A novel capacitive pressure sensor is presented, whose sensing structure is a solid-state capacitor consisting of three square membranes with Al/SiO2/n-type silicon. It was fabricated using pn junction self-stop etchi...A novel capacitive pressure sensor is presented, whose sensing structure is a solid-state capacitor consisting of three square membranes with Al/SiO2/n-type silicon. It was fabricated using pn junction self-stop etching combined with adhesive bonding,and only three masks were used during the process. Sensors with side lengths of 1000,1200,and 1400μm were fabricated,showing sensitivity of 1.8,2.3, and 3.6fF/hPa over the range of 410～ 1010hPa, respectively. The sensi- tivity of the sensor with a side length of 1500μm is 4. 6fF/hPa,the nonlinearity is 6. 4% ,and the max hysteresis is 3.6%. The results show that permittivity change plays an important part in the capacitance change.展开更多
采用局部均值分解(local mean decomposition,LMD)算法对电能质量扰动进行检测时存在'端点效应'和'模态混叠'问题,严重影响了检测精度。文章针对分布式电源接入引起的微电网电能质量问题,对LMD算法进行改进,提出四点波...采用局部均值分解(local mean decomposition,LMD)算法对电能质量扰动进行检测时存在'端点效应'和'模态混叠'问题,严重影响了检测精度。文章针对分布式电源接入引起的微电网电能质量问题,对LMD算法进行改进,提出四点波形曲率延拓,寻找最优匹配波形用以改善'端点效应'。采用三次样条函数插值提高计算速度,使得筛选过程更快,间接减小了'端点效应'和'模态混叠'的影响。进一步提出了自适应筛选停止准则,通过内外层循环判据确定筛选停止条件,从而抑制'模态混叠'。通过对单一扰动、复合扰动模拟信号与实测信号的时频分析,验证了所提算法的可行性和有效性。最后通过与其他算法的计算量对比分析,进一步表明所提算法具有较低的计算量。展开更多
文摘A novel capacitive pressure sensor is presented, whose sensing structure is a solid-state capacitor consisting of three square membranes with Al/SiO2/n-type silicon. It was fabricated using pn junction self-stop etching combined with adhesive bonding,and only three masks were used during the process. Sensors with side lengths of 1000,1200,and 1400μm were fabricated,showing sensitivity of 1.8,2.3, and 3.6fF/hPa over the range of 410～ 1010hPa, respectively. The sensi- tivity of the sensor with a side length of 1500μm is 4. 6fF/hPa,the nonlinearity is 6. 4% ,and the max hysteresis is 3.6%. The results show that permittivity change plays an important part in the capacitance change.
文摘采用局部均值分解(local mean decomposition,LMD)算法对电能质量扰动进行检测时存在'端点效应'和'模态混叠'问题,严重影响了检测精度。文章针对分布式电源接入引起的微电网电能质量问题,对LMD算法进行改进,提出四点波形曲率延拓,寻找最优匹配波形用以改善'端点效应'。采用三次样条函数插值提高计算速度,使得筛选过程更快,间接减小了'端点效应'和'模态混叠'的影响。进一步提出了自适应筛选停止准则,通过内外层循环判据确定筛选停止条件,从而抑制'模态混叠'。通过对单一扰动、复合扰动模拟信号与实测信号的时频分析,验证了所提算法的可行性和有效性。最后通过与其他算法的计算量对比分析,进一步表明所提算法具有较低的计算量。
