With the progression of photolithography processes,the present technology nodes have attained 3 nm and even 2 nm,necessitating a transition in the precision standards for displacement measurement and alignment methodo...With the progression of photolithography processes,the present technology nodes have attained 3 nm and even 2 nm,necessitating a transition in the precision standards for displacement measurement and alignment methodologies from the nanometer scale to the sub-nanometer scale.Metasurfaces,owing to their superior light field manipulation capabilities,exhibit significant promise in the domains of displacement measurement and positioning,and are anticipated to be applied in the advanced alignment systems of lithography machines.This paper primarily provides an overview of the contemporary alignment and precise displacement measurement technologies employed in photolithography stages,alongside the operational principles of metasurfaces in the context of precise displacement measurement and alignment.Furthermore,it explores the evolution of metasurface systems capable of achieving nano/sub-nano precision,and identifies the critical issues associated with sub-nanometer measurements using metasurfaces,as well as the principal obstacles encountered in their implementation within photolithography stages.The objective is to provide initial guidance for the advancement of photolithography technology.展开更多
Stable low-frequency squeezed vacuum states at a wavelength of 1550 nm were generated.By controlling the squeezing angle of the squeezed vacuum states,two types of low-frequency quadrature-phase squeezed vacuum states...Stable low-frequency squeezed vacuum states at a wavelength of 1550 nm were generated.By controlling the squeezing angle of the squeezed vacuum states,two types of low-frequency quadrature-phase squeezed vacuum states and quadrature-amplitude squeezed vacuum states were obtained using one setup respectively.A quantum-enhanced fiber Mach–Zehnder interferometer(FMZI)was demonstrated for low-frequency phase measurement using the generated quadrature-phase squeezed vacuum states that were injected.When phase modulation was measured with the quantumenhanced FMZI,there were above 3 dB quantum improvements beyond the shot-noise limit(SNL)from 40 kHz to 200 kHz,and 2.3 dB quantum improvement beyond the SNL at 20 kHz was obtained.The generated quadrature-amplitude squeezed vacuum state was applied to perform low-frequency amplitude modulation measurement for sensitivity beyond the SNL based on optical fiber construction.There were about 2 dB quantum improvements beyond the SNL from 60 kHz to 200 kHz.The current scheme proves that quantum-enhanced fiber-based sensors are feasible and have potential applications in high-precision measurements based on fiber,particularly in the low-frequency range.展开更多
The position-dependent feature in current vat photopolymerization-based additive manufacturing leads to challenges in controlling the dimensional accuracy of printed components.To overcome this intrinsic limitation,we...The position-dependent feature in current vat photopolymerization-based additive manufacturing leads to challenges in controlling the dimensional accuracy of printed components.To overcome this intrinsic limitation,we propose a time-dependent dynamic laser writing(DLW)approach for the precise volumetric printing of complex-shaped lenses.In the DLW-based volumetric printing,the formed surface is generated by accumulating the material growth functions(MGFs)on the scanning path,where the MGF is created by the laser direct irradiation with controlled energy doses.Benefiting from the stability of MGFs and the process homogenization,the DLW is less sensitive to process errors when compared to current vat photopolymerization-based additive manufacturing techniques.Furthermore,the continuous scanning leads to the naturally ultra-smooth feature of the printed surfaces.As a demonstration,a millimeter-scale spherical lens was printed in 5.67 min,achieving a three-dimensional(3D)form error of 0.135μm(root mean square,RMS)and a surface roughness of 0.31 nm(RMS).The printing demonstrated comparable efficiency while achieving form errors an order of magnitude smaller than those of state-of-the-art continuous layer-wise and volumetric printing methods.In addition,polymer lens arrays,freeform polymer lenses,and fused silica lenses were successfully printed,demonstrating promise for advancing the state-of-the-art in 3D printing of precision lenses.展开更多
