A compact and highly sensitive gas pressure and temperature sensor based on Fabry-Pérot interferometer(FPI)and fiber Bragg grating(FBG)is proposed and demonstrated experimentally in this paper.The theoretical mod...A compact and highly sensitive gas pressure and temperature sensor based on Fabry-Pérot interferometer(FPI)and fiber Bragg grating(FBG)is proposed and demonstrated experimentally in this paper.The theoretical model for pressure and temperature sensing is established.Building on this foundation,a novel micro silicon cavity sensor structure sensitive to pressure is devised downstream of an FBG.The concept of separate measurement and the mechanisms enhancing pressure sensitivity are meticulously analyzed,and the corresponding samples are fabricated.The experimental results indicate that the pressure sensitivity of the sensor is-747.849 nm/MPa in 0—100 k Pa and its linearity is 99.7%and it maintains good stability in 150 min.The sensor offers the advantages of compact size,robust construction,easy fabrication,and high sensitivity,making it potentially valuable for micro-pressure application.展开更多
According to the sensing structure of a practical silicon resonant pressure micro sensor whose preliminary sensing unit is a square silicon diaphragm and the final sensing unit is a silicon beam resonator, its operati...According to the sensing structure of a practical silicon resonant pressure micro sensor whose preliminary sensing unit is a square silicon diaphragm and the final sensing unit is a silicon beam resonator, its operating mechanism is analyzed. The thermal resistor acts as the excited unit, and the piezoresistive unit acts as the detector, for the above micro sensor. By using the amplitude and phase conditions, the self exciting closed loop system is investigated based on the operating mechanism for the abov...展开更多
Silicon microstrip detectors are widely used in experiments for space astronomy.Before the detector is assembled,extensive characterization of the silicon microstrip sensors is indispensable and challenging.This work ...Silicon microstrip detectors are widely used in experiments for space astronomy.Before the detector is assembled,extensive characterization of the silicon microstrip sensors is indispensable and challenging.This work electrically evaluates a series of sensor parameters,including the depletion voltage,bias resistance,metal strip resistance,total leakage current,strip leakage current,coupling capacitance,and interstrip capacitance.Two methods are used to accurately measure the strip leakage current,and the test results match each other well.In measuring the coupling capacitance,we extract the correct value based on a SPICE model and two-port network analysis.In addition,the expression of the measured bias resistance is deduced based on the SPICE model.展开更多
The NO2 gas sensing behavior of porous silicon（PS） is studied at room temperature with and without ultraviolet（UV） light radiation.The PS layer is fabricated by electrochemical etching in an HF-based solution on a...The NO2 gas sensing behavior of porous silicon（PS） is studied at room temperature with and without ultraviolet（UV） light radiation.The PS layer is fabricated by electrochemical etching in an HF-based solution on a p ＋-type silicon substrate.Then,Pt electrodes are deposited on the surface of the PS to obtain the PS gas sensor.The NO2 sensing properties of the PS with different porosities are investigated under UV light radiation at room temperature.The measurement results show that the PS gas sensor has a much higher response sensitivity and faster response-recovery characteristics than NO2 under the illumination.The sensitivity of the PS sample with the largest porosity to 1 ppm NO2 is 9.9 with UV light radiation,while it is 2.4 without UV light radiation.We find that the ability to absorb UV light is enhanced with the increase in porosity.The PS sample with the highest porosity has a larger change than the other samples.Therefore,the effect of UV radiation on the NO2 sensing properties of PS is closely related to the porosity.展开更多
A calibration test was done in order to measure its sensitivity coefficient by an improved soil test device.The experimental result shows that the soil pressure min-sensor made of the monocrystalline silicon（SPMMS）i...A calibration test was done in order to measure its sensitivity coefficient by an improved soil test device.The experimental result shows that the soil pressure min-sensor made of the monocrystalline silicon（SPMMS）is proved to be good linear,high precision and less that can fetch precise data in low pressure range even near by O point,which guarantees the reliability of the soil pressure test in geotechnical engineering.展开更多
