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Study of a novel SiC-based light initiated multi-gate semiconductor switch
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作者 Chongbiao Luan Jianqiang Yuan +7 位作者 Hongwei Liu Longfei Xiao Huiru Sha Le Xu Yang He Lingyun Wang Hongtao Li Yupeng Huang 《Journal of Semiconductors》 2025年第11期48-54,共7页
To optimize turn on velocity of the SiC LIMS,we proposed a new structure for the LIMS that incorporates an opti-mized n^(+)layer and a multi-light triggered electrode design for the anode.The chip size is 5.5 mm×... To optimize turn on velocity of the SiC LIMS,we proposed a new structure for the LIMS that incorporates an opti-mized n^(+)layer and a multi-light triggered electrode design for the anode.The chip size is 5.5 mm×5.5 mm in dimension.The experiment results indicate that the saturation laser energy required to trigger the prepared SiC LIMS has been decreased from 1.8 mJ to 40μJ,with the forward blocking voltage of the prepared SiC LIMSs capable of withstanding over 7000 V.The leakage current is about 0.3μA at room temperature,and the output current density achieves 4.25 kA/cm^(2)(with di/dt larger than 20 kA/μs). 展开更多
关键词 SIC light initiated multi-gate semiconductor switch leakage current pulsed power system
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Performance of Lateral 4H-SiC Photoconductive Semiconductor Switches by Extrinsic Backside Trigger
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作者 WANG Hao LIU Xuechao +8 位作者 ZHENG Zhong PAN Xiuhong XU Jintao ZHU Xinfeng CHEN Kun DENG Weijie TANG Meibo GUO Hui GAO Pan 《无机材料学报》 SCIE EI CAS CSCD 北大核心 2024年第9期1070-1076,共7页
Photoconductive semiconductor switch(PCSS)can be applied in pulsed high power systems and microwave techniques.However,reducing the damage and increasing the lifetime of silicon carbide(SiC)PCSS are still faced severe... Photoconductive semiconductor switch(PCSS)can be applied in pulsed high power systems and microwave techniques.However,reducing the damage and increasing the lifetime of silicon carbide(SiC)PCSS are still faced severe challenges.In this study,PCSSs with various structures were prepared on 4-inch diameter,500μm thick high-purity semi-insulating 4H-SiC substrates and their on-state resistance and damage mechanisms were investigated.It was found that the PCSS of an Au/TiW/Ni electrode system annealed at 950℃had a minimum on-state resistance of 6.0Ωat 1 kV bias voltage with a 532 nm and 170 mJ pulsed laser by backside illumination single trigger.The backside illumination single trigger could reduce on-state resistance and alleviate the damage of PCSS compared to the frontside trigger when the diameter of the laser spot was larger than the channel length of PCSS.For the 200 s trigger test by a 10 Hz laser,the black branch-like ablation on Au/TiW/Ni PCSS was mainly caused by thermal stress owing to hot carriers.Replacing metal Ni with boron gallium co-doped zinc oxide(BGZO)thin films annealed at 400℃,black branch-like ablation was alleviated while concentric arc damage was obvious at the anode.The major causes of concentric arc are both pulsed laser diffraction and thermal effect. 展开更多
关键词 silicon carbide photoconductive semiconductor switch on-state resistance failure analysis
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Transient Characteristics of a Nonlinear GaAs Photoconductive Semiconductor Switch
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作者 王馨梅 施卫 +1 位作者 屈光辉 田立强 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第6期1108-1110,共3页
The transient resistance,voltage,and power of a nonlinear GaAs photoconductive semiconductor switch (PCSS) are presented by the finite difference formula to deal with the experiment data, based on the conversation o... The transient resistance,voltage,and power of a nonlinear GaAs photoconductive semiconductor switch (PCSS) are presented by the finite difference formula to deal with the experiment data, based on the conversation of energy in the switch circuit. This method resolves the problem of directly measuring the transient characteristics of PCSS in nonlinear mode. The curve of transient voltage shows that the average electric field of PCSS in the lock-on period is always higher than the Gunn threshold,and increases monotonically. By comparing the transient power curves of the PCSS and the electrical source,it is demonstrated directly that the power shortage leads to the PCSS from the lock-on state into the selfturnoff state,so a controllable turnoff of the PCSS in lock-on by changing the distribution of the circuit power is predicted. 展开更多
关键词 photoconductive semiconductor switch lock-on effect nonlinear mode controllable turnoff
