Due to scale effects,micromechanical resonators offer an excellent platform for investigating the intrinsic mechanisms of nonlinear dynamical phenomena and their potential applications.This review focuses on mode-coup...Due to scale effects,micromechanical resonators offer an excellent platform for investigating the intrinsic mechanisms of nonlinear dynamical phenomena and their potential applications.This review focuses on mode-coupled micromechanical resonators,highlighting the latest advancements in four key areas:internal resonance,synchronization,frequency combs,and mode localization.The origin,development,and potential applications of each of these dynamic phenomena within mode-coupled micromechanical systems are investigated,with the goal of inspiring new ideas and directions for researchers in this field.展开更多
The excellent mechanical properties make graphene promising for realizing nanomechanical resonators with high resonant frequencies,large quality factors,strong nonlinearities,and the capability to efectively interface...The excellent mechanical properties make graphene promising for realizing nanomechanical resonators with high resonant frequencies,large quality factors,strong nonlinearities,and the capability to efectively interface with various physical systems.Equipped with gate electrodes,it has been demonstrated that these exceptional device properties can be electrically manipulated,leading to a variety of nanomechanical/acoustic applications.Here,we review the recent progress of graphene nanomechanical resonators with a focus on their electrical tunability.First,we provide an overview of diferent graphene nanomechanical resonators,including their device structures,fabrication methods,and measurement setups.Then,the key mechanical properties of these devices,for example,resonant frequencies,nonlinearities,dissipations,and mode coupling mechanisms,are discussed,with their behaviors upon electrical gating being highlighted.After that,various potential classical/quantum applications based on these graphene nanomechanical resonators are reviewed.Finally,we briefy discuss challenges and opportunities in this feld to ofer future prospects for the ongoing studies on graphene nanomechanical resonators.展开更多
Enhancing the vibration resistance of micro-electro-mechanical systems(MEMS)resonators in complex environments is a critical issue that urgently needs to be addressed.This paper presents a chip-scale locally resonant ...Enhancing the vibration resistance of micro-electro-mechanical systems(MEMS)resonators in complex environments is a critical issue that urgently needs to be addressed.This paper presents a chip-scale locally resonant phononic crystal(LRPnC)plate based on a folded helical beam structure.Through finite element simulation and theoretical analysis,the bandgap characteristics and vibration suppression mechanisms of this structure were thoroughly investigated.The results show that the structure exhibits a complete bandgap in the frequency range of 9.867-14.605 kHz,and the bandgap can be effectively tuned by adjusting the structural parameters.Based on this,the influence of the number of unit cell layers on the vibration reduction performance was further studied,and a finite periodic LRPnC plate was constructed.Numerical studies have shown that the LRPnC plate can achieve more than-30 dB of vibration attenuation within the bandgap and effectively suppress y-direction coupling vibrations caused by x-direction propagating waves.In addition,its chip-scale size and planar structure design provide new ideas and methods for the engineering application of phononic crystal technology in the field of MEMS vibration isolation.展开更多
As an ultrathin wide-bandgap(WBG)material,CaNb_(2)O_(6)exhibits excellent optical and electrical properties.Particularly,its highly asymmetric crystal structure provides new opportunities for designing novel nanodevic...As an ultrathin wide-bandgap(WBG)material,CaNb_(2)O_(6)exhibits excellent optical and electrical properties.Particularly,its highly asymmetric crystal structure provides new opportunities for designing novel nanodevices with directional functionality.However,due to the significant challenges in applying conventional techniques to nanoscale samples,the in-plane anisotropy of CaNb_(2)O_(6)has still remained unexplored.Here,we leverage the resonant nanoelectromechanical systems(NEMS)platform to successfully quantify both the mechanical and thermal anisotropies in such an ultrathin WBG crystal.Specifically,by measuring the dynamic response in both spectral and spatial domains,we determine the anisotropic Young’s modulus of CaNb_(2)O_(6)as E_(Y(a))=70.42 GPa and EY(b)=116.2 GPa.By further expanding this technique to cryogenic temperatures,we unveil the anisotropy in thermal expansion coefficients as α_((a))=13.4 ppm·K^(-1),α(b)=2.9 ppm·K^(-1).Interestingly,through thermal strain engineering,we successfully modulate the mode sequence and achieve a crossing of(1×2)-(2×1)modes with perfect degeneracy.Our study provides guidelines for future CaNb_(2)O_(6)nanodevices with additional degrees of freedom and new device functions.展开更多