Novel potassium ion selective electrodes (K^+ISEs) and cDNA array sensors based on porous silicon (PS) have been developed.The calibration curve for the K^+ISEs is linear within a wide range of pK=2.0～6.0 with the sl...Novel potassium ion selective electrodes (K^+ISEs) and cDNA array sensors based on porous silicon (PS) have been developed.The calibration curve for the K^+ISEs is linear within a wide range of pK=2.0～6.0 with the slope of 56 mV per decade,which is near Nernst response.The response time and detection limit are within 31 s and 0.5μmol/L,respectively.The selective coefficient for Na^+ is-3.8,satisfies the requirement for the assay of blood potassium.The response variation is within 2 mV during 2 months.The binding capacity,the dynamic range and the detection limit of the DNA sensors were improved by replacing glass slide with PS substrates.The cDNA array sensors can bear 80℃of high temperature,75% of humidity,3.6 kLx of irradiation and keep stable within 10 days when they are exposed in air.Good performances of the K^+ISE and the cDNA array sensor are attributed to the large internal surface area and the easily modified microstructure of PS.展开更多
The fabrication of nano porous silicon, nPSi, using alkali etching process has been studied and carried out. The surface chemistry of anisotropic etching of n-type Si-wafer is reviewed and the anisotropic chemical etc...The fabrication of nano porous silicon, nPSi, using alkali etching process has been studied and carried out. The surface chemistry of anisotropic etching of n-type Si-wafer is reviewed and the anisotropic chemical etching of silicon in alkaline solution using wetting agents is discussed. Transformation of crystallographic plane of n-Si (211) to nPSi (100) has occurred on using n-propanol as wetting agent. The rate of pore formation was 0.02478 - 0.02827 μm/min, which was heavily dependent upon the concentration of the etchant containing wetting agents, allowing patterned porous silicon formation through selective doping of the substrate. A particle size of 15 nm for porous nano-silicon was calculated from the XRD data. Porosity of PS layers is about 10%. Pore diameter and porous layer thickness are 0.0614 nm and 16 μm, respectively. The energy gap of the produced porous silicon is 3.3 eV. Furthermore, the combination of PS with Congo Red, which are nanostructured due to their deposition within the porous matrix is discussed. Such nano compounds offer broad avenue of new and interesting properties depending on the involved materials as well as on their morphology. Chemical route was utilized as the host material to achieve pores filling. They were impregnated with Congo Red, which gave good results for the porous silicon as a promising pH sensor.展开更多
A new silicon micro flow sensor with multiple temperature sensing elements was proposed and numerically simulated in considering wide range flow measuring properties.The micro flow sensor has three pairs of temperatur...A new silicon micro flow sensor with multiple temperature sensing elements was proposed and numerically simulated in considering wide range flow measuring properties.The micro flow sensor has three pairs of temperature sensing elements with a central heater compared with typical sensor which has only a temperature sensing element on each side of a central heater.A numerical analysis of the micro flow sensor by Finite Difference Formulation for Heat Transfer Equation was performed.The nearest pair of temperature sensor showed very good linear sensitivity between 0 to 0.4m/s flow and saturated from 0.75m/s flow.However the furthest pair of temperature sensor showed some flow sensitivity even though the flow rate of 2.0m/s.Thus,this suggested new micro flow meter with multiple temperature sensing elements could be used as a thermal mass flow sensor which has accuracy sensitivity for very wide flow range.展开更多
基金supported in part by the National Natural Science Foundation of China(Nos.61735014 and 61927812)the Shaanxi Provincial Education Department(No.18JS093)+2 种基金the Natural Science Basic Research Program of Shaanxi Province(No.2024JC-YBMS-530)the Operation Fund of Logging Key Laboratory of Group Company(No.2021DQ0107-11)the Graduate Student Innovation Fund of Xi’an Shiyou University(No.YCS23213193)。
文摘A compact and highly sensitive gas pressure and temperature sensor based on Fabry-Pérot interferometer(FPI)and fiber Bragg grating(FBG)is proposed and demonstrated experimentally in this paper.The theoretical model for pressure and temperature sensing is established.Building on this foundation,a novel micro silicon cavity sensor structure sensitive to pressure is devised downstream of an FBG.The concept of separate measurement and the mechanisms enhancing pressure sensitivity are meticulously analyzed,and the corresponding samples are fabricated.The experimental results indicate that the pressure sensitivity of the sensor is-747.849 nm/MPa in 0—100 k Pa and its linearity is 99.7%and it maintains good stability in 150 min.The sensor offers the advantages of compact size,robust construction,easy fabrication,and high sensitivity,making it potentially valuable for micro-pressure application.
基金The Chinese Aeronautics Science Foundation(99I5 10 0 6)Foundation for University Key Teacherby the Ministry of Education
文摘According to the sensing structure of a practical silicon resonant pressure micro sensor whose preliminary sensing unit is a square silicon diaphragm and the final sensing unit is a silicon beam resonator, its operating mechanism is analyzed. The thermal resistor acts as the excited unit, and the piezoresistive unit acts as the detector, for the above micro sensor. By using the amplitude and phase conditions, the self exciting closed loop system is investigated based on the operating mechanism for the abov...
