In order to suppress the influence of temperature changes on the performance of accelerometers,a digital quartz resonant accelerometer with low temperature drift is developed using a quartz resonator cluster as a tran...In order to suppress the influence of temperature changes on the performance of accelerometers,a digital quartz resonant accelerometer with low temperature drift is developed using a quartz resonator cluster as a transducer element.In addition,a digital intellectual property(IP) is designed in FPGA to achieve signal processing and fusion of integrated resonators.A testing system for digital quartz resonant accelerometers is established to characterize the performance under different conditions.The scale factor of the accelerometer prototype reaches 3561.63 Hz/g in the range of -1 g to +1 g,and 3542.5 Hz/g in the range of-10 g to+10 g.In different measurement ranges,the linear correlation coefficient R~2 of the accelerometer achieves greater than 0.998.The temperature drift of the accelerometer prototype is tested using a constant temperature test chamber,with a temperature change from -20℃ to 80℃.After temperature-drift compensation,the zero bias temperature coefficient falls to 0.08 mg/℃,and the scale factor temperature coefficient is 65.43 ppm/℃.The experimental results show that the digital quartz resonant accelerometer exhibits excellent sensitivity and low temperature drift.展开更多
This paper proposes a differential mode measurement and control system(DMCS)for differential MEMS resonant accelerometer(DMRA),which operates the differential resonators of the DMRA at different vibration modes.Unlike...This paper proposes a differential mode measurement and control system(DMCS)for differential MEMS resonant accelerometer(DMRA),which operates the differential resonators of the DMRA at different vibration modes.Unlike traditional DMRA,the first resonator of the differential resonator operates in the first-order mode(R1M1),and the second resonator operates in the second-order mode(R2M2).Within the measurement range of DMRA,the frequencies of the two resonators will not cross,so there will be no mutual interference.This ensures the structural symmetry of the DMRA while avoiding the measurement dead zone phenomenon caused by the coupling of the differential vibration beam at similar resonant frequencies.The structural symmetry of the differential resonator ensures good temperature consistency of the differential vibration beam,and the consistency of the temperature frequency coefficient matches well,which enables the differential resonator to strongly suppress the temperatureinduced common-mode effects.During the temperature cycling process between-20℃ and 80℃,the equivalent acceleration drift of R1M1 and R2M2 were 341.6 mg and 414.6 mg,respectively.After using the differential temperature compensation algorithm,the equivalent acceleration drift was reduced to 1.19 mg.The minimum Allan variance measured statically at room temperature decreased from 1.42μg@0.85 s for R1M1 and 1.52μg@0.85 s for R2M2 to 0.23μg@7.15 s,indicating a significant improvement in the long-term stability of DMRA.In addition,the differential measuring method also eliminated common mode ambient noise in low frequency range,ultimately achieving a noise level of 220 ng=ffiffiffiffiffi Hz p@(0.2–0.8 Hz)for a prototype device with a measurement range exceeding±5 g.展开更多
Geometric nonlinear behaviors ofmicro resonators have attracted extensive attention of MEMS （micro- electro-mechanical systems） researchers, and MEMS transducers utilizing these behaviors have been widely re- search...Geometric nonlinear behaviors ofmicro resonators have attracted extensive attention of MEMS （micro- electro-mechanical systems） researchers, and MEMS transducers utilizing these behaviors have been widely re- searched and used due to the advantages of essentially digital output. Currently, the design of transducers with nonlinear behaviors is mainly performed by numerical method and rarely by system level design method. In this paper, the geometric nonlinear beam structure was modeled and established as a reusable library component by sys- tem level modeling and simulation method MuPEN （multi port element network）. A resonant accelerometer was constructed and simulated using this model together with MuPEN reusable library. The AC （alternating current） analysis results of MuPEN model agreed well with the results of architect model and the experiment results shown in the existing reference. Therefore, we are convinced that the beam component based on MuPEN method is valid, and MEMS system level design method and related libraries can effectively model and simulate transducers with geometric nonlinear behaviors if appropriate system level components are available.展开更多
This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by mask...This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by masked-maskless combined anisotropic etching.Four resonant beams are located at the surface of a silicon substrate,whereas the gravity centre of a proof mass lies within the neutral plane of four crab-leg supporting beams on the same substrate.Compared with early reported mechanical structures,the simple structure not only eliminates the bending moments caused by in-plane acceleration,and thereby avoiding the rotation of the proof mass,but also providing sufficiently small rigidity to X and Y axes accelerations,potentially leading to a large sensitivity for measuring the in-plane acceleration.展开更多
文摘In order to suppress the influence of temperature changes on the performance of accelerometers,a digital quartz resonant accelerometer with low temperature drift is developed using a quartz resonator cluster as a transducer element.In addition,a digital intellectual property(IP) is designed in FPGA to achieve signal processing and fusion of integrated resonators.A testing system for digital quartz resonant accelerometers is established to characterize the performance under different conditions.The scale factor of the accelerometer prototype reaches 3561.63 Hz/g in the range of -1 g to +1 g,and 3542.5 Hz/g in the range of-10 g to+10 g.In different measurement ranges,the linear correlation coefficient R~2 of the accelerometer achieves greater than 0.998.The temperature drift of the accelerometer prototype is tested using a constant temperature test chamber,with a temperature change from -20℃ to 80℃.After temperature-drift compensation,the zero bias temperature coefficient falls to 0.08 mg/℃,and the scale factor temperature coefficient is 65.43 ppm/℃.The experimental results show that the digital quartz resonant accelerometer exhibits excellent sensitivity and low temperature drift.
