This paper reports a high performance co-oscillating electrochemical vector hydrophone based on integrated microelectrodes with microgrooves.Through theoretical and simulation analysis,the influence of key parameters ...This paper reports a high performance co-oscillating electrochemical vector hydrophone based on integrated microelectrodes with microgrooves.Through theoretical and simulation analysis,the influence of key parameters such as the spacing between anode and cathode,depth of microgrooves and the distribution of vias on the performance of the hydrophone was determined.By using the new microgroove structures,micron-scale anode and cathode spacing was realized and effective cathode areas were greatly enlarged and eventually increased the sensitivities of the hydrophones.Furthermore,a force-balanced negative feedback system was designed to expand the effective working band of the vector hydrophone.The characterization results indicated that the device had~2 times higher original sensitivities and wider-3dB-bandwidth than that of existing devices.The above results show that the vector hydrophone developed in this work has a wide application scenarios in the field of underwater sound detections.展开更多
基金supported in part by the Strategic Priority Research Program(B)of the Chinese Academy of Sciences under Grant XDB1110201in part by the National Natural Science Foundation of China under Grant 62201549,Grant 52335012,and Grant U23A20362+1 种基金in part by Beijing Natural Science Foundation under Grant 4242012in part by the Youth Innovation Promotion Association CAS under Grant 2023134.
文摘This paper reports a high performance co-oscillating electrochemical vector hydrophone based on integrated microelectrodes with microgrooves.Through theoretical and simulation analysis,the influence of key parameters such as the spacing between anode and cathode,depth of microgrooves and the distribution of vias on the performance of the hydrophone was determined.By using the new microgroove structures,micron-scale anode and cathode spacing was realized and effective cathode areas were greatly enlarged and eventually increased the sensitivities of the hydrophones.Furthermore,a force-balanced negative feedback system was designed to expand the effective working band of the vector hydrophone.The characterization results indicated that the device had~2 times higher original sensitivities and wider-3dB-bandwidth than that of existing devices.The above results show that the vector hydrophone developed in this work has a wide application scenarios in the field of underwater sound detections.