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Photoconductive semiconductor switch-based triggering with 1 ns jitter for trigatron 被引量:8
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作者 Langning Wang Yongsheng Jia Jinliang Liu 《Matter and Radiation at Extremes》 SCIE EI CAS 2018年第5期256-260,共5页
Synchronization for multiple-pulse at nanosecond range shows a great value on the power multiplication and synchronous electric fieldsapplications. Nanosecond or sub-ns jitter synchronization is essential for the impr... Synchronization for multiple-pulse at nanosecond range shows a great value on the power multiplication and synchronous electric fieldsapplications. Nanosecond or sub-ns jitter synchronization is essential for the improved working efficiency of the large amounts of pulse modulesand accurate requirements for the power coherent combining applications. This paper presents a trigger generator based on a laser diodetriggered GaAs photoconductive semiconductor switch (PCSS) with low jitter and compact size characteristics. It avoids the high currentsthat are harmful to high-gain mode PCSSs. In the trigger circuit, a 200 pF capacitor is charged by a microsecond-scale 18 kV pulse and thendischarged via the high-gain mode GaAs PCSS to trigger the high-power trigatron switch. When triggered by the ~10 ns pulse generated by thePCSS, the DC-charged trigatron can operate in the 20e35 kV range with 10 ns rise time and 1 ns delay-time jitter. 展开更多
关键词 Pulsed power High power switches SYNCHRONIZATION Trigger generator Photoconductive semiconductor switch
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Roles of voltage in semi-insulating GaAs photoconductive semiconductor switch 被引量:1
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作者 Hai-Juan Cui Hong-Chun Yang +2 位作者 Jun Xu Yu-Ming Yang Zi-Xian Yang 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第1期493-497,共5页
An experimental study of leakage current is presented in a semi-insulating(SI) Ga As photoconductive semiconductor switch(PCSS) with voltages up to 5.8 kV(average field is 19.3 kV/cm). The leakage current increa... An experimental study of leakage current is presented in a semi-insulating(SI) Ga As photoconductive semiconductor switch(PCSS) with voltages up to 5.8 kV(average field is 19.3 kV/cm). The leakage current increases nonlinearly with the bias voltage increasing from 1.2×10^-9 A to 3.6×10^-5A. Furthermore, the dark resistance, which is characterized as a function of electric field, does not monotonically decrease with the field but displays several distinct regimes. By eliminating the field-dependent drift velocity, the free-electron density n is extracted from the current, and then the critical field for each region of n(E) characteristic of PCSS is obtained. It must be the electric field that provides the free electron with sufficient energy to activate the carrier in the trapped state via multiple physical mechanisms, such as impurity ionization, fielddependent EL2 capture, and impact ionization of donor centers EL10 and EL2. The critical fields calculated from the activation energy of these physical processes accord well with the experimental results. Moreover, agreement between the fitting curve and experimental data of J(E), further confirms that the dark-state characteristics are related to these field-dependent processes. The effects of voltage on SI-Ga As PCSS may give us an insight into its physical mechanism. 展开更多
关键词 photoconductive semiconductor switch leakage current dark resistance nonlinear characteristics
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A High Power Semiconductor Switch RSD for Pulsed Power Applications
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作者 周郁明 余岳辉 +1 位作者 陈海刚 梁琳 《Plasma Science and Technology》 SCIE EI CAS CSCD 2007年第5期622-625,共4页
High power switch is one of the most important components in pulsed power technology. The RSD (Reversely Switched Dynistor), turned on by a thin layer of an electron-hole plasma, is a high power semiconductor switch... High power switch is one of the most important components in pulsed power technology. The RSD (Reversely Switched Dynistor), turned on by a thin layer of an electron-hole plasma, is a high power semiconductor switch. In this study, the RSD turn-on conditions were investigated by numerical analysis and device simulation as well as the experiments conducted to validate the turn-on conditions. A design of a triggering high-voltage RSD is presented based on a saturable transformer. 展开更多
关键词 pulsed power semiconductor switch RSD trigger charge saturable transformer
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Experimental Study of Surface Flashover Field of SI-GaAs Photoconductive Semiconductor Switch
