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Preparation and Characterization of CeO_2-TiO_2/SnO_2:Sb Films Deposited on Glass Substrates by R.F.Sputtering 被引量:6
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作者 ZHAO Qingnan DONG Yuhong NI Jiamiao WANG Peng ZHAO Xiujian 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2008年第4期443-447,共5页
CeO2-TiO2 films and CeO2-TiO/SnO2:Sb (6 mol%) double films were deposited on glass substrates by radio-frequency magnetron sputtering (R.F. Sputtering), using SnO2:Sb(6 mol%) target, and CeO2- TiO2 targets wit... CeO2-TiO2 films and CeO2-TiO/SnO2:Sb (6 mol%) double films were deposited on glass substrates by radio-frequency magnetron sputtering (R.F. Sputtering), using SnO2:Sb(6 mol%) target, and CeO2- TiO2 targets with different molar ratio of CeO2 to TiO2 (CeO2:TiO2-0:1.0; 0.1:0.9; 0.2:0.8; 0.3:0.7; 0.4:0.6; 0.5:0.5; 0.6:0.4; 0.7:0.3; 0.8:0.2; 0.9:0.1; 1.0:0). The films are characterized by UV-visible transmission and infrared reflection spectra, scanning electron microscopy (SEM), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD), respectively. The obtained results show that the amorphous phases composed of CeO2-TiO2 play an important role in absorbing UV, there are Ce^3-, Ce^4- and Ti^4- on the surface of the films; the glass substrates coated with CeO2-TiO2 (Ce/Ti=0.5:0.5; 0.6:0.4)/SnO2:Sb(6 mol%) double films show high absorbing UV(〉99), high visible light transmission (75%) and good infrared reflection (〉70%). The sheet resistance of the films is 30-50 Ω/□. The glass substrates coated with the double functional films can be used as window glass of buildings, automobile and so on. 展开更多
关键词 coating glass CeO2-TiO/SnO2:Sb double thin films absorbing UV IR reflection R.F. sputterin
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18~20nm正入射宽带多层膜的研究 被引量:2
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作者 柯常军 王占山 +1 位作者 万重怡 曹健林 《中国激光》 EI CAS CSCD 北大核心 2000年第11期1016-1018,共3页
采用随机数的方法在 18~ 2 0 nm波段设计了积分反射率最大的宽带多层膜 ,理论上得到了高于周期膜系 8%的积分反射率 ,同时带宽与视场范围有明显的展宽 ,并用磁控溅射法进行了初步制备。对反射率的相对测试表明 ,与周期膜系相比 ,非周... 采用随机数的方法在 18~ 2 0 nm波段设计了积分反射率最大的宽带多层膜 ,理论上得到了高于周期膜系 8%的积分反射率 ,同时带宽与视场范围有明显的展宽 ,并用磁控溅射法进行了初步制备。对反射率的相对测试表明 ,与周期膜系相比 ,非周期多层膜的带宽展宽 ,但峰值反射率略有降低。膜厚控制是实验的难点。 展开更多
关键词 软X射线 宽带多层膜 磁控溅射 反射率
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