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Fabrication of grating-like polystyrene latex monolayer structure as three-dimensional calibration standards for scanning probe microscope
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作者 朱国栋 曾志刚 +2 位作者 国璋 杜强国 严学俭 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第3期997-1001,共5页
This paper illuminates the preparation of grating-like polystyrene latex monolayer structure, which can minimize the effects of the size deviation of spheres and the defect transfer on the accuracy as calibration samp... This paper illuminates the preparation of grating-like polystyrene latex monolayer structure, which can minimize the effects of the size deviation of spheres and the defect transfer on the accuracy as calibration samples for micro-scopes. The latex films are grown on freshly cleaved mica substrates by vertical deposition method. The concentration dependence of the structure and the topography of latex films is characterized by optical microscope, ultraviolet- visible transmission spectrum and scanning probe microscope. The origination of such a grating-like structure is also discussed. 展开更多
关键词 polystyrene spheres scanning probe microscope grating-like structure calibration samrile
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Observations of Wood Cell Walls with a Scanning Probe Microscope
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作者 Manami Yamashita Masato Yoshida +2 位作者 Miyuki Matsuo Saori Sato Hiroyuki Yamamoto 《Materials Sciences and Applications》 2016年第10期644-653,共11页
Scanning Probe Microscopes (SPMs) observe specimen surfaces with probes by detecting the physical amount of a material between the cantilever and the surface. SPMs have a high resolution and can measure mechanical cha... Scanning Probe Microscopes (SPMs) observe specimen surfaces with probes by detecting the physical amount of a material between the cantilever and the surface. SPMs have a high resolution and can measure mechanical characteristics such as stiffness, adsorptive properties, and viscoelasticity. These features make it easy to identify the surface structure of complex materials;therefore, the use of SPMs has increased in recent years. Wood cell walls are primarily composed of cellulose, hemicellulose, and lignin. It is believed that hemicellulose and lignin surround the cellulose framework;however, their detailed formation remains unknown. Therefore, we observed wood cell walls via scanning probe microscopy to try to reveal the formation of the cellulose framework. We determined that the size of the cellulose microfibril bundle and hemicellulose lignin module composite was 18.48 nm based on topography and that the size of the cellulose microfibril bundle was 15.33 nm based on phase images. In the viscoelasticity image, we found that the viscoelasticities of each cell wall of the same cell were not the same. This is because the cellulose microfibrils in each cell wall lean in different directions. The angle between the leaning of the cellulose microfibril and the cantilever affects the viscoelasticity measurement. 展开更多
关键词 scanning probe microscope Wood Cell Wall Cellulose Microfibril HEMICELLULOSE LIGNIN
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STUDY ON THE SCANNING PROBE MICROSCOPE WITH WIDE MEASURING RANGE
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《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 1997年第1期1-6,共3页
STUDYONTHESCANNINGPROBEMICROSCOPEWITHWIDEMEASURINGRANGEZhangHonghai,CaoWei,LiWenju,ShiHanmin,ChenRiyaoHuazhn... STUDYONTHESCANNINGPROBEMICROSCOPEWITHWIDEMEASURINGRANGEZhangHonghai,CaoWei,LiWenju,ShiHanmin,ChenRiyaoHuazhngUniversityofScie... 展开更多
关键词 WIDE microscope ON probe RANGE scanning STUDY THE MEASURING WITH
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EXPERIMENTAL RESEARCH OF NANO-CUTTING BY USING SCANNING PROBE MICROCOPE
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作者 Fu Huinan (Institute of Manufacturing Technology,Guangdong University of Technology) Xu Xipeng (Huaqiao University) 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2001年第4期297-299,304,共4页
