Flexible implantable electrodes provide unprecedented opportunities for gentle mechanical interaction with soft neural tissues to acquire stable electrophysiological signals and reduce risk of tissue inflammatory resp...Flexible implantable electrodes provide unprecedented opportunities for gentle mechanical interaction with soft neural tissues to acquire stable electrophysiological signals and reduce risk of tissue inflammatory response.Most electrocorticography(ECoG)electrodes adopt polymer film or silicone as substrate,with thickness sacrifice or poor micromachining precision,respectively.Besides,the distance of recessed electrode site to cortical surface leads to signal degradation.Here,we report a 3D polyimide-based electrode array on soft microbumps(height,327µm),with buffering contact capability and reliable mechanical strength that alleviates the mismatch from dental cement or cranial window.We demonstrate the reshaping processes of conventional 2D sites(diameter,200µm)into 3D protruding structure by stress-free preforming and silicone casting.The 3D soft microbump electrodes(SMBE)remain well undergoing whether cyclic voltammetry scanning or cyclic compression.The acute implanted SMBE array has shown sensitive response to whisker pulling and insusceptible stability by external force of anesthetic rats.展开更多
基金support received from the Science and Technology Innovation 2030-Major Project(2022ZD0208601,2022ZD0208600)National Natural Science Foundation of China(62204204,62104056)+2 种基金Innovation Capability Support Program of Shaanxi(2024RSCXTD-7)NaturalScience Basic Research Plan in Shaanxi Province of China(2023JC-XJ-07)support from Dr.Honglai Xu,Mr.Yuxiang Hong from Neuracle Medical Technology(Shanghai)Co.,Ltd.,Mr.Xiaowang Zhao from LPKF Shanghai Co.,Ltd.,staffs from Wenzhou Institute of Hangzhou Dianzi University and Xi'an LEADMEMS SCI&-TECH Co.,Ltd。
文摘Flexible implantable electrodes provide unprecedented opportunities for gentle mechanical interaction with soft neural tissues to acquire stable electrophysiological signals and reduce risk of tissue inflammatory response.Most electrocorticography(ECoG)electrodes adopt polymer film or silicone as substrate,with thickness sacrifice or poor micromachining precision,respectively.Besides,the distance of recessed electrode site to cortical surface leads to signal degradation.Here,we report a 3D polyimide-based electrode array on soft microbumps(height,327µm),with buffering contact capability and reliable mechanical strength that alleviates the mismatch from dental cement or cranial window.We demonstrate the reshaping processes of conventional 2D sites(diameter,200µm)into 3D protruding structure by stress-free preforming and silicone casting.The 3D soft microbump electrodes(SMBE)remain well undergoing whether cyclic voltammetry scanning or cyclic compression.The acute implanted SMBE array has shown sensitive response to whisker pulling and insusceptible stability by external force of anesthetic rats.
