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Simulation of incompressible multiphase flows with complex geometry using etching multiblock method 被引量:1
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作者 Haoran LIU Kai MU Hang DING 《Applied Mathematics and Mechanics(English Edition)》 SCIE EI CSCD 2016年第11期1405-1418,共14页
The incompressible two-phase flows are simulated using combination of an etching multiblock method and a diffuse interface (DI) model, particularly in the com- plex domain that can be decomposed into multiple rectan... The incompressible two-phase flows are simulated using combination of an etching multiblock method and a diffuse interface (DI) model, particularly in the com- plex domain that can be decomposed into multiple rectangular subdomains. The etching multiblock method allows natural communications between the connected subdomains and the efficient parallel computation. The DI model can consider two-phase flows with a large density ratio, and simulate the flows with the moving contact line (MCL) when a geometric formulation of the MCL model is included. Therefore, combination of the etch- ing method and the DI model has potential to deal with a variety of two-phase flows in industrial applications. The performance is examined through a series of numerical exper- iments. The convergence of the etching method is firstly tested by simulating single-phase flows past a square cylinder, and the method for the multiphase flow simulation is vali- dated by investing drops dripping from a pore. The numerical results are compared with either those from other researchers or experimental data. Good agreement is achieved. The method is also used to investigate the impact of a droplet on a grooved substrate and droplet generation in flow focusing devices. 展开更多
关键词 etching multiblock method complex geometry multiphase flow movingcontact line (MCL) MULTIBLOCK
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FIB Secondary Etching Method for Fabrication of Fine CNT Forest Metamaterials 被引量:1
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作者 Adam Pander Akimitsu Hatta Hiroshi Furuta 《Nano-Micro Letters》 SCIE EI CAS 2017年第4期73-80,共8页
Anisotropic materials, like carbon nanotubes(CNTs), are the perfect substitutes to overcome the limitations of conventional metamaterials; however, the successful fabrication of CNT forest metamaterial structures is s... Anisotropic materials, like carbon nanotubes(CNTs), are the perfect substitutes to overcome the limitations of conventional metamaterials; however, the successful fabrication of CNT forest metamaterial structures is still very challenging. In this study, a new method utilizing a focused ion beam(FIB) with additional secondary etching is presented, which can obtain uniform and fine patterning of CNT forest nanostructures for metamaterials and ranging in sizes from hundreds of nanometers to several micrometers. The influence of the FIB processing parameters on the morphology of the catalyst surface and the growth of the CNT forest was investigated, including the removal of redeposited material,decreasing the average surface roughness(from 0.45 to 0.15 nm), and a decrease in the thickness of the Fe catalyst.The results showed that the combination of FIB patterning and secondary etching enabled the growth of highly aligned, highdensity CNT forest metamaterials. The improvement in the quality of single-walled CNTs(SWNTs), defined by the very high G/D peak ratio intensity of 10.47, demonstrated successful fine patterning of CNT forest for the first time. With a FIB patterning depth of 10 nm and a secondary etching of 0.5 nm, a minimum size of 150 nm of CNT forest metamaterials was achieved. The development of the FIB secondary etching method enabled for the first time, the fabrication of SWNT forest metamaterials for the optical and infrared regime, for future applications, e.g., in superlenses, antennas,or thermal metamaterials. 展开更多