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作者 JI Weili SHI Wei 《高电压技术》 EI CAS CSCD 北大核心 2013年第8期1919-1924,共6页
With its unique features, photoconductive semiconductor switch (PCSS) is generally recognized today as a promising power electronic device. However, a major limitation of PCSS is its surprisingly low voltage threshold... With its unique features, photoconductive semiconductor switch (PCSS) is generally recognized today as a promising power electronic device. However, a major limitation of PCSS is its surprisingly low voltage threshold of surface flashover (SF). In this paper, an experimental study of surface flashover of a back-triggered PCSS is presented. The PCSSs with electrode gap of 18 mm are fabricated from liquid encapsulated czochralski (LEC) semi-insulating gallium arsenide (SI-GaAs), and they are either un-coated, or partly coated, or en- tirely coated PCSSs with high-strength transparent insulation. The SF fields of the PCSSs are measured and discussed. According to the experimental results, the high-dielectric-strength coating is efficient in both reducing the gas desorption from semiconductor and increasing the SF field: a well-designed PCSS can resist a voltage up to 20 kV under the repetition frequency of 30 Hz. The physical mechanism of the PCSS SF is analyzed, and the conclusion is made that having a channel structure, the SF is the breakdown of the contaminated dielectric layer at the semiconductor-ambient dielectric interface. The non-uniform distribution of the surface field and the gas desorption due to thermal effects of semiconductor surface currents are key factors causing the SF field reduction. 展开更多
关键词 光导半导体开关 SI-GAAS 沿面闪络 实验 光电 电力电子装置 光导开关 半绝缘砷化镓
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Applications of Semiconductor Switches in Pulsed Power Technology 被引量:19
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作者 孟志鹏 张自成 +1 位作者 杨汉武 钱宝良 《Chinese Physics C》 SCIE CAS CSCD 北大核心 2008年第z1期277-279,共3页
Pulsed power technology has an important trend in the world,which has high power,long pulse,high operating frequency and miniaturization.Thus all-solid-state pulsed power technologies based on semiconductor devices ha... Pulsed power technology has an important trend in the world,which has high power,long pulse,high operating frequency and miniaturization.Thus all-solid-state pulsed power technologies based on semiconductor devices have drawn more attention and widely used.This article introduces several kinds of semiconductor switches,such as SCR,IGBT,and SOS.The charging system based on SCR,the Marx generator,and pulsed transformer topology using IGBTs,and the system using SOS are described in detail.Some experimental results are also given.The use of semiconductor switches technology in solid state Marx generate can solve the disappointments such as short life time, low operating frequency,low reliability of conventional pulsed power equipments and has extensive perspective. 展开更多
关键词 semiconductor switch ALL-SOLID-STATE pulsed power
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Low-loss and Compact Hybrid DC Circuit Breaker Scheme Using Self-commutated Semiconductor Switch Module 被引量:1
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作者 Lei Qi Xinyuan Qu +3 位作者 Xilin Chen Liangtao Zhan Xiangyu Zhang Xiang Cui 《CSEE Journal of Power and Energy Systems》 SCIE EI CSCD 2023年第4期1585-1593,共9页
In traditional hybrid DC circuit breakers(HCBs)schemes,complex equipment is usually required to ensure current commutation from mechanical to semiconductor switches,which cause not only additional construction costs a... In traditional hybrid DC circuit breakers(HCBs)schemes,complex equipment is usually required to ensure current commutation from mechanical to semiconductor switches,which cause not only additional construction costs and volume but also additional losses and maintenance work.Different from this condition,a low-loss and compact HCB scheme that does not use separate current commutation equipment is proposed in this study.By rationally using the charge and discharge of the snubber capacitor,the self-commutated semiconductor switch(SCS)module can integrate both the current commutation and shutdown functions,thereby greatly reducing cost and volume.The working process is discussed and analyzed in detail,and then a 10-kA prototype is developed and tested,which verifies the feasibility and effectiveness of the proposed scheme.Index Terms-HVDC circuit breakers,hybrid DC circuit breakers(HCBs),self-commutated semiconductor switch(SCS). 展开更多
关键词 HVDC circuit breakers hybrid DC circuit breakers(HCBs) self-commutated semiconductor switch(SCS).
