期刊文献+
共找到2篇文章
< 1 >
每页显示 20 50 100
Single-cycle contact-interference hybrid lithography for scalable fabrication of arrayed quadrant micro-polarizer structures
1
作者 Tianshi Lu Fuyuan Deng +2 位作者 Yufeng Wei Zhipeng Zeng Xinghui Li 《International Journal of Extreme Manufacturing》 2026年第2期693-709,共17页
The advantages of polarization imaging can be readily leveraged in remote sensing applications by applying subwavelength metal grating arrays in standard optical imaging systems.However,the efficient fabrication of th... The advantages of polarization imaging can be readily leveraged in remote sensing applications by applying subwavelength metal grating arrays in standard optical imaging systems.However,the efficient fabrication of these arrays remains a significant challenge due to their dual size-scale features,periodic subwavelength grating structures with feature sizes of hundreds of nanometers,and pixel quadrants with dimensions on the order of tens of micrometers.The present study addresses this issue by introducing contact-interference assembly hybrid lithography.With this method,fine grating structures are fabricated using the interference fringes generated by two coherent laser beams having a wavelength close to the feature size.By using a specially designed,flexible mask,the interference wavefront is then segmented to produce the grating structures in each quadrant of the array unit via a single-cycle process.Notably,sub-micron alignment accuracy is guaranteed by introducing an overlay measurement system.The adverse effects of the gap between the mask and the substrate are suppressed by a mechanism in which the refractive index is smoothed out.A fabrication platform was developed,and a double-layer metal grating with a 20 mm×20 mm four-quadrant array having a period of 950 nm and a unit size of 15μm×15μm was constructed using a total exposure time of 180 s.This represents a 3−4 orders of magnitude reduction in the fabrication time compared to that of electron beam lithography.The quadrant micro-polarizer was characterized,where the produced sample exhibited a polarization extinction ratio of over 20 dB and an equivalent transmittance of approximately 50%.The results reveal the feasibility of the proposed method for scalable fabrication. 展开更多
关键词 lithography single-cycle process micro-polarization array polarization imaging mid-infrared spectrometry
在线阅读 下载PDF
Generating quasi-single-cycle THz pulse from frequency-chirped electron bunch train and a tapered undulator
2
作者 Zhuoran Ma Zhe Wang +2 位作者 Feichao Fu Rui Wang Dao Xiang 《High Power Laser Science and Engineering》 SCIE CAS CSCD 2016年第1期5-8,共4页
We propose a proof-of-principle experiment to test a new scheme to produce a single-cycle radiation pulse in free-electron lasers(FELs). Here, a few α-BBO crystals will be first used to produce an equally spaced lase... We propose a proof-of-principle experiment to test a new scheme to produce a single-cycle radiation pulse in free-electron lasers(FELs). Here, a few α-BBO crystals will be first used to produce an equally spaced laser pulse train.Then, the laser pulse train illuminates the cathode to produce a frequency-chirped electron bunch train in a photocathode rf gun. Finally, the frequency-chirped electron bunch train passes through a tapered undulator to produce a quasi-single-cycle THz pulse. This experiment should allow comparison and confirmation of predictive models and scaling laws, and the preliminary experimental results will also be discussed. 展开更多
关键词 electron BUNCH TRAIN single-cycle THZ PULSE tapered UNDULATOR
原文传递
上一页 1 下一页 到第
使用帮助 返回顶部