An experimental study on cutting amorphous alloy at nanometer scale is conducted by applying the principle and technology of scanning probe microscope(SPM) It is revealed from the experiments that cutting inside SPM... An experimental study on cutting amorphous alloy at nanometer scale is conducted by applying the principle and technology of scanning probe microscope(SPM) It is revealed from the experiments that cutting inside SPM is an excellent and direct way to research the material removal process at small size Based on the experimental results,the chip formation mechanism for the cutting of amorphous alloy is discussed It is found that the deformation along the direction of chip flow occurs ahead of the appearance of localized shear,and a simplified geometrical model is proposed to illustrate the deformation. 展开更多
关键词 scanning probe microscope(SPM) NANOTECHNOLOGY Cutting mechanism
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Processing technique of target capsule's micro inflation hole with a scanning probe 被引量:7
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作者 SUN Tao, YAN Yongda, GAO Dangzhong, TANG Yongjian, FU Yibei & DONG ShenPrecision Engineering Research Institute, Harbin Institute of Technology, Harbin 150001, China Research Centre of Laser Fusion, Chinese Academy of Engineering Plysics, Mianyang 621900, China Institute of Nuclear Physics and Chemistry, Chinese Academy of Engineering Physics, Mianyang 621900, China 《Science China(Technological Sciences)》 SCIE EI CAS 2004年第1期77-84,共8页
To resolve inflation of inertial confinement fusion (ICF) target and encapsulation of micro inflation hole with adhesive, a scanning probe microscope (SPM) diamond microprobe was used as the cutting tool with SPM in c... To resolve inflation of inertial confinement fusion (ICF) target and encapsulation of micro inflation hole with adhesive, a scanning probe microscope (SPM) diamond microprobe was used as the cutting tool with SPM in contact mode. Some parameters influencing the quality of micro inflation hole, such as the scanning direction of the diamond tip, the scanning rate and the contact force are discussed. Accurate taper hole was achieved whose climension and precision could meet the requirements of inflation and encapsulation technique of micro hole. The experimental results show that using SPM diamond microprobe as the cutting tool and with special processing technique, the precision machining of target capsule's taper inflation hole can be realized. A novel operative technology for filling high Z gas to target is provided. 展开更多
关键词 target capsule scanning probe microscope (SPM) diamond microprobe PROCESSING technique BRITTLE material.
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Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging
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作者 Aixi Pan Xiaoli Zhu +5 位作者 Chenxu Zhu Jian Yin Md Soyaeb Hasan Zhongyi Liu Dayan Ban Bo Cui 《Microsystems & Nanoengineering》 2025年第5期543-551,共9页
Atomic force microscope(AFM)systems rely on silicon(Si)probes for precise nanoscale characterization across diverse environments.However,fabricating high-aspect-ratio(HAR)and sharp Si tips and optimizing the handle ge... Atomic force microscope(AFM)systems rely on silicon(Si)probes for precise nanoscale characterization across diverse environments.However,fabricating high-aspect-ratio(HAR)and sharp Si tips and optimizing the handle geometries remain significant challenges.Conventional HAR probe fabrication methods lack scalability,precision,and cost efficiency,while cuboid-shaped handles risk obstructing laser detection and limiting compatibility.This study presents an innovative batch-fabrication strategy for high-performance Si AFM probes that integrate ultra-sharp HAR tips,rectangular cantilevers,and universally compatible stair-shaped handles.Notably,the tip fabrication process employs only low-cost microscale ultraviolet(UV)lithography,while still achieving nanoscale structural