This paper describes the successful fabrication of 4H-SiC junction barrier Schottky （JBS） rectifiers with a linearly graded field limiting ring （LG-FLR）. Linearly variable ring spacings for the FLR termination are...This paper describes the successful fabrication of 4H-SiC junction barrier Schottky （JBS） rectifiers with a linearly graded field limiting ring （LG-FLR）. Linearly variable ring spacings for the FLR termination are applied to improve the blocking voltage by reducing the peak surface electric field at the edge termination region, which acts like a variable lateral doping profile resulting in a gradual field distribution. The experimental results demonstrate a breakdown voltage of 5 kV at the reverse leakage current density of 2 mA/cm2 （about 80% of the theoretical value）. Detailed numerical simulations show that the proposed termination structure provides a uniform electric field profile compared to the conventional FLR termi- nation, which is responsible for 45% improvement in the reverse blocking voltage despite a 3.7% longer total termination length.展开更多
An improved structure of Schottky rectifier, called a trapezoid mesa trench metal oxide semiconductor （MOS） barrier Schottky rectifier （TM-TMBS）, is proposed and studied by two-dimensional numerical simulations. B...An improved structure of Schottky rectifier, called a trapezoid mesa trench metal oxide semiconductor （MOS） barrier Schottky rectifier （TM-TMBS）, is proposed and studied by two-dimensional numerical simulations. Both forward and especially better reverse I-V characteristics, including lower leakage current and higher breakdown voltage, are demonstrated by comparing our proposed TM-TMBS with a regular trench MOS barrier Schottky rectifier （TMBS） as well as a conventional planar Schottky barrier diode rectifier. Optimized device parameters corresponding to the requirement for high breakdown voltage are given. With optimized parameters, TM-TMBS attains a breakdown voltage of 186 V, which is 6.3% larger than that of the optimized TMBS, and a leakage current of 4.3×10^-6 A/cm2, which is 26% smaller than that of the optimized TMBS. The relationship between optimized breakdown voltage and some device parameters is studied. Explanations and design rules are given according to this relationship.展开更多
This paper proposes a double epi-layers 4H-SiC junction barrier Schottky rectifier （JBSR） with embedded P layer （EPL） in the drift region. The structure is characterized by the P-type layer formed in the n-type dr...This paper proposes a double epi-layers 4H-SiC junction barrier Schottky rectifier （JBSR） with embedded P layer （EPL） in the drift region. The structure is characterized by the P-type layer formed in the n-type drift layer by epitaxial overgrowth process. The electric field and potential distribution are changed due to the buried P-layer, resulting in a high breakdown voltage （BV） and low specific on-resistance （Ron,sp）. The influences of device parameters, such as the depth of the embedded P＋ regions, the space between them and the doping concentration of the drift region, etc., on BV and Ron,sp are investigated by simulations, which provides a particularly useful guideline for the optimal design of the device. The results indicate that BV is increased by 48.5% and Baliga＇s figure of merit （BFOM） is increased by 67.9% compared to a conventional 4H-SiC JBSR.展开更多
This paper investigates the behaviours of 4H--SiC merged PiN Schottky （MPS） rectifiers with junction termination extension （JTE） by extensive numerical simulations. The simulated results show that the present mode...This paper investigates the behaviours of 4H--SiC merged PiN Schottky （MPS） rectifiers with junction termination extension （JTE） by extensive numerical simulations. The simulated results show that the present model matches the experimental data very well. The influences of the JTE design parameters such as the doping concentration and length of the JTE on the breakdown characteristics are discussed in detail. Then the temperature sensitivity of the forward behaviour is studied in terms of the different designs of 4H--SiC MPS with JTE, which provides a particularly useful guideline for the optimal design of MPS rectifiers with JTE.展开更多
