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Influence of TiO_(2)seeding layers on phase composition of lead magnesium niobate-lead titanate thin films prepared by RF magnetron sputtering
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作者 WANG Junming LI Weii FEI Weidong 《Rare Metals》 SCIE EI CAS CSCD 2007年第S1期205-209,共5页
The influence of amorphous TiO_(2) seeding layers on the phase composition of lead magnesium niobate-lead titanate(0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3,PMN-PT)films deposited on Pt/Ti/SiO2/Si substrate by RF magnetron sputte... The influence of amorphous TiO_(2) seeding layers on the phase composition of lead magnesium niobate-lead titanate(0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3,PMN-PT)films deposited on Pt/Ti/SiO2/Si substrate by RF magnetron sputtering was examined.The relation between seeding layer thickness and phase composition at different post annealing temperature was observed by XRD.The thickness of amorphous TiO2 seeding layer and post annealing temperature had remarkable effects on PMN-PT film phase composition.When amorphous seeding layer becomes thick,a new phase of Nb2O5 exists in the films.Only when the seeding layer thickness is suitable,the film with pure perovskite phase can be attained. 展开更多
关键词 PMN-PT film AMORPHOUS TiO_(2)seeding layers RF magnetron sputtering
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Magnetic properties and structure of Ni_80Fe_20/Ni_48Fe_12Cr_40 bilayer films deposited on SiO_2/Si(100) by electron beam evaporation 被引量:1
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作者 WU Ping GAO Yanqing QIU Hong PAN Liqing TIAN Yue Wang Fengping 《Rare Metals》 SCIE EI CAS CSCD 2007年第2期176-181,共6页
Ni80Fe20/Ni48Fe12Cr40 bilayer films and Ni80Fe20 monolayer films were deposited at room temperature on SiO2/Si(100) substrates by electron beam evaporation. The influence of the thickness of the Ni48Fe12Cr40 underla... Ni80Fe20/Ni48Fe12Cr40 bilayer films and Ni80Fe20 monolayer films were deposited at room temperature on SiO2/Si(100) substrates by electron beam evaporation. The influence of the thickness of the Ni48Fe12Cr40 underlayer on the structure, magnetization, and magnetoresistance of the Ni80Fe20/Ni48Fe12Cr40 bilayer film was investigated. The thickness of the Ni48Fe12Cr40 layer varied from about 1 nm to 18 nm while the Ni80Fe20 layer thickness was fixed at 45 nm. For the as-deposited bilayer films the introducing of the Ni48Fe12Cr40 underlayer promotes both the (111) texture and grain growth in the Ni80Fe20 layer. The Ni48Fe12Cr40 underlayer has no significant influence on the magnetic moment of the Ni80Fe20/Ni48Fe12Cr40 bilayer film. However, the coercivity of the bilayer film changes with the thickness of the Ni48Fe12Cr40 undedayer. The optimum thickness of the Ni48Fe12Cr40 underlayer for improving the anisotropic magnetoresistance effect of the Ni80Fe20/Ni48Fe12Cr40 bilayer film is about 5 nm. With a decrease in temperature from 300 K to 81 K, the anisotropic magnetoresistance ratio of the Ni80Fe20 (45 nm)/Ni48Fe12Cr40 (5 nm) bilayer film increases linearly from 2.1% to 4.8% compared with that of the Ni80Fe20 monolayer film from 1.7% to 4.0%. 展开更多
关键词 Ni80Fe20 films Ni48Fe12Cr4o seed layer STRUCTURE magnetic properties
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Structure and electrical properties of PZT/LNO/PT multilayer films on stainless steel substrates 被引量:1
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作者 Zhao, Xuelian Jiang, Dan +1 位作者 Yu, Shengwen Cheng, Jinrong 《Rare Metals》 SCIE EI CAS CSCD 2012年第3期272-275,共4页
PbZr0.53Ti0.47O3 (PZT) ferroelectric thin films were deposited on LaNiO3 (LNO) by sol-gel method. The PbTiO3 (PT) seed layer was depos-ited between the LNO buffer layer and stainless steel (SS) substrate, which effect... PbZr0.53Ti0.47O3 (PZT) ferroelectric thin films were deposited on LaNiO3 (LNO) by sol-gel method. The PbTiO3 (PT) seed layer was depos-ited between the LNO buffer layer and stainless steel (SS) substrate, which effectively decreased the annealing temperature of LNO layer from 750 C to 650 C. X-ray diffraction (XRD) reveals that LNO layers with PT layer crystallize into a perovskite phase on annealing at 650 C for 10 min. PZT deposited on LNO buffer layer with PT seed layer exhibits good ferroelectric property. 展开更多