resolution.The fabricated probes exhibit a tip apex radius of 5 nm and a half-cone angle of 7.5°,enabling high-resolution and highfidelity imaging.The novel stair-shaped handle geometry is introduced and fabricated via a single-step dry etching process,which provides unobstructed laser detection and ensures compatibility with a broad range of commercial AFM platforms.Durability testing demonstrates stable scanning performance for up to 8 hours within the 100 nm precision range,confirming the mechanical reliability of the design.This scalable,reproducible,and high-yield fabrication strategy represents a significant advancement in HAR AFM probe development,providing enhanced performance and extended applicability for diverse nanoscale imaging applications. 展开更多
关键词 si tips fabrication methods ultra sharp atomic force microscope probes high precision imaging batch fabrication atomic force nanoscale characterization optimizing handle geometries
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Effect of SPM Scanning Range on the Micromorphology Parameters
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作者 Libing Liao Suozai Li (School of materials Science and engineering, China University of Geosciences, Beijing 100083, China) 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 1998年第1期36-38,共3页
The surface of a compact disk is analyzed by using SPM and the quantitative micromorphology analysissoftware SPMIAS developed by the author. Images at the same position but with different scanning ranges areobtained ... The surface of a compact disk is analyzed by using SPM and the quantitative micromorphology analysissoftware SPMIAS developed by the author. Images at the same position but with different scanning ranges areobtained under the same experimental conditions. Micromorphology parameters are calculated and compared, andthe relationship between the changing of the scanning range and the changing of micromorphology parameters issummarized. 展开更多
关键词 scanning probe microscope(SPM) MICROMORPHOLOGY micromorphology parameters
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Thermionic Emission Dynamics of Ultrafast Electron Sources
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作者 Chao-Yu Guo Hao-Tian Zheng +7 位作者 Gui-Lin Zhu Yu-Qing Huang Qin Wang Da Wu Zheng-Pu Zhao Chu-Wei Zhang Jing-Tao Lu Ying Jiang 《Chinese Physics Letters》 2025年第5期215-219,共5页
Ultrafast electron sources, which enable high spatiotemporal resolution in time-resolved electron microscopy and scanning probe microscopy, are receiving increased attention. The most widely used method for achieving ... Ultrafast electron sources, which enable high spatiotemporal resolution in time-resolved electron microscopy and scanning probe microscopy, are receiving increased attention. The most widely used method for achieving ultrafast electron sources involves irradiating metal tips by ultrashort laser pulses, causing electron beam emission via the photoelectric effect [including photon-driven(quantum) or field-driven(classical) emission]. However, the thermionic electrons emission process due to the heating effect of ultrashort lasers, particularly its dynamic aspects, has rarely been addressed in previous studies. In this paper, we improved the signal-to-noise ratio of a two-pulse correlation measurement on the tip electron emission by nearly two orders of magnitude using a delay time modulation method. This allowed us to obtain information on the temperature evolution of hot electrons and phonons in a non-equilibrium state, and to extract characteristic time scales for electron-phonon and phonon-phonon scattering. Our findings indicate that the thermionic electrons emission, unlike the instantaneous photoelectric effect, causes electron emission to lag behind the laser pulse by tens of picoseconds, thus significantly affecting the detection of ultrafast dynamics of samples. Furthermore, such a lagging effect was found to be sensitive to the local structure of the metal tip, offering new insights into the improved design of ultrafast electron sources. 展开更多