关键词 Carbon nanotubes Metamaterial FIB patterning Secondary etching method Chemical vapor deposition
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Etching Mechanism of Ti_(3)C_(2)Cl_(2) MXene Phases by CuCl_(2)-Lewis Molten Salt Method 被引量:1
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作者 严明 ZHU Yu +5 位作者 HUANG Jiangtao CHEN Haoyu DENG Yuxiao CHEN Yanlin 王娟 Jan-Michael Albina 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS CSCD 2024年第4期863-868,共6页
We described a method for obtaining fluorine-free Ti_(3)C_(2)Cl_(2)MXene phases by melting copper in CuCl_(2)instead of aluminum in Ti_(3)AlC_(2).XRD results show that when molten salt CuCl_(2)etches Ti_(3)AlC_(2),it ... We described a method for obtaining fluorine-free Ti_(3)C_(2)Cl_(2)MXene phases by melting copper in CuCl_(2)instead of aluminum in Ti_(3)AlC_(2).XRD results show that when molten salt CuCl_(2)etches Ti_(3)AlC_(2),it forms an intermediate product Ti_(3)CuC_(2),and then reacts with Ti_(3)CuC_(2)to obtain Ti_(3)C_(2)Cl_(2).The reaction of Ti_(3)AlC_(2)and CuCl_(2)at a temperature of 800℃for 2 h to obtain Ti_(3)C_(2)Cl_(2)with an optimal lamellar structure is shown in SEM results.The pseudopotential plane-wave(PP-PW)method is used to calculate on the electronic structure.The etching mechanism is investigated by the total energies of each substance.The chemical reaction of Ti_(3)AlC_(2)and CuCl_(2)will first become Ti_(3)CuC_(2)and Cu,and then become Ti_(3)C_(2)Cl_(2)during the Lewis acid etching process,which are consistent with the experimental results. 展开更多
关键词 molten salt method CuCl_(2) MXene first-principles calculations etching mechanism
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A step-by-step Chebyshev space-time spectral method for force vibration of functionally graded structures
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作者 Haizhou Liu Yixin Huang Yang Zhao 《Acta Mechanica Sinica》 2025年第4期142-155,共14页
This paper proposes a new step-by-step Chebyshev space-time spectral method to analyze the force vibration of functionally graded material structures.Although traditional space-time spectral methods can reduce the acc... This paper proposes a new step-by-step Chebyshev space-time spectral method to analyze the force vibration of functionally graded material structures.Although traditional space-time spectral methods can reduce the accuracy mismatch between tem-poral low-order finite difference and spatial high-order discre tization,the ir time collocation points must increase dramatically to solve highly oscillatory solutions of structural vibration,which results in a surge in computing time and a decrease in accuracy.To address this problem,we introduced the step-by-step idea in the space-time spectral method.The Chebyshev polynomials and Lagrange's equation were applied to derive discrete spatial goverming equations,and a matrix projection method was used to map the calculation results of prev ious steps as the initial conditions of the subsequent steps.A series of numerical experiments were carried out.The results of the proposed method were compared with those obtained by traditional space-time spectral methods,which showed that higher accuracy could be achieved in a shorter computation time than the latter in highly oscillatory cases. 展开更多