关键词 PT seed layer LNO PZT ferroelectric thin films
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Preparation,Properties and Characterization of Modified CeO_(2)/La_2Zr_2O_7 Buffer Layers
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作者 Cheng Yanling Suo Hongli +2 位作者 Liu Min Ma Lin Zhang Teng 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2011年第S3期350-353,共4页
The metal organic deposition(MOD)method was used for the epitaxial growth of the CeO2/La2Zr2O7(LZO)/LZO seed layer structure on a cube-textured Ni5W substrate layer by layer.The material phase and the macro-orientatio... The metal organic deposition(MOD)method was used for the epitaxial growth of the CeO2/La2Zr2O7(LZO)/LZO seed layer structure on a cube-textured Ni5W substrate layer by layer.The material phase and the macro-orientations were analyzed by XRD.The surface morphology and the blocking performance of the buffer layer were investigated by SEM and AES.The grain orientation and the crystallographic growth mode of the CeO2 layer were first characterized by electron backscattering diffraction(EBSD).The uniformly distributed islanded LZO seed layer optimized both the in-plan and the out-plan orientation of the CeO2/LZO buffer layers,and the CeO2/LZO buffer layers with a thickness of 175 nm acted as an efficient Ni,W barrier.The EBSD analysis indicated that the crystallographic orientation of each layer can be obtained at various accelerating voltages for the multilayer sample,the percentage of{001}<110>rotated cube texture of CeO2 layer reaching 97.4%at the accelerating voltage of 15 kV,thus showing epitaxial deposition with a high texture. 展开更多
关键词 coated conductor buffer layer LA2ZR2O7 seed layer CEO2 rotated cube texture accelerating voltage
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Deposition of Cu seed layer film by supercritical fluid deposition for advanced interconnects
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作者 赵斌 赵明涛 +1 位作者 张艳飞 杨俊和 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第6期435-439,共5页
The deposition of a Cu seed layer film is investigated by supercritical fluid deposition (SCFD) using H2 as a reducing agent for Bis(2,2,6,6-tetramethyl-3,5- heptanedionato) copper in supercritical CO2 (scCO2). ... The deposition of a Cu seed layer film is investigated by supercritical fluid deposition (SCFD) using H2 as a reducing agent for Bis(2,2,6,6-tetramethyl-3,5- heptanedionato) copper in supercritical CO2 (scCO2). The effects of deposition temperature, precursor, and H2 concentration are investigated to optimize Cu deposition. Continuous metallic Cu films are deposited on Ru substrates at 190 ℃ when a 0.002 mol/L Cu precursor is introduced with 0.75 mol/L H2. A Cu precursor concentration higher than 0.002 mol/L is found to have negative effects on the surface qualities of Cu films. For a H2 concentration above 0.56 mol/L, the root-mean-square (RMS) roughness of a Cu film decreases as the H2 concentration increases. Finally, a 20-nm thick Cu film with a smooth surface, which is required as a seed layer in advanced interconnects, is successfully deposited at a high H2 concentration (0.75 tool/L). 展开更多
关键词 supercritical CO2 CU film seed layer Cu interconnects
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Effect of seed layers on the static and dynamic magnetic properties of CoIr films with negative effective magnetocrystalline anisotropy
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作者 马天勇 张莎 +3 位作者 张晨虎 李志伟 王涛 李发伸 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第12期554-559,共6页