Two-dimensional phononic crystal(PnC)slabs have shown advantages in enhancing the quality factors Q of piezoelectric laterally vibrating resonators(LVRs)through topology optimization.However,the narrow geometries of m...Two-dimensional phononic crystal(PnC)slabs have shown advantages in enhancing the quality factors Q of piezoelectric laterally vibrating resonators(LVRs)through topology optimization.However,the narrow geometries of most topology-optimized silicon–air 2D PnC slabs face significant fabrication challenges owing to restricted etching precision,and the anisotropic nature of silicon is frequently overlooked.To address these issues,this study employs the finite element method with appropriate discretization numbers and the genetic algorithm to optimize the structures and geometries of 2D silicon–air PnC slabs.The optimized square-lattice PnC slabs,featuring a rounded-cross structure oriented along the`110e directions of silicon,achieve an impressive relative bandgap(RBG)width of 82.2%for in-plane modes.When further tilted by 15° from the (100) directions within the(001)plane,the optimal RBG width is expanded to 91.4%.We fabricate and characterize thin-film piezoelectric-on-silicon LVRs,with or without optimized 2D PnC slabs.The presence of PnC slabs around anchors increases the series and parallel quality factors Q_(s) and Q_(p) from 2240 to 7118 and from 2237 to 7501,respectively,with the PnC slabs oriented along the`110e directions of silicon.展开更多
To enhance the quality factor and sensitivity of refractive index sensors,a feedback waveguide slot grating micro-ring resonator was proposed.An air-hole grating structure was introduced based on the slot micro-ring,u...To enhance the quality factor and sensitivity of refractive index sensors,a feedback waveguide slot grating micro-ring resonator was proposed.An air-hole grating structure was introduced based on the slot micro-ring,utilizing the reflection of the grating to achieve the electromagnetic-like induced transparency effect at different wavelengths.The high slope characteristics of the EIT-like effect enabled a higher quality factor and sensitivity.The transmission principle of the structure was analyzed using the transmission matrix method,and the transmission spectrum and mode field distribution were simulated using the finite-difference time-domain(FDTD)method,and the device structure parameters were adjusted for optimization.Simulation results show that the proposed structure achieves an EIT-like effect with a quality factor of 59267.5.In the analysis of refractive index sensing characteristics,the structure exhibits a sensitivity of 408.57 nm/RIU and a detection limit of 6.23×10^(-5) RIU.Therefore,the proposed structure achieved both a high quality factor and refractive index sensitivity,demonstrating excellent sensing performance for applications in environmental monitoring,biomedical fields,and other areas with broad market potential.展开更多
A broadband tunable acoustic metasurface(BTAM)is conceived with Helmholtz resonators(HRs).The tunability of HRs’neck enables precise control over the phase shift of the unit cell.Through careful arrangement of unit c...A broadband tunable acoustic metasurface(BTAM)is conceived with Helmholtz resonators(HRs).The tunability of HRs’neck enables precise control over the phase shift of the unit cell.Through careful arrangement of unit cells,the BTAMs are engineered to exhibit various phase differences,thereby inducing anomalous reflections and acoustic focusing.Numerical simulations demonstrate the BTAM’s remarkable efficacy in manipulating the angle of reflection wave and achieving wave focusing across a broadband frequency range.Experimental investigations of the phase shift and anomalous reflection further validate the design of metasurface.This work contributes to the fields of broadband and tunable acoustic wave manipulation and provides a flexible and efficient approach for acoustic control devices.展开更多
