A high-speed dynamic-range-extended white light interferometry(HS-DRE-WLI) system is developed for fast,high-resolution 3D surface profiling across varying reflectance levels. The system combines high-speed fiber-stre...A high-speed dynamic-range-extended white light interferometry(HS-DRE-WLI) system is developed for fast,high-resolution 3D surface profiling across varying reflectance levels. The system combines high-speed fiber-stretcher-based optical path difference modulation with an asymmetric line-illumination technique to enhance imaging speed and dynamic range. Chromatic and polarization-induced distortions are minimized through dispersion compensation using optimized fiber lengths and a Faraday rotator, achieving 14.2-μm axial resolution. Validated on diverse samples, the system captures fine and large-scale features with high fidelity,demonstrating strong potential for industrial and biomedical applications requiring accurate, robust surface measurements.展开更多
基金National Research Foundation of Korea(NRFRS-2021-NR060086)Korea Evaluation Institute of Industrial Technology(1415181752)Institute of Civil-Military Technology Cooperation(23-SF-EL-09).
文摘A high-speed dynamic-range-extended white light interferometry(HS-DRE-WLI) system is developed for fast,high-resolution 3D surface profiling across varying reflectance levels. The system combines high-speed fiber-stretcher-based optical path difference modulation with an asymmetric line-illumination technique to enhance imaging speed and dynamic range. Chromatic and polarization-induced distortions are minimized through dispersion compensation using optimized fiber lengths and a Faraday rotator, achieving 14.2-μm axial resolution. Validated on diverse samples, the system captures fine and large-scale features with high fidelity,demonstrating strong potential for industrial and biomedical applications requiring accurate, robust surface measurements.