The c-axis oriented hcp-Co_(81)Ir_(19)magnetic films were prepared on different seed layers(Ni,Cu,Ir,Pt,Au,and No seed).We systematically investigated the impact that surface-free energy and strain energy have on the ... The c-axis oriented hcp-Co_(81)Ir_(19)magnetic films were prepared on different seed layers(Ni,Cu,Ir,Pt,Au,and No seed).We systematically investigated the impact that surface-free energy and strain energy have on the orientation and defects and/or internal stress of the grains by increasing the lattice mismatch ratio.Moreover,the initial permeability and the natural resonance frequency were discussed in great detail using a comparison between calculated values and experimental values.We found that the almost unchanged 4πM_(s) andμ_(i) are not affected,while the changed H_(c),intrinsic K_(grain),and f_(r) are strongly dependent on the seed layer and seed layer material.Moreover,the extracted damping constant is sensitive to the defects and/or internal stress and orientation of the grains.Therefore,the soft magnetic properties and microwave properties are adjusted and optimized by seed layers with different materials. 展开更多
关键词 seed layers magnetic anisotropy surface free energy soft magnetic thin films
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Effect of Seed Layer on the Orientation of Zinc Oxide Film on Silicon Substrate
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作者 Mi XIAO Makoto KUWABARA 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2005年第6期887-890,共4页
The effect of seed layer on the orientation of ZnO film was investigated. Before the preparation of ZnO film using sol-gel method, seed layer of ZnO was prepared in a similar way using the precursor at a rather low co... The effect of seed layer on the orientation of ZnO film was investigated. Before the preparation of ZnO film using sol-gel method, seed layer of ZnO was prepared in a similar way using the precursor at a rather low concentration. Experiments show that the existence of seed layer can improve the orientation of the finally prepared ZnO film, while baking temperature, baking time and precursor concentration all have effects on the final results. 展开更多
关键词 ZnO film SOL-GEL Seed layer
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Effect of TiO_2 Seed Layer on 0.7Pb(Mg_(0.33)Nb_(0.67))O_3-0.3PbTiO_3 Thin Films Deposited by Radio Frequency Magnetron Sputtering
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作者 王俊明 费维栋 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2009年第S1期17-19,共3页
We have grown PbMg1/3Nb2/3O3-PbTiO3(PMN-PT) thin films by radio frequency(RF) sputtering deposition at 550 ℃-650 ℃ on Pt/Ti/SiO2/Si and TiO2/Pt/Ti/SiO2/Si substrates.The phase compositions and microstructure of thin... We have grown PbMg1/3Nb2/3O3-PbTiO3(PMN-PT) thin films by radio frequency(RF) sputtering deposition at 550 ℃-650 ℃ on Pt/Ti/SiO2/Si and TiO2/Pt/Ti/SiO2/Si substrates.The phase compositions and microstructure of thin films were characterized by X-ray diffraction(XRD) and scanning electric microstructure(SEM).The effect of the TiO2 seed layer on PMN-PT films was studied. 展开更多
关键词 PMN-PT radio frequency TiO2 seed layer
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Artificial synaptic and self-rectifying properties of crystalline(Na_(1-x)K_(x))NbO_(3)thin films grown on Sr_(2)Nb_(3)O_(10)nanosheet seed layers
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作者 In-Su Kim Jong-Un Woo +2 位作者 Hyun-Gyu Hwang Bumjoo Kim Sahn Nahm 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2022年第28期136-143,共8页
Crystalline(Na_(1-x)K_(x))NbO_(3)(NKN)thin films were deposited on Sr_(2)Nb_(3)O_(10)/TiN/Si(S-TS)substrates at 370°C.Sr_(2)Nb_(3)O_(10)(SNO)nanosheets served as a template for the formation of crystalline NKN fi... Crystalline(Na_(1-x)K_(x))NbO_(3)(NKN)thin films were deposited on Sr_(2)Nb_(3)O_(10)/TiN/Si(S-TS)substrates at 370°C.Sr_(2)Nb_(3)O_(10)(SNO)nanosheets served as a template for the formation of crystalline NKN films at low temperatures.When the NKN film was deposited on one SNO monolayer,the NKN memristor exhibited normal bipolar switching characteristics,which could be attributed to the formation and destruction of oxygen vacancy