible tactile sensors with high sensitivity,wide sensing range and ability to detect three-dimensional(3D)force is still very challenging.Herein,a flexible tactile electronic skin sensor based on carbon nanotubes(CNTs)/polydimethylsiloxane(PDMS)nanocomposites is presented for 3D contact force detection.The 3D forces were acquired from combination of four specially designed cells in a sensing element.Contributed from the double-sided rough porous structure and specific surface morphology of nanocomposites,the piezoresistive sensor possesses high sensitivity of 12.1 kPa?1 within the range of 600 Pa and 0.68 kPa?1 in the regime exceeding 1 kPa for normal pressure,as well as 59.9 N?1 in the scope of<0.05 N and>2.3 N?1 in the region of<0.6 N for tangential force with ultra-low response time of 3.1 ms.In addition,multi-functional detection in human body monitoring was employed with single sensing cell and the sensor array was integrated into a robotic arm for objects grasping control,indicating the capacities in intelligent robot applications. 展开更多
关键词 Flexible TACTILE sensorS Electronic SKIN Piezoresistive sensorS CNTs/PDMS NANOCOMPOSITES 3D force detection
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Development and Calibration of a Hyperstatic Six-component Force/Torque Sensor 被引量:9
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作者 HOU Yulei YAO Jiantao ZENG Daxing CHEN Jie ZHAO Yongsheng 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2009年第4期505-513,共9页
The six-component force/torque sensor has become one kind of the most important sensors with the ability of measuring all the external forces and torques. A novel hyperstatic six-component force/torque sensor based on... The six-component force/torque sensor has become one kind of the most important sensors with the ability of measuring all the external forces and torques. A novel hyperstatic six-component force/torque sensor based on the Stewart platform structure, which can be used for the force measurement of the robot wrist, is proposed, and its structural optimal design, finite element analysis and calibration experimentation is presented. The characteristic of the sensor structure is analyzed in comparison with the traditional Stewart platform-based sensor. The mathematical expression of the sensor's force mapping matrix is introduced. The condition number and generalized amplifying coefficient defined by singular values of force Jacobian matrix are used to evaluate the performances of isotropy and sensitivity of the sensor respectively. The optimal design of the sensor structure is performed with the objective of achieving high measurement sensitivity and good isotropy. The sensor prototype is fabricated, and the static and dynamic characteristics of the sensor are analyzed with finite element analysis software package ANSYS. The calibration device is manufactured, and the data acquisition and processing system is developed. The theoretical and experimental study of the static calibration of the sensor prototype is carried out. The results of simulation analysis and calibration experimentation prove the feasibility of the hyperstatic sensor structure, and the contents of this paper possess theoretical significance and engineering value for the further research and practical application of the six-component force sensor. 展开更多
关键词 force/torque sensor six-component hyperstatic finite element analysis CALIBRATION
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Three-Dimensional Ocean Sensor Networks:A Survey 被引量:21
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作者 WANG Yu LIU Yingjian GUO Zhongwen 《Journal of Ocean University of China》 SCIE CAS 2012年第4期436-450,共15页
The past decade has seen a growing interest in ocean sensor networks because of their wide applications in marine research,oceanography,ocean monitoring,offshore exploration,and defense or homeland security.Ocean sens... The past decade has seen a growing interest in ocean sensor networks because of their wide applications in marine research,oceanography,ocean monitoring,offshore exploration,and defense or homeland security.Ocean sensor networks are generally formed with various ocean sensors,autonomous underwater vehicles,surface stations,and research vessels.To make ocean sensor network applications viable,efficient communication among all devices and components is crucial.Due to the unique characteristics of underwater acoustic channels and the complex deployment environment in three dimensional(3D) ocean spaces,new efficient and reliable communication and networking protocols are needed in design of ocean sensor networks.In this paper,we aim to provide an overview of the most recent advances in network design principles for 3D ocean sensor networks,with focuses on deployment,localization,topology design,and position-based routing in 3D ocean spaces. 展开更多