This review focuses on recent developments in additive manufacturing(AM)of precision optical devices,particularly devices consisting of components with critical features at the micro-and nanoscale.These include,but ar...This review focuses on recent developments in additive manufacturing(AM)of precision optical devices,particularly devices consisting of components with critical features at the micro-and nanoscale.These include,but are not limited to,microlenses,diffractive optical elements,and photonic devices.However,optical devices with large-size lenses and mirrors are not specifically included as this technology has not demonstrated feasibilities in that category.The review is roughly divided into two slightly separated topics,the first on meso-and microoptics and the second on optics with nanoscale features.Although AM of precision optics is still in its infancy with many unanswered questions,the references cited on this exciting topic demonstrate an enabling technology with almost unlimited possibilities.There are many high quality reviews of AM processes of non-optical components,hence they are not the focus of this review.The main purpose of this review is to start a conversion on optical fabrication based on information about 3D AM methods that has been made available to date,with an ultimate long-term goal of establishing new optical manufacturing methods that are low cost and highly precise with extreme flexibility.展开更多
Dual-comb interferometric systems with high time accuracy have been realized for various applications.The flourishing ultralow noise dual-comb system promotes the measurement and characterization of relative timing ji...Dual-comb interferometric systems with high time accuracy have been realized for various applications.The flourishing ultralow noise dual-comb system promotes the measurement and characterization of relative timing jitter,thus improving time accuracy.With optical solutions,introducing an optical reference enables 105 harmonics measurements,thereby breaking the limit set by electrical methods;nonlinear processes or spectral interference schemes were also employed to track the relative timing jitter.However,such approaches operating in the time domain either require additional continuous references or impose stringent requirements on the amount of timing jitter.We propose a scheme to correct the relative timing jitter of a free-running dual-comb interferometry assisted by a Fabry-Pérot(F-P)cavity in the frequency domain.With high wavelength thermal stability provided by the F-P cavity,the absolute wavelength deviation in the operating bandwidth is compressed to<0.4 pm,corresponding to a subpicosecond sensitivity of pulse-to-pulse relative timing jitter.Also,Allan deviation of 10^(-10) is obtained under multiple coherent averaging,which lays the foundation for mode-resolved molecular spectroscopic applications.The spectral absorption features of hydrogen cyanide gas molecules at ambient temperature were measured and matched to the HITRAN database.Our scheme promises to provide new ideas on sensitive measurements of relative timing jitter.展开更多
Developing approaches for precise engineering of the optical response of plasmonic nanocavities at the postfabrication stage is important for achieving enhanced and tunable light-matter interactions.In this work,we de...Developing approaches for precise engineering of the optical response of plasmonic nanocavities at the postfabrication stage is important for achieving enhanced and tunable light-matter interactions.In this work,we demonstrate selective enhancement/suppression of specific plasmonic modes by embedding nanocube-on-mirror plasmonic nanocavities into a poly(methyl methacrylate)(PMMA)layer with a controllable thickness.With the increase of the PMMA thickness from 0 to approximately 100 nm,the dominating out-of-plane plasmonic modes are significantly suppressed in the scattering spectra,while the in-plane plasmonic modes are greatly enhanced with a factor reaching 102±20.This enhancement is related to the variation of momentum matching between the plasmonic modes and the radiative fields,affecting both mode excitation and emission properties.In addition,the spectral positions of the in-plane and out-of-plane plasmonic modes shift up to 52±5 and 81±2 nm,respectively.These properties are important for matching and enhancing plasmonic and molecular resonances in a variety of applications.展开更多
The precise control of optical polarization states has emerged as a cornerstone of photonic engineering,underpinning information encoding,optical processing systems,and quantum stateresolved transmission protocols[1-3...The precise control of optical polarization states has emerged as a cornerstone of photonic engineering,underpinning information encoding,optical processing systems,and quantum stateresolved transmission protocols[1-3].Birefringent crystals exhibit optical anisotropy owing to distinct refractive indices along crystallographic axes,thereby distinguishing them from isotropic optical materials.展开更多
基金supported by the National Natural Science Foundation of China(No.62222511)National Key Research and Devel-opment Program of China(No.2023YFF0613000)+1 种基金Natural Science Foundation of Zhejiang Province China(No.LR22F050006)STI 2030-Major Projects(No.2021ZD0200401).