关键词 Functionally graded materials Space-time spectral method step-by-step approach Forced vibration
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In-situ Characterization of Non-aqueous Nano-dispersion Systems by Freeze-etching TEM and Comparative Study with Laser Scattering Method
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作者 欧忠文 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2010年第3期432-436,共5页
In-situ characterization of non-aqueous nano-dispersion systems(NANDS) by freeze-etching transmission electron microscope(FETEM) was reported.To improve just-for-once successive rate of specimen preparation and ge... In-situ characterization of non-aqueous nano-dispersion systems(NANDS) by freeze-etching transmission electron microscope(FETEM) was reported.To improve just-for-once successive rate of specimen preparation and get good characterization results,an improving specimen preparation method of freezing etching was developed.Size,distribution and morphology of NANDS were directly visualized.Some information of particle dispersion feature and particle density can also be obtained.Reproductivity of the FETEM characterization is excellent.Comparing with laser scattering method,which is liable to give positive error especially for small size particle anchoring disperser,FETEM characterization can give more accurate measurement of particle size.Moreover,FETEM can give dispersion feature of nanoparticle in non-aqueous medium. 展开更多
关键词 non-aqueous nano-dispersion system dispersion state in-situ characterization FREEZE-etching laser scattering method
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Adsorption of CO_(2) on MgAl layered double hydroxides: Effect of intercalated anion and alkaline etching time 被引量:3
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作者 Yan-Yan Feng Xiao-Di Niu +1 位作者 Yong-Hui Xu Wen Yang 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第4期542-549,共8页
The adsorption of CO_(2) on MgAl layered double hydroxides(MgAl-LDHs) based adsorbents has been an effective way to capture CO_(2),however the adsorption capacity was hampered due to the pore structure and the dispers... The adsorption of CO_(2) on MgAl layered double hydroxides(MgAl-LDHs) based adsorbents has been an effective way to capture CO_(2),however the adsorption capacity was hampered due to the pore structure and the dispersibility of adsorption active sites.To address the problem,we investigate the effect of intercalated anion and alkaline etching time on the structure,morphology and CO_(2) uptake performances of MgAl-LDHs.MgAl-LDHs are synthesized by the onepot hydrothermal method,followed by alkaline etching of NaOH,and characterized by x-ray diffraction,N_(2) adsorption,scanning electron microscopy and Fourier transform infrared spectroscopy.The CO_(2) adsorption tests of the samples are performed on a thermogravimetric analyzer,and the adsorption data are fitted by the first-order,pseudo-second-order and Elovich models,respectively.The results demonstrate that among the three intercalated samples,MgAl(Cl) using chloride salts as precursors possesses the highest adsorption capacity of CO_(2),owing to high crystallinity and porous structure,while MgAl(Ac) employing