Microring resonators(MRRs)are extensively utilized in photonic chips for generating quantum light sources and enabling high-efficiency nonlinear frequency conversion.However,conventional microrings are typically optim...Microring resonators(MRRs)are extensively utilized in photonic chips for generating quantum light sources and enabling high-efficiency nonlinear frequency conversion.However,conventional microrings are typically optimized for a single specific function,limiting their versatility in multifunctional applications.In this work,we propose a reconfigurable microring resonator architecture designed to accommodate diverse application requirements.By integrating a cascaded Mach–Zehnder interferometer(MZI)as the microring coupler,the design enables independent control of the quality factors for pump,signal and idler photons through two tunable phase shifters.This capability allows for dynamic tuning and optimization of critical performance parameters,including photon-pair generation rate(PGR),spectral purity and single photon heralding efficiency(HE).The proposed structure is implemented on a silicon photonic chip,and experimental results exhibit a wide range of tunability for these parameters,with excellent agreement with theoretical predictions.This flexible and multi-functional design offers a promising pathway for high-performance,highly integrated on-chip quantum information processing systems.展开更多
Diffraction effects will bring about more difficulties in actuating resonators,which are electrostatically actuated ones with sub-micrometer or nanometer dimensions,and in detecting the frequency of the resonator by o...Diffraction effects will bring about more difficulties in actuating resonators,which are electrostatically actuated ones with sub-micrometer or nanometer dimensions,and in detecting the frequency of the resonator by optical detection.To avoid the effects of diffraction,a new type of nanoelectromechanical systems（NEMS） resonators is fabricated and actuated to oscillate.As a comparison,a doubly clamped silicon beam is also fabricated and studied.The smallest width and thickness of the resonators are 180 and 200 nm,respectively.The mechanical oscillation responses of these two kinds of resonators are studied experimentally.Results show that the resonant frequencies are from 6.8 to 20 MHz,much lower than the theoretical values.Based on the simulation,it is found that over-etching is one of the important factors which results in lower frequencies than the theoretical values.It is also found that the difference between resonance frequencies of two types of resonators decreases with the increase in beam length.The quality factor is improved greatly by lowering the pressure in the sample chamber at room temperature.展开更多
基金supported by the National Key Research and Development Program of China(No.2022YFB3203600)the National Natural Science Foundation of China(Nos.12202355,12132013,and 12172323)the Zhejiang Provincial Natural Science Foundation of China(No.LZ22A020003)。
文摘Due to scale effects,micromechanical resonators offer an excellent platform for investigating the intrinsic mechanisms of nonlinear dynamical phenomena and their potential applications.This review focuses on mode-coupled micromechanical resonators,highlighting the latest advancements in four key areas:internal resonance,synchronization,frequency combs,and mode localization.The origin,development,and potential applications of each of these dynamic phenomena within mode-coupled micromechanical systems are investigated,with the goal of inspiring new ideas and directions for researchers in this field.
基金supported by the Natural Science Foundation of Jiangsu Province(Grant No.BK20240123)the National Key Research and Development Program of China(Grant No.2022YFA1405900)the National Natural Science Foundation of China(Grant Nos.12274397,12274401,and 12034018)。
文摘The excellent mechanical properties make graphene promising for realizing nanomechanical resonators with high resonant frequencies,large quality factors,strong nonlinearities,and the capability to efectively interface with various physical systems.Equipped with gate electrodes,it has been demonstrated that these exceptional device properties can be electrically manipulated,leading to a variety of nanomechanical/acoustic applications.Here,we review the recent progress of graphene nanomechanical resonators with a focus on their electrical tunability.First,we provide an overview of diferent graphene nanomechanical resonators,including their device structures,fabrication methods,and measurement setups.Then,the key mechanical properties of these devices,for example,resonant frequencies,nonlinearities,dissipations,and mode coupling mechanisms,are discussed,with their behaviors upon electrical gating being highlighted.After that,various potential classical/quantum applications based on these graphene nanomechanical resonators are reviewed.Finally,we briefy discuss challenges and opportunities in this feld to ofer future prospects for the ongoing studies on graphene nanomechanical resonators.
基金supported by National Natural Science Foundation of China(No.62271262).
