This article discusses the transition of a form of nanoimprint lithography technology,known as Jet and Flash Imprint Lithography(J-FIL),from research to a commercial fabrication infrastructure for leading-edge semicon...This article discusses the transition of a form of nanoimprint lithography technology,known as Jet and Flash Imprint Lithography(J-FIL),from research to a commercial fabrication infrastructure for leading-edge semiconductor integrated circuits(ICs).Leadingedge semiconductor lithography has some of the most aggressive technology requirements,and has been a key driver in the 50-year history of semiconductor scaling.Introducing a new,disruptive capability into this arena is therefore a case study in a“highrisk-high-reward”opportunity.This article first discusses relevant literature in nanopatterning including advanced lithography options that have been explored by the IC fabrication industry,novel research ideas being explored,and literature in nanoimprint lithography.The article then focuses on the J-FIL process,and the interdisciplinary nature of risk,involving nanoscale precision systems,mechanics,materials,material delivery systems,contamination control,and process engineering.Next,the article discusses the strategic decisions that were made in the early phases of the project including:(i)choosing a step and repeat process approach;(ii)identifying the first target IC market for J-FIL;(iii)defining the product scope and the appropriate collaborations to share the risk-reward landscape;and(iv)properly leveraging existing infrastructure,including minimizing disruption to the widely accepted practices in photolithography.Finally,the paper discusses the commercial J-FIL stepper system and associated infrastructure,and the resulting advances in the key lithographic process metrics such as critical dimension control,overlay,throughput,process defects,and electrical yield over the past 5 years.This article concludes with the current state of the art in J-FIL technology for IC fabrication,including description of the high volume manufacturing stepper tools created for advanced memory manufacturing.展开更多
This paper presents a fuzzy control algorithm applied to the position control of a multi-axis motion platform to achieve high precision motion control of the multi-axis motion platform.A LabVIEW-based multi-axis motio...This paper presents a fuzzy control algorithm applied to the position control of a multi-axis motion platform to achieve high precision motion control of the multi-axis motion platform.A LabVIEW-based multi-axis motion control system is designed.This system controls stepper motors using trapezoidal acceleration/deceleration pulse types and fuzzy control algorithms,which effectively avoids mechanical jitter and loss of step in the process of multi-angle motion of the stepper motor,and achieves accurate control of the stepper motor.The TCP/IP(transmission control protocol/internet protocol)communication protocol is used,so that data are output stably and not lost in the process of transmission and communication,achieving the purpose of interconnection of different systems and remote control of equipment.This control system has been tested to maintain a high level of stability and repeatability during actual operation.展开更多
Agriculture is undoubtedly a leading field for livelihoods in China.As the population increases,it is necessary to increase agricultural productivity.By capturing the support and the increment in production on farms,t...Agriculture is undoubtedly a leading field for livelihoods in China.As the population increases,it is necessary to increase agricultural productivity.By capturing the support and the increment in production on farms,the need for freshwater used for irrigation increases too.Presently,agriculture accounts for 80% of overall water uptake in China.Unexpected overflow of water carelessly leads to waste of water.Therefore we created a programmed plant irrigation system with Arduino that mechanically supplies water to the plants and keeps it updated by transferring the message to user.Plant irrigation system employs the soil moisture sensor which controls a degree of moisture in the soil.If the humidity degree is lower,Arduino activates a pump of water to supply water to the system.The pump of water stops by design when the organism detects sufficient moisture in the ground.Each time the system is switched off or on,an electronic messaging is conveyed to the end-user through the IoT unit,informing the position of the soil moisture and the pump of water.A spray motor and the pump of water are grounded on the crane concept.Widely,this system is applicable for in small fields,gardens farms,etc.This design is entirely programmed and needed no human involvement.Furthermore,transmission of the sensor readings send through a Thing speak frequency to produce graphic elements for better inquiry.This study gathers the ideas of IoT(Internet of Things)with some engineering tools like machinery,artificial intelligence and use of sensors in an efficient way to respond current needs and extraction of resources by availing scientific methods and procedures that work on inputs.Moreover,this study further defines the engineering works that have been part of this field,but it requires more efficiency and reduction of energy as well as costs by adding more contribution of IoT in the field of agriculture engineering.展开更多