关键词 ocean sensor networks underwater sensor networks three-dimensional sensor networks ocean applications 3D de-ployment topology design LOCALIZATION position-based routing
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Force/Moment Isotropy of 8/4-4 Parallel Six-Axis Force Sensor Based on Performance Atlases 被引量:3
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作者 Song Weishan Li Chenggang +3 位作者 Wang Chunming Song Yong Wu Zefeng Rajnathsing Hemant 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI CSCD 2018年第6期1018-1026,共9页
A six-axis force sensor with parallel 8/4-4 structure is introduced and its measurement principle is analyzed.Based on condition numbers of Jacobian matrix spectral norm of the sensor,the relationship between the forc... A six-axis force sensor with parallel 8/4-4 structure is introduced and its measurement principle is analyzed.Based on condition numbers of Jacobian matrix spectral norm of the sensor,the relationship between the force and moment isotropy and some structural parameters is deduced.Orthogonal test methods are used to determine the degree of primary and secondary factors that have significant effect on sensor characteristics.Furthermore,the relationship between each performance index and the structural parameters of the sensor is analyzed by the method of the atlas,which lays a foundation for structural optimization design of the force sensor. 展开更多
关键词 six-axis force sensor JACOBIAN matrix condition number ISOTROPY ORTHOGONAL test indices ATLASES
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Three-dimensional graphene and its composite for gas sensors 被引量:5
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作者 Meng Hao Wen Zeng +1 位作者 Yan-Qiong Li Zhong-Chang Wang 《Rare Metals》 SCIE EI CAS CSCD 2021年第6期1494-1514,共21页
As a two-dimensional(2D)material,graphene shows excellent advantages in the field of gas sensors due to its inherent large specific surface area and unique electrical properties.However,in the practical application of... As a two-dimensional(2D)material,graphene shows excellent advantages in the field of gas sensors due to its inherent large specific surface area and unique electrical properties.However,in the practical application of gas detection,graphene sheet is easy to form irreversible agglomeration and has some limitations such as low sensitivity,long response time and slow recovery speed,which greatly reduce its gas sensing performance.As a gas sensing material,three-dimensional(3D)porous graphene has been extensively studied in recent years owing to its larger specific surface area and stable structure.In order to synthesize graphene with different three-dimensional structures,many methods have been developed.Herein,the synthesis and assembly of three-dimensional graphene and its composites were reviewed,with emphasis on the application of three-dimensional graphene and its composites in the field of gas sensors.The challenges and development prospects of three-dimensional graphene materials in the application of gas sensors were briefly described. 展开更多
关键词 three-dimensional graphene Gas sensor Sensitivity Composites material
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ROBOT'S MOTION ERROR AND ONLINE COMPENSATION BASED ON FORCE SENSOR 被引量:2
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作者 GAN Fangjian LIU Zhengshi +1 位作者 REN Chuansheng ZHANG Ping 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2007年第4期8-11,共4页
Robot's dynamic motion error and on-line compensation based on multi-axis force sensor are dealt with.It is revealed that the reasons of the error are formed and the relations of the error are delivered.A motion equa... Robot's dynamic motion error and on-line compensation based on multi-axis force sensor are dealt with.It is revealed that the reasons of the error are formed and the relations of the error are delivered.A motion equation of robot's termination with the error is established,and then,an error matrix and an error compensation matrix of the motion equation are also defined.An on-line error's compensation method is put forward to decrease the displacement error,which is a degree of millimeter,shown by the result of simulation of PUMA562 robot. 展开更多
关键词 Multi-axis force sensor ROBOT ERROR COMPENSATION
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Optical Fiber Grating Sensor for Force Measurement of Anchor Cable 被引量:2
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作者 JIANG Desheng FU Jinghua +2 位作者 LIU Shengchun SUI Lingfeng FU Rong 《Wuhan University Journal of Natural Sciences》 EI CAS 2006年第3期662-666,共5页
