Three-dimensional(3D)printing allows for the construction of complex structures.However,3D-printing vertical structures with a high aspect ratio remains a pending challenge,especially when a high lateral resolution is...Three-dimensional(3D)printing allows for the construction of complex structures.However,3D-printing vertical structures with a high aspect ratio remains a pending challenge,especially when a high lateral resolution is required.Here,to address this challenge,we propose and demonstrate micro-3D sculptured metastructures with deep trenches of 1:4(width:height)aspect ratio for sub-10µm resolution.Our construction relies on two-photon polymerization for a 3D-pattern with its trenches,followed by electroplating of a thick metal film and its dry etching to remove the seed layer.To test the proposed fabrication process,we built up three-dimensional RF metastructures showcasing the depth effect as the third dimension.Using the numerical solutions,we custom-tailored these metastructure resonators to fall within a specific resonance frequency range of 4-6 GHz while undertaking comparative analyses regarding overall footprint,quality factor,and resonance frequency shift as a function of their cross-sectional aspect ratio.The proposed process flow is shown to miniaturize metal footprint and tune the resonance frequency of these thick 3Dmetastructures while increasing their quality factor.These experimental findings indicate that this method of producing trenches via 3D-printing provides rich opportunities to implement high-aspect-ratio,complex structures.展开更多
基金the financial support in part from TUBITAK 20AG001,and 121C266HVD also acknowledges the support from TUBA and TUBITAK 2247-A National Leader Researchers Program(121C266)。
文摘Three-dimensional(3D)printing allows for the construction of complex structures.However,3D-printing vertical structures with a high aspect ratio remains a pending challenge,especially when a high lateral resolution is required.Here,to address this challenge,we propose and demonstrate micro-3D sculptured metastructures with deep trenches of 1:4(width:height)aspect ratio for sub-10µm resolution.Our construction relies on two-photon polymerization for a 3D-pattern with its trenches,followed by electroplating of a thick metal film and its dry etching to remove the seed layer.To test the proposed fabrication process,we built up three-dimensional RF metastructures showcasing the depth effect as the third dimension.Using the numerical solutions,we custom-tailored these metastructure resonators to fall within a specific resonance frequency range of 4-6 GHz while undertaking comparative analyses regarding overall footprint,quality factor,and resonance frequency shift as a function of their cross-sectional aspect ratio.The proposed process flow is shown to miniaturize metal footprint and tune the resonance frequency of these thick 3Dmetastructures while increasing their quality factor.These experimental findings indicate that this method of producing trenches via 3D-printing provides rich opportunities to implement high-aspect-ratio,complex structures.