acetate salts as precursors displays the lowest CO_(2) uptake because of poor crystallinity,disorderly stacked structure and unsatisfactory pore structure.With regard to alkaline etching,the surface of the treated MgAl(Cl) is partly corroded,thus the specific surface area and pore volume increase,which is conducive to the exposure of adsorption active sites.Correspondingly,the adsorption performance of the alkaline-etched adsorbents is significantly improved,and MgAl(Cl)-6 has the highest CO_(2) uptake.With the alkaline etching time further increasing,the CO_(2) adsorption capacity of MgAl(Cl)-9 sharply decreases,mainly due to the collapse of pore structure and the fragmentized sheet-structure.Hence,the CO_(2) adsorption performance is greatly influenced by alkaline etching time,and appropriate alkaline etching time can facilitate the contact between CO_(2) molecules and the adsorbent. 展开更多
关键词 CO_(2)adsorption Mg Al-LDHs one-pot hydrothermal method intercalated anion alkaline etching
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Preparation of Electrode Array by Electrochemical Etching Based on FEM
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作者 Minghuan WANG Di ZHU Lei WANG 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2008年第6期845-849,共5页
Process technology of multiple cylindrical micro-pins by wire-electrical discharge machining (wire-EDM) and electrochemical etching was presented. A row of rectangular micro-columns were machined by wire-EDM and the... Process technology of multiple cylindrical micro-pins by wire-electrical discharge machining (wire-EDM) and electrochemical etching was presented. A row of rectangular micro-columns were machined by wire-EDM and then machined into cylindrical shape by electrochemical etching. However, the shape of the multiple electrodes and the consistent sizes of the electrodes row are not easy to be controlled. In the electrochemical process, the shape of the cathode electrode determines the current density distribution on the anode and so the forming of multiple electrodes. This paper proposes a finite element method (FEM) to accurately optimize the electrode profile. The microelectrodes row with uniformity diameters with size from hundreds micrometers to several decades could be fabricated, and mathematical model controlling the shape and diameter of multiple microelectrodes was provided. Furthermore, a good agreement between experimental and theoretical results was confirmed. 展开更多
关键词 Electrode array Electrochemical etching Finite element method (FEM) Micro-electrodes
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Angular Effects on F+ Etching SiC: MD Study
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作者 CHEN Xu TIAN Shuping +5 位作者 HE Pingni ZHAO Chengli SUN Weizhong ZHANG Junyuan CHEN Feng GOU Fujun 《Plasma Science and Technology》 SCIE EI CAS CSCD 2012年第12期1102-1105,共4页
Molecular dynamics (MD) simulations were performed to investigate F+ continuously bombarding SiC surfaces with energies of 100 eV at different incident angles at 300 K. The simulated results show that the steady-st... Molecular dynamics (MD) simulations were performed to investigate F+ continuously bombarding SiC surfaces with energies of 100 eV at different incident angles at 300 K. The simulated results show that the steady-state uptake of F atoms increases with increasing incident angle. With the steady-state etching established, a Si-C-F reactive layer is formed. It is found that the etching yield of Si is greater than that of C. In the F-containing reaction layer, the SiF species is dominant with incident angles less than 30°. For all incident angles, the CF species is dominant over CF2 and CF3. 展开更多