关键词 thermionic emission ultrafast electron sources scanning probe microscopy heating effect time resolved electron microscopy irradiating metal tips ultrashort laser pulses photoelectric effect thermionic electrons
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针尖增强纳米光谱术
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作者 谢仲林 张恒 +4 位作者 雷博阳 魏雪桐 卢凡凡 梅霆 张文定 《光电工程》 北大核心 2025年第9期39-62,共24页
针尖增强纳米光谱术(Tip-enhanced nanospectroscopy,TENS)是一种结合扫描探针显微镜与针尖纳米聚焦光源的高空间分辨率光谱表征技术。该方法能够在纳米乃至亚纳米尺度上同步获取样品表面形貌与化学结构信息,为物理、化学、材料科学、... 针尖增强纳米光谱术(Tip-enhanced nanospectroscopy,TENS)是一种结合扫描探针显微镜与针尖纳米聚焦光源的高空间分辨率光谱表征技术。该方法能够在纳米乃至亚纳米尺度上同步获取样品表面形貌与化学结构信息,为物理、化学、材料科学、生物及纳米技术等多个前沿领域提供强有力的研究工具。首先概述了三种常用扫描探针显微镜的反馈原理;随后系统介绍了等离激元探针的类型、激发方式及其纳米聚焦特性;进一步详细讨论了多种典型TENS系统的构型与特点;最后综述了TENS在单分子成像、非线性光谱、相干反斯托克斯拉曼散射、荧光增强及暗态拉曼可视化等重要领域中的应用与前沿进展。 展开更多
关键词 针尖增强纳米光谱术 扫描探针显微镜 针尖纳米聚焦光源
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Some recent advances in 3D crack and contact analysis of elastic solids with transverse isotropy and multifield coupling 被引量:4
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作者 Wei-Qiu Chen 《Acta Mechanica Sinica》 SCIE EI CAS CSCD 2015年第5期601-626,共26页
Significant progress has been made in mixed boundary-value problems associated with three-dimensional(3D) crack and contact analyses of advanced materials featuring more complexities compared to the conventional iso... Significant progress has been made in mixed boundary-value problems associated with three-dimensional(3D) crack and contact analyses of advanced materials featuring more complexities compared to the conventional isotropic elastic materials.These include material anisotropy and multifield coupling,two typical characteristics of most current multifunctional materials.In this paper we try to present a state-of-the-art description of 3D exact/analytical solutions derived for crack and contact problems of elastic solids with both transverse isotropy and multifield coupling in the latest decade by the potential theory method in the spirit of V.I.Fabrikant.whose ingenious breakthrough brings new vigor and vitality to the old research subject of classical potential theory.We are particularly interested in crack and contact problems with certain nonlinear features.Emphasis is also placed on the coupling between the temperature field(or the like) and other physical fields(e.g.,elastic,electric,and magnetic fields).We further highlight the practical significance of 3D contact solutions,in particular in applications related to modern scanning probe microscopes. 展开更多
关键词 CRACK CONTACT Mixed boundary-value problem Transverse isotropy Multifield coupling Potential theory Exact solution scanning probe microscope
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扫描探针显微镜校准装置
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作者 徐小芳 张旭敏 《模具制造》 2025年第9期42-44,共3页
依据计量标准考核规范要求,结合扫描探针电子显微镜计量标准工作的方法原理和校准方法,对测量结果进行了重复性、稳定性考核,对校准结果进行了不确定度评定,并用比对法对校准结果和测量结果的不确定度进行了验证。结果表明,该装置符合... 依据计量标准考核规范要求,结合扫描探针电子显微镜计量标准工作的方法原理和校准方法,对测量结果进行了重复性、稳定性考核,对校准结果进行了不确定度评定,并用比对法对校准结果和测量结果的不确定度进行了验证。结果表明,该装置符合量值溯源和传递要求,可开展扫描探针显微镜校准工作。 展开更多
关键词 扫描探针显微镜 校准 纳米台阶高度标准样板 二维格栅样板
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Friction-Induced Nanofabrication: A Review 被引量:4
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作者 Bingjun Yu Linmao Qian 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2021年第2期26-51,共26页
As the bridge between basic principles and applications of nanotechnology,nanofabrication methods play significant role in supporting the development of nanoscale science and engineering,which is changing and improvin... As the bridge between basic principles and applications of nanotechnology,nanofabrication methods play significant role in supporting the development of nanoscale science and engineering,which is changing and improving the production and lifestyle of the human.Photo lithography and other alternative technologies,such as nanoimprinting,electron beam lithography,focused ion beam cutting,and scanning probe lithography,have brought great progress