In this paper, the principle of subaperture stitching interferometry was introduced. A testing stage with five degrees of freedom for stitching interferometry was built. A model based on least-squares method and error...In this paper, the principle of subaperture stitching interferometry was introduced. A testing stage with five degrees of freedom for stitching interferometry was built. A model based on least-squares method and error averaging method for data processing was estab- lished, which could reduce error accumulation and improve the precision. A 100ram plane mirror was measured with a 50mm aperture interferometer by means of stitching interferometry. Compared with the results by a 100 mm interferometer, peak to valley （PV） and root mean square （RMS） of the phase distribution residual are 0.00382 and 0.00042, respectively. It proved that the model and method are helpful for large optical measurement.展开更多
基金This work was supported by the National Natural Science Foundation of China （Grant No. 61128012） and the Research Grants Council of the Hong Kong Special Administrative Region （No. 9041577）.
文摘In this paper, the principle of subaperture stitching interferometry was introduced. A testing stage with five degrees of freedom for stitching interferometry was built. A model based on least-squares method and error averaging method for data processing was estab- lished, which could reduce error accumulation and improve the precision. A 100ram plane mirror was measured with a 50mm aperture interferometer by means of stitching interferometry. Compared with the results by a 100 mm interferometer, peak to valley （PV） and root mean square （RMS） of the phase distribution residual are 0.00382 and 0.00042, respectively. It proved that the model and method are helpful for large optical measurement.
