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Thermodynamics-based sealing method for anodized aluminum used in semiconductor processing apparatuses
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作者 Yuhang Wang Yang Zhao +3 位作者 Shaogang Wang Ji Chen Tao Zhang Fuhui Wang 《Journal of Materials Science & Technology》 2025年第13期241-259,共19页
A principle was proposed for designing a method to seal anodized aluminum used in semiconductor processing apparatuses.Thermodynamic calculations and Fick’s second law were used to reveal trends in the metal ion depo... A principle was proposed for designing a method to seal anodized aluminum used in semiconductor processing apparatuses.Thermodynamic calculations and Fick’s second law were used to reveal trends in the metal ion deposition,deposition product stability,vapor pressures of halides for selected metal ions,the holding temperature,and time.Interactions between ion concentrations and the sealing temperature were also revealed.According to the design principles,anodized aluminum dipped in 1 mM Cr^(3+)ion solution and steam-sealed for 18 h exhibited the highest corrosion resistance when exposed to 5 wt.%HCl solution and HCl gas,verifying the designed results. 展开更多
关键词 Semiconductor Thermodynamic calculations Anodized aluminum sealing method Design principle
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Comment on hydration with Cefuroxime-a method for sealing a small leaking corneal perforation 被引量:1
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作者 Murat Aslankurt Osman Cekic 《International Journal of Ophthalmology(English edition)》 SCIE CAS 2017年第4期663-664,共2页
Dear Editor,In a recent interventional case report,Allon et al )hydrated corneal stroma with cefuroxime to seal a small traumatic leaky corneal perforation that was unresponsive to prior soft bandage contact lens app... Dear Editor,In a recent interventional case report,Allon et al )hydrated corneal stroma with cefuroxime to seal a small traumatic leaky corneal perforation that was unresponsive to prior soft bandage contact lens application for 6d. 展开更多
关键词 Comment on hydration with Cefuroxime-a method for sealing a small leaking corneal perforation
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The mass and heat transfer process through the door seal of refrigeration 被引量:3
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作者 Haoshu Tan Xinzhou Song +1 位作者 Ying Zhang Maogang He 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2017年第8期1115-1119,共5页
As one of the main reasons causing leakage heat load in a refrigerator,mass and heat transfer through refrigerator door seal is of great importance to be studied.In this paper,a model is presented for numerical simula... As one of the main reasons causing leakage heat load in a refrigerator,mass and heat transfer through refrigerator door seal is of great importance to be studied.In this paper,a model is presented for numerical simulation of mass and heat transfer process through refrigerator door seal,and an experiment apparatus is designed and set up as well for comparison.A two-dimensional model and tracer gas method are used in simulation and experiment,respectively.It can be found that the relative deviations of air infiltration rate between the simulated results and experimental results were less than 1%,and the temperature difference errors at two special points of the door seal were less than 2.03℃.In conclusion,the simulated results are in good agreement with the experimental results.This paper initially sets up a model that can accurately simulate the heat and mass transfer through the refrigerator door seal,and the model can be used in refrigerator door seal optimization research in the follow-up study. 展开更多
关键词 Refrigerator Door Seal Air infiltration Numerical simulation Tracer gas method
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Numerical analysis and experimental verification of a novel water hydraulic rotary proportional valve for an environment-friendly manipulator
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作者 Zhenyao WANG Yinshui LIU +4 位作者 Xi WANG Yong LIU Xuemei PAN Chuanqi GAO Defa WU 《Frontiers of Mechanical Engineering》 2025年第1期69-85,共17页
Water hydraulic technology is a potential application to deep-sea manipulators and their proportional valves.In the ocean,water is a better choice as the working medium than mineral oil because of its environmentally ... Water hydraulic technology is a potential application to deep-sea manipulators and their proportional valves.In the ocean,water is a better choice as the working medium than mineral oil because of its environmentally friendly advantages.However,no water hydraulic proportional valve for deep sea exists yet.In this study,a novel water hydraulic rotary proportional valve with a four-way,three-position principle and a plane sealing method for the environment-friendly manipulator is invented.The static and dynamic performance of the proportional valve is studied using a mathematical model and experiments.A valve-control swing cylinder system,which simulates the working state of the manipulator,is also facilitated in a deep-sea simulation device for simulating a depth of 6500 m in the ocean.Results show that the numerical and experimental data match well.The proportional valve can achieve zero leakage,and the dead zone is approximately 10%.The bandwidths are 30 and 6 Hz when the input signal amplitude is 5%and 100%of the valve’s full stroke,respectively.The proportional valve can accurately control the swing cylinder on the manipulator’s elbow joint with a rotation angle error of±0.1°.The rotary proportional valve has excellent application to deep-sea manipulators. 展开更多
关键词 deep-sea manipulator water hydraulic rotary proportional valve plane sealing method static and dynamic performance valve-control swing cylinder system
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