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Experimental investigation of limit space charge accumulation mode operation in a semi-insulating GaAs photoconductive semiconductor switch
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作者 马湘蓉 施卫 向梅 《Journal of Semiconductors》 EI CAS CSCD 2013年第7期106-110,共5页
Experiments with the limited space-charge accumulation(LSA) mode of oscillation in a large gap semiinsulating (SI) GaAs photoconductive semiconductor switch(PCSS) are discussed.It has been observed that growth a... Experiments with the limited space-charge accumulation(LSA) mode of oscillation in a large gap semiinsulating (SI) GaAs photoconductive semiconductor switch(PCSS) are discussed.It has been observed that growth and drift of a photo-activated charge domain(PACD) are quenched only when the bias voltage is more than twice the threshold voltage.The original negative resistance characteristics are directly utilized in the LSA mode;during LSA operation the spatial average of the electric field varies over a large portion of the negative differential mobility region of the velocity-electric field characteristic.The work efficiency of an SI GaAs PCSS is remarkably enhanced by electric field excursions into the positive resistance region when the total electric field is only below the threshold part of the time.The LSA mode can only operate in the certain conditions that satisfy the quenching of the accumulation layer and the smaller initial domain voltage. 展开更多
关键词 GaAs photoconductive semiconductor switch limit space charge accumulate mode accumulation layer photo-activated charge domain
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片上固态高功率微波实现辐射因子20 kV输出
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作者 栾崇彪 袁建强 +8 位作者 肖龙飞 刘宏伟 李洪涛 耿力东 何泱 杨杰 孙逊 李阳凡 徐现刚 《强激光与粒子束》 北大核心 2025年第12期9-10,共2页
随着低空经济产业加速发展,低空安防日益引起广泛关注。我们提出了一种片上固态高功率微波新思路,并在单个厚度0.5mm、直径0.15m的半导体晶圆上集成了储能电容、高功率光控半导体开关及天线,实现了辐射因子20kV的超宽谱高功率微波输出... 随着低空经济产业加速发展,低空安防日益引起广泛关注。我们提出了一种片上固态高功率微波新思路,并在单个厚度0.5mm、直径0.15m的半导体晶圆上集成了储能电容、高功率光控半导体开关及天线,实现了辐射因子20kV的超宽谱高功率微波输出。实验表明,基于集成化片上高功率微波系统,对10m处的消费级无人机造成了通信链路切断及飞行失控的效果。 展开更多
关键词 低空安防 片上高功率微波 光控半导体开关 反无人机
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采用半导体开关的重频Marx型长脉冲高压电源