A junction barrier Schottky （JBS） rectifier with an improved P-well on 4H-SiC is proposed to improve the VF-IR trade-off and the breakdown voltage. The reverse current density of the proposed JBS rectifier at 300 K ...A junction barrier Schottky （JBS） rectifier with an improved P-well on 4H-SiC is proposed to improve the VF-IR trade-off and the breakdown voltage. The reverse current density of the proposed JBS rectifier at 300 K and 800 V is about 3.3 × 10-s times that of the common JBS rectifier at no expense of the forward voltage drop. This is because the depletion layer thickness in the P-well region at the same reverse voltage is larger than in the P＋ grid, resulting in a lower spreading current and tunneling current. As a result, the breakdown voltage of the proposed JBS rectifier is over 1.6 kV, that is about 0.8 times more than that of the common JBS rectifier due to the uniform electric field. Although the series resistance of the proposed JBS rectifier is a little larger than that of the common JBS rectifier, the figure of merit （FOM） of the proposed JBS rectifier is about 2.9 times that of the common JBS rectifier. Based on simulating the values of susceptibility of the two JBS rectifiers to electrostatic discharge （ESD） in the human body model （HBM） circuits, the failure energy of the proposed JBS rectifier increases 17% compared with that of the common JBS rectifier.展开更多
Developing efficient electrocatalysts for selective nitrate contamination reduction into value-added ammonia is significant.Here,heterostructured Co/CoO nanosheet arrays(Co/CoO NSAs)exhibited excellent Faradaic effici...Developing efficient electrocatalysts for selective nitrate contamination reduction into value-added ammonia is significant.Here,heterostructured Co/CoO nanosheet arrays(Co/CoO NSAs)exhibited excellent Faradaic efficiency(93.8%)and selectivity(91.2%)for nitrate electroreduction to ammonia,greatly outperforming Co NSAs.15N isotope labeling experiments and 1H nuclear magnetic resonance(NMR)quantitative testing methods confirmed the origin of the produced ammonia.Electrochemical in situ Fourier transform infrared(FTIR)spectroscopy,online differential electrochemical mass spectrometry(DEMS)data and density functional theory(DFT)results revealed that the superior performances arose from the electron deficiency of Co induced by the rectifying Schottky contact in the Co/CoO heterostructures.The electron transfer from Co to CoO at the interface could not only suppress the competitive hydrogen evolution reaction,but also increase energy barriers for by-products,thus leading to high Faradaic efficiency and selectivity of ammonia.展开更多
基金Project supported by the State Key Program of the National Natural Science Foundation of China(Grant No.61234006)
文摘This paper describes the successful fabrication of 4H-SiC junction barrier Schottky （JBS） rectifiers with a linearly graded field limiting ring （LG-FLR）. Linearly variable ring spacings for the FLR termination are applied to improve the blocking voltage by reducing the peak surface electric field at the edge termination region, which acts like a variable lateral doping profile resulting in a gradual field distribution. The experimental results demonstrate a breakdown voltage of 5 kV at the reverse leakage current density of 2 mA/cm2 （about 80% of the theoretical value）. Detailed numerical simulations show that the proposed termination structure provides a uniform electric field profile compared to the conventional FLR termi- nation, which is responsible for 45% improvement in the reverse blocking voltage despite a 3.7% longer total termination length.
基金Project supported by the International Research Training Group "Materials and Concepts for Interconnects and Nanosystems"
文摘An improved structure of Schottky rectifier, called a trapezoid mesa trench metal oxide semiconductor （MOS） barrier Schottky rectifier （TM-TMBS）, is proposed and studied by two-dimensional numerical simulations. Both forward and especially better reverse I-V characteristics, including lower leakage current and higher breakdown voltage, are demonstrated by comparing our proposed TM-TMBS with a regular trench MOS barrier Schottky rectifier （TMBS） as well as a conventional planar Schottky barrier diode rectifier. Optimized device parameters corresponding to the requirement for high breakdown voltage are given. With optimized parameters, TM-TMBS attains a breakdown voltage of 186 V, which is 6.3% larger than that of the optimized TMBS, and a leakage current of 4.3×10^-6 A/cm2, which is 26% smaller than that of the optimized TMBS. The relationship between optimized breakdown voltage and some device parameters is studied. Explanations and design rules are given according to this relationship.