filaments.Moreover,the NKN memristor with one SNO monolayer exhibited artificial synaptic properties.However,the NKN memristor deposited on two SNO monolayers exhibited self-rectifying bipolar switching properties,with the two SNO monolayers acting as tunneling barriers in the memristor.The conduction mechanism of the NKN memristor with two SNO monolayers in the highresistance state is attributed to Schottky emission,direct tunneling,and Fowler–Nordheim(FN)tunneling.The current conduction in this memristor in the low-resistance state was governed by direct tunneling and FN tunneling.Additionally,the NKN memristor with two SNO monolayers exhibited large ON/OFF and rectification ratios and artificial synaptic properties.Therefore,an NKN memristor with two SNO monolayers can be used for fabricating artificial synaptic devices with a cross-point array structure. 展开更多
关键词 Bipolar switching properties Self-rectifying bipolar switching properties Artificial synaptic properties Crystalline NKN thin film Sr_(2)Nb_(3)O_(10)nanosheet seed layer
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Highest Solar-to-Hydrogen Conversion Efficiency in Cu_(2)ZnSnS_4 Photocathodes and Its Directly Unbiased Solar Seawater Splitting
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作者 Muhammad Abbas Shuo Chen +7 位作者 Zhidong Li Muhammad Ishaq Zhuanghao Zheng Juguang Hu Zhenghua Su Yanbo Li Liming Ding Guangxing Liang 《Nano-Micro Letters》 2025年第10期672-690,共19页
Despite being an excellent candidate for a photocathode,Cu_(2)ZnSnS_4(CZTS)performance is limited by suboptimal bulk and interfacial charge carrier dynamics.In this work,we introduce a facile and versatile CZTS precur... Despite being an excellent candidate for a photocathode,Cu_(2)ZnSnS_4(CZTS)performance is limited by suboptimal bulk and interfacial charge carrier dynamics.In this work,we introduce a facile and versatile CZTS precursor seed layer engineering technique,which significantly enhances crystal growth and mitigates detrimental defects in the postsulfurized CZTS light-absorbing films.This effective optimization of defects and charge carrier dynamics results in a highly efficient CZTS/CdS/TiO_(2)/Pt thin-film photocathode,achieving a record half-cell solar-to-hydrogen(HC-STH)conversion efficiency of 9.91%.Additionally,the photocathode exhibits a highest photocurrent density(J_(ph))of 29.44 m A cm^(-2)(at 0 VRHE)and favorable onset potential(Von)of 0.73 VRHE.Furthermore,our CTZS photocathode demonstrates a remarkable Jph of 16.54 m A cm^(-2)and HC-STH efficiency of 2.56%in natural seawater,followed by an impressive unbiased STH efficiency of 2.20%in a CZTS-BiVO_4 tandem cell.The scalability of this approach is underscored by the successful fabrication of a 4×4 cm^(2)module,highlighting its significant potential for practical,unbiased in situ solar seawater splitting applications. 展开更多
关键词 Cu_(2)ZnSnS_4 Solar-to-hydrogen conversion Charge transfer dynamics Precursor seed layer engineering Seawater splitting
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Electrochemically Grown Ultrathin Platinum Nanosheet Electrodes with Ultralow Loadings for Energy-Saving and Industrial-Level Hydrogen Evolution 被引量:4
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作者 Lei Ding Zhiqiang Xie +8 位作者 Shule Yu Weitian Wang Alexander Y.Terekhov Brian K.Canfield Christopher B.Capuano Alex Keane Kathy Ayers David A.Cullen Feng-Yuan Zhang 《Nano-Micro Letters》 SCIE EI CAS CSCD 2023年第9期257-274,共18页