关键词 molecular dynamics methods plasma etching SIC
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The Implementation of the Surface Charging Effects in Three-Dimensional Simulations of SiO_(2) Etching Profile Evolution 被引量:1
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作者 Branislav Radjenovic Marija Radmilovic-Radjenovic 《Engineering(科研)》 2014年第1期1-6,共6页
Refined control of etched profile in microelectronic devices during plasma etching process is one of the most important tasks of front-end and back-end microelectronic devices manufacturing technologies. A comprehensi... Refined control of etched profile in microelectronic devices during plasma etching process is one of the most important tasks of front-end and back-end microelectronic devices manufacturing technologies. A comprehensive simulation of etching profile evolution requires knowledge of the etching rates at all the points of the profile surface during the etching process. Electrons do not contribute directly to the material removal, but they are the source, together with positive ions, of the profile charging that has many negative consequences on the final outcome of the process especially in the case of insulating material etching. The ability to simulate feature charging was added to the 3D level set profile evolution simulator described earlier. The ion and electron fluxes were computed along the feature using Monte Carlo method. The surface potential profiles and electric field for the entire feature were generated by solving Laplace equation using finite elements method. Calculations were performed in the case of simplified model of Ar+/CF4 non-equilibrium plasma etching of SiO2. 展开更多
关键词 Plasma etching Level Set method Profile Charging Finite Elements method
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Dislocation Analysis for Large-sized Sapphire Single Crystal Grown by SAPMAC Method 被引量:2
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作者 汪桂根 张明福 +3 位作者 左洪波 许承海 赫晓东 韩杰才 《Chinese Journal of Structural Chemistry》 SCIE CAS CSCD 北大核心 2007年第11期1332-1336,共5页
In this paper, large-sized sapphire (Φ230×210 mm, 27.5 kg) was grown by SAPMAC method (sapphire growth technique with micro-pulling and shoulder-expanding at the cooled center). Dislocation peculiarity in la... In this paper, large-sized sapphire (Φ230×210 mm, 27.5 kg) was grown by SAPMAC method (sapphire growth technique with micro-pulling and shoulder-expanding at the cooled center). Dislocation peculiarity in large sapphire boule (0001) basal plane was investigated by chemical etchiing, scanning electron microscopy and X-ray topography method. The triangular dislocation etch pit measured is 7.6× 10^1-8.0×10^2 cm^2, in which relative high-density dislocations were generated at both initial and final stages of crystal growth. The analysis of single-crystal X-ray topography shows that there are no apparent sub-grain boundaries; the dislocation lines are isolated and straight. Finally, the origins of low-density dislocation in sapphire crystal are discussed by numerical analysis method. 展开更多
关键词 SAPPHIRE DISLOCATION chemical etching X-ray topography SAPMAC method
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Studies on the Properties of ZnO Crystal Plane Grown by the Innovated Hydrothermal Method
