A thermodynamic model of hydrogen induced silicon surface layer splitting with the help of an oxidized silicon wafer bonded is proposed.Wafer splitting is the result of lateral growth of hydrogen blisters in the enti...A thermodynamic model of hydrogen induced silicon surface layer splitting with the help of an oxidized silicon wafer bonded is proposed.Wafer splitting is the result of lateral growth of hydrogen blisters in the entire implanted hydrogen region during annealing.The blister growth rate depends on the effective activation energies of both hydrogen complex dissociation and hydrogen diffusion.The hydrogen blister radius was studied as the function of annealing time,annealing temperature and implantation dose.The critical radius was obtained according to the Griffith energy condition.The time required for wafer splitting at the cut temperature was calculated in accordance with the growth of hydrogen blisters.展开更多
针对当前机械加工领域工艺优化效率低下、严重依赖人工经验的问题,提出了基于几何-物理-运动协同仿真的智能机床工艺自主优化方法。首先,构建了几何模型,实现数字化表达工件与刀具,重构切削的材料去除过程;其次,建立了基于神经网络的物...针对当前机械加工领域工艺优化效率低下、严重依赖人工经验的问题,提出了基于几何-物理-运动协同仿真的智能机床工艺自主优化方法。首先,构建了几何模型,实现数字化表达工件与刀具,重构切削的材料去除过程;其次,建立了基于神经网络的物理模型,完成了切削刃的力-热载荷解析,实现了切削力与刀具磨损的精准预测;最后,搭建机床运动模型,分析运动链与五轴联动过程,约束刀尖点(tool center point,TCP)与刀轴矢量变化。在此基础上,基于几何-物理-运动协同仿真模型提出工艺自主优化方法,根据周期迭代优化机制与梯度下降法自主迭代工艺参数,并在航空发动机叶片上进行了验证实验。结果表明,该方法能针对不同加工目标实现工艺优化,具有较高的适用性与优化效率。展开更多
文摘A thermodynamic model of hydrogen induced silicon surface layer splitting with the help of an oxidized silicon wafer bonded is proposed.Wafer splitting is the result of lateral growth of hydrogen blisters in the entire implanted hydrogen region during annealing.The blister growth rate depends on the effective activation energies of both hydrogen complex dissociation and hydrogen diffusion.The hydrogen blister radius was studied as the function of annealing time,annealing temperature and implantation dose.The critical radius was obtained according to the Griffith energy condition.The time required for wafer splitting at the cut temperature was calculated in accordance with the growth of hydrogen blisters.
文摘针对当前机械加工领域工艺优化效率低下、严重依赖人工经验的问题,提出了基于几何-物理-运动协同仿真的智能机床工艺自主优化方法。首先,构建了几何模型,实现数字化表达工件与刀具,重构切削的材料去除过程;其次,建立了基于神经网络的物理模型,完成了切削刃的力-热载荷解析,实现了切削力与刀具磨损的精准预测;最后,搭建机床运动模型,分析运动链与五轴联动过程,约束刀尖点(tool center point,TCP)与刀轴矢量变化。在此基础上,基于几何-物理-运动协同仿真模型提出工艺自主优化方法,根据周期迭代优化机制与梯度下降法自主迭代工艺参数,并在航空发动机叶片上进行了验证实验。结果表明,该方法能针对不同加工目标实现工艺优化,具有较高的适用性与优化效率。