Nanostructured catalyst-integrated electrodes with remarkably reduced catalyst loadings,high catalyst utilization and facile fabrication are urgently needed to enable cost-effective,green hydrogen production via proto... Nanostructured catalyst-integrated electrodes with remarkably reduced catalyst loadings,high catalyst utilization and facile fabrication are urgently needed to enable cost-effective,green hydrogen production via proton exchange membrane electrolyzer cells(PEMECs).Herein,benefitting from a thin seeding layer,bottom-up grown ultrathin Pt nanosheets(Pt-NSs)were first deposited on thin Ti substrates for PEMECs via a fast,template-and surfactant-free electrochemical growth process at room temperature,showing highly uniform Pt surface coverage with ultralow loadings and vertically well-aligned nanosheet morphologies.Combined with an anode-only Nafion 117 catalyst-coated membrane(CCM),the Pt-NS electrode with an ultralow loading of 0.015 mgPt cm−2 demonstrates superior cell performance to the commercial CCM(3.0 mgPt cm^(−2)),achieving 99.5%catalyst savings and more than 237-fold higher catalyst utilization.The remarkable performance with high catalyst utilization is mainly due to the vertically well-aligned ultrathin nanosheets with good surface coverage exposing abundant active sites for the electrochemical reaction.Overall,this study not only paves a new way for optimizing the catalyst uniformity and surface coverage with ultralow loadings but also provides new insights into nanostructured electrode design and facile fabrication for highly efficient and low-cost PEMECs and other energy storage/conversion devices. 展开更多
关键词 seeding layer Electrochemically grown Pt nanosheet Ultralow loadings High catalyst utilization Hydrogen evolution
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Seed Free Growth of Aligned ZnO Nanowire Arrays on AZO Substrate 被引量:1
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作者 LIU Liqing CAO Guangxia HONG Kunquan 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2018年第6期1372-1375,共4页
In the absence of commonly used seed layer, we can still successfully synthesized aligned ZnO nanowire arrays by the hydrothermal method. By using aluminum-doped zinc oxide(AZO) glass as a substrate, high-density and ... In the absence of commonly used seed layer, we can still successfully synthesized aligned ZnO nanowire arrays by the hydrothermal method. By using aluminum-doped zinc oxide(AZO) glass as a substrate, high-density and vertically aligned ZnO nanowires were synthesized directly on the substrate in the absence of the ZnO seed layer. The current-voltage curve indicated that the sample grown on AZO glass substrate in the absence of seed layer possesses better conductivity than that synthesized on FTO glass substrate with ZnO seed layer. Thus, a simplified, seed-free and low-cost experimental protocol was reported here for large-scale production of high quality ZnO nanowire arrays with promoted conductivity. 展开更多
关键词 ZnO nanowire arrays seed layer free AZO substrate CONDUCTIVITY
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Optimization and Evaluation of Sputtering Barrier/Seed Layer in Through Silicon Via for 3-D Integration 被引量:3
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作者 Tiwei Wei Jian Cai +4 位作者 Qian Wang Yang Hu Lu Wang Ziyu Liu Zijian Wu 《Tsinghua Science and Technology》 SCIE EI CAS 2014年第2期150-160,共11页
The barrier/seed layer is a key issue in Through Silicon Via (TSV) technology for 3-D integration. Sputtering is an important deposition method for via metallization in semiconductor process. However, due to the lim... The barrier/seed layer is a key issue in Through Silicon Via (TSV) technology for 3-D integration. Sputtering is an important deposition method for via metallization in semiconductor process. However, due to the limitation of sputtering and a "scallop" profile inside vias, poor step coverage of the barrier/seed layer always occurs in the via metallization process. In this paper, the effects of several sputter parameters (DC power, Ar pressure, deposition time, and substrate temperature) on thin film coverage for TSV applications are investigated. Robust TSVs with aspect ratio 5 : 1 were obtained with optimized magnetron sputter parameters. In addition, the influences of different sputter parameters are compared and the conclusion could be used as a guideline to select appropriate parameter sets. 展开更多
关键词 barrier/seed layer Through Silicon Via (TSV) SPUTTERING OPTIMIZATION
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Effects of seed layer on the performance of microcrystalline silicon germanium solar cells