A new design of stato magnetic System is Proposed for 3-phase & 12-pole HB stepper, and it features bet-ter distribution of magntic lield to incare Pullou tope and bopmve Operaonal stability of moor and minimummut...A new design of stato magnetic System is Proposed for 3-phase & 12-pole HB stepper, and it features bet-ter distribution of magntic lield to incare Pullou tope and bopmve Operaonal stability of moor and minimummutual inductance between phase windimp to make design of control circuit easier, and application proved it is as good as expected.展开更多
An instrument is developed to measure the dynamic andstatic fabric drapability by the technology of image analy-sis. A set of stepper motor speed - regulation system,which is based on the control of single - chip micr...An instrument is developed to measure the dynamic andstatic fabric drapability by the technology of image analy-sis. A set of stepper motor speed - regulation system,which is based on the control of single - chip microproces-sor and microcomputer, is developed to form the dynamictest environment in order to implement the measurementof dynamic drapability. An algorithm is presented to con-vert the original draped images which are captured by adigital camera into binary images. The test results showthat the algorithm is adapted for all kinds of fabrics. Thewhole measurement process is controlled by a展开更多
A scanning probe microscope(SPM)stage controlled by three stepper motors is designed,which has more flexibilitiesthan that of one motor controlled stage,while the control whom is more complicated.In this project,we bu...A scanning probe microscope(SPM)stage controlled by three stepper motors is designed,which has more flexibilitiesthan that of one motor controlled stage,while the control whom is more complicated.In this project,we build the stageactions in an Arduino microcontroller,and finite state machine(FSM)is also built in the Arduino micro controller to communicatewith a computer and a radio frequency(RF)controller.A special displaying scheme with five states is employed to indicatethe operation of the stage.Finally,the stage is fully tested and has a700nm resolution in Z motion of the SPM.展开更多
In order to resolve the problean of the unbalanced threephase and unstable voltage, intellectual economized technique on elec- tricity based on electromagnetic regulation and control is proposed in this paper. We choo...In order to resolve the problean of the unbalanced threephase and unstable voltage, intellectual economized technique on elec- tricity based on electromagnetic regulation and control is proposed in this paper. We choose the TMS320LF2407A as the control chip and stepper motor as the executing agency. The equipment controls the movable contact reaching to the assigned position on the magnetic coil quickly and accurately, and outputs the sine-wave voltage steadily along with the network voltage variation though the fuzzy Porportional Integral Derivative（PID） control algorithm of integral separation and incremental mode with setting dead area. The principle of work and the key technique on the electromagnetic regulation and control are introduced in detail in this paper. The experiment result gives a proof for all the algorithm mentioned in this paper.展开更多
This paper presents the design and implementation of a Stepper Motor using Nexys2 circuit board based on a Xilinx Spartan 3E Field Programmable Gate Array (FPGA) device with VHDL code. The algorithm implemented on FPG...This paper presents the design and implementation of a Stepper Motor using Nexys2 circuit board based on a Xilinx Spartan 3E Field Programmable Gate Array (FPGA) device with VHDL code. The algorithm implemented on FPGA allows a substantial decrease of the equivalent processing time developed by different velocity controllers. The Stepper Speed control is achieved using VHDL code, and the hardware digital circuit is designed for a programmable rotational stepper motor using VHDL as a tool and FPGA as a target technology. The 50 MHZ provided by the starter kit is divided to obtain the necessary delay time between the motor phases that ranges between 2 - 10 m seconds. Though output selections, the direction of rotation of the stepper motor besides the magnitude of the angle of movement and the rotation speed can be controlled. The major advantage of using reconfigurable hardware (FPGA) in implementing the Stepper Motor instead of a discrete digital component is that it makes modifications to the design easy and quick and also, the total design hence represents an embedded system (works without computer). The total programmable hardware design that controlled on the stepper motor movement, occupied an area that did not exceed 12% of the chip resources.展开更多
In order to lighten the burden of health care workers and help people with Lower limb insufficiency to do rehabilitation training, this paper designs a model named exoskeletons rehabilitation robot to simulate the hum...In order to lighten the burden of health care workers and help people with Lower limb insufficiency to do rehabilitation training, this paper designs a model named exoskeletons rehabilitation robot to simulate the human gait, including exoskeletons and scooter structure, and designs the driver module. Finally, this paper uses Workbench software to do the stress and strain analysis, which validates the reliability of the whole design.展开更多