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作者 王永好 陈达贵 +4 位作者 李伟 黄嘉魁 王国红 林璋 黄丰 《Chinese Journal of Structural Chemistry》 SCIE CAS CSCD 北大核心 2008年第4期399-403,共5页
ZnO single crystals were grown by the innovated hydrothermal method. The crystal surfaces were polished, and then studied by atom force microscope (AFM) and wet-chemical etching (WCE). It was found that the Zn pol... ZnO single crystals were grown by the innovated hydrothermal method. The crystal surfaces were polished, and then studied by atom force microscope (AFM) and wet-chemical etching (WCE). It was found that the Zn polar plane was smoother than O polar plane under the same polishing conditions. The etch pit density of Zn polar plane is 4.3×10^3 cm^-2, which is consistent with the previous report, while the density of etch pit of O polar plane is more than 103cm^-2. After annealing treatment, the density of etch pit of Zn plane reduces to 5.8×102 cm^2 and is superior to the current report. This investigation reveals that the high quality ZnO single crystals with fine Zn polar plane can be obtained by the innovated hydrothermal method. 展开更多
关键词 ZnO crystal AFM etch pit density hydrothermal method surface topography
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Study Coefficient and Optical Application of KCI Single Crystal with Sn Impurity Growth on Czochralski Method under Visible Radiation
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作者 Feridoun Samavat Ebrahim Haji Ali Somayeh Solgi 《材料科学与工程(中英文A版)》 2012年第12期799-802,共4页
关键词 可见光辐射 光学系数 杂质 SN 提拉法 系数和 晶体生长 单晶
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锥形光纤布拉格光栅制备工艺及传感特性研究
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作者 刘明尧 兰永清 李聪 《传感器与微系统》 北大核心 2025年第8期50-53,58,共5页
通过对电弧放电法和氢氟酸(HF)腐蚀法两种制备锥形光纤布拉格光栅(TFBG)的工艺进行对比,证明HF腐蚀制备的TFBG带宽应变灵敏度更高。区别于以往对裸露TFBG反射谱带宽研究,采用353ND环氧树脂保护封装的方法,将HF腐蚀制备的TFBG和光纤布拉... 通过对电弧放电法和氢氟酸(HF)腐蚀法两种制备锥形光纤布拉格光栅(TFBG)的工艺进行对比,证明HF腐蚀制备的TFBG带宽应变灵敏度更高。区别于以往对裸露TFBG反射谱带宽研究,采用353ND环氧树脂保护封装的方法,将HF腐蚀制备的TFBG和光纤布拉格光栅(FBG)粘贴在等悬臂铝梁上,通过应变加载实验表明:TFBG与FBG应变灵敏度理论值仅相差0.7%;通过温度加载实验表明TFBG与FBG粘贴在铝基板上温度灵敏度理论值仅相差2.8%,应变灵敏度仅相差2.4%,TFBG带宽在25~100℃表现出对温度不敏感,证明了腐蚀后FBG与腐蚀前FBG中心波长应变灵敏度和温度灵敏没有发生改变,以及HF腐蚀制备的TFBG使用环氧树脂封装解决温度-应变交叉敏感在工程应用上的可行性。 展开更多
关键词 锥形光纤布拉格光栅 电弧放电法 化学腐蚀法 温度-应变交叉敏感
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等离子体刻蚀对聚苯乙烯微球尺寸缩减的工艺优化研究
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作者 孙士阳 黄胜保 +4 位作者 钱远近 刘东昆 李嘉彬 任元 张文兴 《材料保护》 2025年第7期58-65,共8页
利用感应耦合等离子体刻蚀技术(Inductively Coupled Plasma, ICP)以及聚苯乙烯(PS)微球作为掩膜的刻蚀技术在硅纳米阵列的制备中应用广泛,但是PS微球的尺寸缩减过程中刻蚀往往伴随着表面质量下降的问题,同时PS微球的形貌受到多种工艺... 利用感应耦合等离子体刻蚀技术(Inductively Coupled Plasma, ICP)以及聚苯乙烯(PS)微球作为掩膜的刻蚀技术在硅纳米阵列的制备中应用广泛,但是PS微球的尺寸缩减过程中刻蚀往往伴随着表面质量下降的问题,同时PS微球的形貌受到多种工艺参数共同的影响,研究困难。为了解决这些问题,采用正交实验法对ICP工艺在粒径为10μm的PS微球尺寸缩减过程中的工艺影响进行了深入研究。结果显示:气体成分对刻蚀效果有显著影响,射频功率与微球尺寸缩减、表面粗糙度均为正相关,压强与微球表面粗糙度呈负相关,流量基本无影响。基于上述结论,最终确定最优工艺参数为:在O_(2)中添加20%的CF_(4),射频功率200 W-100 W(感应功率-直流偏置功率),压强3.0 Pa,气体流量50 mL/min(O_(2)∶CF_(4)流量比为4∶1)的工艺参数下,在不影响PS微球的刻蚀缩减效果的情况下表面粗糙度最低。采用此优化模板制备得到了高度线性化且外表面光滑的硅纳米阵列。 展开更多
关键词 等离子体刻蚀 聚苯乙烯微球 正交实验法 表面形貌
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混合法制备的双锥角型光纤探针的应用
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作者 曾祥 王婉玲 +2 位作者 汪凯伟 张波 刘子龙 《激光技术》 北大核心 2025年第3期399-402,共4页
为了提高双锥角型光纤探针的捕获效率,采用静态化学腐蚀法制备1次锥角,研磨法制备2次锥角,然后使用基于双锥角型光纤探针的单光纤光镊系统对酵母菌细胞进行捕获实验;并采用界面层腐蚀法制备出了参数相近的双锥角型光纤探针,分别测量了... 为了提高双锥角型光纤探针的捕获效率,采用静态化学腐蚀法制备1次锥角,研磨法制备2次锥角,然后使用基于双锥角型光纤探针的单光纤光镊系统对酵母菌细胞进行捕获实验;并采用界面层腐蚀法制备出了参数相近的双锥角型光纤探针,分别测量了两种不同方法制备的光纤探针对酵母菌细胞的捕获力大小。结果表明,混合法制备的双锥角型光纤探针具有更好的表面光滑度和对称性,其捕获效率比界面层腐蚀法制备的双锥角型光纤探针提高了20%。该研究对混合法制备双锥角型光纤探针是有帮助的。 展开更多