文摘With the progression of photolithography processes,the present technology nodes have attained 3 nm and even 2 nm,necessitating a transition in the precision standards for displacement measurement and alignment methodologies from the nanometer scale to the sub-nanometer scale.Metasurfaces,owing to their superior light field manipulation capabilities,exhibit significant promise in the domains of displacement measurement and positioning,and are anticipated to be applied in the advanced alignment systems of lithography machines.This paper primarily provides an overview of the contemporary alignment and precise displacement measurement technologies employed in photolithography stages,alongside the operational principles of metasurfaces in the context of precise displacement measurement and alignment.Furthermore,it explores the evolution of metasurface systems capable of achieving nano/sub-nano precision,and identifies the critical issues associated with sub-nanometer measurements using metasurfaces,as well as the principal obstacles encountered in their implementation within photolithography stages.The objective is to provide initial guidance for the advancement of photolithography technology.
基金Project supported by the National Natural Science Foundation of China(Grant No.62175135)the Fundamental Research Program of Shanxi Province(Grant No.202103021224025)。
文摘Stable low-frequency squeezed vacuum states at a wavelength of 1550 nm were generated.By controlling the squeezing angle of the squeezed vacuum states,two types of low-frequency quadrature-phase squeezed vacuum states and quadrature-amplitude squeezed vacuum states were obtained using one setup respectively.A quantum-enhanced fiber Mach–Zehnder interferometer(FMZI)was demonstrated for low-frequency phase measurement using the generated quadrature-phase squeezed vacuum states that were injected.When phase modulation was measured with the quantumenhanced FMZI,there were above 3 dB quantum improvements beyond the shot-noise limit(SNL)from 40 kHz to 200 kHz,and 2.3 dB quantum improvement beyond the SNL at 20 kHz was obtained.The generated quadrature-amplitude squeezed vacuum state was applied to perform low-frequency amplitude modulation measurement for sensitivity beyond the SNL based on optical fiber construction.There were about 2 dB quantum improvements beyond the SNL from 60 kHz to 200 kHz.The current scheme proves that quantum-enhanced fiber-based sensors are feasible and have potential applications in high-precision measurements based on fiber,particularly in the low-frequency range.
基金supported by the Special funding for Jiangsu Province Innovation Support Program(Grant No.BZ2023058)the National Natural Science Foundation of China(Grant Nos.52275437 and U2013211)。
文摘The position-dependent feature in current vat photopolymerization-based additive manufacturing leads to challenges in controlling the dimensional accuracy of printed components.To overcome this intrinsic limitation,we propose a time-dependent dynamic laser writing(DLW)approach for the precise volumetric printing of complex-shaped lenses.In the DLW-based volumetric printing,the formed surface is generated by accumulating the material growth functions(MGFs)on the scanning path,where the MGF is created by the laser direct irradiation with controlled energy doses.Benefiting from the stability of MGFs and the process homogenization,the DLW is less sensitive to process errors when compared to current vat photopolymerization-based additive manufacturing techniques.Furthermore,the continuous scanning leads to the naturally ultra-smooth feature of the printed surfaces.As a demonstration,a millimeter-scale spherical lens was printed in 5.67 min,achieving a three-dimensional(3D)form error of 0.135μm(root mean square,RMS)and a surface roughness of 0.31 nm(RMS).The printing demonstrated comparable efficiency while achieving form errors an order of magnitude smaller than those of state-of-the-art continuous layer-wise and volumetric printing methods.In addition,polymer lens arrays,freeform polymer lenses,and fused silica lenses were successfully printed,demonstrating promise for advancing the state-of-the-art in 3D printing of precision lenses.