Light manipulation and control are essential in various contemporary technologies,and as these technologies evolve,the demand for miniaturized optical components increases.Planar-lens technologies,such as metasurfaces...Light manipulation and control are essential in various contemporary technologies,and as these technologies evolve,the demand for miniaturized optical components increases.Planar-lens technologies,such as metasurfaces and difractive optical elements,have gained attention in recent years for their potential to dramatically reduce the thickness of traditional refractive optical systems.However,their fabrication,particularly for visible wavelengths,involves complex and costly processes,such as high-resolution lithography and dry-etching,which has limited their availability.In this study,we present a simplifed method forfabricating visible Fresnel zone plate(FZP)planar lenses,a type of diffractive optical element,using an i-line stepper and a special photoresist(color resist)that only necessitates coating,exposure,and development,eliminating the need for etching or other post-processing steps.We fabricated visible FZp lens patterns using conventional photolithography equipment on 8-inch silica glass wafers,and demonstrated focusing of 550 nm light to a diameter of 1.1μm with a focusing efficiency of 7.2%.Numerical simulations showed excellent agreement with experimental results,confirming the high precision and designability of our method.Our lenses were also able to image objects with features down to 1.1μm,showcasing their potential for practical applications in imaging.Our method is a cost-effective,simple,and scalable solution for mass production of planar lenses and other optical components operating in the visible region.It enables the development of advanced,miniaturized optical systems to meet modern technology demand,making it a valuable contribution to optical component manufacturing.展开更多
The precision seeding technique has been developed at full speed along with the continuous development of new agricultural technologies,especially those concerning cultivated patterns.The seed-metering device is the k...The precision seeding technique has been developed at full speed along with the continuous development of new agricultural technologies,especially those concerning cultivated patterns.The seed-metering device is the key component of a precision seeder.A ground wheel is used to drive the seed-metering device of the conventional direct seeder.However,the wheel bears high resistance and easily slips.Moreover,the adjustment of the precision seeder’s seeding rate is more difficult.In order to solve these problems,a control system which could keep the rotational speed of the seed-metering device consistent with the seeder’s working speed for the precision seed-metering device was designed.The control system includes a Hall sensor,a single chip microcomputer system,a motor control module,a stepper motor and a display.The control system used a Hall sensor to measure the seeder’s working speed and employed a single chip microcomputer system to predict the rotational speed of seed-metering device.It would then determine the relationship between the seeder’s working speed and the rotational speed of the seed metering-device according to the seeder’s working state,distance between seeds and the requirement of sowing rate.The system could effectively reduce the influence of inhomogeneous sowing caused by the ground wheel’s slipping.The system was found to be reliable by the experiment.The seeding control system could also make the speed of the seed-metering device and seeder’s uniform,improving the uniformity of the amount of seeding,and achieving the goal of design.This new design provides a platform to solve problems of the seed-metering device and the seeder.展开更多
基金This work was partially funded by DARPA Contract No.N66001-02-C-8011NIST Advanced Technology Program Contract No.70NANB4H3012+2 种基金US DoD Contract No.N66001-06-C-2003DARPA A2P Program administered by AFRL Contract No.FA8650-15-C-7542by the National Science Foundation under Cooperative Agreement No.EEC-1160494.
文摘This article discusses the transition of a form of nanoimprint lithography technology,known as Jet and Flash Imprint Lithography(J-FIL),from research to a commercial fabrication infrastructure for leading-edge semiconductor integrated circuits(ICs).Leadingedge semiconductor lithography has some of the most aggressive technology requirements,and has been a key driver in the 50-year history of semiconductor scaling.Introducing a new,disruptive capability into this arena is therefore a case study in a“highrisk-high-reward”opportunity.This article first discusses relevant literature in nanopatterning including advanced lithography options that have been explored by the IC fabrication industry,novel research ideas being explored,and literature in nanoimprint lithography.The article then focuses on the J-FIL process,and the interdisciplinary nature of risk,involving nanoscale precision systems,mechanics,materials,material delivery systems,contamination control,and process engineering.Next,the article discusses the strategic decisions that were made in the early phases of the project including:(i)choosing a step and repeat process approach;(ii)identifying the first target IC market for J-FIL;(iii)defining the product scope and the appropriate collaborations to share the risk-reward landscape;and(iv)properly leveraging existing infrastructure,including minimizing disruption to the widely accepted practices in photolithography.Finally,the paper discusses the commercial J-FIL stepper system and associated infrastructure,and the resulting advances in the key lithographic process metrics such as critical dimension control,overlay,throughput,process defects,and electrical yield over the past 5 years.This article concludes with the current state of the art in J-FIL technology for IC fabrication,including description of the high volume manufacturing stepper tools created for advanced memory manufacturing.