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作者 丁明军 董攀 +1 位作者 李杰 冯宗明 《强激光与粒子束》 北大核心 2025年第3期26-30,共5页
为满足如速调管等对输出长达毫秒量级脉冲调制器需求,介绍一种基于Marx电路的长脉冲高压脉冲电源,它采用固态半导体开关作为主放电开关,通过在Marx每一级单元引入独立的充电半导体开关,解决了Marx采用电阻对储能电容充电导致无法高重频... 为满足如速调管等对输出长达毫秒量级脉冲调制器需求,介绍一种基于Marx电路的长脉冲高压脉冲电源,它采用固态半导体开关作为主放电开关,通过在Marx每一级单元引入独立的充电半导体开关,解决了Marx采用电阻对储能电容充电导致无法高重频工作的问题。设计一辅助电源给每一级Marx单元半导体开关的驱动电路供电,通过光纤触发,可输出1ms以上的长脉冲。采用该电路设计的Marx验证装置共有6级,可输出电压幅度-10kV/1A、脉冲宽度1ms的长脉冲,输出短脉冲时最高输出频率达50kHz以上。 展开更多
关键词 高压脉冲电源 半导体开关 Marx结构 长脉冲
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考虑驱动参数的Si/SiC混合器件损耗建模研究
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作者 刘平 曹麒 +3 位作者 肖标 肖凡 郭祺 涂春鸣 《湖南大学学报(自然科学版)》 北大核心 2025年第10期133-144,共12页
针对SiC MOSFET与Si IGBT并联构成的Si/SiC混合器件在不同驱动参数下损耗模型精度低问题,提出一种基于驱动参数的损耗建模方法.首先,在两种典型开关时序下分段分析Si/SiC混合器件的暂态过程.其次,基于驱动电压与驱动电阻构建损耗模型.最... 针对SiC MOSFET与Si IGBT并联构成的Si/SiC混合器件在不同驱动参数下损耗模型精度低问题,提出一种基于驱动参数的损耗建模方法.首先,在两种典型开关时序下分段分析Si/SiC混合器件的暂态过程.其次,基于驱动电压与驱动电阻构建损耗模型.最后,搭建双脉冲测试与稳态参数测量实验平台,在不同驱动电阻、不同负载电流与不同驱动电压条件下验证模型的准确性.实验结果表明,开关时序Ⅰ下开通损耗与关断损耗模型的拟合度分别达到97.61%和99.20%;在开关时序Ⅱ下,开通损耗与关断损耗模型的拟合度分别为97.83%和97.66%. 展开更多
关键词 功率半导体器件 SiC MOSFET Si IGBT 混合器件 损耗 驱动参数
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基于离化波导通机制的快速半导体开关
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作者 王淦平 金晓 +3 位作者 刘冰 李飞 宋法伦 吴朝阳 《太赫兹科学与电子信息学报》 2025年第10期1107-1112,共6页
快速离化开关(FID)具有高功率容量、快导通速度、高重复频率及低抖动等特性,成为固态脉冲源的理想开关。本文系统阐述了FID的工作原理,研究了开关内部的物理过程,分析了影响开关导通性能的主要因素,并开展耐压3.5 kV的快速离化开关设计... 快速离化开关(FID)具有高功率容量、快导通速度、高重复频率及低抖动等特性,成为固态脉冲源的理想开关。本文系统阐述了FID的工作原理,研究了开关内部的物理过程,分析了影响开关导通性能的主要因素,并开展耐压3.5 kV的快速离化开关设计和试制,采用漂移阶跃恢复二极管(DSRD)进行验证测试。在dU/dt大于3 kV/ns的触发条件下,开关样件可实现快速离化导通,典型击穿电压达7.37 kV,导通时间约为700 ps,电流为706 A。在50 Hz@1 s的重频运行实验中,电压/电流波形一致性好,证实了器件在1 s持续工作下的稳定性。该研究为高功率脉冲系统的固态化提供了可靠解决方案。 展开更多
关键词 功率半导体器件 快速离化波 亚纳秒导通 固态源
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基于PCSS触发TSS阵列的高压纳秒开关设计及应用
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作者 张静 屈光辉 +5 位作者 张琳 赵国强 张哲豪 刘丽娜 刘园园 李明奇 《强激光与粒子束》 北大核心 2025年第5期104-111,共8页
指标高、结构紧凑、稳定性好的固态高压脉冲开关对脉冲功率技术的进步具有重要意义。提出基于光电导开关(PCSS)和电涌抑制晶闸管(TSS)阵列的高压纳秒开关技术路线,采用便于实现高压隔离的PCSS作为TSS阵列的触发单元,研制了一种新型高压... 指标高、结构紧凑、稳定性好的固态高压脉冲开关对脉冲功率技术的进步具有重要意义。提出基于光电导开关(PCSS)和电涌抑制晶闸管(TSS)阵列的高压纳秒开关技术路线,采用便于实现高压隔离的PCSS作为TSS阵列的触发单元,研制了一种新型高压纳秒开关模块(PTTSSM)。研制的20 kV开关模块输出峰值电流23.7 A,脉冲宽度122.1 ns,上升时间和下降时间分别为55.9 ns和128.3 ns,尺寸为60 mm×60 mm×40 mm;100 kV模块输出峰值电压60~100 kV可调、最大输出峰值电流356 A,脉宽1.308μs,上升和下降时间分别是160.4 ns和2.454μs,尺寸为150 mm×100 mm×50 mm,均能够长时间稳定工作。基于新型高压纳秒开关模块的脉冲电源在有机废水处理实验中成功产生大量稳定低温等离子体,有效降解有机物,验证了开关模块驱动产生等离子体的可行性和有效性。 展开更多