关键词 激光技术 光纤探针 光捕获 静态化学腐蚀法 研磨法
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导模法生长氧化镓晶体中的位错缺陷及其分布特点
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作者 杨文娟 卜予哲 +1 位作者 赛青林 齐红基 《人工晶体学报》 北大核心 2025年第3期414-419,共6页
β-Ga_(2)O_(3)作为新一代超宽带隙半导体材料,因优异的物理性能和在器件中的高性能而受到越来越多的关注。β-Ga_(2)O_(3)的制备可采用浮区法、导模(EFG)法等多种熔融晶体生长方法。缺陷通常会对半导体器件的性能产生严重的负面影响,... β-Ga_(2)O_(3)作为新一代超宽带隙半导体材料,因优异的物理性能和在器件中的高性能而受到越来越多的关注。β-Ga_(2)O_(3)的制备可采用浮区法、导模(EFG)法等多种熔融晶体生长方法。缺陷通常会对半导体器件的性能产生严重的负面影响,所以β-Ga_(2)O_(3)晶体的缺陷检测技术显得尤为重要。过去通常采用刻蚀的方法进行位错的检测和密度计算,但这种方法是破坏性的,只适用于实验样品的研究分析。本文突破传统缺陷分析方法的局限,引入X射线形貌分析术(XRT)并结合酸性腐蚀法,对导模法生长β-Ga_(2)O_(3)的(001)、(010)、(100)面分别进行了深入研究,揭示了位错在三维空间的分布特征,明确指出,在导模法晶体中,沿着b轴[010]方向的位错占主导地位,为理解β-Ga_(2)O_(3)位错的结构和特征提供了宝贵的信息,进而为之后外延和器件晶面的选择指明了新的方向。 展开更多
关键词 氧化镓 宽禁带半导体 位错 X射线形貌分析术 导模法 腐蚀法
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REBCO带材的水解性能衰退与微观结构变化分析
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作者 王震 刘华军 +3 位作者 刘方 张新涛 胡帅 高硕尉 《低温与超导》 北大核心 2025年第7期17-24,34,共9页
本文研究了REBCO超导带材在不同水解条件下的临界电流衰退规律及机理,并探讨了化学刻蚀对超导层的影响。实验采用国产掺杂3.5%BaHfO3的REBCO超导带材,研究水解时间以及边缘暴露对水解性能的影响。利用四引线法测试样品在液氮环境中的临... 本文研究了REBCO超导带材在不同水解条件下的临界电流衰退规律及机理,并探讨了化学刻蚀对超导层的影响。实验采用国产掺杂3.5%BaHfO3的REBCO超导带材,研究水解时间以及边缘暴露对水解性能的影响。利用四引线法测试样品在液氮环境中的临界电流,采用化学刻蚀法去除外层铜和银保护层,并结合扫描电子显微镜、EDS能谱和X射线衍射等手段对水解后的微观结构进行表征。结果表明,水解显著降低了临界电流,且高温加速衰退。显微分析揭示水解过程中超导相减少、CuO析出和晶界弱连接效应增强。铜层的致密度越高、厚度越大,水分子渗透至超导层的时间越长,从而延缓水解反应的发生。优化化学刻蚀方法可减少超导层损伤,为微观结构分析提供可靠手段。 展开更多
关键词 REBCO 超导带材 水解机理 化学刻蚀方法
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蓝宝石MEMS光纤动态压力传感器技术研究
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作者 姜晓龙 窦雁巍 +3 位作者 程振乾 孙志强 毕佳宇 邵志强 《传感器与微系统》 北大核心 2025年第8期124-127,共4页
首次提出了一种蓝宝石MEMS光纤动态压力传感器。利用有限元分析软件设计了蓝宝石MEMS敏感结构,采用湿法腐蚀和直接键合工艺制作了蓝宝石F-P敏感结构。为了快速提取出压力信息,提出了采用基于光强-干涉自补偿解调方法对传感器进行解调。... 首次提出了一种蓝宝石MEMS光纤动态压力传感器。利用有限元分析软件设计了蓝宝石MEMS敏感结构,采用湿法腐蚀和直接键合工艺制作了蓝宝石F-P敏感结构。为了快速提取出压力信息,提出了采用基于光强-干涉自补偿解调方法对传感器进行解调。搭建了动态压力测试平台,在室温环境下对传感器执行了10Hz~1kHz的动态压力测试和固有频率测试。测试结果表明,在10Hz~1kHz频率范围内,传感器的幅值灵敏度相对误差优于±0.5%,传感器的固有频率为430kHz。 展开更多
关键词 动态压力传感器 湿法腐蚀 直接键合 自补偿解调方法
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二氧化钍芯块金相样品的制备
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作者 杜艳华 郭洪 +1 位作者 池春霞 贺进明 《物理测试》 2025年第3期42-46,共5页
开发核电燃料二氧化钍芯块金相样品的制备方法对其显微组织观察及其性能研究具有重要意义。本文主要考察了H_(2)SO_(4)、HCl-H_(2)O、H_(2)SO_(4)-HNO_(3)-HCl-H_(2)O、H_(2)SO_(4)-HCl-H_(2)O和H_(3)PO_(4)这5种化学腐蚀液对制备二氧... 开发核电燃料二氧化钍芯块金相样品的制备方法对其显微组织观察及其性能研究具有重要意义。本文主要考察了H_(2)SO_(4)、HCl-H_(2)O、H_(2)SO_(4)-HNO_(3)-HCl-H_(2)O、H_(2)SO_(4)-HCl-H_(2)O和H_(3)PO_(4)这5种化学腐蚀液对制备二氧化钍芯块金相样品的影响,优化了化学腐蚀方法,并讨论了选用不同成型压力条件对金相样品微观孔洞、裂纹和晶粒度的影响。结果表明,仅采用H_(2)SO_(4)-HCl-H_(2)O和H_(3)PO_(4)这两种化学腐蚀液制备样品后出现了清晰的晶粒边界,因考虑H_(3)PO_(4)刺激性气味相对弱,最终选用H_(3)PO_(4)腐蚀制备二氧化钍芯块金相样品。试验表明,在相同的成型压力下,比表面高的原始粉末由于具有更优的烧结驱动力和烧结活性,更有助于二氧化钍芯块样品中孔洞、裂纹的减少和晶粒的长大。 展开更多
关键词 二氧化钍芯块 化学腐蚀方法 晶粒度 成型压力 金相样品
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直通孔扩散层结构对PEM电解槽性能影响研究
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作者 丁万龙 纪东骅 +3 位作者 崔国亮 赵明 骆泽威 范礼 《电源技术》 北大核心 2025年第2期403-407,共5页
为提升质子交换膜(PEM)电解槽的制氢效率并降低相应的能耗,通过调节阳极扩散层的孔径和孔隙率,采用化学蚀刻法制备了具有直通孔结构的扩散层。利用原位测试和电化学阻抗谱(EIS)技术,分析了不同扩散层结构对电解槽性能的影响。结果表明,... 为提升质子交换膜(PEM)电解槽的制氢效率并降低相应的能耗,通过调节阳极扩散层的孔径和孔隙率,采用化学蚀刻法制备了具有直通孔结构的扩散层。利用原位测试和电化学阻抗谱(EIS)技术,分析了不同扩散层结构对电解槽性能的影响。结果表明,在60℃的工作温度和1 A/cm^(2)的电流密度条件下,具有70%孔隙率和400μm孔径的扩散层展现出了最佳的制氢效率和最低的制氢能耗,此时电解槽的电压仅为1.642 V。这为阳极扩散层的制备及其结构优化提供了重要的理论基础和技术指导。 展开更多
关键词 PEM电解槽 制氢 扩散层 化学蚀刻法 电化学阻抗
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