Microelectronic magnetic sensors are essential in diverse applications,including automotive,industrial,and consumer electronics.Hall-effect devices hold the largest share of the magnetic sensor market,and they are par...Microelectronic magnetic sensors are essential in diverse applications,including automotive,industrial,and consumer electronics.Hall-effect devices hold the largest share of the magnetic sensor market,and they are particularly valued for their reliability,low cost and CMOS compatibility.This paper introduces a novel 3-axis Hall-effect sensor element based on an inverted pyramid structure,realized by leveraging MEMS micromachining and CMOS processing.The devices are manufactured by etching the pyramid openings with TMAH and implanting the sloped walls with n-dopants to define the active area.Through the use of various bias-sense detection modes,the device is able to detect both in-plane and out-of-plane magnetic fields within a single compact structure.In addition,the offset can be significantly reduced by one to three orders of magnitude by employing the current-spinning method.The device presented in this work demonstrated high in-plane and out-of-plane current-and voltage-related sensitivities ranging between 64.1 to 198 V A−1 T−1 and 14.8 to 21.4 mV V^(−1) T−1,with crosstalk below 4.7%.The sensor exhibits a thermal noise floor which corresponds to approximately 0:5μT/√Hz p at 1.31 V supply.This novel Hall-effect sensor represents a promising and simpler alternative to existing state-of-the-art 3-axis magnetic sensors,offering a viable solution for precise and reliable magnetic field sensing in various applications such as position feedback and power monitoring.展开更多
We demonstrate a multi-fidelity(MF)machine learning ensemble framework for the inverse design of photonic surfaces,trained on a dataset of 11,759 samples that we fabricate using high throughput femtosecond laser proce...We demonstrate a multi-fidelity(MF)machine learning ensemble framework for the inverse design of photonic surfaces,trained on a dataset of 11,759 samples that we fabricate using high throughput femtosecond laser processing.The MF ensemble combines an initial low fidelity model for generating design solutions,with a high fidelity model that refines these solutions through local optimization.The combined MF ensemble can generate multiple disparate sets of laser-processing parameters that can each produce the same target input spectral emissivity with high accuracy(root mean squared errors<2%).SHapley Additive exPlanations analysis shows transparent model interpretability of the complex relationship between laser parameters and spectral emissivity.Finally,the MF ensemble is experimentally validated by fabricating and evaluating photonic surface designs that it generates for improved efficiency energy harvesting devices.Our approach provides a powerful tool for advancing the inverse design of photonic surfaces in energy harvesting applications.展开更多
文摘Microelectronic magnetic sensors are essential in diverse applications,including automotive,industrial,and consumer electronics.Hall-effect devices hold the largest share of the magnetic sensor market,and they are particularly valued for their reliability,low cost and CMOS compatibility.This paper introduces a novel 3-axis Hall-effect sensor element based on an inverted pyramid structure,realized by leveraging MEMS micromachining and CMOS processing.The devices are manufactured by etching the pyramid openings with TMAH and implanting the sloped walls with n-dopants to define the active area.Through the use of various bias-sense detection modes,the device is able to detect both in-plane and out-of-plane magnetic fields within a single compact structure.In addition,the offset can be significantly reduced by one to three orders of magnitude by employing the current-spinning method.The device presented in this work demonstrated high in-plane and out-of-plane current-and voltage-related sensitivities ranging between 64.1 to 198 V A−1 T−1 and 14.8 to 21.4 mV V^(−1) T−1,with crosstalk below 4.7%.The sensor exhibits a thermal noise floor which corresponds to approximately 0:5μT/√Hz p at 1.31 V supply.This novel Hall-effect sensor represents a promising and simpler alternative to existing state-of-the-art 3-axis magnetic sensors,offering a viable solution for precise and reliable magnetic field sensing in various applications such as position feedback and power monitoring.
基金supported by the Laboratory Directed Research and Development Program of Lawrence Berkeley National Laboratory under U.S.Department of Energy Contract No.DE-AC02-05CH11231supported by ARPA-E Contract No.2107-1539J.Mueller was supported by the U.S.Department of Energy,Office of Science,Office of Advanced Scientific Computing Research,Scientific Discovery through Advanced Computing(SciDAC)program through the FASTMath Institute under Contract No.DE-AC36-08GO28308 at the National Renewable Energy Laboratory.
文摘We demonstrate a multi-fidelity(MF)machine learning ensemble framework for the inverse design of photonic surfaces,trained on a dataset of 11,759 samples that we fabricate using high throughput femtosecond laser processing.The MF ensemble combines an initial low fidelity model for generating design solutions,with a high fidelity model that refines these solutions through local optimization.The combined MF ensemble can generate multiple disparate sets of laser-processing parameters that can each produce the same target input spectral emissivity with high accuracy(root mean squared errors<2%).SHapley Additive exPlanations analysis shows transparent model interpretability of the complex relationship between laser parameters and spectral emissivity.Finally,the MF ensemble is experimentally validated by fabricating and evaluating photonic surface designs that it generates for improved efficiency energy harvesting devices.Our approach provides a powerful tool for advancing the inverse design of photonic surfaces in energy harvesting applications.