关键词 高压纳秒开关 光电导开关 电涌抑制晶闸管 有机废水处理 低温等离子体技术
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平面型光导器件高压、高频响应测试链路研究
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作者 王日品 刘福印 +3 位作者 王朗宁 姚金妹 易木俣 荀涛 《半导体光电》 北大核心 2025年第3期396-402,共7页
针对平面型SiC,GaN光导器件,设计了一种用于高压、高频响应测试链路。根据宽禁带半导体器件的不同特性阻抗,利用PSpice软件对测试链路进行电路仿真,同时利用CST软件在0.5~5 GHz频率下进行高频响应仿真,最后分别采用SiC和GaN光导器件测... 针对平面型SiC,GaN光导器件,设计了一种用于高压、高频响应测试链路。根据宽禁带半导体器件的不同特性阻抗,利用PSpice软件对测试链路进行电路仿真,同时利用CST软件在0.5~5 GHz频率下进行高频响应仿真,最后分别采用SiC和GaN光导器件测试了链路的高压导通能力和高频响应能力。实验结果表明:所设计的高压、高频响应测试链路具有耐高压、全固态、可快速拆卸的优势,能满足平面型SiC,GaN光导器件在0~30 kV偏置电压和DC~1 GHz工作频段下的光电导测试需求。该研究成果为宽禁带半导体光电导器件的耐高压工作能力和高频响应能力提供一定的设计参考和实验借鉴。 展开更多
关键词 高压、高频响应 测试链路 平面型宽禁带半导体 光导开关 SiC GAN
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毫米波/太赫兹MEMS开关研究及技术进展 被引量:1
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作者 张博 李依桐 +4 位作者 张乃柏 宋瑞良 邓琨 杨光耀 刘军 《固体电子学研究与进展》 2025年第1期41-46,共6页
毫米波/太赫兹MEMS开关是一种采用半导体技术制造的微小型可移动器件,具有体积小、功耗低、集成度高等优点。本文首先介绍了毫米波/太赫兹MEMS开关的结构及工作原理,回顾了近年来基于固定梁式和悬臂梁式的毫米波/太赫兹MEMS开关的研究进... 毫米波/太赫兹MEMS开关是一种采用半导体技术制造的微小型可移动器件,具有体积小、功耗低、集成度高等优点。本文首先介绍了毫米波/太赫兹MEMS开关的结构及工作原理,回顾了近年来基于固定梁式和悬臂梁式的毫米波/太赫兹MEMS开关的研究进展,指出对于低功耗的应用来说,悬臂梁式的开关要优于其他的开关设计。然后,分析了几种典型的毫米波/太赫兹MEMS开关的重要性能指标优化方案。最后,阐述了毫米波/太赫兹MEMS开关在6G移动通信的应用,并对其未来研究趋势和面临的挑战进行了总结和展望。 展开更多
关键词 微机电开关 电容比 微加工 半导体技术 6G移动通信
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体结构4H-SiC光电导开关光电转换效率研究
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作者 李飞 黄嘉 +2 位作者 刘京亮 侯钧杰 陈湘锦 《强激光与粒子束》 北大核心 2025年第9期13-19,共7页
随着固态化、模块化、小型化脉冲功率系统的需求不断加深,宽禁带半导体光电导开关(PCSS)由于高功率和快响应等特点引起了广泛的关注。基于高纯半绝缘(HPSI)碳化硅(SiC)衬底,研制了体结构SiC PCSS。在此基础上,提出了一种基于氟化镁和二... 随着固态化、模块化、小型化脉冲功率系统的需求不断加深,宽禁带半导体光电导开关(PCSS)由于高功率和快响应等特点引起了广泛的关注。基于高纯半绝缘(HPSI)碳化硅(SiC)衬底,研制了体结构SiC PCSS。在此基础上,提出了一种基于氟化镁和二氧化钛的高反射镜SiC光电导开关封装结构,有效地提高了光电导开关的光能利用率,搭建了基于新封装结构高纯SiC光电导开关的亚纳秒短脉冲产生电路,优化了脉冲形成线与光电导开关的连接方式,设计了开槽型脉冲形成线结构,减小了电路的寄生电感,缩短了电路的响应时间。采用新封装结构和脉冲形成线,在偏置电压为10 kV、激光波长为532 nm、激光脉冲半高宽为500 ps、激光脉冲能量为90μJ和负载为50Ω的工作条件下,实验获得了电压幅值为7.6 kV的亚纳秒短脉冲,脉冲波形的上升沿和半高宽分别为620 ps和2.2 ns,对应的输出峰值功率为1.1 MW,系统的光电功率增益达到7.7 dB。 展开更多