文摘This paper presents a fuzzy control algorithm applied to the position control of a multi-axis motion platform to achieve high precision motion control of the multi-axis motion platform.A LabVIEW-based multi-axis motion control system is designed.This system controls stepper motors using trapezoidal acceleration/deceleration pulse types and fuzzy control algorithms,which effectively avoids mechanical jitter and loss of step in the process of multi-angle motion of the stepper motor,and achieves accurate control of the stepper motor.The TCP/IP(transmission control protocol/internet protocol)communication protocol is used,so that data are output stably and not lost in the process of transmission and communication,achieving the purpose of interconnection of different systems and remote control of equipment.This control system has been tested to maintain a high level of stability and repeatability during actual operation.
基金sponsored by the synergistic innovation center of Jiangsu modern agriculture equipment and technology(No.4091600014).
文摘Agriculture is undoubtedly a leading field for livelihoods in China.As the population increases,it is necessary to increase agricultural productivity.By capturing the support and the increment in production on farms,the need for freshwater used for irrigation increases too.Presently,agriculture accounts for 80% of overall water uptake in China.Unexpected overflow of water carelessly leads to waste of water.Therefore we created a programmed plant irrigation system with Arduino that mechanically supplies water to the plants and keeps it updated by transferring the message to user.Plant irrigation system employs the soil moisture sensor which controls a degree of moisture in the soil.If the humidity degree is lower,Arduino activates a pump of water to supply water to the system.The pump of water stops by design when the organism detects sufficient moisture in the ground.Each time the system is switched off or on,an electronic messaging is conveyed to the end-user through the IoT unit,informing the position of the soil moisture and the pump of water.A spray motor and the pump of water are grounded on the crane concept.Widely,this system is applicable for in small fields,gardens farms,etc.This design is entirely programmed and needed no human involvement.Furthermore,transmission of the sensor readings send through a Thing speak frequency to produce graphic elements for better inquiry.This study gathers the ideas of IoT(Internet of Things)with some engineering tools like machinery,artificial intelligence and use of sensors in an efficient way to respond current needs and extraction of resources by availing scientific methods and procedures that work on inputs.Moreover,this study further defines the engineering works that have been part of this field,but it requires more efficiency and reduction of energy as well as costs by adding more contribution of IoT in the field of agriculture engineering.
文摘A new design of stato magnetic System is Proposed for 3-phase & 12-pole HB stepper, and it features bet-ter distribution of magntic lield to incare Pullou tope and bopmve Operaonal stability of moor and minimummutual inductance between phase windimp to make design of control circuit easier, and application proved it is as good as expected.
文摘An instrument is developed to measure the dynamic andstatic fabric drapability by the technology of image analy-sis. A set of stepper motor speed - regulation system,which is based on the control of single - chip microproces-sor and microcomputer, is developed to form the dynamictest environment in order to implement the measurementof dynamic drapability. An algorithm is presented to con-vert the original draped images which are captured by adigital camera into binary images. The test results showthat the algorithm is adapted for all kinds of fabrics. Thewhole measurement process is controlled by a
文摘A scanning probe microscope(SPM)stage controlled by three stepper motors is designed,which has more flexibilitiesthan that of one motor controlled stage,while the control whom is more complicated.In this project,we build the stageactions in an Arduino microcontroller,and finite state machine(FSM)is also built in the Arduino micro controller to communicatewith a computer and a radio frequency(RF)controller.A special displaying scheme with five states is employed to indicatethe operation of the stage.Finally,the stage is fully tested and has a700nm resolution in Z motion of the SPM.
基金supported by Natural Science Foundation of Shandong Province(No.Z2007F08)
文摘In order to resolve the problean of the unbalanced threephase and unstable voltage, intellectual economized technique on elec- tricity based on electromagnetic regulation and control is proposed in this paper. We choose the TMS320LF2407A as the control chip and stepper motor as the executing agency. The equipment controls the movable contact reaching to the assigned position on the magnetic coil quickly and accurately, and outputs the sine-wave voltage steadily along with the network voltage variation though the fuzzy Porportional Integral Derivative（PID） control algorithm of integral separation and incremental mode with setting dead area. The principle of work and the key technique on the electromagnetic regulation and control are introduced in detail in this paper. The experiment result gives a proof for all the algorithm mentioned in this paper.