The development of the sensor suitable for measuring large load stress to the anchor cable becomes an important task in bridge construction and maintenance. Therefore, a new type of optical fiber sensor was developed ... The development of the sensor suitable for measuring large load stress to the anchor cable becomes an important task in bridge construction and maintenance. Therefore, a new type of optical fiber sensor was developed in the laboratory - optical fiber grating sensor for force measurement of anchor cable (OFBFMAC). No similar report about this kind of sensor has been found up to now in China and other countries. This sensor is proved to be an effective way of monitoring in processes of anchor cable installation, cable cutting, cable force regulation, etc, with the accurate and repeatable measuring results. Its successful application in the tie bar cable force safety monitoring for Wuhan Qingchuan bridge is a new exploration of optical fiber grating sensing technology in bridge tie bar monitoring system. 展开更多
关键词 new type of optical fiber sensor anchor cable tie bar cable force health condition OFBFMAC
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A novel fully-integrated miniature six-axis force/torque sensor 被引量:5
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作者 王嘉力 Xie Zongwu +2 位作者 Liu Hong Jiang Li Gao Xiaohui 《High Technology Letters》 EI CAS 2006年第3期235-238,共4页
This paper presents a new designed miniature six DOF (degree of freedom) force/torque sensor. This sensor is fully integrated with a micro DSP (digital signal processor), so all the signal conditioning, A/D, decou... This paper presents a new designed miniature six DOF (degree of freedom) force/torque sensor. This sensor is fully integrated with a micro DSP (digital signal processor), so all the signal conditioning, A/D, decoupling, digital-signals serial output are performed in the sensor. Some experimental results are presented to demonstrate the capability of the proposed design. Finally, a neural network was used for decoupling the interacting signals, compared with the conventional method using the inverse matrix, this new method is more accurate. 展开更多
关键词 six-axis force sensor sensing element CALIBRATION neural network
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Modeling of a Smart Nano Force Sensor Using Finite Elements and Neural Networks 被引量:2
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作者 Farid Menacer Abdelmalek Kadr Zohir Dibi 《International Journal of Automation and computing》 EI CSCD 2020年第2期279-291,共13页
The aim of this work is to model and analyze the behavior of a new smart nano force sensor.To do so,the carbon nanotube has been used as a suspended gate of a metal-oxide-semiconductor field-effect transistor(MOSFET).... The aim of this work is to model and analyze the behavior of a new smart nano force sensor.To do so,the carbon nanotube has been used as a suspended gate of a metal-oxide-semiconductor field-effect transistor(MOSFET).The variation of the applied force on the carbon nanotube(CNT)generates a variation of the capacity of the transistor oxide-gate and therefore the variation of the threshold voltage,which allows the MOSFET to become a capacitive nano force sensor.The sensitivity of the nano force sensor can reach 0.12431V/nN.This sensitivity is greater than results in the literature.We have found through this study that the response of the sensor depends strongly on the geometric and physical parameters of the CNT.From the results obtained in this study,it can be seen that the increase in the applied force increases the value of the MOSFET threshold voltage VTh.In this paper,we first used artificial neural networks to faithfully reproduce the response of the nano force sensor model.This neural model is called direct model.Then,secondly,we designed an inverse model called an intelligent sensor which allows linearization of the response of our developed force sensor. 展开更多
关键词 NANO force sensor carbon nanotube(CNT) FINITE elements NEURAL network
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An intraoperative lumbar neurological force monitoring system with high-density flexible pressure sensor array 被引量:3
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作者 Zhang Qi Zhang Xu +4 位作者 Li Caili Liu Jianchao Liu Ming Yuan Fang Chen Hongda 《High Technology Letters》 EI CAS 2020年第4期435-441,共7页
In the surgery of lumbar disc herniation(LDH),the nerve root retractor is used to pull the nerve root to prevent damage.The traditional medical nerve root retractor cannot quantify the force on the nerve root.In order... In the surgery of lumbar disc herniation(LDH),the nerve root retractor is used to pull the nerve root to prevent damage.The traditional medical nerve root retractor cannot quantify the force on the nerve root.In order to improve the nerve root retractor,this paper proposes an intraoperative lumbar neurological force monitoring system.The core module of this system is the improved nerve root retractor equipped with the high density flexible pressure sensor array.The high density microneedle array and multiple pressure detection units are used in the pressure sensor to realise sensitive pressure monitoring in a narrow surgical operation area.The sensing area is 4 mm×17 mm,including 6 detection units.The sensitivity of sensor is 67.30%/N in the range of 0-5 N.This system is used for in vitro animal experiments,which can continuously detect pressure. 展开更多