文摘This review focuses on recent developments in additive manufacturing(AM)of precision optical devices,particularly devices consisting of components with critical features at the micro-and nanoscale.These include,but are not limited to,microlenses,diffractive optical elements,and photonic devices.However,optical devices with large-size lenses and mirrors are not specifically included as this technology has not demonstrated feasibilities in that category.The review is roughly divided into two slightly separated topics,the first on meso-and microoptics and the second on optics with nanoscale features.Although AM of precision optics is still in its infancy with many unanswered questions,the references cited on this exciting topic demonstrate an enabling technology with almost unlimited possibilities.There are many high quality reviews of AM processes of non-optical components,hence they are not the focus of this review.The main purpose of this review is to start a conversion on optical fabrication based on information about 3D AM methods that has been made available to date,with an ultimate long-term goal of establishing new optical manufacturing methods that are low cost and highly precise with extreme flexibility.
基金supported by the National Key Research and Development Program of China(Grant No.2022YFF0705904)the National Natural Science Foundation of China(Grant Nos.61927817 and 62075072).
文摘Dual-comb interferometric systems with high time accuracy have been realized for various applications.The flourishing ultralow noise dual-comb system promotes the measurement and characterization of relative timing jitter,thus improving time accuracy.With optical solutions,introducing an optical reference enables 105 harmonics measurements,thereby breaking the limit set by electrical methods;nonlinear processes or spectral interference schemes were also employed to track the relative timing jitter.However,such approaches operating in the time domain either require additional continuous references or impose stringent requirements on the amount of timing jitter.We propose a scheme to correct the relative timing jitter of a free-running dual-comb interferometry assisted by a Fabry-Pérot(F-P)cavity in the frequency domain.With high wavelength thermal stability provided by the F-P cavity,the absolute wavelength deviation in the operating bandwidth is compressed to<0.4 pm,corresponding to a subpicosecond sensitivity of pulse-to-pulse relative timing jitter.Also,Allan deviation of 10^(-10) is obtained under multiple coherent averaging,which lays the foundation for mode-resolved molecular spectroscopic applications.The spectral absorption features of hydrogen cyanide gas molecules at ambient temperature were measured and matched to the HITRAN database.Our scheme promises to provide new ideas on sensitive measurements of relative timing jitter.
基金National Key Research and Development Program of China(2023YFB2806701)National Natural Science Foundation of China(92250305,62305293)+2 种基金Natural Science Foundation of Zhejiang Province(LR25F050001,LDT23F04015F05)Engineering and Physical Sciences Research Council(EP/W017075/1)New Cornerstone Science Foundation(NCI202216)。
文摘Developing approaches for precise engineering of the optical response of plasmonic nanocavities at the postfabrication stage is important for achieving enhanced and tunable light-matter interactions.In this work,we demonstrate selective enhancement/suppression of specific plasmonic modes by embedding nanocube-on-mirror plasmonic nanocavities into a poly(methyl methacrylate)(PMMA)layer with a controllable thickness.With the increase of the PMMA thickness from 0 to approximately 100 nm,the dominating out-of-plane plasmonic modes are significantly suppressed in the scattering spectra,while the in-plane plasmonic modes are greatly enhanced with a factor reaching 102±20.This enhancement is related to the variation of momentum matching between the plasmonic modes and the radiative fields,affecting both mode excitation and emission properties.In addition,the spectral positions of the in-plane and out-of-plane plasmonic modes shift up to 52±5 and 81±2 nm,respectively.These properties are important for matching and enhancing plasmonic and molecular resonances in a variety of applications.
基金supported by the National Key Research and Development Program of China(2021YFB3601502)National Natural Science Foundation of China(22193044,22361132544,22335007,52172012)+5 种基金CAS Project for Young Scientists in Basic Research(YSBR-024)Xinjiang Major Science and Technology Project(2021A01001)Tianshan Talent Project(2022TSYCJU0001,2022TSYCCX0078)Xinjiang University 2024 Outstanding Doctoral Students’Innovation Project(XJU2024BS053)Postdoctoral Fellow-Ship Program(Grade C)(GZC20232959)Tianchi Talent Program of Xinjiang Uygur Autonomous Region。
文摘The precise control of optical polarization states has emerged as a cornerstone of photonic engineering,underpinning information encoding,optical processing systems,and quantum stateresolved transmission protocols[1-3].Birefringent crystals exhibit optical anisotropy owing to distinct refractive indices along crystallographic axes,thereby distinguishing them from isotropic optical materials.
