This article focuses on asymptotic precision motion control for electro-hydraulic axis systems under unknown time-variant parameters,mismatched and matched disturbances.Different from the traditional adaptive results ...This article focuses on asymptotic precision motion control for electro-hydraulic axis systems under unknown time-variant parameters,mismatched and matched disturbances.Different from the traditional adaptive results that are applied to dispose of unknown constant parameters only,the unique feature is that an adaptive-gain nonlinear term is introduced into the control design to handle unknown time-variant parameters.Concurrently both mismatched and matched disturbances existing in electro-hydraulic axis systems can also be addressed in this way.With skillful integration of the backstepping technique and the adaptive control,a synthesized controller framework is successfully developed for electro-hydraulic axis systems,in which the coupled interaction between parameter estimation and disturbance estimation is avoided.Accordingly,this designed controller has the capacity of low-computation costs and simpler parameter tuning when compared to the other ones that integrate the adaptive control and observer/estimator-based technique to dividually handle parameter uncertainties and disturbances.Also,a nonlinear filter is designed to eliminate the“explosion of complexity”issue existing in the classical back-stepping technique.The stability analysis uncovers that all the closed-loop signals are bounded and the asymptotic tracking performance is also assured.Finally,contrastive experiment results validate the superiority of the developed method as well.展开更多
Lithography machines operate in scanning mode for the fabrication of large-scale integrated circuits(ICs),requiring high-precision synchronous motion between the reticle and wafer stages.Disturbances generated by each...Lithography machines operate in scanning mode for the fabrication of large-scale integrated circuits(ICs),requiring high-precision synchronous motion between the reticle and wafer stages.Disturbances generated by each stage during high-acceleration movements are transmitted through the base frame,resulting in degradation of synchronization performance.To address this challenge,this paper proposes a tube-based model predictive control(tube-MPC)approach for synchronization in lithography machines.First,the proposed modeling method accurately characterizes the coupling disturbances and synchronization dynamics.Subsequently,a tube-MPC approach is developed to ensure that the states of the nominal system are constrained within the terminal constraint set.To reduce the complexity of online computations,an approach is employed to transform online optimization problems into offline problems by creating an online lookup table.This enables the determination of optimal control inputs via a simplified online optimization algorithm.The robustness and trajectory tracking performance of the proposed approach are verified through simulation experiments,demonstrating its effectiveness in enhancing the synchronization performance of multiple motion systems.展开更多
With regard to precision/ultra-precision motion systems,it is important to achieve excellent tracking performance for various trajectory tracking tasks even under uncertain external disturbances.In this paper,to overc...With regard to precision/ultra-precision motion systems,it is important to achieve excellent tracking performance for various trajectory tracking tasks even under uncertain external disturbances.In this paper,to overcome the limitation of robustness to trajectory variations and external disturbances in offline feedforward compensation strategies such as iterative learning control(ILC),a novel real-time iterative compensation(RIC)control framework is proposed for precision motion systems without changing the inner closed-loop controller.Specifically,the RIC method can be divided into two parts,i.e.,accurate model prediction and real-time iterative compensation.An accurate prediction model considering lumped disturbances is firstly established to predict tracking errors at future sampling times.In light of predicted errors,a feedforward compensation term is developed to modify the following reference trajectory by real-time iterative calculation.Both the prediction and compen-sation processes are finished in a real-time motion control sampling period.The stability and convergence of the entire control system after real-time iterative compensation is analyzed for different conditions.Various simulation results consistently demonstrate that the proposed RIC framework possesses satisfactory dynamic regulation capability,which contributes to high tracking accuracy comparable to ILC or even better and strong robustness.展开更多
Nowadays, high-precision motion controls are needed in modern manufacturing industry. A data-driven nonparametric model adaptive control(NMAC) method is proposed in this paper to control the position of a linear servo...Nowadays, high-precision motion controls are needed in modern manufacturing industry. A data-driven nonparametric model adaptive control(NMAC) method is proposed in this paper to control the position of a linear servo system. The controller design requires no information about the structure of linear servo system, and it is based on the estimation and forecasting of the pseudo-partial derivatives(PPD) which are estimated according to the voltage input and position output of the linear motor. The characteristics and operational mechanism of the permanent magnet synchronous linear motor(PMSLM) are introduced, and the proposed nonparametric model control strategy has been compared with the classic proportional-integral-derivative(PID) control algorithm. Several real-time experiments on the motion control system incorporating a permanent magnet synchronous linear motor showed that the nonparametric model adaptive control method improved the system s response to disturbances and its position-tracking precision, even for a nonlinear system with incompletely known dynamic characteristics.展开更多
基金supported in part by the National Key R&D Program of China(No.2021YFB2011300)the National Natural Science Foundation of China(No.52075262,51905271,52275062)+1 种基金the Fok Ying-Tong Education Foundation of China(No.171044)the Postgraduate Research&Practice Innovation Program of Jiangsu Province(No.KYCX22_0471)。
文摘This article focuses on asymptotic precision motion control for electro-hydraulic axis systems under unknown time-variant parameters,mismatched and matched disturbances.Different from the traditional adaptive results that are applied to dispose of unknown constant parameters only,the unique feature is that an adaptive-gain nonlinear term is introduced into the control design to handle unknown time-variant parameters.Concurrently both mismatched and matched disturbances existing in electro-hydraulic axis systems can also be addressed in this way.With skillful integration of the backstepping technique and the adaptive control,a synthesized controller framework is successfully developed for electro-hydraulic axis systems,in which the coupled interaction between parameter estimation and disturbance estimation is avoided.Accordingly,this designed controller has the capacity of low-computation costs and simpler parameter tuning when compared to the other ones that integrate the adaptive control and observer/estimator-based technique to dividually handle parameter uncertainties and disturbances.Also,a nonlinear filter is designed to eliminate the“explosion of complexity”issue existing in the classical back-stepping technique.The stability analysis uncovers that all the closed-loop signals are bounded and the asymptotic tracking performance is also assured.Finally,contrastive experiment results validate the superiority of the developed method as well.