关键词 nerve root retractor flexible sensor force monitoring lumbar disc herniation(LDH)surgery
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Isotropic Optimization of a Stewart-Type Six-Component Force Sensor 被引量:1
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作者 ZHANG Tao XIAO Xinyi +1 位作者 YANG Dehua WU Changcheng 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI CSCD 2020年第S01期102-108,共7页
This paper presents the isotropic optimization of a Stewart-type six-component force sensor. First,the static model of the sensor is built by the screw theory and the forward isotropy indexes and the inverse isotropy ... This paper presents the isotropic optimization of a Stewart-type six-component force sensor. First,the static model of the sensor is built by the screw theory and the forward isotropy indexes and the inverse isotropy indexes are further presented. Second,a comprehensive evaluation function is established to evaluate the isotropic performance of the sensor. By compromising all the isotropy indexes and solving the extreme value of the function,the sensor optimization process is completed and an optimal solution of a set of sensor structure parameters is obtained. Finally,the design of the components and the assembly of the prototype are established by 3D modeling software Pro-E. The verification of the isotropic performance of the sensor is conducted by the finite element analysis software ANSYS. The results obtained by our research can provide useful reference to the isotropic performance evaluation and structure design of the stewart-type six-component force sensor. 展开更多
关键词 STEWART force sensor ISOTROPY OPTIMIZATION finite element analysis
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Conducting Rubber Force Sensor: Transient Characteristics and Radiation Heating Effect 被引量:1
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作者 Masato Ohmukai Yasushi Kami Ken Ashida 《Journal of Sensor Technology》 2013年第3期36-41,共6页
Compression force sensors are indispensable to tactile sensors in humanoid robots. We are investigating the application of low-cost electrically conducting rubber sheets to force sensors, of which the biggest problem ... Compression force sensors are indispensable to tactile sensors in humanoid robots. We are investigating the application of low-cost electrically conducting rubber sheets to force sensors, of which the biggest problem is its poor reproducibility. We have found that the deposition of aluminum by a vacuum evaporation method shows such an excellent characteristic that the sensor can be used in a wide range under 10.33 N/cm2. In this article, we investigated time response of the sensors and also studied how the radiation heating during the vacuum evaporation process for Al deposition affected their sensing property. We found that the radiation heating induces deterioration from the point of view of standard deviation of the output voltage of the sensors at a transient region. We convince that a low-temperature Al deposition method should be developed to form electrodes on the electrical conducting rubber sensors. 展开更多
关键词 CONDUCTING RUBBER force sensor ELECTRODE VACUUM Deposition RADIATION HEATING
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Electrode for Force Sensor of Conductive Rubber 被引量:1
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作者 Masato Ohmukai Yasushi Kami Ryosuke Matsuura 《Journal of Sensor Technology》 2012年第3期127-131,共5页
Tactile sensors are believed to be a key element in order to realize robotic fingers to catch a fragile object without damage. Force sensitive conductive rubber is a low-cost material and then attractive for the appli... Tactile sensors are believed to be a key element in order to realize robotic fingers to catch a fragile object without damage. Force sensitive conductive rubber is a low-cost material and then attractive for the application to tactile sensors. We have studied the effect of electrodes attached to the rubber sheets. We have tried four kinds of electrodes: vacuum deposited Al, adhesive Cu tape, Al thin film sheet and silver paste. It can be concluded that vacuum deposited Al has the highest potential from the practical point of view;it has the widest dynamic range and good precision at the same time. 展开更多
关键词 CONDUCTIVE RUBBER force sensor Robot FINGER ELECTRODE VACUUM DEPOSITION
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