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New Lateral Super Junction MOSFETs with n^+-Floating Layer on High-Resistance Substrate 被引量:2
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作者 段宝兴 张波 李肇基 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第2期166-170,共5页
A new super junction LDMOST structure that suppresses the substrate-assisted depletion effect is designed with an n^+-floating layer embedded in the high-resistance p-type substrate by implanting phosphor or arsenic.... A new super junction LDMOST structure that suppresses the substrate-assisted depletion effect is designed with an n^+-floating layer embedded in the high-resistance p-type substrate by implanting phosphor or arsenic. This effect results from a charge imbalance between the n-type and p-type pillars when the n-type pillars are depleted by p-type substrate. The high electric field around the drain is reduced by the n^+-floating layer due to the REBULF effect,which causes the redistribution of the bulk electric field in the drift region,and thus the substrate supports more biases. The new structure features high breakdown voltage, low on-resistance,and charge balance in the drift region. 展开更多
关键词 super junction LDMOST substrate-assisted depletion n^+-floating layer breakdown voltage
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Realizing High Breakdown Voltage SJ-LDMOS on Bulk Silicon Using a Partial n-Buried Layer 被引量:1
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作者 陈万军 张波 李肇基 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第3期355-360,共6页
A new design concept is proposed to eliminate the substrate-assisted depletion effect that significantly degrades the breakdown voltage (BV) of conventional super junction-LDMOS. The key feature of the new concept i... A new design concept is proposed to eliminate the substrate-assisted depletion effect that significantly degrades the breakdown voltage (BV) of conventional super junction-LDMOS. The key feature of the new concept is that a partial buried layer is implemented which compensates for the charge interaction between the p-substrate and SJ region,realizing high breakdown voltage and low on-resistance. Numerical simulation results indicate that the proposed device features high breakdown voltage,low on-resistance,and reduced sensitivity to doping imbalance in the pillars. In addition, the proposed device is compatible with smart power technology. 展开更多
关键词 super junction LDMOS breakdown voltage substrate-assisted depletion effect
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Binder-free electrodes for advanced potassium-ion batteries:A review 被引量:2
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作者 Wencong Liu Wenyi Liu +4 位作者 Yuqi Jiang Qiuyue Gui Deliang Ba Yuanyuan Li Jinping Liu 《Chinese Chemical Letters》 SCIE CAS CSCD 2021年第4期1299-1308,共10页
Potassium-ion batteries(PIBs)have attracted enormous attention due to the abundance of potassium resources,low cost,fast ionic conductivity of electrolyte and relatively high operating voltage.Despite great effo rts a... Potassium-ion batteries(PIBs)have attracted enormous attention due to the abundance of potassium resources,low cost,fast ionic conductivity of electrolyte and relatively high operating voltage.Despite great effo rts and progress,researches on PIBs are still at the initial stage,especially in the emerging field of flexible and wearable PIBs.The inevitable challenges for PIBs include low reversible capacity,unsatisfactory cycling stability and insufficient energy density,the solution to which mostly relies on designing adva nced electrodes.Binder-free electrodes have emerged as promising electrode architecture for PIBs.Such electrodes avoid the use of insulating binders,which can be designed with various synergistic functional materials to address the aforementioned PIB issues and be endowed with flexibility/wearability.In this review,we mainly summarize the recent progress on binde r-free electrodes for PIBs,with the focus on the methodologies,detailed strategies and functional materials for electrode construction.One strategy for binder-free electrodes is to assemble free-standing architecture with the help of carbon nanotubes(CNTs),graphitic fibers,and other carbon or mechanically robust materials,either alone or in combination.The other effective strategy is current collector substrate-assisted direct growth,including the use of carbon cloth,metal.MXenes and other conductive substrates.Additionally,challenges and research opportunities are put forward at the end as the guidance for future development of binder-free PIB devices. 展开更多
关键词 Binder-free Free-standing electrode substrate-assisted directly grown electrode Potassium-ion battery Flexible device
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Super junction LDMOS with enhanced dielectric layer electric field for high breakdown voltage 被引量:3
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作者 王文廉 张波 李肇基 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第2期28-32,共5页
The lateral super junction (SJ) power devices suffer the substrate-assisted depletion (SAD) effect, which breaks the charge balance of SJ resulting in the low breakdown voltage (BV). A solution based on enhancin... The lateral super junction (SJ) power devices suffer the substrate-assisted depletion (SAD) effect, which breaks the charge balance of SJ resulting in the low breakdown voltage (BV). A solution based on enhancing the electric field of the dielectric buried layer is investigated for improving the BV of super junction LDMOSFET (SJ-LDMOS). High density interface charges enhance the electric field in the buried oxide (BOX) layer to increase the block voltage of BOX, which suppresses the SAD effect to achieve the charge balance of SJ. In order to obtain the linear enhancement of electric field, SO1 SJ-LDMOS with trenched BOX is presented. Because the trenched BOX self-adaptively collects holes according to the variable electric field strength, the approximate linear charge distribution is formed on the surface of the BOX to enhance the electric field according to the need. As a result, the charge balance between N and P pillars of SJ is achieved, which improves the BV of SJ-LDMOS to close that of the idea SJ structure. 展开更多
关键词 super junction LDMOS substrate-assisted depletion effect
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A novel SOI high-voltage SJ-pLDMOS based on self-adaptive charge balance
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作者 吴丽娟 章文通 +1 位作者 张波 李肇基 《Journal of Semiconductors》 EI CAS CSCD 2014年第2期42-46,共5页
A new SOl self-balance (SB) super-junction (S J) pLDMOS with a self-adaptive charge (SAC) layer and its physical model are presented. The SB is an effective way to realize charges balance (CB). The substrate-a... A new SOl self-balance (SB) super-junction (S J) pLDMOS with a self-adaptive charge (SAC) layer and its physical model are presented. The SB is an effective way to realize charges balance (CB). The substrate-assisted depletion (SAD) effect of the lateral SJ is eliminated by the self-adaptive inversion electrons provided by the SAC. At the same time, high concentration dynamic self-adaptive electrons effectively enhance the electric field (EI) of the dielectric buried layer and increase breakdown voltage (BV). E1 = 600 V/μm and BV =- 237 V are obtained by 3D simulation on a 0.375-μm-thick dielectric layer and a 2.5-μm-thick top silicon layer. The optimized structure realizes the specific on resistance (Ron,sp) of 0.01319Ω·cm2, FOM (FOM = BV2/R p) of 4.26 MW/cm2 under a 11 μm length (Ld) drift region. 展开更多
关键词 self-adaptive charge SELF-BALANCE charge balance super-junction substrate-assisted depletion
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