Device robust-design is inherently a multiple-objective optimization problem.Using design of experiments (DoE) combined with response surface methodology (RSM) can satisfy the great incentive to reduce the number of t...Device robust-design is inherently a multiple-objective optimization problem.Using design of experiments (DoE) combined with response surface methodology (RSM) can satisfy the great incentive to reduce the number of technology CAD(TCAD) simulations that need to be performed.However,the errors of RSM models might be large enough to diminish the validity of the results for some nonlinear problems.To find the feasible design space,a new method with objectives-oriented design in generations that takes the errors of RSM model into account is presented.After the augment design of experiments in promising space according to the results of RSM model in current generation,the feasible space will be emerging as the model errors deceasing.The results on FIBMOS examples show that the methodology is efficient.展开更多
文摘Device robust-design is inherently a multiple-objective optimization problem.Using design of experiments (DoE) combined with response surface methodology (RSM) can satisfy the great incentive to reduce the number of technology CAD(TCAD) simulations that need to be performed.However,the errors of RSM models might be large enough to diminish the validity of the results for some nonlinear problems.To find the feasible design space,a new method with objectives-oriented design in generations that takes the errors of RSM model into account is presented.After the augment design of experiments in promising space according to the results of RSM model in current generation,the feasible space will be emerging as the model errors deceasing.The results on FIBMOS examples show that the methodology is efficient.
