Microdisplay panels are critical components for metaverse technology.Aiming to achieve high-resolution and full-color microdisplay,we report the photolithographic fabrication of color-converted Micro-quantum dot light...Microdisplay panels are critical components for metaverse technology.Aiming to achieve high-resolution and full-color microdisplay,we report the photolithographic fabrication of color-converted Micro-quantum dot light emitting diodes(QLED)panel by combining blue Micro-QLED electroluminescence(EL)device and red-green quantum dot color converter(QDCC).Pre-patterned templates were firstly photolithographically fabricated and then applied as substrate to fabricate patterned blue Micro-QLED device,achieving an ultra-high pixel resolution up to 6350 pixels per inch(pixel size ranging from 20μm×20μm to 2μm×2μm).Notably,the patterned blue devices achieve a peak external quantum efficiency(EQE)of 7.8%and a maximum brightness of 39,472 cd m^(−2).The patterned red devices achieve a peak EQE of 18%and a maximum brightness of 103,022 cd m^(−2).By integrating a dual-color red and green QDCC arrays on the top of the blue Micro-QLED,a prototype full-color Micro-QLED panel was fabricated,achieving a resolution up to 1184 pixels per inch with a peak EQE 4.8%,and a maximum brightness of 10065 cd m^(−2).The photolithographic fabrication of color-converted Micro-QLED provides an easy-operated method for achieving cost-effective microdisplay panels.展开更多
基金supported by the National Natural Science Foundation of China(U23A20683,H.Z.)the Natural Science Foundation of Beijing Municipality(No.Z210018)+2 种基金Beijing Municipal Science&Technology Commission,Administrative Commission of Zhongguancun Science under Park No.Z231100006023018the National Natural Science Foundation of China(62422501)the National Natural Science Foundation of China(No.52203321)。
文摘Microdisplay panels are critical components for metaverse technology.Aiming to achieve high-resolution and full-color microdisplay,we report the photolithographic fabrication of color-converted Micro-quantum dot light emitting diodes(QLED)panel by combining blue Micro-QLED electroluminescence(EL)device and red-green quantum dot color converter(QDCC).Pre-patterned templates were firstly photolithographically fabricated and then applied as substrate to fabricate patterned blue Micro-QLED device,achieving an ultra-high pixel resolution up to 6350 pixels per inch(pixel size ranging from 20μm×20μm to 2μm×2μm).Notably,the patterned blue devices achieve a peak external quantum efficiency(EQE)of 7.8%and a maximum brightness of 39,472 cd m^(−2).The patterned red devices achieve a peak EQE of 18%and a maximum brightness of 103,022 cd m^(−2).By integrating a dual-color red and green QDCC arrays on the top of the blue Micro-QLED,a prototype full-color Micro-QLED panel was fabricated,achieving a resolution up to 1184 pixels per inch with a peak EQE 4.8%,and a maximum brightness of 10065 cd m^(−2).The photolithographic fabrication of color-converted Micro-QLED provides an easy-operated method for achieving cost-effective microdisplay panels.