of semiconductor industry,IC manufacturing and micro/nanoelectromechanical system(MEMS/NEMS)devices.However,there remains a lot of challenges,relating to the resolution,cost,speed,and so on,in realizing high-quality products with further development of nanotechnology.None of the existing techniques can satisfy all the needs in nanoscience and nanotechnology at the same time,and it is essential to explore new nanofabrication methods.As a newly developed scanning probe microscope(SPM)-based lithography,friction-induced nanofabrication provides opportunities for maskless,flexible,low-damage,low-cost and environment-friendly processing on a wide variety of materials,including silicon,quartz,glass surfaces,and so on.It has been proved that this fabrication route provides with a broad application prospect in the fabrication of nanoimprint templates,microfluidic devices,and micro/nano optical structures.This paper hereby involved the principals and operations of friction-induced nanofabrication,including friction-induced selective etching,and the applications were reviewed as well for looking ahead at opportunities and challenges with nanotechnology development.The present review will not only enrich the knowledge in nanotribology,but also plays a positive role in promoting SPM-based nanofabrication. 展开更多
关键词 scanning probe microscope Tip-based lithography Friction-induced nanofabrication Friction-induced selective etching
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Implementing an SPM controller with LabVIEW
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作者 BAI Jiang hua John L Freeouf Andres La Rosa 《Journal of Measurement Science and Instrumentation》 CAS CSCD 2018年第3期257-268,共12页
The purpose of this article is to reduce the barrier of developing a house made scanning probe microscope (SPM). Here in this paper, we cover all the details of programming an SPM controller with LabVIEW. The main c... The purpose of this article is to reduce the barrier of developing a house made scanning probe microscope (SPM). Here in this paper, we cover all the details of programming an SPM controller with LabVIEW. The main controller has three major sequential portions. They are system initialization portion, scan control and image display portion and system shutdown portion. The most complicated and essential part of the main controller is the scan control and image display portion, which is achieved with various parallel tasks. These tasks are scan area and image size adjusting module, Y axis scan control module, X axis scan and image transferring module, parameters readjusting module, emergency shutdown module, etc. A NI7831R FPGA board is used to output the control signals and utilize the Z-axis real time feedback controls. The system emergency shutdown is also carried out by the FPGA module. Receiving the shutdown command from the main controller, the FPGA board will move the probe to its XYZ zero position, turn off all the high voltage control signals and also eliminate the possible oscillations in the system. Finally, how to operate the controller is also briefly introduced. That messy wires fly back and forth is the main drawback of LabVIEW programming. Especially when the program is complicated, this problem becomes more serious. We use a real example to show how to achieve complex functionalities with structural programming and parallel multi task programming. The actual code showed in this paper is clear, intuitive and simple. Following the examples showed in this paper, readers are able to develop simple LabVIEW programs to achieve complex functionalities. 展开更多
关键词 scanning probe microscope (SPM) LABVIEW FPGA multi task programming real time cntrol
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An SPM stage driven by three stepper motors
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作者 BAI Jiang-hua 《Journal of Measurement Science and Instrumentation》 CAS CSCD 2017年第3期271-276,共6页