文摘Enhancing the vibration resistance of micro-electro-mechanical systems(MEMS)resonators in complex environments is a critical issue that urgently needs to be addressed.This paper presents a chip-scale locally resonant phononic crystal(LRPnC)plate based on a folded helical beam structure.Through finite element simulation and theoretical analysis,the bandgap characteristics and vibration suppression mechanisms of this structure were thoroughly investigated.The results show that the structure exhibits a complete bandgap in the frequency range of 9.867-14.605 kHz,and the bandgap can be effectively tuned by adjusting the structural parameters.Based on this,the influence of the number of unit cell layers on the vibration reduction performance was further studied,and a finite periodic LRPnC plate was constructed.Numerical studies have shown that the LRPnC plate can achieve more than-30 dB of vibration attenuation within the bandgap and effectively suppress y-direction coupling vibrations caused by x-direction propagating waves.In addition,its chip-scale size and planar structure design provide new ideas and methods for the engineering application of phononic crystal technology in the field of MEMS vibration isolation.
基金supported by the National Key R&D Program of China(2022YFB3203600)the National Natural Science Foundation of China(Grant Nos.T2325007,62450003,62401104,62404029,U21A20459,62250073,61774029,and U23A20570)+1 种基金the China Postdoctoral Science Foundation(Grant Nos.GZB20230107 and GZB20240109)the Natural Science Foundation of Sichuan Province(Grant Nos.2024NSFSC1430 and 2024NSFSC1408).
文摘As an ultrathin wide-bandgap(WBG)material,CaNb_(2)O_(6)exhibits excellent optical and electrical properties.Particularly,its highly asymmetric crystal structure provides new opportunities for designing novel nanodevices with directional functionality.However,due to the significant challenges in applying conventional techniques to nanoscale samples,the in-plane anisotropy of CaNb_(2)O_(6)has still remained unexplored.Here,we leverage the resonant nanoelectromechanical systems(NEMS)platform to successfully quantify both the mechanical and thermal anisotropies in such an ultrathin WBG crystal.Specifically,by measuring the dynamic response in both spectral and spatial domains,we determine the anisotropic Young’s modulus of CaNb_(2)O_(6)as E_(Y(a))=70.42 GPa and EY(b)=116.2 GPa.By further expanding this technique to cryogenic temperatures,we unveil the anisotropy in thermal expansion coefficients as α_((a))=13.4 ppm·K^(-1),α(b)=2.9 ppm·K^(-1).Interestingly,through thermal strain engineering,we successfully modulate the mode sequence and achieve a crossing of(1×2)-(2×1)modes with perfect degeneracy.Our study provides guidelines for future CaNb_(2)O_(6)nanodevices with additional degrees of freedom and new device functions.
基金supported by the National Natural Science Foundation of China(Grant No.52175552)the National Key RD Program of China(Grant Nos.2022YFB3205400 and 2022YFB3204300).
文摘Two-dimensional phononic crystal(PnC)slabs have shown advantages in enhancing the quality factors Q of piezoelectric laterally vibrating resonators(LVRs)through topology optimization.However,the narrow geometries of most topology-optimized silicon–air 2D PnC slabs face significant fabrication challenges owing to restricted etching precision,and the anisotropic nature of silicon is frequently overlooked.To address these issues,this study employs the finite element method with appropriate discretization numbers and the genetic algorithm to optimize the structures and geometries of 2D silicon–air PnC slabs.The optimized square-lattice PnC slabs,featuring a rounded-cross structure oriented along the`110e directions of silicon,achieve an impressive relative bandgap(RBG)width of 82.2%for in-plane modes.When further tilted by 15° from the (100) directions within the(001)plane,the optimal RBG width is expanded to 91.4%.We fabricate and characterize thin-film piezoelectric-on-silicon LVRs,with or without optimized 2D PnC slabs.The presence of PnC slabs around anchors increases the series and parallel quality factors Q_(s) and Q_(p) from 2240 to 7118 and from 2237 to 7501,respectively,with the PnC slabs oriented along the`110e directions of silicon.