基金Project supported by the 13115 Innovation Engineering of Shaanxi Province of China(Grant No.2008ZDKG-30)
文摘This paper proposes a double epi-layers 4H-SiC junction barrier Schottky rectifier （JBSR） with embedded P layer （EPL） in the drift region. The structure is characterized by the P-type layer formed in the n-type drift layer by epitaxial overgrowth process. The electric field and potential distribution are changed due to the buried P-layer, resulting in a high breakdown voltage （BV） and low specific on-resistance （Ron,sp）. The influences of device parameters, such as the depth of the embedded P＋ regions, the space between them and the doping concentration of the drift region, etc., on BV and Ron,sp are investigated by simulations, which provides a particularly useful guideline for the optimal design of the device. The results indicate that BV is increased by 48.5% and Baliga＇s figure of merit （BFOM） is increased by 67.9% compared to a conventional 4H-SiC JBSR.
基金Project supported by Shaanxi 13115 Innovation Engineering Foundation (Grant No. 2008ZDKG-30)Pre-research Project(Grant No. 51308040302)
文摘This paper investigates the behaviours of 4H--SiC merged PiN Schottky （MPS） rectifiers with junction termination extension （JTE） by extensive numerical simulations. The simulated results show that the present model matches the experimental data very well. The influences of the JTE design parameters such as the doping concentration and length of the JTE on the breakdown characteristics are discussed in detail. Then the temperature sensitivity of the forward behaviour is studied in terms of the different designs of 4H--SiC MPS with JTE, which provides a particularly useful guideline for the optimal design of MPS rectifiers with JTE.
基金Project supported by the Program for New Century Excellent Talents in University,China(Grant No.NCET-10-0052)the Fundamental Research Funds for the Central Universities of China(Grant No.HEUCFT1008)
文摘A junction barrier Schottky （JBS） rectifier with an improved P-well on 4H-SiC is proposed to improve the VF-IR trade-off and the breakdown voltage. The reverse current density of the proposed JBS rectifier at 300 K and 800 V is about 3.3 × 10-s times that of the common JBS rectifier at no expense of the forward voltage drop. This is because the depletion layer thickness in the P-well region at the same reverse voltage is larger than in the P＋ grid, resulting in a lower spreading current and tunneling current. As a result, the breakdown voltage of the proposed JBS rectifier is over 1.6 kV, that is about 0.8 times more than that of the common JBS rectifier due to the uniform electric field. Although the series resistance of the proposed JBS rectifier is a little larger than that of the common JBS rectifier, the figure of merit （FOM） of the proposed JBS rectifier is about 2.9 times that of the common JBS rectifier. Based on simulating the values of susceptibility of the two JBS rectifiers to electrostatic discharge （ESD） in the human body model （HBM） circuits, the failure energy of the proposed JBS rectifier increases 17% compared with that of the common JBS rectifier.
基金supported by the National Natural Science Foundation of China(21871206,21701122)。
文摘Developing efficient electrocatalysts for selective nitrate contamination reduction into value-added ammonia is significant.Here,heterostructured Co/CoO nanosheet arrays(Co/CoO NSAs)exhibited excellent Faradaic efficiency(93.8%)and selectivity(91.2%)for nitrate electroreduction to ammonia,greatly outperforming Co NSAs.15N isotope labeling experiments and 1H nuclear magnetic resonance(NMR)quantitative testing methods confirmed the origin of the produced ammonia.Electrochemical in situ Fourier transform infrared(FTIR)spectroscopy,online differential electrochemical mass spectrometry(DEMS)data and density functional theory(DFT)results revealed that the superior performances arose from the electron deficiency of Co induced by the rectifying Schottky contact in the Co/CoO heterostructures.The electron transfer from Co to CoO at the interface could not only suppress the competitive hydrogen evolution reaction,but also increase energy barriers for by-products,thus leading to high Faradaic efficiency and selectivity of ammonia.