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作者 曹宇 张建军 +6 位作者 李天微 黄振华 马峻 杨旭 倪牮 耿新华 赵颖 《Journal of Semiconductors》 EI CAS CSCD 2013年第3期58-62,共5页
Using plasma enhanced chemical vapor deposition(PECVD) at 13.56 MHz,a seed layer is fabricated at the initial growth stage of the hydrogenated microcrystalline silicon germanium(μc-Si1-xGex:H) i-layer.The effects o... Using plasma enhanced chemical vapor deposition(PECVD) at 13.56 MHz,a seed layer is fabricated at the initial growth stage of the hydrogenated microcrystalline silicon germanium(μc-Si1-xGex:H) i-layer.The effects of seeding processes on the growth ofμc-Si1-xGex:H i-layers and the performance ofμc-Si1-xGex:H p-i-n single junction solar cells are investigated.By applying this seeding method,theμc-Si1-xGex:H solar cell shows a significant improvement in short circuit current density(Jsc) and fill factor(FF) with an acceptable performance of blue response as aμc-Si:H solar cell even when the Ge content x increases up to 0.3.Finally,an improved efficiency of 7.05%is achieved for theμc-Si0.7Ge0.3:H solar cell. 展开更多
关键词 hydrogenated microcrystalline silicon germanium seed layer incubation layer solar cell
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Steady-state solution growth of microcrystalline silicon on nanocrystalline seed layers on glass
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作者 r.bansen c.ehlers +1 位作者 th.teubner t.boeck 《Journal of Semiconductors》 EI CAS CSCD 2016年第9期37-40,共4页
The growth of polycrystalline silicon layers on glass from tin solutions at low temperatures is presented.This approach is based on the steady-state solution growth of Si crystallites on nanocrystalline seed layers, w... The growth of polycrystalline silicon layers on glass from tin solutions at low temperatures is presented.This approach is based on the steady-state solution growth of Si crystallites on nanocrystalline seed layers, which are prepared in a preceding process step. Scanning electron microscopy and atomic force microscopy investigations reveal details about the seed layer surfaces, which consist of small hillocks, as well as about Sn inclusions and gaps along the glass substrate after solution growth. The successful growth of continuous microcrystalline Si layers with grain sizes up to several ten micrometers shows the feasibility of the process and makes it interesting for photovoltaics. 展开更多
关键词 thin film solar cell microcrystalline Si solution growth steady-state liquid phase epitaxy(SSLPE) seed layer
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Indium tin oxide-free inverted polymer solar cells with ultrathin metal transparent electrodes
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作者 Tao YUAN Zhonghuan CAO Guoli TU 《Frontiers of Optoelectronics》 EI CSCD 2017年第4期402-408,共7页
Efficient indium tin oxide (ITO)-free inverted polymer solar cells (PSCs) were fabricated by applying ultrathin metal transparent electrodes as sunlight incident electrodes. Smooth and continuous Ag film of 4 nm t... Efficient indium tin oxide (ITO)-free inverted polymer solar cells (PSCs) were fabricated by applying ultrathin metal transparent electrodes as sunlight incident electrodes. Smooth and continuous Ag film of 4 nm thickness was developed through the introduction of a 2 nm Au seed layer. Ultrathin Ag transparent electrode with an average transmittance of up to 80% from 480 to 680 nm and a sheet resistance of 35.4Ω/sq was obtained through the introduction of a ZnO anti-reflective layer. The ultrathin metal electrode could be directly used as cathode in polymer solar cells without oxygen plasma treatment. ITO-free inverted PSCs obtained a power conversion efficiency (PCE) of 5.2% by utilizing the ultrathin metal transparent electrodes. These results demonstrated a simple method of fabricating ITO-free inverted PSCs. 展开更多
关键词 polymer solar cells ultrathin metal transparentelectrodes seed layer anti-reflective layer
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