基金supported by Natural Science Foundation of Gansu Province(NO.21JR7RA289)。
文摘To enhance the quality factor and sensitivity of refractive index sensors,a feedback waveguide slot grating micro-ring resonator was proposed.An air-hole grating structure was introduced based on the slot micro-ring,utilizing the reflection of the grating to achieve the electromagnetic-like induced transparency effect at different wavelengths.The high slope characteristics of the EIT-like effect enabled a higher quality factor and sensitivity.The transmission principle of the structure was analyzed using the transmission matrix method,and the transmission spectrum and mode field distribution were simulated using the finite-difference time-domain(FDTD)method,and the device structure parameters were adjusted for optimization.Simulation results show that the proposed structure achieves an EIT-like effect with a quality factor of 59267.5.In the analysis of refractive index sensing characteristics,the structure exhibits a sensitivity of 408.57 nm/RIU and a detection limit of 6.23×10^(-5) RIU.Therefore,the proposed structure achieved both a high quality factor and refractive index sensitivity,demonstrating excellent sensing performance for applications in environmental monitoring,biomedical fields,and other areas with broad market potential.
基金supported by the National Natural Science Foundation of China(Grant Nos.11991030,11991031 and 12202054)Aeronautical Science Foundation(Grant No.ASFC20230042072010).
文摘A broadband tunable acoustic metasurface(BTAM)is conceived with Helmholtz resonators(HRs).The tunability of HRs’neck enables precise control over the phase shift of the unit cell.Through careful arrangement of unit cells,the BTAMs are engineered to exhibit various phase differences,thereby inducing anomalous reflections and acoustic focusing.Numerical simulations demonstrate the BTAM’s remarkable efficacy in manipulating the angle of reflection wave and achieving wave focusing across a broadband frequency range.Experimental investigations of the phase shift and anomalous reflection further validate the design of metasurface.This work contributes to the fields of broadband and tunable acoustic wave manipulation and provides a flexible and efficient approach for acoustic control devices.
基金Project supported by the Innovation Program for Quantum Science and Technology(Grant No.2021ZD0301500)the National Natural Science Foundation of China(Grant No.62105366)。
文摘Microring resonators(MRRs)are extensively utilized in photonic chips for generating quantum light sources and enabling high-efficiency nonlinear frequency conversion.However,conventional microrings are typically optimized for a single specific function,limiting their versatility in multifunctional applications.In this work,we propose a reconfigurable microring resonator architecture designed to accommodate diverse application requirements.By integrating a cascaded Mach–Zehnder interferometer(MZI)as the microring coupler,the design enables independent control of the quality factors for pump,signal and idler photons through two tunable phase shifters.This capability allows for dynamic tuning and optimization of critical performance parameters,including photon-pair generation rate(PGR),spectral purity and single photon heralding efficiency(HE).The proposed structure is implemented on a silicon photonic chip,and experimental results exhibit a wide range of tunability for these parameters,with excellent agreement with theoretical predictions.This flexible and multi-functional design offers a promising pathway for high-performance,highly integrated on-chip quantum information processing systems.
基金The National High Technology Research and Development Program of China(863 Program)(No.2007AA04Z301)
文摘Diffraction effects will bring about more difficulties in actuating resonators,which are electrostatically actuated ones with sub-micrometer or nanometer dimensions,and in detecting the frequency of the resonator by optical detection.To avoid the effects of diffraction,a new type of nanoelectromechanical systems（NEMS） resonators is fabricated and actuated to oscillate.As a comparison,a doubly clamped silicon beam is also fabricated and studied.The smallest width and thickness of the resonators are 180 and 200 nm,respectively.The mechanical oscillation responses of these two kinds of resonators are studied experimentally.Results show that the resonant frequencies are from 6.8 to 20 MHz,much lower than the theoretical values.Based on the simulation,it is found that over-etching is one of the important factors which results in lower frequencies than the theoretical values.It is also found that the difference between resonance frequencies of two types of resonators decreases with the increase in beam length.The quality factor is improved greatly by lowering the pressure in the sample chamber at room temperature.