关键词 光电导开关 高纯半绝缘碳化硅 光电转换效率 峰值输出功率 光电功率增益
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Application of an Al-doped zinc oxide subcontact layer on vanadium-compensated 6H–SiC photoconductive switches 被引量:1
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作者 周天宇 刘学超 +3 位作者 黄维 代冲冲 郑燕青 施尔畏 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第4期241-245,共5页
Al-doped ZnO thin film (AZO) is used as a subcontact layer in 6H-SiC photoconductive semiconductor switches (PCSSs) to reduce the on-state resistance and optimize the device structure. Our photoconductive test sho... Al-doped ZnO thin film (AZO) is used as a subcontact layer in 6H-SiC photoconductive semiconductor switches (PCSSs) to reduce the on-state resistance and optimize the device structure. Our photoconductive test shows that the onstate resistance of lateral PCSS with an n+-AZO subcontact layer is 14.7% lower than that of PCSS without an n+-AZO subcontact layer. This occurs because a heavy-doped AZO thin film can improve Ohmic contact properties, reduce contact resistance, and alleviate Joule heating. Combined with the high transparance characteristic at 532 nm of AZO film, vertical structural PCSS devices are designed and their structural superiority is discussed. This paper provides a feasible route for fabricating high performance SiC PCSS by using conductive and transparent ZnO-based materials. 展开更多
关键词 photoconductive semiconductor switch SIC n+-AZO subcontact layer on-state resistance
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一种基于终端扩展结构的高场强平面碳化硅光导器件仿真研究
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作者 刘福印 王朗宁 +5 位作者 何婷 曾玲珑 王日品 牛昕玥 易木俣 荀涛 《现代应用物理》 2025年第2期133-140,共8页
平面型光导器件作为常见的构型,其电极间的闪络和击穿现象严重制约了器件的工作性能。为了提升平面型光导器件工作电压,介绍了一种基于终端扩展结构的电场屏蔽结构,该结构在器件阳极与阴极下方分别外延p型和n型碳化硅(SiC)高电导率层,... 平面型光导器件作为常见的构型,其电极间的闪络和击穿现象严重制约了器件的工作性能。为了提升平面型光导器件工作电压,介绍了一种基于终端扩展结构的电场屏蔽结构,该结构在器件阳极与阴极下方分别外延p型和n型碳化硅(SiC)高电导率层,采用增大曲率半径和引入反向电荷电场2种措施来匀化内部电场。利用TCAD数值仿真软件,研究了不同结构参数对器件通态峰值电场与电流密度的优化效果,并分析了优化结构对导通特性的影响。仿真结果表明,终端扩展结构能够有效匀化器件内部动态峰值电场并缓解电流聚集现象。在电极间隙为1 mm、光峰值功率为100 kW·mm^(-2)、偏置电场为100 kV·cm^(-1)的条件下,与原始器件相比,优化器件能够将最大电场和最大电流密度分别减小90%和81%,同时导通电阻降低了26%。终端扩展结构可为提升平面光导器件通态击穿电压提供参考。 展开更多
关键词 SIC 光电导半导体开关 平面器件 终端结构 半导体仿真
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