Design and simulation results of a novel multifunctional electronic calibration kit based on microelectromechanical system(MEMS)single-pole double-throw(SPDT)switches are presented in this paper.The short-open-load-th...Design and simulation results of a novel multifunctional electronic calibration kit based on microelectromechanical system(MEMS)single-pole double-throw(SPDT)switches are presented in this paper.The short-open-load-through(SOLT)calibration states can be completed simultaneously by using the MEMS electronic calibration,and the electronic calibrator can be reused 10^(6) times.The simulation results show that this novel electronic calibration can be used in a frequency range of 0.1 GHz–20 GHz,the return loss is less than 0.18 dB and 0.035 dB in short-circuit and open-circuit states,respectively,and the insertion loss in through(thru)state is less than 0.27 dB.On the other hand,the size of this novel calibration kit is only 6 mm×2.8 mm×0.8 mm.Our results demonstrate that the calibrator with integrated radiofrequency microelectromechanical system(RF MEMS)switches can not only provide reduced size,loss,and calibration cost compared with traditional calibration kit but also improves the calibration accuracy and efficiency.It has great potential applications in millimeter-wave measurement and testing technologies,such as device testing,vector network analyzers,and RF probe stations.展开更多
采用0.18μm CMOS SOI工艺设计制作了一种集成控制模块的微波单刀双掷开关。开关控制模块包含了低压差线性稳压器和负电压电荷泵,低压差线性稳压器将外部供电高电压转换为开关电路低电压,负电压电荷泵产生一个负压,用以改善开关的性能...采用0.18μm CMOS SOI工艺设计制作了一种集成控制模块的微波单刀双掷开关。开关控制模块包含了低压差线性稳压器和负电压电荷泵,低压差线性稳压器将外部供电高电压转换为开关电路低电压,负电压电荷泵产生一个负压,用以改善开关的性能。制作的SOI开关具有良好的性能,芯片测试表明,开关导通状态下从DC到9 GHz范围内插损小于1.7 d B,关断状态下隔离度大于28.5 d B,回波损耗小于-15 d B,开关开启时间为1.06μs。芯片的尺寸为0.87 mm×1.08 mm。展开更多
Monolithic GaAs pin diode single pole double throw （SPDT） switches based on the fabrication technology of IMECAS are designed,fabricated,and tested. These SPDT switches achieve an insertion loss of 1.5dB,isolation o...Monolithic GaAs pin diode single pole double throw （SPDT） switches based on the fabrication technology of IMECAS are designed,fabricated,and tested. These SPDT switches achieve an insertion loss of 1.5dB,isolation of 32dB, and input and output return losses over 10dB from 8 to 20GHz. The switch design uses 2.5μm thick I-region GaAs pin diodes and a series-shunt-shunt switch topology in each arm. These performance characteristics are measured at a normal bias setting of 1.3V,which corresponds to 7mA of series diode bias current.展开更多
基金Project supported by the National Defense Technology Industry Strong,China (Grant No. JCKY2018408B006)the Information System New Items Project,China (Grant Nos. 2018XW0026 and 2019XW0010)the Information System Pre-research Project,China (Grant No. 31513060101)
文摘Design and simulation results of a novel multifunctional electronic calibration kit based on microelectromechanical system(MEMS)single-pole double-throw(SPDT)switches are presented in this paper.The short-open-load-through(SOLT)calibration states can be completed simultaneously by using the MEMS electronic calibration,and the electronic calibrator can be reused 10^(6) times.The simulation results show that this novel electronic calibration can be used in a frequency range of 0.1 GHz–20 GHz,the return loss is less than 0.18 dB and 0.035 dB in short-circuit and open-circuit states,respectively,and the insertion loss in through(thru)state is less than 0.27 dB.On the other hand,the size of this novel calibration kit is only 6 mm×2.8 mm×0.8 mm.Our results demonstrate that the calibrator with integrated radiofrequency microelectromechanical system(RF MEMS)switches can not only provide reduced size,loss,and calibration cost compared with traditional calibration kit but also improves the calibration accuracy and efficiency.It has great potential applications in millimeter-wave measurement and testing technologies,such as device testing,vector network analyzers,and RF probe stations.
文摘采用0.18μm CMOS SOI工艺设计制作了一种集成控制模块的微波单刀双掷开关。开关控制模块包含了低压差线性稳压器和负电压电荷泵,低压差线性稳压器将外部供电高电压转换为开关电路低电压,负电压电荷泵产生一个负压,用以改善开关的性能。制作的SOI开关具有良好的性能,芯片测试表明,开关导通状态下从DC到9 GHz范围内插损小于1.7 d B,关断状态下隔离度大于28.5 d B,回波损耗小于-15 d B,开关开启时间为1.06μs。芯片的尺寸为0.87 mm×1.08 mm。
文摘Monolithic GaAs pin diode single pole double throw （SPDT） switches based on the fabrication technology of IMECAS are designed,fabricated,and tested. These SPDT switches achieve an insertion loss of 1.5dB,isolation of 32dB, and input and output return losses over 10dB from 8 to 20GHz. The switch design uses 2.5μm thick I-region GaAs pin diodes and a series-shunt-shunt switch topology in each arm. These performance characteristics are measured at a normal bias setting of 1.3V,which corresponds to 7mA of series diode bias current.