A scanning probe microscope(SPM)stage controlled by three stepper motors is designed,which has more flexibilitiesthan that of one motor controlled stage,while the control whom is more complicated.In this project,we bu... A scanning probe microscope(SPM)stage controlled by three stepper motors is designed,which has more flexibilitiesthan that of one motor controlled stage,while the control whom is more complicated.In this project,we build the stageactions in an Arduino microcontroller,and finite state machine(FSM)is also built in the Arduino micro controller to communicatewith a computer and a radio frequency(RF)controller.A special displaying scheme with five states is employed to indicatethe operation of the stage.Finally,the stage is fully tested and has a700nm resolution in Z motion of the SPM. 展开更多
关键词 scanning probe microscope (SPM) stepper motors radio frequency (RF) control Lab VIEW
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STM钨针尖电化学加工及其装置的改进 被引量:9
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作者 姚琲 李春艳 +2 位作者 刘平 王慧 杨梅 《电子显微学报》 CAS CSCD 北大核心 2003年第3期256-258,共3页
本文报导利用自由落体的原理 ,设计了一种新的针尖和液面脱离装置制作了STM钨针尖 ,并与利用步进电机提升针尖的方法进行了比较。分析和实验说明 ,本方法脱离速度较快 ,简单经济 ,效果良好。
关键词 扫描隧道显微镜 扫描探针显微镜 针尖 液面脱离装置 电化学腐蚀 电化学加工 显微镜设计
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石英音叉扫描探针显微镜 被引量:7
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作者 黄强先 王毛翠 +2 位作者 赵剑 王广红 余惠娟 《机械工程学报》 EI CAS CSCD 北大核心 2012年第4期1-5,共5页
石英音叉是一种谐振频率稳定、品质因数高的时基器件,其音叉臂的谐振参数(谐振振幅和谐振频率)对微力极其敏感。利用石英音叉对外力的敏感性,与钨探针结合,构成一种新型的表面形貌扫描测头。该测头与xyz压电工作台结合,利用测头音叉臂... 石英音叉是一种谐振频率稳定、品质因数高的时基器件,其音叉臂的谐振参数(谐振振幅和谐振频率)对微力极其敏感。利用石英音叉对外力的敏感性,与钨探针结合,构成一种新型的表面形貌扫描测头。该测头与xyz压电工作台结合,利用测头音叉臂谐振频率对扫描微力的敏感性,研制基于相位反馈控制的扫描探针显微镜。首先介绍石英音叉测头的构成、工作原理和特性测试,以及由该测头构建的扫描探针显微镜的结构和测试、分析。通过对测头和系统的测试结果分析,系统达到1.2 nm的垂直分辨率,并通过对一维栅的测量,给出扫描获得的试样表面微观形貌图以及相位图,证明系统的有效性。另外,由于采用大长径比的钨探针,该系统具有测量大深宽比微器件表面轮廓的能力。 展开更多
关键词 石英音叉 钨探针 相位反馈 扫描探针显微镜
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原子力显微镜及其应用 被引量:27
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作者 刘小虹 颜肖慈 +1 位作者 罗明道 李伟 《自然杂志》 北大核心 2002年第1期36-40,共5页
本文简要介绍了原子力显微镜的发展史 ,评述了原子力显微镜的工作原理、工作模式及技术 。
关键词 原子力显微镜 针尖 微悬臂 扫描探针显微镜
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钒渣物相结构及钙化焙烧相变对钒转化率的影响因素探讨 被引量:13
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作者 王春梅 刘锦燕 +1 位作者 史志新 苑天宇 《冶金分析》 CAS CSCD 北大核心 2015年第6期26-30,共5页
运用马弗炉焙烧钒渣得到不同温度阶段的熟料,采用偏光显微镜、扫描电子显微镜、电子探针以及能谱仪等对钒渣物相结构、形貌以及焙烧过程中物相组成变化规律等进行详细分析。通过偏光显微镜观察得出钒渣主要由钒尖晶石、金属铁、硅酸盐... 运用马弗炉焙烧钒渣得到不同温度阶段的熟料,采用偏光显微镜、扫描电子显微镜、电子探针以及能谱仪等对钒渣物相结构、形貌以及焙烧过程中物相组成变化规律等进行详细分析。通过偏光显微镜观察得出钒渣主要由钒尖晶石、金属铁、硅酸盐及钛铁矿等物相组成;通过能谱成分分析得出钒尖晶石为主要含钒物相;通过扫描电镜和电子探针观察钒渣焙烧过程形貌变化,得出钒尖晶石最终氧化分解形成铁板钛矿、氧化铁以及钒酸钙相,认为钒渣物相结构(钒尖晶石晶粒大小、硅酸盐粘结相分布和分散金属铁量的多少)、熟料中钒的存在形式、钒酸钙相的生成含量以及高熔点硅酸盐的形成等都可能会影响钒的转化率高低。 展开更多
关键词 钙化焙烧 钒渣 物相 扫描电子显微镜 能谱 偏光显微镜 电子探针
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扫描探针显微镜进行细胞扫描时探针对于细胞活性的影响 被引量:6
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作者 韩立 韩冬 +1 位作者 王秀凤 陈皓明 《电子显微学报》 CAS CSCD 北大核心 2003年第2期92-96,共5页
扫描探针显微镜 (scanningprobemicroscope ,SPM)是近几年发展很快的一种形貌表征仪器。它的一个突出优点是 ,可在溶液中以很高的分辨率对细胞活体进行观察。不同于光学显微镜 ,SPM是利用探针和样品之间的相互作用来扫描成像 ,探针对细... 扫描探针显微镜 (scanningprobemicroscope ,SPM)是近几年发展很快的一种形貌表征仪器。它的一个突出优点是 ,可在溶液中以很高的分辨率对细胞活体进行观察。不同于光学显微镜 ,SPM是利用探针和样品之间的相互作用来扫描成像 ,探针对细胞有力的作用。这种作用力会在扫描过程中直接影响细胞的状态。为了研究SPM成像过程中探针作用力对于细胞的影响 ,我们用SPM的接触模式 (contactmode)和敲击模式 (tappingmode)对培养液中的生物活细胞进行了较长时间的扫描观察。结果显示 ,尽管接触模式SPM成像清楚 ,但长时间的扫描会造成细胞凋零 ;敲击模式SPM进行长时间扫描时也会造成细胞变形 。 展开更多
关键词 扫描探针显微镜 细胞活性 作用力 分辨率 接触模式 敲击模式
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压电微动工作台的动态迟滞模型 被引量:24
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作者 张栋 张承进 魏强 《光学精密工程》 EI CAS CSCD 北大核心 2009年第3期549-556,共8页
为实现压电微动工作台的快速准确运动定位,研究了其运动定位模型。压电工作台的运动定位精度主要受工作台动态特性和迟滞特性的影响,在介绍这两类典型特性模型及其适用范围的基础上,提出了能够同时体现压电工作台动态特性和迟滞特性的... 为实现压电微动工作台的快速准确运动定位,研究了其运动定位模型。压电工作台的运动定位精度主要受工作台动态特性和迟滞特性的影响,在介绍这两类典型特性模型及其适用范围的基础上,提出了能够同时体现压电工作台动态特性和迟滞特性的动态迟滞模型,并给出了采用Prandtl-Ishlinskii(PI)迟滞算子的动态迟滞模型参数辨识途径。以TRITOR100型压电工作台为例进行实验研究,结果表明:当压电工作台在30μm的定位范围内以±900V/s的输入电压速率进行快速运动定位时,动态迟滞模型的模型精度比以往常用的线性动态模型和迟滞模型有较大提高,其平均误差为0.16μm,最大误差为0.38μm,为高性能运动定位工作台控制系统的设计提供了模型基础。 展开更多
关键词 压电微动工作台 运动定位 动态迟滞模型 PI迟滞模型 扫描探针显微镜
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