本文叙述了盖得的发明专利,从初期的汞扩散泵到分馏油扩散泵的演变过程。讨论了泵体结构、喷咀型式、泵油性能和几个关键技术问题。现代油扩散泵的何氏系数达0.65以上,返油率达10-5 mg/cm2.min,1 kW功率抽气量可达200 Pa L/s。最后对泵...本文叙述了盖得的发明专利,从初期的汞扩散泵到分馏油扩散泵的演变过程。讨论了泵体结构、喷咀型式、泵油性能和几个关键技术问题。现代油扩散泵的何氏系数达0.65以上,返油率达10-5 mg/cm2.min,1 kW功率抽气量可达200 Pa L/s。最后对泵的性能、结构和应用前景作了展望。展开更多
The research is to design a differential pumping system not only to achieve the pressure transition with a large throughput,but also to achieve a clean system without back-oil.In the paper,the pressure in differential...The research is to design a differential pumping system not only to achieve the pressure transition with a large throughput,but also to achieve a clean system without back-oil.In the paper,the pressure in differential stages is calculated;the differential pumping system design and equipment choice are introduced;the tests of Molecular/Booster Pump(MBP),a new kind of molecular-drag pump with large throughout and clean vacuum are described and the system experimental result and analysis are presented.展开更多
文摘The research is to design a differential pumping system not only to achieve the pressure transition with a large throughput,but also to achieve a clean system without back-oil.In the paper,the pressure in differential stages is calculated;the differential pumping system design and equipment choice are introduced;the tests of Molecular/Booster Pump(MBP),a new kind of molecular-drag pump with large throughout and clean vacuum are described and the system experimental result and analysis are presented.