文摘This paper presents the design and implementation of a Stepper Motor using Nexys2 circuit board based on a Xilinx Spartan 3E Field Programmable Gate Array (FPGA) device with VHDL code. The algorithm implemented on FPGA allows a substantial decrease of the equivalent processing time developed by different velocity controllers. The Stepper Speed control is achieved using VHDL code, and the hardware digital circuit is designed for a programmable rotational stepper motor using VHDL as a tool and FPGA as a target technology. The 50 MHZ provided by the starter kit is divided to obtain the necessary delay time between the motor phases that ranges between 2 - 10 m seconds. Though output selections, the direction of rotation of the stepper motor besides the magnitude of the angle of movement and the rotation speed can be controlled. The major advantage of using reconfigurable hardware (FPGA) in implementing the Stepper Motor instead of a discrete digital component is that it makes modifications to the design easy and quick and also, the total design hence represents an embedded system (works without computer). The total programmable hardware design that controlled on the stepper motor movement, occupied an area that did not exceed 12% of the chip resources.
基金Supported by Science and Technology Department of Anhui Province Qiushi Plan(JZ2015QSJH0245)National College Students’Entrepreneurship Practice Project(201410359070)
文摘In order to lighten the burden of health care workers and help people with Lower limb insufficiency to do rehabilitation training, this paper designs a model named exoskeletons rehabilitation robot to simulate the human gait, including exoskeletons and scooter structure, and designs the driver module. Finally, this paper uses Workbench software to do the stress and strain analysis, which validates the reliability of the whole design.
文摘Light manipulation and control are essential in various contemporary technologies,and as these technologies evolve,the demand for miniaturized optical components increases.Planar-lens technologies,such as metasurfaces and difractive optical elements,have gained attention in recent years for their potential to dramatically reduce the thickness of traditional refractive optical systems.However,their fabrication,particularly for visible wavelengths,involves complex and costly processes,such as high-resolution lithography and dry-etching,which has limited their availability.In this study,we present a simplifed method forfabricating visible Fresnel zone plate(FZP)planar lenses,a type of diffractive optical element,using an i-line stepper and a special photoresist(color resist)that only necessitates coating,exposure,and development,eliminating the need for etching or other post-processing steps.We fabricated visible FZp lens patterns using conventional photolithography equipment on 8-inch silica glass wafers,and demonstrated focusing of 550 nm light to a diameter of 1.1μm with a focusing efficiency of 7.2%.Numerical simulations showed excellent agreement with experimental results,confirming the high precision and designability of our method.Our lenses were also able to image objects with features down to 1.1μm,showcasing their potential for practical applications in imaging.Our method is a cost-effective,simple,and scalable solution for mass production of planar lenses and other optical components operating in the visible region.It enables the development of advanced,miniaturized optical systems to meet modern technology demand,making it a valuable contribution to optical component manufacturing.
基金This work was financially supported by the Special Fund for Agro-scientific Research in the Public Interest(No.201203059)the Natural Science Foundation of China(No.51275196)+1 种基金the Fundamental Research Funds for the Central Universities(No.2012ZYTS022)and the National Key Technology R&D Program(No.2011BAD20B08).
文摘The precision seeding technique has been developed at full speed along with the continuous development of new agricultural technologies,especially those concerning cultivated patterns.The seed-metering device is the key component of a precision seeder.A ground wheel is used to drive the seed-metering device of the conventional direct seeder.However,the wheel bears high resistance and easily slips.Moreover,the adjustment of the precision seeder’s seeding rate is more difficult.In order to solve these problems,a control system which could keep the rotational speed of the seed-metering device consistent with the seeder’s working speed for the precision seed-metering device was designed.The control system includes a Hall sensor,a single chip microcomputer system,a motor control module,a stepper motor and a display.The control system used a Hall sensor to measure the seeder’s working speed and employed a single chip microcomputer system to predict the rotational speed of seed-metering device.It would then determine the relationship between the seeder’s working speed and the rotational speed of the seed metering-device according to the seeder’s working state,distance between seeds and the requirement of sowing rate.The system could effectively reduce the influence of inhomogeneous sowing caused by the ground wheel’s slipping.The system was found to be reliable by the experiment.The seeding control system could also make the speed of the seed-metering device and seeder’s uniform,improving the uniformity of the amount of seeding,and achieving the goal of design.This new design provides a platform to solve problems of the seed-metering device and the seeder.