基金supported in part by the National Key Research and Development Program of China under Grant 2022YFB3207301Shandong Provincial Natural Science Foundation under Grant No.ZR2024ZD08.
文摘This paper proposes a differential mode measurement and control system(DMCS)for differential MEMS resonant accelerometer(DMRA),which operates the differential resonators of the DMRA at different vibration modes.Unlike traditional DMRA,the first resonator of the differential resonator operates in the first-order mode(R1M1),and the second resonator operates in the second-order mode(R2M2).Within the measurement range of DMRA,the frequencies of the two resonators will not cross,so there will be no mutual interference.This ensures the structural symmetry of the DMRA while avoiding the measurement dead zone phenomenon caused by the coupling of the differential vibration beam at similar resonant frequencies.The structural symmetry of the differential resonator ensures good temperature consistency of the differential vibration beam,and the consistency of the temperature frequency coefficient matches well,which enables the differential resonator to strongly suppress the temperatureinduced common-mode effects.During the temperature cycling process between-20℃ and 80℃,the equivalent acceleration drift of R1M1 and R2M2 were 341.6 mg and 414.6 mg,respectively.After using the differential temperature compensation algorithm,the equivalent acceleration drift was reduced to 1.19 mg.The minimum Allan variance measured statically at room temperature decreased from 1.42μg@0.85 s for R1M1 and 1.52μg@0.85 s for R2M2 to 0.23μg@7.15 s,indicating a significant improvement in the long-term stability of DMRA.In addition,the differential measuring method also eliminated common mode ambient noise in low frequency range,ultimately achieving a noise level of 220 ng=ffiffiffiffiffi Hz p@(0.2–0.8 Hz)for a prototype device with a measurement range exceeding±5 g.
文摘Geometric nonlinear behaviors ofmicro resonators have attracted extensive attention of MEMS （micro- electro-mechanical systems） researchers, and MEMS transducers utilizing these behaviors have been widely re- searched and used due to the advantages of essentially digital output. Currently, the design of transducers with nonlinear behaviors is mainly performed by numerical method and rarely by system level design method. In this paper, the geometric nonlinear beam structure was modeled and established as a reusable library component by sys- tem level modeling and simulation method MuPEN （multi port element network）. A resonant accelerometer was constructed and simulated using this model together with MuPEN reusable library. The AC （alternating current） analysis results of MuPEN model agreed well with the results of architect model and the experiment results shown in the existing reference. Therefore, we are convinced that the beam component based on MuPEN method is valid, and MEMS system level design method and related libraries can effectively model and simulate transducers with geometric nonlinear behaviors if appropriate system level components are available.
基金Project (No. 61076110) supported by the National Natural Science Foundation of China
文摘This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by masked-maskless combined anisotropic etching.Four resonant beams are located at the surface of a silicon substrate,whereas the gravity centre of a proof mass lies within the neutral plane of four crab-leg supporting beams on the same substrate.Compared with early reported mechanical structures,the simple structure not only eliminates the bending moments caused by in-plane acceleration,and thereby avoiding the rotation of the proof mass,but also providing sufficiently small rigidity to X and Y axes accelerations,potentially leading to a large sensitivity for measuring the in-plane acceleration.