基金This work was supported by the National Key R&D Program of China(No.2016YFA0400204)the National Natural Science Foundation of China(Nos.11873020,11973097,and U1738210)the Strategic Pioneer Program on Space Science of the Chinese Academy of Sciences(No.XDA15010200)。
文摘Silicon microstrip detectors are widely used in experiments for space astronomy.Before the detector is assembled,extensive characterization of the silicon microstrip sensors is indispensable and challenging.This work electrically evaluates a series of sensor parameters,including the depletion voltage,bias resistance,metal strip resistance,total leakage current,strip leakage current,coupling capacitance,and interstrip capacitance.Two methods are used to accurately measure the strip leakage current,and the test results match each other well.In measuring the coupling capacitance,we extract the correct value based on a SPICE model and two-port network analysis.In addition,the expression of the measured bias resistance is deduced based on the SPICE model.
基金Project supported by the National Natural Science Foundation of China (Grant Nos. 60771019 and 60801018)the Tianjin Key Research Program of Application Foundation and Advanced Technology,China (Grant No. 11JCZDJC15300)
文摘The NO2 gas sensing behavior of porous silicon（PS） is studied at room temperature with and without ultraviolet（UV） light radiation.The PS layer is fabricated by electrochemical etching in an HF-based solution on a p ＋-type silicon substrate.Then,Pt electrodes are deposited on the surface of the PS to obtain the PS gas sensor.The NO2 sensing properties of the PS with different porosities are investigated under UV light radiation at room temperature.The measurement results show that the PS gas sensor has a much higher response sensitivity and faster response-recovery characteristics than NO2 under the illumination.The sensitivity of the PS sample with the largest porosity to 1 ppm NO2 is 9.9 with UV light radiation,while it is 2.4 without UV light radiation.We find that the ability to absorb UV light is enhanced with the increase in porosity.The PS sample with the highest porosity has a larger change than the other samples.Therefore,the effect of UV radiation on the NO2 sensing properties of PS is closely related to the porosity.
文摘A calibration test was done in order to measure its sensitivity coefficient by an improved soil test device.The experimental result shows that the soil pressure min-sensor made of the monocrystalline silicon（SPMMS）is proved to be good linear,high precision and less that can fetch precise data in low pressure range even near by O point,which guarantees the reliability of the soil pressure test in geotechnical engineering.
基金supported by National Natural Science Foundation of China(69925409,60276036)Shanghai Applied Material Foundation(0202).
文摘Novel potassium ion selective electrodes (K^+ISEs) and cDNA array sensors based on porous silicon (PS) have been developed.The calibration curve for the K^+ISEs is linear within a wide range of pK=2.0～6.0 with the slope of 56 mV per decade,which is near Nernst response.The response time and detection limit are within 31 s and 0.5μmol/L,respectively.The selective coefficient for Na^+ is-3.8,satisfies the requirement for the assay of blood potassium.The response variation is within 2 mV during 2 months.The binding capacity,the dynamic range and the detection limit of the DNA sensors were improved by replacing glass slide with PS substrates.The cDNA array sensors can bear 80℃of high temperature,75% of humidity,3.6 kLx of irradiation and keep stable within 10 days when they are exposed in air.Good performances of the K^+ISE and the cDNA array sensor are attributed to the large internal surface area and the easily modified microstructure of PS.
文摘The fabrication of nano porous silicon, nPSi, using alkali etching process has been studied and carried out. The surface chemistry of anisotropic etching of n-type Si-wafer is reviewed and the anisotropic chemical etching of silicon in alkaline solution using wetting agents is discussed. Transformation of crystallographic plane of n-Si (211) to nPSi (100) has occurred on using n-propanol as wetting agent. The rate of pore formation was 0.02478 - 0.02827 μm/min, which was heavily dependent upon the concentration of the etchant containing wetting agents, allowing patterned porous silicon formation through selective doping of the substrate. A particle size of 15 nm for porous nano-silicon was calculated from the XRD data. Porosity of PS layers is about 10%. Pore diameter and porous layer thickness are 0.0614 nm and 16 μm, respectively. The energy gap of the produced porous silicon is 3.3 eV. Furthermore, the combination of PS with Congo Red, which are nanostructured due to their deposition within the porous matrix is discussed. Such nano compounds offer broad avenue of new and interesting properties depending on the involved materials as well as on their morphology. Chemical route was utilized as the host material to achieve pores filling. They were impregnated with Congo Red, which gave good results for the porous silicon as a promising pH sensor.
文摘A new silicon micro flow sensor with multiple temperature sensing elements was proposed and numerically simulated in considering wide range flow measuring properties.The micro flow sensor has three pairs of temperature sensing elements with a central heater compared with typical sensor which has only a temperature sensing element on each side of a central heater.A numerical analysis of the micro flow sensor by Finite Difference Formulation for Heat Transfer Equation was performed.The nearest pair of temperature sensor showed very good linear sensitivity between 0 to 0.4m/s flow and saturated from 0.75m/s flow.However the furthest pair of temperature sensor showed some flow sensitivity even though the flow rate of 2.0m/s.Thus,this suggested new micro flow meter with multiple temperature sensing elements could be used as a thermal mass flow sensor which has accuracy sensitivity for very wide flow range.
