Yiqun Wang1,Kaiyou Liu1,Jue Huang1,Xiaofeng Wang1,3,Keren Dai2,and Zheng You1,31 Department of Precision Instrument,Tsinghua University,Beijing 100084,China 2 School of Mechanical Engineering,Nanjing University of Sci...Yiqun Wang1,Kaiyou Liu1,Jue Huang1,Xiaofeng Wang1,3,Keren Dai2,and Zheng You1,31 Department of Precision Instrument,Tsinghua University,Beijing 100084,China 2 School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China 3 Beijing Advanced Innovation Center for Integrated Circuits,Tsinghua University,Beijing 100084,China.展开更多
文摘Yiqun Wang1,Kaiyou Liu1,Jue Huang1,Xiaofeng Wang1,3,Keren Dai2,and Zheng You1,31 Department of Precision Instrument,Tsinghua University,Beijing 100084,China 2 School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China 3 Beijing Advanced Innovation Center for Integrated Circuits,Tsinghua University,Beijing 100084,China.