基金supported by National Natural Science Foundation of China(52375530,52075132)Natural Science Foundation of Heilongjiang Province(YQ2022E025)+2 种基金State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment(Guangdong University of Technology)(JMDZ202312)Fundamental Research Funds for the Central Universities(HIT.OCEF.2024034)Space Drive and Manipulation Mechanism Laboratory of BICE and National Key Laboratory of Space Intelligent Control(BICE-SDMM-2024-01).
文摘Lithography machines operate in scanning mode for the fabrication of large-scale integrated circuits(ICs),requiring high-precision synchronous motion between the reticle and wafer stages.Disturbances generated by each stage during high-acceleration movements are transmitted through the base frame,resulting in degradation of synchronization performance.To address this challenge,this paper proposes a tube-based model predictive control(tube-MPC)approach for synchronization in lithography machines.First,the proposed modeling method accurately characterizes the coupling disturbances and synchronization dynamics.Subsequently,a tube-MPC approach is developed to ensure that the states of the nominal system are constrained within the terminal constraint set.To reduce the complexity of online computations,an approach is employed to transform online optimization problems into offline problems by creating an online lookup table.This enables the determination of optimal control inputs via a simplified online optimization algorithm.The robustness and trajectory tracking performance of the proposed approach are verified through simulation experiments,demonstrating its effectiveness in enhancing the synchronization performance of multiple motion systems.
基金This work was supported in part by the National Nature Science Foundation of China(51922059)in part by the Beijing Natural Science Foundation(JQ19010)in part by the China Postdoctoral Science Foundation(2021T140371).
文摘With regard to precision/ultra-precision motion systems,it is important to achieve excellent tracking performance for various trajectory tracking tasks even under uncertain external disturbances.In this paper,to overcome the limitation of robustness to trajectory variations and external disturbances in offline feedforward compensation strategies such as iterative learning control(ILC),a novel real-time iterative compensation(RIC)control framework is proposed for precision motion systems without changing the inner closed-loop controller.Specifically,the RIC method can be divided into two parts,i.e.,accurate model prediction and real-time iterative compensation.An accurate prediction model considering lumped disturbances is firstly established to predict tracking errors at future sampling times.In light of predicted errors,a feedforward compensation term is developed to modify the following reference trajectory by real-time iterative calculation.Both the prediction and compen-sation processes are finished in a real-time motion control sampling period.The stability and convergence of the entire control system after real-time iterative compensation is analyzed for different conditions.Various simulation results consistently demonstrate that the proposed RIC framework possesses satisfactory dynamic regulation capability,which contributes to high tracking accuracy comparable to ILC or even better and strong robustness.
基金supported by Beijing Natural Science Foundation(No.4142017)International Cooperation Project of National Natural Science Foundation of China(No.61120106009)Beijing Science and Technology Commission Precision Machinery Projects(No.Z121100001612007)
文摘Nowadays, high-precision motion controls are needed in modern manufacturing industry. A data-driven nonparametric model adaptive control(NMAC) method is proposed in this paper to control the position of a linear servo system. The controller design requires no information about the structure of linear servo system, and it is based on the estimation and forecasting of the pseudo-partial derivatives(PPD) which are estimated according to the voltage input and position output of the linear motor. The characteristics and operational mechanism of the permanent magnet synchronous linear motor(PMSLM) are introduced, and the proposed nonparametric model control strategy has been compared with the classic proportional-integral-derivative(PID) control algorithm. Several real-time experiments on the motion control system incorporating a permanent magnet synchronous linear motor showed that the nonparametric model adaptive control method improved the system s response to disturbances and its position-tracking precision, even for a nonlinear system with incompletely known dynamic characteristics.
