In semiconductor manufacturing process, probe station that is testing equipment is important. Inspection step is for detecting defects on semiconductor before the packaging. Probe card is a part of probe station and c...In semiconductor manufacturing process, probe station that is testing equipment is important. Inspection step is for detecting defects on semiconductor before the packaging. Probe card is a part of probe station and contains probe tip that contacts to semiconductor. Through probe tip, it can inspect defects of semiconductor. In this paper, optimization method is used with response surface analysis to design MEMS type probe tip. And fabricating probe tip uses maskless lithography, electro-plating and lapping process.展开更多
To satisfy the measuring demands for the micro components of the industry, micro/nano probing systems with various ball tips have been developed. However, most of them cannot be used to measure the real micro geometri...To satisfy the measuring demands for the micro components of the industry, micro/nano probing systems with various ball tips have been developed. However, most of them cannot be used to measure the real micro geometrical features high precisely because the parameters of the ball tips are not appropriate. The ball tips with a diameter of less than 100 μm, a sphericity and eccentricity of far less than 1 μm are required urgently. A review on the state-of-the-art of ball tips of micro/nano probing systems is presented. The material characteristics and geometric parameters of now available ball tips are introduced sepa- rately. The existing fabrication methods for the ball tips are demonstrated and summarized. The ball tips＇ future trends, which are smaller diameter, better sphericity and smaller eccentricity, are proposed in view of the practical requirements of high-precision measurement for micro geometrical features. Some challenges have to be faced in future, such as the promotion and high-precision measurement for the small ball tip＇s sphericity and eccentricity. Fusion method without the gravity effect when the molten ball tip solidifying is a more suitable way to fabricate a small diameter ball tip together with a shaft.展开更多
面向原子力显微镜(atomic force microscope,AFM)探针的应用需求,提出一种基于硅尖的垂直取向碳纳米管(carbon nanotubes,CNTs)制备方法。首先,通过优化掩膜设计和KOH湿法腐蚀工艺,制备了高度约为6μm的硅尖阵列;然后,采用图案化催化剂...面向原子力显微镜(atomic force microscope,AFM)探针的应用需求,提出一种基于硅尖的垂直取向碳纳米管(carbon nanotubes,CNTs)制备方法。首先,通过优化掩膜设计和KOH湿法腐蚀工艺,制备了高度约为6μm的硅尖阵列;然后,采用图案化催化剂定位投放技术,在硅尖顶端实现了铁蛋白分子的选择性附着;最后,通过热化学气相沉积(chemical vapor deposition,CVD)法,在优化的工艺参数下,成功在硅尖上生长出直径约16~20 nm、垂直取向的单根碳纳米管。扫描电子显微镜(scanning electron microscopy,SEM)和透射电子显微镜(transmission electron microscopy,TEM)表征结果显示,所制备的CNTs结构均匀且结晶度良好;拉曼光谱分析进一步证实其具有高度石墨化特性。研究结果可为高性能AFM探针的制备提供可行的技术方案,具有重要的应用价值。展开更多
文摘In semiconductor manufacturing process, probe station that is testing equipment is important. Inspection step is for detecting defects on semiconductor before the packaging. Probe card is a part of probe station and contains probe tip that contacts to semiconductor. Through probe tip, it can inspect defects of semiconductor. In this paper, optimization method is used with response surface analysis to design MEMS type probe tip. And fabricating probe tip uses maskless lithography, electro-plating and lapping process.
基金Supported by National Natural Science Foundation of China(Grant Nos.51675157,51475131)State Key Laboratory of Precision Measuring Technology and Instruments of China(Grant No.PIL1401)
文摘To satisfy the measuring demands for the micro components of the industry, micro/nano probing systems with various ball tips have been developed. However, most of them cannot be used to measure the real micro geometrical features high precisely because the parameters of the ball tips are not appropriate. The ball tips with a diameter of less than 100 μm, a sphericity and eccentricity of far less than 1 μm are required urgently. A review on the state-of-the-art of ball tips of micro/nano probing systems is presented. The material characteristics and geometric parameters of now available ball tips are introduced sepa- rately. The existing fabrication methods for the ball tips are demonstrated and summarized. The ball tips＇ future trends, which are smaller diameter, better sphericity and smaller eccentricity, are proposed in view of the practical requirements of high-precision measurement for micro geometrical features. Some challenges have to be faced in future, such as the promotion and high-precision measurement for the small ball tip＇s sphericity and eccentricity. Fusion method without the gravity effect when the molten ball tip solidifying is a more suitable way to fabricate a small diameter ball tip together with a shaft.
文摘面向原子力显微镜(atomic force microscope,AFM)探针的应用需求,提出一种基于硅尖的垂直取向碳纳米管(carbon nanotubes,CNTs)制备方法。首先,通过优化掩膜设计和KOH湿法腐蚀工艺,制备了高度约为6μm的硅尖阵列;然后,采用图案化催化剂定位投放技术,在硅尖顶端实现了铁蛋白分子的选择性附着;最后,通过热化学气相沉积(chemical vapor deposition,CVD)法,在优化的工艺参数下,成功在硅尖上生长出直径约16~20 nm、垂直取向的单根碳纳米管。扫描电子显微镜(scanning electron microscopy,SEM)和透射电子显微镜(transmission electron microscopy,TEM)表征结果显示,所制备的CNTs结构均匀且结晶度良好;拉曼光谱分析进一步证实其具有高度石墨化特性。研究结果可为高性能AFM探针的制备提供可行的技术方案,具有重要的应用价值。
